TH79242A - Laser processing method - Google Patents

Abstract

DC60 (10/07/56) provides a method for laser processing that can cut the processed object with high precision. The laser processing method of this invention projects a flat object processed in method 1 with a laser beam L while arranging a convergence point P within object 1. Initially, a first modification region 71, which will serve as the starting point for cutting, is formed along the line of the first cutting line 5a in object 1. Thereafter, a second modification region 72, which will serve as the starting point for cutting, is formed along the line of the second cutting line 5b that intersects with the cutting line 5a in such a way that it intersects at least part of the modification region 71. Then, a fourth modification region 73, which will serve as the starting point for cutting, is formed along the line of the second cutting line 5b that intersects with the cutting line 5a in such a way that it intersects at least part of the modification region 71. A cut is formed along the cutting path 5b. A third modification region 74, the origin for cutting, is formed along the cutting path 5a between the modification region 71 and the entrance face 1a of the object 1 . The area where the laser light L is incident on is such that it intersects at least a portion of the modification region 73. A laser processing method of the present invention irradiates a flat processed object 1 with laser light L while arranging a convergence point P within the object 1 . Initially, a first modification region 71, the origin for cutting, is formed along the first cutting path 5a in the object 1 . A second modification region 72, the origin for cutting, is formed along the second cutting path 5b intersecting with the cutting path 5a in such a way that it intersects at least a portion of the modification region 71 . A fourth modification region 73, the origin for cutting, is A cut is formed along the cutting line 5b, after which a third modification region 74 that will be the starting point for the cut is formed along the cutting line 5a between modification region 71 and the entrance face 1a of object 1 where the laser light L is incident, so as to intersect at least part of modification region 73.

Claims (6)

1. Laser processing methods that include; The first step of projecting a flat object processed with laser light while aligning the dot within the object. To form the first modified area to be the starting point for Cutting is raised inside the object along the cutting line at one of the objects. And formation of the second modification area This will be the starting point for cutting up inside the object along the line of the second cut that intersects. With the first cut line in such a way that the second modification area intersects with at least part of the First modified area; and The second step of projecting an object with a laser beam while aligning the dot within the object. After the first step To form a third modified area that will serve as the starting point for cutting. Along the line of the first cut within the object, between the first modification area and the incoming surface of Subjects where the laser beam hits And forming the fourth modified area that will be the starting point for The cut comes up along the second cutting line within the object between the second modification area and the surface. Inward in such a way that the fourth modification area intersects at least part of the third modification area. 2. Laser processing method according to claim 1, where the second modified area is formed. Formed after the formation of the first modification area in the first step; And where the fourth modified region was formed after the second modification of the third modification area. 3. Laser processing method according to claim 1, where the second modified area is formed. Formed after the formation of the first modification area in the first step; And where the third modified region was formed after the fourth modification region formed in the second step. 4. Laser processing method according to claim 1, where the surface information is in place. One was recorded when forming the first modified area. And the third modified area has been formed The image is formed while using the information of the surface in one place; And where the information of the surface is facing the second The second modification area and the fourth modification area were documented while the second-face surface information was applied. 5. Laser processing method according to claim 1, where the first to fourth modification area. Minimum one area Has been created by a number of rows of aligned modified regions In the direction according to the thickness of the object 6. Laser processing method according to claim 1, where at least one set of area First and second modifications And the third and fourth modified regions have been formed by rows in the number of Equal to the modified region, aligned in a direction according to the thickness of the object.