SE543575C2 - Electrostatic lens for controlling beam of charged particles - Google Patents

Electrostatic lens for controlling beam of charged particles

Info

Publication number
SE543575C2
SE543575C2 SE1900143A SE1900143A SE543575C2 SE 543575 C2 SE543575 C2 SE 543575C2 SE 1900143 A SE1900143 A SE 1900143A SE 1900143 A SE1900143 A SE 1900143A SE 543575 C2 SE543575 C2 SE 543575C2
Authority
SE
Sweden
Prior art keywords
electrostatic lens
lens element
charged particles
deflector
optical axis
Prior art date
Application number
SE1900143A
Other versions
SE1900143A1 (en
Inventor
Mikael Olofsson
Original Assignee
Scienta Omicron Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scienta Omicron Ab filed Critical Scienta Omicron Ab
Priority to SE1900143A priority Critical patent/SE543575C2/en
Priority to SE1951077A priority patent/SE543641C8/en
Priority to PCT/SE2020/050824 priority patent/WO2021040609A1/en
Priority to CN202080060729.1A priority patent/CN114303229A/en
Priority to EP20856886.5A priority patent/EP4022669A4/en
Publication of SE1900143A1 publication Critical patent/SE1900143A1/en
Publication of SE543575C2 publication Critical patent/SE543575C2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Beam Exposure (AREA)

Abstract

An arrangement (100) is described which comprises an electrostatic lens (7) comprising an optical axis (6), a first electrostatic lens element (1), a second electrostatic lens element (2), and a deflector arrangement comprising a deflector package (5) with a plurality of electrodes (15) being arranged circumferentially around the optical axis (6) between the first end (26) of the first electrostatic lens element (1) and the second end (29) of the second electrostatic lens element (2), and arranged to deflect the beam of charged particles, in at least a first coordinate direction (x, y) perpendicular to the optical axis (6). The deflector package (5) is arranged such that, during operation of the electrostatic lens (7), a charged particle, travelling from the first electrostatic lens (1) element to the second electrostatic lens element (2), first passes through the electric field between the first electrostatic lens element (1) and the deflector package (5), and subsequently passes through the electric field between the deflector package (5) and the second electrostatic lens element (2).
SE1900143A 2019-08-30 2019-08-30 Electrostatic lens for controlling beam of charged particles SE543575C2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE1900143A SE543575C2 (en) 2019-08-30 2019-08-30 Electrostatic lens for controlling beam of charged particles
SE1951077A SE543641C8 (en) 2019-08-30 2019-09-24 Electrostatic lens for controlling beam of electrons
PCT/SE2020/050824 WO2021040609A1 (en) 2019-08-30 2020-08-27 Electrostatic lens for controlling beam of electrons
CN202080060729.1A CN114303229A (en) 2019-08-30 2020-08-27 Electrostatic lens for controlling electron beam
EP20856886.5A EP4022669A4 (en) 2019-08-30 2020-08-27 Electrostatic lens for controlling beam of electrons

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE1900143A SE543575C2 (en) 2019-08-30 2019-08-30 Electrostatic lens for controlling beam of charged particles

Publications (2)

Publication Number Publication Date
SE1900143A1 SE1900143A1 (en) 2021-03-01
SE543575C2 true SE543575C2 (en) 2021-04-06

Family

ID=74882437

Family Applications (2)

Application Number Title Priority Date Filing Date
SE1900143A SE543575C2 (en) 2019-08-30 2019-08-30 Electrostatic lens for controlling beam of charged particles
SE1951077A SE543641C8 (en) 2019-08-30 2019-09-24 Electrostatic lens for controlling beam of electrons

Family Applications After (1)

Application Number Title Priority Date Filing Date
SE1951077A SE543641C8 (en) 2019-08-30 2019-09-24 Electrostatic lens for controlling beam of electrons

Country Status (1)

Country Link
SE (2) SE543575C2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5966042A (en) * 1982-10-08 1984-04-14 Hitachi Ltd Electrostatic type focusing deflection device
EP0462554A2 (en) * 1990-06-20 1991-12-27 Hitachi, Ltd. Charged particle beam apparatus
US20140001372A1 (en) * 2012-06-29 2014-01-02 Fei Company Multi Species Ion Source

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5966042A (en) * 1982-10-08 1984-04-14 Hitachi Ltd Electrostatic type focusing deflection device
EP0462554A2 (en) * 1990-06-20 1991-12-27 Hitachi, Ltd. Charged particle beam apparatus
US20140001372A1 (en) * 2012-06-29 2014-01-02 Fei Company Multi Species Ion Source

Also Published As

Publication number Publication date
SE543641C8 (en) 2022-05-03
SE543641C2 (en) 2021-05-11
SE1900143A1 (en) 2021-03-01
SE1951077A1 (en) 2021-03-01

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