SG52594A1 - Process for passivating treatment of piping system for high-purity gas - Google Patents
Process for passivating treatment of piping system for high-purity gasInfo
- Publication number
- SG52594A1 SG52594A1 SG1996006535A SG1996006535A SG52594A1 SG 52594 A1 SG52594 A1 SG 52594A1 SG 1996006535 A SG1996006535 A SG 1996006535A SG 1996006535 A SG1996006535 A SG 1996006535A SG 52594 A1 SG52594 A1 SG 52594A1
- Authority
- SG
- Singapore
- Prior art keywords
- piping system
- purity gas
- passivating treatment
- passivating
- treatment
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/12—Oxidising using elemental oxygen or ozone
- C23C8/14—Oxidising of ferrous surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Treatment Of Metals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8005327A JP2987754B2 (ja) | 1996-01-17 | 1996-01-17 | 高純度ガスの配管路での不動態化処理方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG52594A1 true SG52594A1 (en) | 1998-09-28 |
Family
ID=11608157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG1996006535A SG52594A1 (en) | 1996-01-17 | 1996-03-20 | Process for passivating treatment of piping system for high-purity gas |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5746841A (ja) |
| JP (1) | JP2987754B2 (ja) |
| DE (1) | DE19610322B4 (ja) |
| SG (1) | SG52594A1 (ja) |
| TW (1) | TW403792B (ja) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3403294B2 (ja) * | 1996-09-10 | 2003-05-06 | 忠弘 大見 | 圧力検出器 |
| JP4125406B2 (ja) * | 1997-08-08 | 2008-07-30 | 忠弘 大見 | フッ化不働態処理が施された溶接部材の溶接方法および再フッ化不働態処理方法ならびに溶接部品 |
| JPH11104881A (ja) * | 1997-10-03 | 1999-04-20 | Tadahiro Omi | 溶接部に酸化クロム不働態膜を形成する溶接技術、及び溶接時に用いるガスの供給システム |
| DE10065924A1 (de) * | 2000-11-27 | 2002-09-26 | Alstom Switzerland Ltd | Schutzschicht für Bauteile einer Dampfkraftanlage |
| JP2009079667A (ja) * | 2007-09-26 | 2009-04-16 | Tokyo Electron Ltd | ガス供給装置及び半導体製造装置 |
| JP5616591B2 (ja) * | 2008-06-20 | 2014-10-29 | 株式会社日立国際電気 | 半導体装置の製造方法及び基板処理装置 |
| JP5873231B2 (ja) * | 2009-10-23 | 2016-03-01 | 大陽日酸株式会社 | 太陽電池用セレン化水素混合ガスの供給装置及び供給方法 |
| JP5891609B2 (ja) * | 2011-05-30 | 2016-03-23 | 株式会社明電舎 | 不動態化処理方法 |
| JP2014109059A (ja) * | 2012-12-03 | 2014-06-12 | Iwatani Internatl Corp | 耐水素脆性金属素材および耐水素脆性金属素材の表面処理方法 |
| JP6552206B2 (ja) * | 2015-02-02 | 2019-07-31 | 東京エレクトロン株式会社 | 排気管無害化方法及び成膜装置 |
| JP6052357B2 (ja) * | 2015-08-28 | 2016-12-27 | 株式会社明電舎 | 不動態化処理方法 |
| JP6936714B2 (ja) | 2017-11-30 | 2021-09-22 | 岩谷産業株式会社 | 被処理対象物の内壁面の処理方法 |
| CN117026237B (zh) * | 2023-08-11 | 2025-09-16 | 河南铱钶环保科技有限公司 | 臭氧水处理系统中通过控制初始浓度的预膜缓蚀的工艺 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1027202A (fr) * | 1949-11-05 | 1953-05-08 | Procédé pour l'obtention de revêtements protecteurs de très liaute résistance | |
| NL131125C (ja) * | 1959-06-04 | |||
| US4636266A (en) * | 1984-06-06 | 1987-01-13 | Radiological & Chemical Technology, Inc. | Reactor pipe treatment |
| JPS6124463A (ja) * | 1984-07-13 | 1986-02-03 | Matsushita Electric Ind Co Ltd | 記録装置 |
| JP2768952B2 (ja) * | 1988-08-04 | 1998-06-25 | 忠弘 大見 | 金属酸化処理装置及び金属酸化処理方法 |
| JPH0254751A (ja) * | 1988-08-17 | 1990-02-23 | Tadahiro Omi | 金属酸化処理装置及び金属酸化処理方法並びに金属装入方法 |
| IT1251524B (it) * | 1991-03-18 | 1995-05-16 | Vincenzo Lagana | Metodo per la passivazione delle superfici metalliche interessate da condizioni e agenti promotori di corrosione |
| JP2918385B2 (ja) * | 1992-04-13 | 1999-07-12 | 日立造船株式会社 | ステンレス鋼部材の表面処理方法 |
| JP3379070B2 (ja) * | 1992-10-05 | 2003-02-17 | 忠弘 大見 | クロム酸化物層を表面に有する酸化不動態膜の形成方法 |
| JP2925876B2 (ja) * | 1993-02-08 | 1999-07-28 | 日立造船株式会社 | 金属表面酸化処理方法 |
-
1996
- 1996-01-17 JP JP8005327A patent/JP2987754B2/ja not_active Expired - Lifetime
- 1996-03-05 TW TW085102705A patent/TW403792B/zh not_active IP Right Cessation
- 1996-03-08 US US08/612,644 patent/US5746841A/en not_active Expired - Lifetime
- 1996-03-15 DE DE19610322A patent/DE19610322B4/de not_active Expired - Lifetime
- 1996-03-20 SG SG1996006535A patent/SG52594A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US5746841A (en) | 1998-05-05 |
| JP2987754B2 (ja) | 1999-12-06 |
| JPH09195031A (ja) | 1997-07-29 |
| DE19610322B4 (de) | 2005-10-13 |
| TW403792B (en) | 2000-09-01 |
| DE19610322A1 (de) | 1997-07-24 |
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