SG10201400597SA - Fully differential capacitive architecture for mems accelerometer - Google Patents

Fully differential capacitive architecture for mems accelerometer

Info

Publication number
SG10201400597SA
SG10201400597SA SG10201400597SA SG10201400597SA SG10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA
Authority
SG
Singapore
Prior art keywords
fully differential
mems accelerometer
differential capacitive
capacitive architecture
architecture
Prior art date
Application number
SG10201400597SA
Other languages
English (en)
Inventor
Ender Ocak Ilker
Chengliang Sun
Ming-Lin Tsai Julius
Nirodha Fernando Sanchitha
Original Assignee
Pgs Geophysical As
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pgs Geophysical As, Agency Science Tech & Res filed Critical Pgs Geophysical As
Publication of SG10201400597SA publication Critical patent/SG10201400597SA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/02—Generating seismic energy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/38—Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Geology (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Geophysics (AREA)
  • Oceanography (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
SG10201400597SA 2013-03-14 2014-03-12 Fully differential capacitive architecture for mems accelerometer SG10201400597SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361785851P 2013-03-14 2013-03-14
US14/190,673 US20140260617A1 (en) 2013-03-14 2014-02-26 Fully differential capacitive architecture for mems accelerometer

Publications (1)

Publication Number Publication Date
SG10201400597SA true SG10201400597SA (en) 2014-10-30

Family

ID=50241204

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201400597SA SG10201400597SA (en) 2013-03-14 2014-03-12 Fully differential capacitive architecture for mems accelerometer

Country Status (4)

Country Link
US (2) US20140260617A1 (fr)
EP (1) EP2778691B1 (fr)
CA (1) CA2844780C (fr)
SG (1) SG10201400597SA (fr)

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US20140260617A1 (en) 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
US10273147B2 (en) 2013-07-08 2019-04-30 Motion Engine Inc. MEMS components and method of wafer-level manufacturing thereof
WO2015013828A1 (fr) * 2013-08-02 2015-02-05 Motion Engine Inc. Capteur de mouvement à système microélectromécanique (mems) et procédé de fabrication
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US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (fr) 2014-06-02 2015-12-10 Motion Engine Inc. Capteur de mouvement mems à plusieurs masses
WO2016090467A1 (fr) 2014-12-09 2016-06-16 Motion Engine Inc. Magnétomètre de système micro électromécanique (mems) 3d et procédés associés
CA3220839A1 (fr) 2015-01-15 2016-07-21 Motion Engine Inc. Dispositif mems 3d a cavite hermetique
US20170370768A1 (en) * 2015-01-22 2017-12-28 The Board Of Trustees Of The University Of Illinois Micro-electro-mechanical-systems based acoustic emission sensors
US10393903B2 (en) * 2015-10-06 2019-08-27 Halliburton Energy Services, Inc. Acoustic logging tool utilizing fundamental resonance
US20210042395A1 (en) * 2019-08-08 2021-02-11 International Business Machines Corporation Connector wear correlation and prediction analysis
CN113603054B (zh) * 2021-07-26 2024-01-26 杭州士兰微电子股份有限公司 Mems传感器及其制备方法
CN113970655B (zh) * 2021-12-23 2022-04-12 杭州麦新敏微科技有限责任公司 一种mems加速度计及其形成方法

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Also Published As

Publication number Publication date
CA2844780C (fr) 2019-10-15
US20150293142A1 (en) 2015-10-15
US9506946B2 (en) 2016-11-29
EP2778691B1 (fr) 2015-11-18
EP2778691A1 (fr) 2014-09-17
CA2844780A1 (fr) 2014-09-14
US20140260617A1 (en) 2014-09-18

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