SE517847C2 - Elektrod för uppbärning av ett prov i ett svepelektronmikroskop - Google Patents

Elektrod för uppbärning av ett prov i ett svepelektronmikroskop

Info

Publication number
SE517847C2
SE517847C2 SE9601247A SE9601247A SE517847C2 SE 517847 C2 SE517847 C2 SE 517847C2 SE 9601247 A SE9601247 A SE 9601247A SE 9601247 A SE9601247 A SE 9601247A SE 517847 C2 SE517847 C2 SE 517847C2
Authority
SE
Sweden
Prior art keywords
filter element
electrode
channel
grooves
electron microscope
Prior art date
Application number
SE9601247A
Other languages
English (en)
Swedish (sv)
Other versions
SE9601247D0 (sv
SE9601247L (sv
Inventor
Rolf Nybom
Original Assignee
Rolf Nybom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolf Nybom filed Critical Rolf Nybom
Priority to SE9601247A priority Critical patent/SE517847C2/sv
Publication of SE9601247D0 publication Critical patent/SE9601247D0/xx
Priority to DE1997608733 priority patent/DE69708733T2/de
Priority to EP19970850050 priority patent/EP0800199B1/fr
Publication of SE9601247L publication Critical patent/SE9601247L/
Publication of SE517847C2 publication Critical patent/SE517847C2/sv

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2202Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/0606Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/24Suction devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N2001/028Sampling from a surface, swabbing, vaporising
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2202Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222Other features
    • G01N2001/2223Other features aerosol sampling devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE9601247A 1996-04-01 1996-04-01 Elektrod för uppbärning av ett prov i ett svepelektronmikroskop SE517847C2 (sv)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE9601247A SE517847C2 (sv) 1996-04-01 1996-04-01 Elektrod för uppbärning av ett prov i ett svepelektronmikroskop
DE1997608733 DE69708733T2 (de) 1996-04-01 1997-03-27 Elektrode zur Halterung einer Probe in einem Rasterelektronenmikroskop
EP19970850050 EP0800199B1 (fr) 1996-04-01 1997-03-27 Electrode pour supporter un échantillon dans un microscope électronique à balayage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9601247A SE517847C2 (sv) 1996-04-01 1996-04-01 Elektrod för uppbärning av ett prov i ett svepelektronmikroskop

Publications (3)

Publication Number Publication Date
SE9601247D0 SE9601247D0 (sv) 1996-04-01
SE9601247L SE9601247L (sv) 1997-10-02
SE517847C2 true SE517847C2 (sv) 2002-07-23

Family

ID=20402037

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9601247A SE517847C2 (sv) 1996-04-01 1996-04-01 Elektrod för uppbärning av ett prov i ett svepelektronmikroskop

Country Status (3)

Country Link
EP (1) EP0800199B1 (fr)
DE (1) DE69708733T2 (fr)
SE (1) SE517847C2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011117134A1 (de) * 2011-10-21 2013-04-25 Carl Zeiss Microscopy Gmbh Filterhalter zur korrelativen Partikelanalyse

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0227679A1 (fr) * 1984-09-26 1987-07-08 ANDERSSON, Jan Peter Procede et dispositif de piegeage et d'analyse de particules
US4961916A (en) * 1988-06-02 1990-10-09 Irsst-Institut De Recherche En Sante Et En Securite Du Travail Du Quebec Sampling device

Also Published As

Publication number Publication date
SE9601247D0 (sv) 1996-04-01
EP0800199A3 (fr) 1998-04-22
DE69708733D1 (de) 2002-01-17
EP0800199B1 (fr) 2001-12-05
EP0800199A2 (fr) 1997-10-08
DE69708733T2 (de) 2002-09-05
SE9601247L (sv) 1997-10-02

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Legal Events

Date Code Title Description
NUG Patent has lapsed