SE8006587L - Kapacitiv tryckgivare och utverderingsanordning for denna - Google Patents

Kapacitiv tryckgivare och utverderingsanordning for denna

Info

Publication number
SE8006587L
SE8006587L SE8006587A SE8006587A SE8006587L SE 8006587 L SE8006587 L SE 8006587L SE 8006587 A SE8006587 A SE 8006587A SE 8006587 A SE8006587 A SE 8006587A SE 8006587 L SE8006587 L SE 8006587L
Authority
SE
Sweden
Prior art keywords
diaphragm
pressure sensor
metallic film
assessment device
capacity pressure
Prior art date
Application number
SE8006587A
Other languages
Unknown language ( )
English (en)
Swedish (sv)
Inventor
R Burkel
F M Piteira
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of SE8006587L publication Critical patent/SE8006587L/

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
SE8006587A 1979-09-21 1980-09-19 Kapacitiv tryckgivare och utverderingsanordning for denna SE8006587L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792938205 DE2938205A1 (de) 1979-09-21 1979-09-21 Kapazitiver druckgeber und auswerteeinrichtung hierfuer

Publications (1)

Publication Number Publication Date
SE8006587L true SE8006587L (sv) 1981-03-22

Family

ID=6081461

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8006587A SE8006587L (sv) 1979-09-21 1980-09-19 Kapacitiv tryckgivare och utverderingsanordning for denna

Country Status (7)

Country Link
JP (1) JPS5654331A (it)
BR (1) BR8005996A (it)
DE (1) DE2938205A1 (it)
FR (1) FR2466012A1 (it)
GB (1) GB2059071B (it)
IT (1) IT1132979B (it)
SE (1) SE8006587L (it)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3128032A1 (de) * 1981-07-16 1983-02-03 Robert Bosch Gmbh, 7000 Stuttgart Anordnung zur erfassung eines druckes
DE3337978C2 (de) * 1983-10-19 1987-01-15 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Vorrichtung zum Messen eines Druckes und eines zeitlichen Druckverlaufs
FI842307L (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
US4658358A (en) * 1984-06-13 1987-04-14 Battelle Memorial Institute Underwater computer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
DE3523104A1 (de) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Anordnung mit einer messelektrode, der in festen abstaenden eine erste und eine zweite felderzeugende elektrode zugeordnet sind
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
DE3638978C2 (de) * 1986-11-14 1996-04-25 Teves Gmbh Alfred Elektrohydraulische Vorrichtung zur kontinuierlichen Überwachung des Druckes in einer hydraulischen Kraftfahrzeug-Bremsanlage
JPS6438546U (it) * 1987-09-02 1989-03-08
JPH0743625Y2 (ja) * 1987-10-13 1995-10-09 株式会社トーキン 静電容量式荷重センサ
JPH0542353Y2 (it) * 1987-11-13 1993-10-26
JPH0750685Y2 (ja) * 1987-11-19 1995-11-15 株式会社トーキン 静電容量式荷重センサー
JPH01136041A (ja) * 1987-11-24 1989-05-29 Tokin Corp 静電容量式荷重センサ
JPH086275Y2 (ja) * 1987-12-19 1996-02-21 株式会社トーキン 静電容量式荷重センサ
JPH076499Y2 (ja) * 1988-09-16 1995-02-15 株式会社トーキン 高安定型静電容量式荷重検出装置
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
FR2775075B1 (fr) 1998-02-18 2000-05-05 Theobald Sa A Capteur de pression differentielle
DE102008034350A1 (de) * 2008-07-23 2010-02-11 Continental Automotive Gmbh Sensormembran für einen Drucksensor sowie Herstellungsverfahren dafür

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer

Also Published As

Publication number Publication date
GB2059071B (en) 1983-07-06
FR2466012A1 (fr) 1981-03-27
DE2938205A1 (de) 1981-04-09
FR2466012B1 (it) 1984-10-19
IT8024775A0 (it) 1980-09-19
JPS5654331A (en) 1981-05-14
GB2059071A (en) 1981-04-15
BR8005996A (pt) 1981-03-31
IT1132979B (it) 1986-07-09

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