SE509933C2 - Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt - Google Patents

Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt

Info

Publication number: SE509933C2
Authority: SE; Sweden
Prior art keywords: gas; sputtering; receiving material; layer; reactive gas
Prior art date: 1996-09-16

Application number

SE9603393A

Other languages

English (en)

Swedish (sv)

Other versions

SE9603393L (sv

SE9603393D0 (sv

Inventor

Goeran Hultmark

Original Assignee

Scandinavian Solar Ab

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-09-16

Filing date

1996-09-16

Publication date

1999-03-22

1996-09-16 Application filed by Scandinavian Solar Ab filed Critical Scandinavian Solar Ab

1996-09-16 Priority to SE9603393A priority Critical patent/SE509933C2/sv

1996-09-16 Publication of SE9603393D0 publication Critical patent/SE9603393D0/xx

1997-09-15 Priority to AT97941308T priority patent/ATE234368T1/de

1997-09-15 Priority to DE69719801T priority patent/DE69719801T2/de

1997-09-15 Priority to JP51357598A priority patent/JP2001506698A/ja

1997-09-15 Priority to PCT/SE1997/001545 priority patent/WO1998011271A1/en

1997-09-15 Priority to ES97941308T priority patent/ES2195172T3/es

1997-09-15 Priority to EP97941308A priority patent/EP0948662B1/de

1997-09-15 Priority to AU43248/97A priority patent/AU724684B2/en

1998-03-17 Publication of SE9603393L publication Critical patent/SE9603393L/xx

1999-03-10 Priority to US09/265,495 priority patent/US6171458B1/en

1999-03-22 Publication of SE509933C2 publication Critical patent/SE509933C2/sv

Links

238000000034 method Methods 0.000 title claims description 19
230000002745 absorbent Effects 0.000 title claims description 8
239000002250 absorbent Substances 0.000 title claims description 8
239000000463 material Substances 0.000 claims abstract description 62
239000007789 gas Substances 0.000 claims abstract description 41
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 35
239000011248 coating agent Substances 0.000 claims abstract description 20
238000000576 coating method Methods 0.000 claims abstract description 20
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 17
229910052751 metal Inorganic materials 0.000 claims abstract description 17
239000002184 metal Substances 0.000 claims abstract description 17
239000001301 oxygen Substances 0.000 claims abstract description 17
229910052760 oxygen Inorganic materials 0.000 claims abstract description 17
229910044991 metal oxide Inorganic materials 0.000 claims abstract description 15
150000004706 metal oxides Chemical class 0.000 claims abstract description 15
229910052759 nickel Inorganic materials 0.000 claims abstract description 14
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 9
229910052804 chromium Inorganic materials 0.000 claims abstract description 9
239000011651 chromium Substances 0.000 claims abstract description 9
239000000203 mixture Substances 0.000 claims abstract description 7
230000003595 spectral effect Effects 0.000 claims abstract description 5
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 4
239000010941 cobalt Substances 0.000 claims abstract description 4
229910017052 cobalt Inorganic materials 0.000 claims abstract description 4
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 4
229910052750 molybdenum Inorganic materials 0.000 claims abstract description 4
239000011733 molybdenum Substances 0.000 claims abstract description 4
229910000623 nickel–chromium alloy Inorganic materials 0.000 claims abstract description 3
238000004544 sputter deposition Methods 0.000 claims description 30
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
238000010521 absorption reaction Methods 0.000 claims description 14
229910052786 argon Inorganic materials 0.000 claims description 7
239000002923 metal particle Substances 0.000 claims description 7
230000008878 coupling Effects 0.000 claims description 5
238000010168 coupling process Methods 0.000 claims description 5
238000005859 coupling reaction Methods 0.000 claims description 5
238000004804 winding Methods 0.000 claims description 5
238000004320 controlled atmosphere Methods 0.000 claims description 3
238000009826 distribution Methods 0.000 claims description 3
239000011159 matrix material Substances 0.000 claims description 3
229910052756 noble gas Inorganic materials 0.000 claims description 3
238000001465 metallisation Methods 0.000 claims 3
KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
229910018487 Ni—Cr Inorganic materials 0.000 claims 1
229910045601 alloy Inorganic materials 0.000 claims 1
239000000956 alloy Substances 0.000 claims 1
229910052799 carbon Inorganic materials 0.000 claims 1
VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims 1
239000007769 metal material Substances 0.000 abstract description 7
230000008021 deposition Effects 0.000 abstract description 3
-1 or the similar Substances 0.000 abstract description 2
230000003247 decreasing effect Effects 0.000 abstract 1
239000010410 layer Substances 0.000 description 21
238000010438 heat treatment Methods 0.000 description 6
238000001816 cooling Methods 0.000 description 5
229910052782 aluminium Inorganic materials 0.000 description 4
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical class [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
239000002245 particle Substances 0.000 description 4
238000004519 manufacturing process Methods 0.000 description 3
150000002739 metals Chemical class 0.000 description 3
239000002344 surface layer Substances 0.000 description 3
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
238000007743 anodising Methods 0.000 description 2
238000006243 chemical reaction Methods 0.000 description 2
238000000151 deposition Methods 0.000 description 2
229910001882 dioxygen Inorganic materials 0.000 description 2
231100001261 hazardous Toxicity 0.000 description 2
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
229910000480 nickel oxide Inorganic materials 0.000 description 2
GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 2
239000011148 porous material Substances 0.000 description 2
230000005855 radiation Effects 0.000 description 2
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
PWKWDCOTNGQLID-UHFFFAOYSA-N [N].[Ar] Chemical compound [N].[Ar] PWKWDCOTNGQLID-UHFFFAOYSA-N 0.000 description 1
239000006096 absorbing agent Substances 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
239000010406 cathode material Substances 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
239000000428 dust Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000003792 electrolyte Substances 0.000 description 1
238000005265 energy consumption Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
239000011737 fluorine Substances 0.000 description 1
229910052731 fluorine Inorganic materials 0.000 description 1
239000011521 glass Substances 0.000 description 1
238000009776 industrial production Methods 0.000 description 1
238000009434 installation Methods 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
239000003345 natural gas Substances 0.000 description 1
230000003647 oxidation Effects 0.000 description 1
238000007254 oxidation reaction Methods 0.000 description 1
230000001590 oxidative effect Effects 0.000 description 1
238000002310 reflectometry Methods 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
238000005096 rolling process Methods 0.000 description 1
238000001228 spectrum Methods 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
239000010959 steel Substances 0.000 description 1
238000002834 transmittance Methods 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0063—Reactive sputtering characterised by means for introducing or removing gases
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/225—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption for spectrally selective absorption
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/25—Coatings made of metallic material
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P80/00—Climate change mitigation technologies for sector-wide applications
- Y02P80/20—Climate change mitigation technologies for sector-wide applications using renewable energy

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Organic Chemistry (AREA)
Metallurgy (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Physics & Mathematics (AREA)
General Engineering & Computer Science (AREA)
Combustion & Propulsion (AREA)
Thermal Sciences (AREA)
Sustainable Energy (AREA)
Sustainable Development (AREA)
Life Sciences & Earth Sciences (AREA)
Spectroscopy & Molecular Physics (AREA)
Physical Vapour Deposition (AREA)
Photovoltaic Devices (AREA)
Hybrid Cells (AREA)
Other Surface Treatments For Metallic Materials (AREA)
Inorganic Compounds Of Heavy Metals (AREA)

SE9603393A 1996-09-16 1996-09-16 Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt SE509933C2 (sv)

Priority Applications (9)

Application Number	Priority Date	Filing Date	Title
SE9603393A SE509933C2 (sv)	1996-09-16	1996-09-16	Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt
AU43248/97A AU724684B2 (en)	1996-09-16	1997-09-15	A method for manufacturing an absorbent layer for solar collectors, a device for performing the method and an absorbent layer for solar collectors
PCT/SE1997/001545 WO1998011271A1 (en)	1996-09-16	1997-09-15	A method for manufacturing an absorbent layer for solar collectors, a device for performing the method and an absorbent layer for solar collectors
DE69719801T DE69719801T2 (de)	1996-09-16	1997-09-15	Verfahren und Vorrichtung zur Herstellung einer absorbierenden Schicht für Sonnenkollektoren
JP51357598A JP2001506698A (ja)	1996-09-16	1997-09-15	ソーラーコレクター用吸収層の製造方法、該方法を実施するための装置およびソーラーコレクター用吸収層
AT97941308T ATE234368T1 (de)	1996-09-16	1997-09-15	Verfahren und vorrichtung zur herstellung einer absorbierenden schicht für sonnenkollektoren
ES97941308T ES2195172T3 (es)	1996-09-16	1997-09-15	Procedimiento de fabricacion de una capa absorbente para colectores solares y dispositivo para realizar el procedimiento.
EP97941308A EP0948662B1 (de)	1996-09-16	1997-09-15	Verfahren und Vorrichtung zur Herstellung einer absorbierenden Schicht für Sonnenkollektoren
US09/265,495 US6171458B1 (en)	1996-09-16	1999-03-10	Method for manufacturing an absorbent layer for solar collectors, a device for performing the method and an absorbent layer for solar collectors

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
SE9603393A SE509933C2 (sv)	1996-09-16	1996-09-16	Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt

Publications (3)

Publication Number	Publication Date
SE9603393D0 SE9603393D0 (sv)	1996-09-16
SE9603393L SE9603393L (sv)	1998-03-17
SE509933C2 true SE509933C2 (sv)	1999-03-22

Family

ID=20403923

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE9603393A SE509933C2 (sv)	1996-09-16	1996-09-16	Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt

Country Status (9)

Country	Link
US (1)	US6171458B1 (de)
EP (1)	EP0948662B1 (de)
JP (1)	JP2001506698A (de)
AT (1)	ATE234368T1 (de)
AU (1)	AU724684B2 (de)
DE (1)	DE69719801T2 (de)
ES (1)	ES2195172T3 (de)
SE (1)	SE509933C2 (de)
WO (1)	WO1998011271A1 (de)

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* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3735461B2 (ja) *	1998-03-27	2006-01-18	株式会社シンクロン	複合金属の化合物薄膜形成方法及びその薄膜形成装置
JP3650079B2 (ja) *	2002-04-25	2005-05-18	株式会社鈴寅	機能性繊維シート
DE102004006131B4 (de) *	2004-02-07	2005-12-15	Applied Films Gmbh & Co. Kg	Bandbeschichtungsanlage mit einer Vakuumkammer und einer Beschichtungswalze
DE102004019062B4 (de) *	2004-04-20	2009-10-01	The Most from California LLC, , Thousand Oaks	Vorrichtung zum Beschichten von schweren Bändern im Vakuum
DE102004019061B4 (de) *	2004-04-20	2008-11-27	Peter Lazarov	Selektiver Absorber zur Umwandlung von Sonnenlicht in Wärme, ein Verfahren und eine Vorrichtung zu dessen Herstellung
CN101086059B (zh) *	2006-06-05	2011-07-20	黄鸣	太阳能集热管真空磁控溅射连续镀膜线系统
DE102006037872A1 (de) *	2006-08-11	2008-02-14	Viessmann Werke Gmbh & Co Kg	Absorber, Vorrichtung zur Herstellung eines Absorbers und Verfahren zur Herstellung eines Absorbers
CN101343726B (zh) *	2007-07-09	2010-11-03	殷志强	太阳能集热管连续自动溅射镀膜方法及装置
EP2416184A4 (de) *	2009-03-31	2014-09-03	Stella Chemifa Corp	Optisches element und verfahren zu dessen herstellung
EP4350027A4 (de) *	2021-06-04	2026-03-11	Riken Technos Corp	Verfahren zur herstellung eines verbundfilms und verfahren zur herstellung eines organischen/anorganischen hybridfilms

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* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3022714C2 (de) *	1980-06-18	1982-09-09	Bfg Glassgroup, Paris	Verfahren zum Herstellen einer selektiv absorbierenden Beschichtung für Solarkollektoren und danach hergestellte Beschichtung
JPS5713172A (en)	1980-06-28	1982-01-23	Agency Of Ind Science & Technol	Formation of selective absorption menbrane for solar energy by vacuum plating method
JPS58189372A (ja)	1982-04-30	1983-11-05	Toshiba Corp	マグネトロンスパツタ装置
NL8401721A (nl) *	1984-05-29	1985-12-16	Leer Koninklijke Emballage	Werkwijze en stelsel voor het produceren van een reactief gesputterde geleidende transparante metaaloxidefilm op een doorlopende materiaalbaan.
JPH01500990A (ja)	1986-05-02	1989-04-06	デポジション・テクノロジー・インコーポレイテッド	スパッタコーテッド薄厚ガラスシーティングロールおよびその連続製造方法
US4885070A (en) *	1988-02-12	1989-12-05	Leybold Aktiengesellschaft	Method and apparatus for the application of materials
US4885010A (en) *	1988-10-03	1989-12-05	Gallagher-Kaiser Corporation	Spray booth
DE3926877A1 (de) *	1989-08-16	1991-02-21	Leybold Ag	Verfahren zum beschichten eines dielektrischen substrats mit kupfer
GB9102976D0 (en) *	1991-02-13	1991-03-27	Secr Defence	Matrix-coated reinforcement for production of metal matrix composites
US5135581A (en) *	1991-04-08	1992-08-04	Minnesota Mining And Manufacturing Company	Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas
JPH07110401A (ja)	1993-10-08	1995-04-25	Olympus Optical Co Ltd	光学部材の製造方法及び光学部材
DE19543781A1 (de) *	1995-11-24	1997-05-28	Leybold Ag	Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material

1996
- 1996-09-16 SE SE9603393A patent/SE509933C2/sv not_active IP Right Cessation
1997
- 1997-09-15 AT AT97941308T patent/ATE234368T1/de active
- 1997-09-15 DE DE69719801T patent/DE69719801T2/de not_active Expired - Lifetime
- 1997-09-15 JP JP51357598A patent/JP2001506698A/ja active Pending
- 1997-09-15 ES ES97941308T patent/ES2195172T3/es not_active Expired - Lifetime
- 1997-09-15 EP EP97941308A patent/EP0948662B1/de not_active Expired - Lifetime
- 1997-09-15 AU AU43248/97A patent/AU724684B2/en not_active Ceased
- 1997-09-15 WO PCT/SE1997/001545 patent/WO1998011271A1/en not_active Ceased
1999
- 1999-03-10 US US09/265,495 patent/US6171458B1/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
SE9603393L (sv)	1998-03-17
AU4324897A (en)	1998-04-02
ES2195172T3 (es)	2003-12-01
WO1998011271A1 (en)	1998-03-19
JP2001506698A (ja)	2001-05-22
US6171458B1 (en)	2001-01-09
DE69719801D1 (de)	2003-04-17
ATE234368T1 (de)	2003-03-15
DE69719801T2 (de)	2003-12-18
EP0948662A1 (de)	1999-10-13
EP0948662B1 (de)	2003-03-12
AU724684B2 (en)	2000-09-28
SE9603393D0 (sv)	1996-09-16

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Date	Code	Title	Description
2004-05-04	NUG	Patent has lapsed

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EP0328257B1 (de)	1997-04-02	Magnetronzerstäubungsanlage und -verfahren
EP0716160B1 (de)	2000-01-26	Geometrie und Gestaltungen eines Geräts zum Magnetronzerstäuben
SE509933C2 (sv)	1999-03-22	Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt
CA2059046C (en)	1999-11-30	Aluminium surfaces
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Spura et al.	1982	Thin Silver Film Coating for Increased Lamp Efficiency