Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
  • B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
  • B61B13/00—Other railway systems
  • B61B13/04—Monorail systems
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
  • B65G1/02—Storage devices
  • B65G1/04—Storage devices mechanical
  • B65G1/0457—Storage devices mechanical with suspended load carriers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
  • B65G1/02—Storage devices
  • B65G1/04—Storage devices mechanical
  • B65G1/0485—Check-in, check-out devices
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B66—HOISTING; LIFTING; HAULING
  • B66B—ELEVATORS; ESCALATORS OR MOVING WALKWAYS
  • B66B11/00—Main component parts of lifts in, or associated with, buildings or other structures
  • B66B11/04—Driving gear ; Details thereof, e.g. seals
  • B66B11/06—Driving gear ; Details thereof, e.g. seals with hoisting rope or cable positively attached to a winding drum
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
  • H10P72/3402—Mechanical parts of transfer devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
  • H10P72/3408—Docking arrangements
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
  • B65G2201/02—Articles
  • B65G2201/0297—Wafer cassette
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
  • B65G2207/20—Earthquake protection
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S414/00—Material or article handling
  • Y10S414/135—Associated with semiconductor wafer handling
  • Y10S414/14—Wafer cassette transporting

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Transportation (AREA)
• Civil Engineering (AREA)
• Structural Engineering (AREA)
• Warehouses Or Storage Devices (AREA)
• Control And Safety Of Cranes (AREA)
• Handcart (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=40552007

Family Applications (1)

Country Status (8)

Families Citing this family (3)

Family Cites Families (9)

• 2008
  • 2008-02-20 JP JP2008039177A patent/JP2009196748A/ja active Pending
  • 2008-10-30 TW TW097141779A patent/TWI438124B/zh not_active IP Right Cessation
  • 2008-12-15 KR KR1020080127191A patent/KR20090090258A/ko not_active Ceased
• 2009
  • 2009-02-17 SG SG200901123-0A patent/SG155135A1/en unknown
  • 2009-02-18 US US12/379,292 patent/US7828164B2/en not_active Expired - Fee Related
  • 2009-02-18 EP EP09002276A patent/EP2093795B1/fr not_active Not-in-force
  • 2009-02-18 CN CN2009100093170A patent/CN101513958B/zh not_active Expired - Fee Related
  • 2009-02-18 DE DE602009001016T patent/DE602009001016D1/de active Active

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