SE519921C2 - PVD-belagt skärverktyg och metod för dess framställning - Google Patents

PVD-belagt skärverktyg och metod för dess framställning

Info

Publication number: SE519921C2
Authority: SE; Sweden
Prior art keywords: layer; hkl; coating; cutting tool; spinel
Prior art date: 1999-05-06

Application number

SE9901651A

Other languages

English (en)

Swedish (sv)

Other versions

SE9901651D0 (sv

SE9901651L (sv

Inventor

Olaf Zywitzki

Klaus Goedicke

Fred Fietzke

Siegfried Schiller

Torbjoern Selinder

Mats Ahlgren

Original Assignee

Sandvik Ab

Fraunhofer Ges Forschung

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-05-06

Filing date

1999-05-06

Publication date

2003-04-29

1999-05-06 Application filed by Sandvik Ab, Fraunhofer Ges Forschung filed Critical Sandvik Ab

1999-05-06 Priority to SE9901651A priority Critical patent/SE519921C2/sv

1999-05-06 Publication of SE9901651D0 publication Critical patent/SE9901651D0/xx

2000-05-03 Priority to EP00930016A priority patent/EP1099003B1/de

2000-05-03 Priority to PL345359A priority patent/PL193318B1/pl

2000-05-03 Priority to AT00930016T priority patent/ATE338837T1/de

2000-05-03 Priority to CNB008007853A priority patent/CN100389224C/zh

2000-05-03 Priority to JP2000617221A priority patent/JP4824173B2/ja

2000-05-03 Priority to BR0006061-5A priority patent/BR0006061A/pt

2000-05-03 Priority to KR1020017000110A priority patent/KR100673636B1/ko

2000-05-03 Priority to PCT/SE2000/000858 priority patent/WO2000068453A1/en

2000-05-03 Priority to DE60030524T priority patent/DE60030524T2/de

2000-05-03 Priority to IL14069200A priority patent/IL140692A/xx

2000-11-07 Publication of SE9901651L publication Critical patent/SE9901651L/xx

2001-11-13 Priority to US09/987,123 priority patent/US6554971B2/en

2003-04-29 Publication of SE519921C2 publication Critical patent/SE519921C2/sv

Links

238000000034 method Methods 0.000 title claims abstract description 35
238000005520 cutting process Methods 0.000 title claims abstract description 26
238000004519 manufacturing process Methods 0.000 title claims 2
238000000576 coating method Methods 0.000 claims abstract description 53
229910052596 spinel Inorganic materials 0.000 claims abstract description 45
239000011029 spinel Substances 0.000 claims abstract description 45
229910052782 aluminium Inorganic materials 0.000 claims abstract description 41
239000011248 coating agent Substances 0.000 claims abstract description 41
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 32
229910052751 metal Inorganic materials 0.000 claims abstract description 19
239000002184 metal Substances 0.000 claims abstract description 17
238000005240 physical vapour deposition Methods 0.000 claims abstract description 16
150000001875 compounds Chemical class 0.000 claims abstract description 15
230000008569 process Effects 0.000 claims abstract description 11
239000000758 substrate Substances 0.000 claims description 27
239000000203 mixture Substances 0.000 claims description 13
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
239000007789 gas Substances 0.000 claims description 10
238000001755 magnetron sputter deposition Methods 0.000 claims description 10
239000000463 material Substances 0.000 claims description 10
229910052719 titanium Inorganic materials 0.000 claims description 8
239000000919 ceramic Substances 0.000 claims description 7
229910052749 magnesium Inorganic materials 0.000 claims description 7
229910000997 High-speed steel Inorganic materials 0.000 claims description 6
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical compound [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 claims description 6
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
229910052804 chromium Inorganic materials 0.000 claims description 6
229910052582 BN Inorganic materials 0.000 claims description 5
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
229910052786 argon Inorganic materials 0.000 claims description 5
239000010432 diamond Substances 0.000 claims description 5
229910003460 diamond Inorganic materials 0.000 claims description 5
229910052735 hafnium Inorganic materials 0.000 claims description 5
229910052742 iron Inorganic materials 0.000 claims description 5
150000001247 metal acetylides Chemical class 0.000 claims description 5
229910052750 molybdenum Inorganic materials 0.000 claims description 5
229910052758 niobium Inorganic materials 0.000 claims description 5
150000004767 nitrides Chemical class 0.000 claims description 5
239000001301 oxygen Substances 0.000 claims description 5
229910052760 oxygen Inorganic materials 0.000 claims description 5
229910052715 tantalum Inorganic materials 0.000 claims description 5
229910052721 tungsten Inorganic materials 0.000 claims description 5
229910052720 vanadium Inorganic materials 0.000 claims description 5
229910052726 zirconium Inorganic materials 0.000 claims description 5
238000002441 X-ray diffraction Methods 0.000 claims description 4
229910045601 alloy Inorganic materials 0.000 claims description 4
239000000956 alloy Substances 0.000 claims description 4
229910052736 halogen Inorganic materials 0.000 claims description 4
150000002367 halogens Chemical class 0.000 claims description 4
239000012535 impurity Substances 0.000 claims description 4
150000002739 metals Chemical class 0.000 claims description 4
230000011514 reflex Effects 0.000 claims description 4
229910020068 MgAl Inorganic materials 0.000 claims description 3
229910052793 cadmium Inorganic materials 0.000 claims description 3
229910052802 copper Inorganic materials 0.000 claims description 3
230000009977 dual effect Effects 0.000 claims description 3
229910052748 manganese Inorganic materials 0.000 claims description 3
229910052759 nickel Inorganic materials 0.000 claims description 3
239000002245 particle Substances 0.000 claims description 3
229910052725 zinc Inorganic materials 0.000 claims description 3
239000011195 cermet Substances 0.000 claims description 2
238000002447 crystallographic data Methods 0.000 claims description 2
239000000843 powder Substances 0.000 claims description 2
238000005546 reactive sputtering Methods 0.000 claims 1
238000003754 machining Methods 0.000 abstract description 5
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 16
229910052593 corundum Inorganic materials 0.000 description 15
229910001845 yogo sapphire Inorganic materials 0.000 description 15
239000011777 magnesium Substances 0.000 description 7
229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
238000005516 engineering process Methods 0.000 description 6
XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
239000000126 substance Substances 0.000 description 6
239000010408 film Substances 0.000 description 5
230000006872 improvement Effects 0.000 description 5
230000035882 stress Effects 0.000 description 5
-1 AlCl3 Chemical class 0.000 description 4
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
229910000831 Steel Inorganic materials 0.000 description 4
238000005553 drilling Methods 0.000 description 4
238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
229910052594 sapphire Inorganic materials 0.000 description 4
238000004544 sputter deposition Methods 0.000 description 4
239000010959 steel Substances 0.000 description 4
125000004429 atom Chemical group 0.000 description 3
238000006243 chemical reaction Methods 0.000 description 3
150000002500 ions Chemical class 0.000 description 3
238000012545 processing Methods 0.000 description 3
229910001018 Cast iron Inorganic materials 0.000 description 2
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 2
VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
230000008901 benefit Effects 0.000 description 2
239000000460 chlorine Substances 0.000 description 2
229910052801 chlorine Inorganic materials 0.000 description 2
239000002826 coolant Substances 0.000 description 2
125000004122 cyclic group Chemical group 0.000 description 2
230000008020 evaporation Effects 0.000 description 2
238000001704 evaporation Methods 0.000 description 2
238000005259 measurement Methods 0.000 description 2
238000005555 metalworking Methods 0.000 description 2
230000003287 optical effect Effects 0.000 description 2
238000006467 substitution reaction Methods 0.000 description 2
239000010409 thin film Substances 0.000 description 2
229910003158 γ-Al2O3 Inorganic materials 0.000 description 2
KJPRLNWUNMBNBZ-QPJJXVBHSA-N (E)-cinnamaldehyde Chemical compound O=C\C=C\C1=CC=CC=C1 KJPRLNWUNMBNBZ-QPJJXVBHSA-N 0.000 description 1
229910010037 TiAlN Inorganic materials 0.000 description 1
238000005452 bending Methods 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
238000005422 blasting Methods 0.000 description 1
230000001680 brushing effect Effects 0.000 description 1
150000001768 cations Chemical class 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
239000000356 contaminant Substances 0.000 description 1
230000008602 contraction Effects 0.000 description 1
239000013078 crystal Substances 0.000 description 1
230000032798 delamination Effects 0.000 description 1
238000000151 deposition Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000001514 detection method Methods 0.000 description 1
238000010891 electric arc Methods 0.000 description 1
238000002003 electron diffraction Methods 0.000 description 1
238000000295 emission spectrum Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
239000004744 fabric Substances 0.000 description 1
230000004907 flux Effects 0.000 description 1
150000004820 halides Chemical class 0.000 description 1
125000005843 halogen group Chemical group 0.000 description 1
238000007735 ion beam assisted deposition Methods 0.000 description 1
238000007733 ion plating Methods 0.000 description 1
239000011572 manganese Substances 0.000 description 1
238000003801 milling Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
230000007935 neutral effect Effects 0.000 description 1
230000006911 nucleation Effects 0.000 description 1
238000010899 nucleation Methods 0.000 description 1
239000003973 paint Substances 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
239000002244 precipitate Substances 0.000 description 1
230000001376 precipitating effect Effects 0.000 description 1
238000001556 precipitation Methods 0.000 description 1
239000007787 solid Substances 0.000 description 1
238000004611 spectroscopical analysis Methods 0.000 description 1
230000007480 spreading Effects 0.000 description 1
238000003892 spreading Methods 0.000 description 1
238000012360 testing method Methods 0.000 description 1
230000008646 thermal stress Effects 0.000 description 1
238000012876 topography Methods 0.000 description 1
230000009466 transformation Effects 0.000 description 1
230000000007 visual effect Effects 0.000 description 1
239000011701 zinc Substances 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5046—Spinels, e.g. magnesium aluminate spinels
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Organic Chemistry (AREA)
Materials Engineering (AREA)
Ceramic Engineering (AREA)
Mechanical Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Metallurgy (AREA)
Structural Engineering (AREA)
Inorganic Chemistry (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Physical Vapour Deposition (AREA)
Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Turning (AREA)
Chemical Vapour Deposition (AREA)

SE9901651A 1999-05-06 1999-05-06 PVD-belagt skärverktyg och metod för dess framställning SE519921C2 (sv)

Priority Applications (12)

Application Number	Priority Date	Filing Date	Title
SE9901651A SE519921C2 (sv)	1999-05-06	1999-05-06	PVD-belagt skärverktyg och metod för dess framställning
IL14069200A IL140692A (en)	1999-05-06	2000-05-03	Method for making a cutting tool coated by physical vapor deposition
BR0006061-5A BR0006061A (pt)	1999-05-06	2000-05-03	Ferramenta de corte revestida pela técnica de deposição fìsica a vapor (pvd) e método de sua produção
PL345359A PL193318B1 (pl)	1999-05-06	2000-05-03	Narzędzie skrawające pokrywane metodą fizycznego naparowywania próżniowego (PVD) oraz sposób wytwarzania narzędzia skrawającego pokrywanego metodą fizycznego naparowywania próżniowego (PVD)
AT00930016T ATE338837T1 (de)	1999-05-06	2000-05-03	Pvd beschichtetes schneidwerkzeug und verfahren zu dessen herstellung
CNB008007853A CN100389224C (zh)	1999-05-06	2000-05-03	Pvd法涂覆的切削刀具及其制备方法
JP2000617221A JP4824173B2 (ja)	1999-05-06	2000-05-03	Ｐｖｄ被膜切削工具およびその製造方法
EP00930016A EP1099003B1 (de)	1999-05-06	2000-05-03	Pvd beschichtetes schneidwerkzeug und verfahren zu dessen herstellung
KR1020017000110A KR100673636B1 (ko)	1999-05-06	2000-05-03	Ｐｖｄ 코팅된 절삭공구 및 이의 제조방법
PCT/SE2000/000858 WO2000068453A1 (en)	1999-05-06	2000-05-03	Pvd coated cutting tool and method of its production
DE60030524T DE60030524T2 (de)	1999-05-06	2000-05-03	Pvd beschichtetes schneidwerkzeug und verfahren zu dessen herstellung
US09/987,123 US6554971B2 (en)	1999-05-06	2001-11-13	PVD coated cutting tool and method of its production

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
SE9901651A SE519921C2 (sv)	1999-05-06	1999-05-06	PVD-belagt skärverktyg och metod för dess framställning

Publications (3)

Publication Number	Publication Date
SE9901651D0 SE9901651D0 (sv)	1999-05-06
SE9901651L SE9901651L (sv)	2000-11-07
SE519921C2 true SE519921C2 (sv)	2003-04-29

Family

ID=20415501

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE9901651A SE519921C2 (sv)	1999-05-06	1999-05-06	PVD-belagt skärverktyg och metod för dess framställning

Country Status (12)

Country	Link
US (1)	US6554971B2 (de)
EP (1)	EP1099003B1 (de)
JP (1)	JP4824173B2 (de)
KR (1)	KR100673636B1 (de)
CN (1)	CN100389224C (de)
AT (1)	ATE338837T1 (de)
BR (1)	BR0006061A (de)
DE (1)	DE60030524T2 (de)
IL (1)	IL140692A (de)
PL (1)	PL193318B1 (de)
SE (1)	SE519921C2 (de)
WO (1)	WO2000068453A1 (de)

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1999
- 1999-05-06 SE SE9901651A patent/SE519921C2/sv unknown
2000
- 2000-05-03 BR BR0006061-5A patent/BR0006061A/pt not_active Application Discontinuation
- 2000-05-03 IL IL14069200A patent/IL140692A/xx not_active IP Right Cessation
- 2000-05-03 JP JP2000617221A patent/JP4824173B2/ja not_active Expired - Fee Related
- 2000-05-03 PL PL345359A patent/PL193318B1/pl unknown
- 2000-05-03 DE DE60030524T patent/DE60030524T2/de not_active Expired - Lifetime
- 2000-05-03 CN CNB008007853A patent/CN100389224C/zh not_active Expired - Fee Related
- 2000-05-03 WO PCT/SE2000/000858 patent/WO2000068453A1/en not_active Ceased
- 2000-05-03 KR KR1020017000110A patent/KR100673636B1/ko not_active Expired - Fee Related
- 2000-05-03 AT AT00930016T patent/ATE338837T1/de active
- 2000-05-03 EP EP00930016A patent/EP1099003B1/de not_active Expired - Lifetime
2001
- 2001-11-13 US US09/987,123 patent/US6554971B2/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
CN1304457A (zh)	2001-07-18
WO2000068453A1 (en)	2000-11-16
IL140692A (en)	2005-06-19
KR20010053390A (ko)	2001-06-25
EP1099003B1 (de)	2006-09-06
EP1099003A1 (de)	2001-05-16
PL345359A1 (en)	2001-12-17
US20020051852A1 (en)	2002-05-02
DE60030524D1 (de)	2006-10-19
DE60030524T2 (de)	2007-06-06
IL140692A0 (en)	2002-02-10
CN100389224C (zh)	2008-05-21
KR100673636B1 (ko)	2007-01-23
US6554971B2 (en)	2003-04-29
PL193318B1 (pl)	2007-01-31
SE9901651D0 (sv)	1999-05-06
BR0006061A (pt)	2001-03-20
JP4824173B2 (ja)	2011-11-30
ATE338837T1 (de)	2006-09-15
SE9901651L (sv)	2000-11-07
JP2002543992A (ja)	2002-12-24

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SE519921C2 (sv)	2003-04-29	PVD-belagt skärverktyg och metod för dess framställning
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US20090252973A1 (en)	2009-10-08	Coated body
CN104160060A (zh)	2014-11-19	具有金属基氮化物层的刀体和涂布该刀体的方法
CN105593397A (zh)	2016-05-18	一种涂覆的切削工具和涂覆切削工具的方法
JP4975906B2 (ja)	2012-07-11	Ｐｖｄ酸化アルミニウムで被覆された切削工具の製造方法
US20150284837A1 (en)	2015-10-08	Coated cutting tool and method for the production thereof
JP7741303B2 (ja)	2025-09-17	被覆工具および切削工具
IL135223A (en)	2004-06-20	Aluminum oxide coated cutting tool and processes for the preparation thereof