SU321165A1 - Electrostatic charge particle analyzer - Google Patents

Description

(54) ELECTRIC UTILITY ANALYZER CHARGED The invention relates to devices for: measuring spectral distributions of low-energy charged particle fluxes. One of the urgent problems in modern experimental physics is to increase the sensitivity of the apparatus for measuring small fluxes of charged particles with an energy from 0.01 to 10 ~ 5 O keV. Usually, spherical electrostatic analyzers and discrete particle detectors — secondary electron multipliers or channel electron multipliers — are used for such measurements. In such devices, the minimum measurable density of the particle flux Φ is associated with the minimum N of the detector count rate with the following expression: 4Tl ssi / in

PARTICLES} - analyzer transmittance factor. Electrostatic analyzers of charged particles, coctosmuae from off are known, which are condensate, detector and power supply. Analyzers currently used are characterized by a small field angle S, as a result of which, in order to determine the total particle flux, I fall. From different sides per unit area, it is necessary either to know the function of the angular distribution of particles in the stream, or to rotate the object or instrument in space. j that is not always possible. Thus, I at N 1-1 O mip / s,. 2 cm sr, JUfl wO, 25 is the minimum measured density of the flux of particles F in the range from 1 O to 1 O / cm. It can be seen from the above data that in order to increase the sensitivity of measurements, all other things being equal, it is necessary to increase the analyzer’s geometrical factor as much as possible, i.e., § and S2 Ove-J

jmHiuaaTb the field angle of view of the analyzer aa due to the increase in the gap (between the electrodes or their size is impractical because the increase in the gap while maintaining the average radius of the particle trajectory in the analyzer when

leads to an increase in the ratio of D-- and

respectively, to the deterioration of the energy resolution, ab. , is proportional to the D value of magnitude, and an increase in the radius fjg leads to a sharp increase in the size of the device, which is unacceptable in a number of experiments. In addition, discrete de; The tectors have an entrance window of a small area (S, 01–1 cm) and a narrow radiation pattern into space, so that with an increase in the area of the entrance window and field angle of view of the analyzer, it is difficult to stack the detector and analyzer.

The purpose of the invention is to increase the sensitivity and accuracy of measurements of the spectral distributions of low-energy charged particles by increasing the area of the entrance window and the field angle of view of the analyzer while maintaining the high energy resolution of the device. This is achieved by the fact that each analyzer electrode is made in the form of a connected half-Jurassic and torus, the electrodes are located concentrically relative to each other, with the outer hemisphere and part of the outer torus made of a grid.

The device shown in the drawing. The analyzer consists of a deflecting capacitor in the form of outer and inner hemispheres 1 and outer and inner tori 2, detector 3 and source of deflecting voltages 4. The outer hemisphere is made in the form of a grid of electrically conductive material to pass particles E analyzer regardless of the direction of flow in space. The inner hemisphere is made of solid conductive material. The outer torus electrode from the hemisphere to the inflection point A is also a grid to ensure the unified directional flow of particles, and after the topsi inflection is made of a solid semiconductor material, which is in electric contact with the grid. The internal electrode of the torus, which is in electrical contact with the internal hemisphere, tio of inflection point A is made of solid semiconductor material, and after the inflection point before the exit window, of electrically conductive material. As the conductive material of the electrodes such can be used. : materials with high electrical conductivity, such as silver, gold, nickel, tungsten, etc., and as a semiconductor material, either high resistivity materials or various semiconductor films deposited on an electrically insulating surface made of Teflon, vinyl plastic, glass, and t. and ....

In order to carry out an energy analysis of particle fluxes, for example, electrons, it is advisable to ground the outer grid and inflection points (points with minimal curvature) of the toroidal part, and to send a positive potential to the inner sphere and to the outer output ring of the toroidal part of the analyzer. To ensure the conditions of particle rotation and the constancy of the electrical characteristics of the analyzer, the toroidal plates arranged concentrically are designed in such a way that tJipR 3

; : g COtlSt, and ve shchiny (L &

Ufjo4

equal to the same values for the spherical part of the analyzer (ft -. average

curvature of the toroidal plates; d. the gap between the plates, which for the toroidal part of the analyzer is taken between two points of the plates, the radii of curvature in which they lie on the same straight line, I Yy - the potential difference between the points).

; Thus, the device makes electrical contact of all elements of the external electrode and, accordingly, all elements of the internal electrode of the analyzer, eliminates the effect of edge drills that occur during the sequential joining of several analyzers

 a ditch with different feeding potentials, and in the most favorable way

5, a spherical analyzer of a torus and a discrete particle detector is struck. In addition, you can use any detector, including the collector one. In the case of

registration of positively charged particles (protons, ions, etc.) is necessary

I pvpolpolyusovka under the power supply voltage. 5 I If you need to push a narrowly focused

Systbms should be replaced with a solid conductor surface.

Subject invention

An electrostatic charged particle analyzer consisting of a deflecting capacitor detector and a power source, characterized in that, in order to increase the sensitivity and accuracy of measurements, the electrodes are deflected. capacitor are made in the form of parts of spheres and tori, the outer hemisphere is electrically connected to the outer one, to the inner

electrodes are located 4che-.

rum.

ski relative to each other in the outside electrode hemisphere and part of the torus from n

, luspheres to the inflection point

water in the form of a grid, and tea; torus from the inflection point to the feed point

the deflecting voltage is made of a semi-conductor material; in the internal electrode, part of the torus from the hemisphere to the inflection point is made of semiconductor

the other parts are from npoaoj of the protruding material, and the radii of curvature of the torpedgertotrode of the torus have a dependence. but proportional napoliostp

gap analyzer.

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