SE9402247L - Sätt och anordning för tjockleksbedömning - Google Patents

Sätt och anordning för tjockleksbedömning

Info

Publication number
SE9402247L
SE9402247L SE9402247A SE9402247A SE9402247L SE 9402247 L SE9402247 L SE 9402247L SE 9402247 A SE9402247 A SE 9402247A SE 9402247 A SE9402247 A SE 9402247A SE 9402247 L SE9402247 L SE 9402247L
Authority
SE
Sweden
Prior art keywords
intensity
interval
curve
determined
average value
Prior art date
Application number
SE9402247A
Other languages
Unknown language ( )
English (en)
Other versions
SE9402247D0 (sv
SE502239C2 (sv
Inventor
Nicolas Hassbjer
Original Assignee
Hassbjer Micro System Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hassbjer Micro System Ab filed Critical Hassbjer Micro System Ab
Priority to SE9402247A priority Critical patent/SE502239C2/sv
Publication of SE9402247D0 publication Critical patent/SE9402247D0/sv
Priority to EP95850119A priority patent/EP0690288B1/en
Priority to DE69525879T priority patent/DE69525879T2/de
Priority to US08/495,079 priority patent/US5581354A/en
Publication of SE9402247L publication Critical patent/SE9402247L/sv
Publication of SE502239C2 publication Critical patent/SE502239C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SE9402247A 1994-06-27 1994-06-27 Sätt och anordning för tjockleksbedömning SE502239C2 (sv)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SE9402247A SE502239C2 (sv) 1994-06-27 1994-06-27 Sätt och anordning för tjockleksbedömning
EP95850119A EP0690288B1 (en) 1994-06-27 1995-06-26 Method and device for thickness assessment
DE69525879T DE69525879T2 (de) 1994-06-27 1995-06-26 Verfahren und Vorrichtung zur Dickebewertung
US08/495,079 US5581354A (en) 1994-06-27 1995-06-27 Method and device for thickness assessment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9402247A SE502239C2 (sv) 1994-06-27 1994-06-27 Sätt och anordning för tjockleksbedömning

Publications (3)

Publication Number Publication Date
SE9402247D0 SE9402247D0 (sv) 1994-06-27
SE9402247L true SE9402247L (sv) 1995-09-18
SE502239C2 SE502239C2 (sv) 1995-09-18

Family

ID=20394518

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9402247A SE502239C2 (sv) 1994-06-27 1994-06-27 Sätt och anordning för tjockleksbedömning

Country Status (4)

Country Link
US (1) US5581354A (sv)
EP (1) EP0690288B1 (sv)
DE (1) DE69525879T2 (sv)
SE (1) SE502239C2 (sv)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9616853D0 (en) 1996-08-10 1996-09-25 Vorgem Limited An improved thickness monitor
US5798837A (en) 1997-07-11 1998-08-25 Therma-Wave, Inc. Thin film optical measurement system and method with calibrating ellipsometer
US6278519B1 (en) 1998-01-29 2001-08-21 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US6241244B1 (en) * 1997-11-28 2001-06-05 Diebold, Incorporated Document sensor for currency recycling automated banking machine
US7387236B2 (en) 2001-10-09 2008-06-17 Delaware Capital Formation, Inc. Dispensing of currency
US6859119B2 (en) * 2002-12-26 2005-02-22 Motorola, Inc. Meso-microelectromechanical system package
US7233878B2 (en) * 2004-01-30 2007-06-19 Tokyo Electron Limited Method and system for monitoring component consumption
JP2008503415A (ja) * 2004-06-18 2008-02-07 ロイ ウィークス 紙葉処理装置
GB0724779D0 (en) * 2007-12-20 2008-01-30 Vanguard Sensor Technologies L Monitoring system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4095098A (en) * 1977-02-17 1978-06-13 Looper Norman G Ratiometric transparency meter
DE2735245A1 (de) * 1977-08-04 1979-02-15 Siemens Ag Anordnung zur erzeugung einer konstanten signalamplitude bei einem optoelektronischen abtastsystem
US4276480A (en) * 1979-09-28 1981-06-30 Accuray Corporation Sensor position independent material property determination using radiant energy
JPS5888610A (ja) * 1981-11-20 1983-05-26 Canon Inc 多重送検出装置
US4437332A (en) * 1982-09-30 1984-03-20 Krautkramer-Branson, Inc. Ultrasonic thickness measuring instrument
JPS62150109A (ja) * 1985-12-25 1987-07-04 Tohoku Ricoh Co Ltd 紙厚識別装置
US5138178A (en) * 1990-12-17 1992-08-11 Xerox Corporation Photoelectric paper basis weight sensor

Also Published As

Publication number Publication date
EP0690288A2 (en) 1996-01-03
DE69525879T2 (de) 2002-08-01
SE9402247D0 (sv) 1994-06-27
EP0690288B1 (en) 2002-03-20
EP0690288A3 (en) 1996-11-06
US5581354A (en) 1996-12-03
SE502239C2 (sv) 1995-09-18
DE69525879D1 (de) 2002-04-25

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Legal Events

Date Code Title Description
NUG Patent has lapsed