SE8200712L - Sett och anordning for detektering av ytdefekter - Google Patents

Sett och anordning for detektering av ytdefekter

Info

Publication number
SE8200712L
SE8200712L SE8200712A SE8200712A SE8200712L SE 8200712 L SE8200712 L SE 8200712L SE 8200712 A SE8200712 A SE 8200712A SE 8200712 A SE8200712 A SE 8200712A SE 8200712 L SE8200712 L SE 8200712L
Authority
SE
Sweden
Prior art keywords
light
photosensitive layer
defects
spatial distribution
image
Prior art date
Application number
SE8200712A
Other languages
Unknown language ( )
English (en)
Other versions
SE448030B (sv
Inventor
E Milana
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Publication of SE8200712L publication Critical patent/SE8200712L/sv
Publication of SE448030B publication Critical patent/SE448030B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SE8200712A 1981-02-10 1982-02-08 Sett och anordning for detektering av ytdefekter SE448030B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT67187/81A IT1143380B (it) 1981-02-10 1981-02-10 Procedimento e dispositivo per il rilevamento di difetti superficiali di pezzi meccanici in particolare di pezzi a superficie curva

Publications (2)

Publication Number Publication Date
SE8200712L true SE8200712L (sv) 1982-08-11
SE448030B SE448030B (sv) 1987-01-12

Family

ID=11300313

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8200712A SE448030B (sv) 1981-02-10 1982-02-08 Sett och anordning for detektering av ytdefekter

Country Status (6)

Country Link
CA (1) CA1179036A (sv)
DE (2) DE3204295A1 (sv)
FR (1) FR2499718A1 (sv)
GB (1) GB2095398B (sv)
IT (1) IT1143380B (sv)
SE (1) SE448030B (sv)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58219441A (ja) * 1982-06-15 1983-12-20 Hajime Sangyo Kk 凸面体の表面欠陥検査装置
GB2133871A (en) * 1982-12-23 1984-08-01 Austin Rover Group Apparatus for a method of inspecting automotive components
US4920385A (en) * 1984-02-14 1990-04-24 Diffracto Ltd. Panel surface flaw inspection
US4629319A (en) * 1984-02-14 1986-12-16 Diffracto Ltd. Panel surface flaw inspection
GB2159271B (en) * 1984-04-27 1988-05-18 Nissan Motor Surface flaw detecting method and apparatus
US5206700A (en) * 1985-03-14 1993-04-27 Diffracto, Ltd. Methods and apparatus for retroreflective surface inspection and distortion measurement
JPH0682102B2 (ja) * 1987-02-27 1994-10-19 三菱電機株式会社 パターン欠陥検査装置及びパターン欠陥検査方法
US5168322A (en) * 1991-08-19 1992-12-01 Diffracto Ltd. Surface inspection using retro-reflective light field
US5225890A (en) * 1991-10-28 1993-07-06 Gencorp Inc. Surface inspection apparatus and method
DE4219691A1 (de) * 1992-06-16 1993-12-23 Siemens Ag Meßvorrichtung zur Bestimmung der Richtung der Polarisationsebene von linear polarisiertem Licht
RU2167470C2 (ru) * 1999-04-13 2001-05-20 Научно-исследовательский институт измерительных систем Способ контроля дефектности диэлектрических пленок
RU2179351C2 (ru) * 2000-02-14 2002-02-10 Научно-исследовательский институт измерительных систем Способ контроля дефектности диэлектрических пленок

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2311287A1 (fr) * 1975-05-12 1976-12-10 Bertin & Cie Procede et dispositif optique de mesure des mouvements ondulatoires d'une etendue liquide

Also Published As

Publication number Publication date
GB2095398B (en) 1984-08-08
IT1143380B (it) 1986-10-22
FR2499718A1 (fr) 1982-08-13
CA1179036A (en) 1984-12-04
DE8203330U1 (de) 1985-05-23
IT8167187A0 (it) 1981-02-10
GB2095398A (en) 1982-09-29
FR2499718B1 (sv) 1985-04-26
SE448030B (sv) 1987-01-12
DE3204295A1 (de) 1982-08-19

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