SU746830A1 - Step-by-step displacement gear - Google Patents

Description

one

The invention relates to positioning devices in microelectronics, it can be used in other devices of two-coordinate stepping movement.

A device for linear movement in two coordinates is known, comprising two guide rails of ferromagnetic material, the upper surface of which has a transverse direction tooth, a traverse of ferromagnetic material, the surface of which has a transverse direction tooth, three moving elements, each of which has two parallel rows magnets. Each row contains several individual magnets. Moving elements move along guides and along a traverse on an air cushion without mechanical joints 1,

The prototype is a magnetic device for moving f containing a base, the upper surface of which carries a grid of non-magnetic material, inside which there are areas of ferromagnetic material, a carriage having dBA of a series of magnets

of two perpendicular axes, control circuit 2.

The device has two magnets in each row of the carriage with bidirectional currents in each coil and acts as a four-phase.

Both of these devices have relatively low speed and low reliability.

The purpose of the invention is to increase the reliability and reliability of the device.

15

The goal is achieved by the fact that in the mechanism of the stepping movement, containing a ferromagnetic gear base, on which is installed: a carriage with

20 of it, with U-shaped magnetic conductors and permanent magnets, and a control winding, the permanent magnet is made in the form of a rectangular rod.

25 we are / established between two marketed pipelines; on which the control windings are laid, as well as the fact that the permanent magnet is made of rare-earth material.

Claims (1)

30.-e FIG. 1 shows a general view of the device; FIG. 2 shows the physics of the operation of the device. The magnetic movement arrangement comprises a ferromagnetic toothed base 1 and a carriage 2, the base 1 is filled in the form of a sheet of ferromagnetic material with indicative grooves 3 on the outer surface filled with a nonmagnetic material. The grooves located along axis X and Y form a marker, inside of which they have, with yiacTKH (tooth) 4, a ferromagnetic material. The carriage 2 contains two parallel rows of electromagnets 5 for movement along the X axis and two parallel rows of electromagnets 6 for movement along the Y axis. Each carriage electromagnet. (, 2) has if control winding two U-shaped magnetic cores 8 and a constant magnet in the form of a rod. rectangular formula 9, Electromagnet A has four faces a, a {, a. f electromagnet B - b, b2, and 6j. The distance between the central lines of the faces a and a, and alj, b, b, b11 and is equal to P (Kt) f where K is any number and P is the period of the gear structure ferromagnetic fluxes of 6 ss 1 or 1, Electromagnet B cMeiusH in terms of conversion to electromagnetic A by an amount equal to P (Kt i). The device works as follows. Compressed air is supplied to the carriage 2 in order to create an air cushion. The force of attraction created by the magnetically coupling between carriage 2 and the ferromagnetic one. a gear base 1, and the repulsive force created by air pressure, create a stabilized gap between the base and the carriage. The carriage moves along the ferromagnetic gear base along the axis X by electromagnets 5 as follows: B: winding: electromagnet A on. (4ig 2a), a current is applied, as a result of which the magnetic P & C increases with 3: Dow yyu & gHooHs nx ai and ac, and the magnetic flux in facets x and aij decreases to zero. Faces a and a, are installed against the teeth of the base 1, .. When current is applied to the winding of the elec, pc 4agyita B (Fig. 26) a, the current is turned off in the winding of the electromagnet A, the Ith current flow, separated by 9 rods, switches to face b and b and the carriage 2 moves to the right when the current is fed into the winding of the electromagnet A in another direction (FIG. 2c) and the current is turned off into the winding. Ke of electromagnet B, the magnetic flux created by rod 9, switches to face a and a and f and carriage 2 moves to the right another 1/4 R. When current is fed into the winding of electromagnet B in the other direction (FIG. 2d) and current is turned off in the winding the electromagnet A, the magnetic flux generated by the rod 9 switches to the face 6j. and b, and the carriage 2 moves to the right another 1/4 Pm, d. To move cell 2 along the x-axis to the left, the switching order of the control windings changes. Moving the carriage 2 along the ferromagnetic toothed base 1 along the axis Y is carried out by an electromagnet 6 (Fig. 1) similar to moving along the axis X. The location of the rod of the rectangular form 9 between two U-shaped magnetic cores 8 (Fig 2) reduces the weight of the carriage 2 (FIG. 1) by 40–45% when using permanent magnets made of rare-earth materials, which leads to an improvement in the dynamic parameters of the stepping mechanism. Such an arrangement of the permanent magnet 9 leads to the fact that the center of gravity of the carriage 2 lies below (Fig. 1), and therefore the reliability and speed of the stepper mechanism are improved, and the carriage vibrations during movement are reduced. The location of the permanent magnet 9 of rare earth elements between the two U-shaped magnetic cores 8, as in the prototype, allows reducing the weight of the carriage by no more than 15%, Claim 1, The jogging mechanism containing the ferromagnetic gear base on which the carriage is mounted with magnetic cores and permanent magnets, and control windings, and so on with the fact that, in order to increase reliability and frequency of the mechanism, the permanent magnet is made in the form of a rod A rectangular formula, installed between two U-shaped magnetic boards, on which the control windings are located, 2, Mekho (niem pop, 1, about t and ch and y with a permanent magnet in rare-earth materials. Sources of information taken into account in the examination of 1, US Patent .№ 3837075, CL, 318-38, published, 15,01,73. 2, naiPeHT USA 3457482, L., published 22.07.69Х prototype) w S, LJlIlTlJlJ4Jl ri, 3)