TR200000711T2 - Koruyucu bir katman sistemine sahip bir gereç. - Google Patents

Koruyucu bir katman sistemine sahip bir gereç.

Info

Publication number
TR200000711T2
TR200000711T2 TR2000/00711T TR200000711T TR200000711T2 TR 200000711 T2 TR200000711 T2 TR 200000711T2 TR 2000/00711 T TR2000/00711 T TR 2000/00711T TR 200000711 T TR200000711 T TR 200000711T TR 200000711 T2 TR200000711 T2 TR 200000711T2
Authority
TR
Turkey
Prior art keywords
layer system
tool
layer
mex
theta
Prior art date
Application number
TR2000/00711T
Other languages
English (en)
Inventor
Braendle Hans
Shima Nobuhiko
Original Assignee
Balzers Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26318702&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TR200000711(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Balzers Aktiengesellschaft filed Critical Balzers Aktiengesellschaft
Priority claimed from US08/928,652 external-priority patent/US6071560A/en
Publication of TR200000711T2 publication Critical patent/TR200000711T2/tr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Materials For Medical Uses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Drilling Tools (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Auxiliary Devices For Machine Tools (AREA)

Abstract

Bir gereç gövdesi ile asinmaya dirençli bir katman sistemine sahip olan ve söz konusu katmanin en azindan MeX'den olusan bir katmana sahip oldugu bir gereç önerilmektedir. Me titanyum ve alüminyum içerirken X bir nitrojen veya karbondur. Gerecin gereç gövdesi yüksek hizli çelik (HSS) ya da yapistirilmis karbitten olusurken kati karbit freze ucu ve kati karbit bilye uçlu freze degildir. Bu arada MeX katmaninda Q1 katsayis 2 yönetiminin kullanilmasi ile malzemenin X isinlari dagiliminda sirasiyla (200) ve (111) düzlüklerine atifta bulunan dagilma yogunlugu I(200) ile I(111) arasindaki oran olarak tanimlanirken degeri >1 olacak sekilde seçilir. Öte yandan her ikisi de iyi tanimlanmis donanim ve düzenek ile ölçüldügünde I(200), ortalama gürültü deger yogunlugunun en az yirmi katindadir.
TR2000/00711T 1997-09-12 1997-09-12 Koruyucu bir katman sistemine sahip bir gereç. TR200000711T2 (tr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/IB1997/001089 WO1999014391A1 (en) 1997-09-12 1997-09-12 Tool with protective layer system
US08/928,652 US6071560A (en) 1997-09-12 1997-09-12 Tool with tool body and protective layer system

Publications (1)

Publication Number Publication Date
TR200000711T2 true TR200000711T2 (tr) 2000-07-21

Family

ID=26318702

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2000/00711T TR200000711T2 (tr) 1997-09-12 1997-09-12 Koruyucu bir katman sistemine sahip bir gereç.

Country Status (13)

Country Link
EP (1) EP1021584B1 (tr)
JP (1) JP2001516654A (tr)
AT (1) ATE255173T1 (tr)
AU (1) AU4028197A (tr)
BR (1) BR9714868A (tr)
CA (1) CA2303029C (tr)
DE (1) DE69726466T2 (tr)
ES (1) ES2210561T3 (tr)
PL (1) PL187810B1 (tr)
PT (1) PT1021584E (tr)
SK (1) SK287473B6 (tr)
TR (1) TR200000711T2 (tr)
WO (1) WO1999014391A1 (tr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002331406A (ja) * 2001-05-11 2002-11-19 Hitachi Tool Engineering Ltd 耐摩耗皮膜被覆工具
CA2531028C (en) 2003-06-27 2009-07-14 Sumitomo Electric Industries, Ltd. Surface-coated high hardness material for tool
DE102004057403B4 (de) * 2004-11-26 2007-09-06 Frank Fischer Crimp-Stempel, Crimp-Vorrichtung und ein Verfahren zur Herstellung hierfür
KR101046520B1 (ko) 2007-09-07 2011-07-04 어플라이드 머티어리얼스, 인코포레이티드 내부 챔버 상의 부산물 막 증착을 제어하기 위한 ｐｅｃｖｄ 시스템에서의 소스 가스 흐름 경로 제어
DE102008019202A1 (de) * 2008-04-17 2009-10-22 Kennametal Inc. Beschichtungsverfahren , Werkstück oder Werkzeug und dessen Verwendung
US8277958B2 (en) 2009-10-02 2012-10-02 Kennametal Inc. Aluminum titanium nitride coating and method of making same
US8409702B2 (en) 2011-02-07 2013-04-02 Kennametal Inc. Cubic aluminum titanium nitride coating and method of making same
US9103036B2 (en) 2013-03-15 2015-08-11 Kennametal Inc. Hard coatings comprising cubic phase forming compositions
DE102013107375A1 (de) * 2013-07-11 2015-01-15 Walter Ag Verfahren und Vorrichtung zur Beschichtung von Schneidwerkzeugen mit stabförmiger Grundform
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
EP3722031A1 (en) * 2014-03-18 2020-10-14 Hitachi Metals, Ltd. Coated cutting tool and method for producing the same
JP6233708B2 (ja) * 2014-03-20 2017-11-22 三菱マテリアル株式会社 表面被覆切削工具

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991005075A1 (en) * 1989-09-29 1991-04-18 Sumitomo Electric Industries, Ltd. Surface-coated hard member for cutting and abrasion-resistant tools
US5700551A (en) * 1994-09-16 1997-12-23 Sumitomo Electric Industries, Ltd. Layered film made of ultrafine particles and a hard composite material for tools possessing the film
JP3016703B2 (ja) * 1995-01-31 2000-03-06 日立ツール株式会社 被覆硬質部材

Also Published As

Publication number Publication date
AU4028197A (en) 1999-04-05
DE69726466T2 (de) 2004-09-09
EP1021584A1 (en) 2000-07-26
SK3462000A3 (en) 2001-05-10
BR9714868A (pt) 2000-07-25
WO1999014391A1 (en) 1999-03-25
PL339208A1 (en) 2000-12-04
SK287473B6 (sk) 2010-11-08
PL187810B1 (pl) 2004-10-29
CA2303029A1 (en) 1999-03-25
ES2210561T3 (es) 2004-07-01
EP1021584B1 (en) 2003-11-26
JP2001516654A (ja) 2001-10-02
DE69726466D1 (de) 2004-01-08
PT1021584E (pt) 2004-04-30
CA2303029C (en) 2007-08-14
ATE255173T1 (de) 2003-12-15

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