SE9401268L - Stabiliserad tryckgivare - Google Patents

Stabiliserad tryckgivare

Info

Publication number
SE9401268L
SE9401268L SE9401268A SE9401268A SE9401268L SE 9401268 L SE9401268 L SE 9401268L SE 9401268 A SE9401268 A SE 9401268A SE 9401268 A SE9401268 A SE 9401268A SE 9401268 L SE9401268 L SE 9401268L
Authority
SE
Sweden
Prior art keywords
capacitor
pct
shielding layer
plate
insulating material
Prior art date
Application number
SE9401268A
Other languages
Unknown language ( )
English (en)
Other versions
SE506558C2 (sv
SE9401268D0 (sv
Inventor
Nils Gunno Hallberg
Original Assignee
Mti Trading Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mti Trading Ab filed Critical Mti Trading Ab
Priority to SE9401268A priority Critical patent/SE506558C2/sv
Publication of SE9401268D0 publication Critical patent/SE9401268D0/sv
Priority to DE69521890T priority patent/DE69521890T2/de
Priority to PCT/SE1995/000425 priority patent/WO1995028624A1/en
Priority to US08/722,012 priority patent/US5920015A/en
Priority to JP52691495A priority patent/JP3757984B2/ja
Priority to EP95916908A priority patent/EP0755507B1/en
Publication of SE9401268L publication Critical patent/SE9401268L/sv
Publication of SE506558C2 publication Critical patent/SE506558C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
SE9401268A 1994-04-14 1994-04-14 Givarelement för tryckgivare SE506558C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9401268A SE506558C2 (sv) 1994-04-14 1994-04-14 Givarelement för tryckgivare
DE69521890T DE69521890T2 (de) 1994-04-14 1995-04-18 Stabilisierter drucksensor
PCT/SE1995/000425 WO1995028624A1 (en) 1994-04-14 1995-04-18 Stabilized pressure sensor
US08/722,012 US5920015A (en) 1994-04-14 1995-04-18 Pressure sensor with capacitor electrodes and shield layer parallel thereto
JP52691495A JP3757984B2 (ja) 1994-04-14 1995-04-18 安定化圧力センサ
EP95916908A EP0755507B1 (en) 1994-04-14 1995-04-18 Stabilized pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9401268A SE506558C2 (sv) 1994-04-14 1994-04-14 Givarelement för tryckgivare

Publications (3)

Publication Number Publication Date
SE9401268D0 SE9401268D0 (sv) 1994-04-14
SE9401268L true SE9401268L (sv) 1995-10-15
SE506558C2 SE506558C2 (sv) 1998-01-12

Family

ID=20393657

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9401268A SE506558C2 (sv) 1994-04-14 1994-04-14 Givarelement för tryckgivare

Country Status (6)

Country Link
US (1) US5920015A (sv)
EP (1) EP0755507B1 (sv)
JP (1) JP3757984B2 (sv)
DE (1) DE69521890T2 (sv)
SE (1) SE506558C2 (sv)
WO (1) WO1995028624A1 (sv)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9700613D0 (sv) * 1997-02-20 1997-02-20 Cecap Ab Sensorelement med temperaturmätning
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
WO1999034184A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
EP1040333B1 (de) 1997-12-23 2002-07-03 Unaxis Balzers Aktiengesellschaft Membrane für eine kapazitive vakuummesszelle
US6209398B1 (en) * 1998-09-18 2001-04-03 Texas Instruments Incorporated Fluid pressure transducer apparatus and method for assembling
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
JP3850263B2 (ja) * 2001-10-25 2006-11-29 京セラ株式会社 圧力検出装置用パッケージおよび圧力検出装置
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
DE10323059A1 (de) * 2003-05-20 2004-12-09 Prominent Dosiertechnik Gmbh Sensormembran
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
JP2008160352A (ja) * 2006-12-22 2008-07-10 Yamaha Corp 静電容量センサ
US20080202251A1 (en) * 2007-02-27 2008-08-28 Iee International Electronics & Engineering S.A. Capacitive pressure sensor
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
CN104271322B (zh) 2012-03-08 2016-09-21 品质制造有限公司 触敏机器人抓手
US9605952B2 (en) 2012-03-08 2017-03-28 Quality Manufacturing Inc. Touch sensitive robotic gripper
US8943895B2 (en) 2012-09-07 2015-02-03 Dynisco Instruments Llc Capacitive pressure sensor
US9103738B2 (en) 2012-09-07 2015-08-11 Dynisco Instruments Llc Capacitive pressure sensor with intrinsic temperature compensation
US8984952B2 (en) 2012-09-07 2015-03-24 Dynisco Instruments Llc Capacitive pressure sensor
US20180330886A1 (en) * 2015-01-15 2018-11-15 Stretchsense Limited Electromechanical device with improved connection
US10718359B2 (en) 2015-08-21 2020-07-21 Quality Manufacturing Inc. Devices and systems for producing rotational actuation
CN105784212B (zh) * 2016-03-25 2018-09-21 深圳安培龙科技股份有限公司 一种陶瓷电容式压力传感器及制备方法
JP6871721B2 (ja) * 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
CN110702301B (zh) * 2019-11-19 2024-11-01 川北真空科技(北京)有限公司 一种薄膜真空计
WO2022019167A1 (ja) * 2020-07-21 2022-01-27 株式会社村田製作所 圧力センサ構造、圧力センサ装置および圧力センサ構造の製造方法
CN112834110A (zh) * 2020-12-30 2021-05-25 季华实验室 一种高精度电容薄膜真空计
US11940336B2 (en) * 2021-03-26 2024-03-26 Sporian Microsystems, Inc. Driven-shield capacitive pressure sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI74350C (sv) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
SE459887B (sv) * 1987-02-12 1989-08-14 Hydrolab Ab Tryckgivare
FI872049A7 (sv) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion för användning vid tryckgivare.
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
DE4111118A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Mikromechanischer kapazitiver druckwandler
DE4136995C2 (de) * 1991-11-11 1996-08-08 Sensycon Ind Sensorsyst Kapazitiver Drucksensor
US5189591A (en) * 1992-06-12 1993-02-23 Allied-Signal Inc. Aluminosilicate glass pressure transducer

Also Published As

Publication number Publication date
JP3757984B2 (ja) 2006-03-22
EP0755507A1 (en) 1997-01-29
DE69521890T2 (de) 2004-08-12
SE506558C2 (sv) 1998-01-12
SE9401268D0 (sv) 1994-04-14
US5920015A (en) 1999-07-06
EP0755507B1 (en) 2001-07-25
JPH10501887A (ja) 1998-02-17
DE69521890D1 (de) 2001-08-30
WO1995028624A1 (en) 1995-10-26

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