SG68652A1 - Coating apparatus and coating method - Google Patents

Coating apparatus and coating method

Info

Publication number
SG68652A1
SG68652A1 SG1998000474A SG1998000474A SG68652A1 SG 68652 A1 SG68652 A1 SG 68652A1 SG 1998000474 A SG1998000474 A SG 1998000474A SG 1998000474 A SG1998000474 A SG 1998000474A SG 68652 A1 SG68652 A1 SG 68652A1
Authority
SG
Singapore
Prior art keywords
coating
coating method
coating apparatus
Prior art date
Application number
SG1998000474A
Other languages
English (en)
Inventor
Akihiro Fujimoto
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of SG68652A1 publication Critical patent/SG68652A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
SG1998000474A 1997-03-03 1998-03-02 Coating apparatus and coating method SG68652A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4772397 1997-03-03

Publications (1)

Publication Number Publication Date
SG68652A1 true SG68652A1 (en) 1999-11-16

Family

ID=12783256

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998000474A SG68652A1 (en) 1997-03-03 1998-03-02 Coating apparatus and coating method

Country Status (6)

Country Link
US (1) US6056998A (fr)
EP (1) EP0863538B1 (fr)
KR (1) KR100560263B1 (fr)
DE (1) DE69814710T2 (fr)
SG (1) SG68652A1 (fr)
TW (1) TW405170B (fr)

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US8292598B2 (en) 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
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US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
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KR101243509B1 (ko) 2005-12-02 2013-03-20 엔테그리스, 아이엔씨. 펌프에서의 압력 보상을 위한 시스템 및 방법
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
EP1958039B9 (fr) 2005-12-02 2011-09-07 Entegris, Inc. Systemes d'entree/sortie, procedes et dispositifs pour assurer l'interface avec un controleur de pompe
JP5302002B2 (ja) 2005-12-02 2013-10-02 インテグリス・インコーポレーテッド Ｏリング無し薄型取付部品および取付部品アセンブリ
JP5345853B2 (ja) 2005-12-05 2013-11-20 インテグリス・インコーポレーテッド ポンプのための誤差容積システムおよび方法
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MX351261B (es) 2012-06-01 2017-10-06 Surmodics Inc Aparato y método para recubrir catéteres con globo.
US9827401B2 (en) 2012-06-01 2017-11-28 Surmodics, Inc. Apparatus and methods for coating medical devices
US11090468B2 (en) 2012-10-25 2021-08-17 Surmodics, Inc. Apparatus and methods for coating medical devices
US9228448B2 (en) * 2013-09-20 2016-01-05 United Technologies Corporation Background radiation measurement system
US10655619B2 (en) * 2014-10-23 2020-05-19 Tokyo Electron Limited Pump, pump device, and liquid supply system
US10518199B2 (en) * 2016-09-08 2019-12-31 Tokyo Electron Limited Treatment solution supply apparatus
CN108262183A (zh) * 2016-12-30 2018-07-10 梁韵琳 粉碎输送机
CN106862010A (zh) * 2017-03-24 2017-06-20 苏州威格尔纳米科技有限公司 一种旋转式狭缝涂布模头及方法
WO2020112816A1 (fr) 2018-11-29 2020-06-04 Surmodics, Inc. Appareil et méthodes de revêtement de dispositifs médicaux
US11819590B2 (en) 2019-05-13 2023-11-21 Surmodics, Inc. Apparatus and methods for coating medical devices
CN112831757B (zh) * 2020-12-31 2022-09-20 深圳市瑞泓塑胶五金镀膜技术有限公司 一种不间断式全自动真空镀膜生产线
US12496612B2 (en) 2021-01-08 2025-12-16 Surmodics, Inc. Coating application system and methods for coating rotatable medical devices
JP7578535B2 (ja) * 2021-04-15 2024-11-06 株式会社コガネイ 液体供給装置

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Also Published As

Publication number Publication date
KR19980079831A (ko) 1998-11-25
DE69814710D1 (de) 2003-06-26
EP0863538B1 (fr) 2003-05-21
US6056998A (en) 2000-05-02
DE69814710T2 (de) 2004-03-18
EP0863538A3 (fr) 2000-09-06
KR100560263B1 (ko) 2006-07-06
EP0863538A2 (fr) 1998-09-09
TW405170B (en) 2000-09-11

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