SG72912A1 - Apparatus for treatment of exhaust gases containing hydrogen - Google Patents

Apparatus for treatment of exhaust gases containing hydrogen

Info

Publication number
SG72912A1
SG72912A1 SG1998005980A SG1998005980A SG72912A1 SG 72912 A1 SG72912 A1 SG 72912A1 SG 1998005980 A SG1998005980 A SG 1998005980A SG 1998005980 A SG1998005980 A SG 1998005980A SG 72912 A1 SG72912 A1 SG 72912A1
Authority
SG
Singapore
Prior art keywords
treatment
exhaust gases
containing hydrogen
gases containing
hydrogen
Prior art date
Application number
SG1998005980A
Other languages
English (en)
Inventor
Yoshikazu Tanabe
Yukio Minami
Koji Kawada
Nobukazu Ikeda
Akihiro Morimoto
Keiji Hirao
Original Assignee
Fujikin Kk
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Hitachi Ltd filed Critical Fujikin Kk
Publication of SG72912A1 publication Critical patent/SG72912A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
SG1998005980A 1998-01-06 1998-12-30 Apparatus for treatment of exhaust gases containing hydrogen SG72912A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00088498A JP3563950B2 (ja) 1998-01-06 1998-01-06 水素含有排ガス処理装置

Publications (1)

Publication Number Publication Date
SG72912A1 true SG72912A1 (en) 2000-05-23

Family

ID=11486109

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998005980A SG72912A1 (en) 1998-01-06 1998-12-30 Apparatus for treatment of exhaust gases containing hydrogen

Country Status (9)

Country Link
US (1) US6274098B1 (fr)
EP (1) EP0928631B1 (fr)
JP (1) JP3563950B2 (fr)
KR (1) KR100289986B1 (fr)
CA (1) CA2258632C (fr)
DE (1) DE69925648T2 (fr)
IL (1) IL127760A (fr)
SG (1) SG72912A1 (fr)
TW (1) TW457119B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI227531B (en) * 1997-03-05 2005-02-01 Hitachi Ltd Manufacturing method of semiconductor integrated circuit device
CN1279582C (zh) * 1999-08-06 2006-10-11 株式会社富士金 水分发生用反应炉
WO2001094254A1 (fr) * 2000-06-05 2001-12-13 Fujikin Incorporated Reacteur de production d'humidite
KR100777672B1 (ko) * 2005-12-20 2007-11-28 코아텍주식회사 수소가스 처리용 스크러버 시스템
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
KR101670461B1 (ko) * 2015-06-11 2016-11-01 주식회사 테라세미콘 수소 포함 배기가스 처리장치
WO2017032404A1 (fr) * 2015-08-24 2017-03-02 Applied Materials, Inc. Appareil de dépôt par pulvérisation sous vide et son procédé
CN105999997B (zh) * 2016-06-29 2018-09-25 上海立得催化剂有限公司 间断、小流量、低轻烃组分浓度的含轻烃尾气的处理方法
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR102450632B1 (ko) * 2022-03-17 2022-10-06 (주)진솔루션 반도체 제조 수소 공정의 배기 수소 처리장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1692916A (en) * 1927-01-04 1928-11-27 Woodruff Asa Allen Ejector
US4008050A (en) * 1975-06-11 1977-02-15 Betz Erwin C Apparatus for combining oxygen and hydrogen
US4119706A (en) * 1976-10-12 1978-10-10 Engelhard Minerals & Chemicals Corporation Method of catalytically recombining radiolytic hydrogen and radiolytic oxygen
US4178760A (en) * 1976-12-02 1979-12-18 Filterwerk Mann & Hummel Gmbh Filter dust ejector and check valve arrangement in exhaust system of internal combustion engine
JPS5749895A (en) 1980-09-10 1982-03-24 Hitachi Ltd Catalyst structure of recombiner
DE4319973A1 (de) * 1993-06-17 1995-02-16 Forschungszentrum Juelich Gmbh Katalysatoren zur Beseitigung von Wasserstoff aus einer Wasserstoff, Luft und Dampf enthaltenden Atmosphäre
DE19548235C2 (de) * 1995-12-22 1999-02-25 Forschungszentrum Juelich Gmbh Vorrichtung zur Entfernung von Wasserstoff aus einem Gasgemisch und Anwendung der Vorrichtung
EP1911722A2 (fr) * 1996-01-29 2008-04-16 FUJIKIN Inc. Procédé pour la génération d'humidité, réacteur pour la génération d'humidité, procédé pour contrôler la température d'un réacteur pour la génération d'humidité et procédé pour former une couche de catalyseur revêtu de platine
US5907076A (en) * 1996-12-31 1999-05-25 Exxon Chemical Patents Inc. Process for selectively separating hydrogen, or both hydrogen and carbon monoxide from olefinic hydrocarbons
JP3808975B2 (ja) * 1997-06-17 2006-08-16 忠弘 大見 半導体製造用水分の発生方法

Also Published As

Publication number Publication date
EP0928631B1 (fr) 2005-06-08
TW457119B (en) 2001-10-01
DE69925648T2 (de) 2006-03-16
EP0928631A2 (fr) 1999-07-14
CA2258632A1 (fr) 1999-07-06
JPH11192429A (ja) 1999-07-21
JP3563950B2 (ja) 2004-09-08
KR100289986B1 (ko) 2001-05-15
DE69925648D1 (de) 2005-07-14
IL127760A (en) 2003-06-24
CA2258632C (fr) 2002-07-16
EP0928631A3 (fr) 1999-09-29
IL127760A0 (en) 1999-10-28
US6274098B1 (en) 2001-08-14
KR19990067729A (ko) 1999-08-25

Similar Documents

Publication Publication Date Title
GB2367495B (en) Method and apparatus for purifying oxygen containing gas
SG75989A1 (en) Process and apparatus for cleaning exhaust gas
PL331582A1 (en) Method of and apparatus for treating flue gas
PL329723A1 (en) Method of purifying hydrogen sulphide containing gases
PL333978A1 (en) Apparatus for exchanging gases by diffusion and method of using such apparatus
EP0909576A4 (fr) Appareil d'epuration de gaz d'echappement
EP1142621A4 (fr) Dispositif de traitement des gaz d'echappement
PL310034A1 (en) Exhaust gas treating apparatus
EP1206960A4 (fr) Procede et appareil de traitement des gaz d'echappement
GB9913331D0 (en) Treatment of exhaust gas
PL350521A1 (en) Method for desulphurization of gases
GB9821947D0 (en) Purification of exhaust gases
EP1064042A4 (fr) Appareil d'apport de gaz respirable
EP0882487A4 (fr) Appareil de desulfuration de gaz d'echappement
EP1129775A4 (fr) Procede et appareil pour traiter des gaz residuaires contenant des composes fluores
GB2331810B (en) Method and apparatus for detection of concentration of hydrogen peroxide vapor
GB2298590B (en) Method of and apparatus for purifying exhaust gas
AU2342097A (en) Method and apparatus for purifying hydrogen gas
PL317700A1 (en) Exhaust gas treating apparatus
GB9917018D0 (en) Gas adsorption process and apparatus
IL127760A (en) Apparatus for treatment of exhaust gas containing hydrogen
EP1140266A4 (fr) Appareil de distribution de gaz respirable
PL310910A1 (en) Apparatus for wet desilphurisation of exhaust gas
EP0929078A4 (fr) Appareil de traitement d'air contenant de l'hydrogene
SG73648A1 (en) Abatement system for clf3 containing exhaust gases