SG11202113064SA - Rotor support and vacuum pump with such a rotor support - Google Patents

Rotor support and vacuum pump with such a rotor support

Info

Publication number
SG11202113064SA
SG11202113064SA SG11202113064SA SG11202113064SA SG11202113064SA SG 11202113064S A SG11202113064S A SG 11202113064SA SG 11202113064S A SG11202113064S A SG 11202113064SA SG 11202113064S A SG11202113064S A SG 11202113064SA SG 11202113064S A SG11202113064S A SG 11202113064SA
Authority
SG
Singapore
Prior art keywords
insert
resilient
rotor support
damping member
axial
Prior art date
Application number
SG11202113064SA
Other languages
English (en)
Inventor
Nigel Paul Schofield
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of SG11202113064SA publication Critical patent/SG11202113064SA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D25/00—Component parts, details, or accessories, not provided for in, or of interest apart from, other groups
    • F01D25/16—Arrangement of bearings; Supporting or mounting bearings in casings
    • F01D25/162—Bearing supports
    • F01D25/164—Flexible supports; Vibration damping means associated with the bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/04—Ball or roller bearings, e.g. with resilient rolling bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/025—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant characterised by having a particular shape
    • F16F1/027—Planar, e.g. in sheet form; leaf springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
    • F16F3/08—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber
    • F16F3/10—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction
    • F16F3/12—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction the steel spring being in contact with the rubber spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Support Of The Bearing (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
SG11202113064SA 2019-06-10 2020-06-02 Rotor support and vacuum pump with such a rotor support SG11202113064SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1908277.5A GB2584676B (en) 2019-06-10 2019-06-10 Rotor support and vacuum pump with such a rotor support
PCT/EP2020/065222 WO2020249431A1 (en) 2019-06-10 2020-06-02 Rotor support and vacuum pump with such a rotor support

Publications (1)

Publication Number Publication Date
SG11202113064SA true SG11202113064SA (en) 2021-12-30

Family

ID=67386332

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202113064SA SG11202113064SA (en) 2019-06-10 2020-06-02 Rotor support and vacuum pump with such a rotor support

Country Status (7)

Country Link
US (1) US11885341B2 (de)
EP (1) EP3980655B1 (de)
JP (1) JP7573552B2 (de)
CN (1) CN113924418B (de)
GB (1) GB2584676B (de)
SG (1) SG11202113064SA (de)
WO (1) WO2020249431A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3653884B1 (de) * 2019-10-14 2021-12-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2604878A (en) * 2021-03-15 2022-09-21 Edwards Ltd Damper for a vacuum pump
US11832728B2 (en) * 2021-08-24 2023-12-05 Sleep Number Corporation Controlling vibration transmission within inflation assemblies
GB2625939A (en) * 2022-02-16 2024-07-03 Edwards Ltd A pump, a bearing assembly for a pump and a method of assembling the bearing assembly
GB2617843B (en) * 2022-04-20 2024-05-08 Edwards Ltd Vacuum pump damping arrangements

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310679B2 (de) 1973-01-12 1978-04-15
JPH021493U (de) * 1988-06-14 1990-01-08
US4971458A (en) * 1989-10-04 1990-11-20 United Technologies Corporation Fluid damper and spring
DE19709205A1 (de) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe mit Wellenlagerung
GB2415019A (en) * 2004-06-07 2005-12-14 Boc Group Plc A supporting arrangement for a roller bearing
DE602004024052D1 (de) * 2004-07-20 2009-12-24 Varian Spa Ringförmiger Laufstützkörper für Wälzlagern
GB0509190D0 (en) 2005-05-05 2005-06-15 Boc Group Plc Vacuum pump
GB0511877D0 (en) * 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump
DE102006037187A1 (de) * 2006-08-09 2008-02-21 Pfeiffer Vacuum Gmbh Anordnung zur Lagerung einer Welle einer Vakuumpumpe
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
GB0701609D0 (en) * 2007-01-29 2007-03-07 Boc Group Plc Vacuum pump
CN101608637B (zh) * 2009-07-23 2011-09-14 北京中科科仪技术发展有限责任公司 一种分子泵轴承组件
JP5563525B2 (ja) * 2011-06-14 2014-07-30 日立オートモティブシステムズ株式会社 ウォータポンプ
JP5919745B2 (ja) * 2011-11-15 2016-05-18 株式会社島津製作所 真空ポンプ
JP6295773B2 (ja) 2014-03-27 2018-03-20 株式会社島津製作所 真空ポンプ
US10001169B2 (en) * 2016-10-25 2018-06-19 Schaeffler Technologies AG & Co. KG Prong type cage for a double row roller bearing assembly
GB2557676A (en) * 2016-12-15 2018-06-27 Edwards Ltd Bearing support for a vacuum pump
GB201706179D0 (en) * 2017-04-19 2017-05-31 Rolls Royce Plc Bearing arrangement

Also Published As

Publication number Publication date
WO2020249431A1 (en) 2020-12-17
US20220235778A1 (en) 2022-07-28
EP3980655A1 (de) 2022-04-13
EP3980655B1 (de) 2023-08-09
CN113924418B (zh) 2024-05-07
GB201908277D0 (en) 2019-07-24
GB2584676B (en) 2021-11-10
JP2022536165A (ja) 2022-08-12
CN113924418A (zh) 2022-01-11
JP7573552B2 (ja) 2024-10-25
GB2584676A (en) 2020-12-16
US11885341B2 (en) 2024-01-30

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