TR200401637T4 - Helyum geri kazanma yöntemi - Google Patents

Helyum geri kazanma yöntemi

Info

Publication number
TR200401637T4
TR200401637T4 TR2004/01637T TR200401637T TR200401637T4 TR 200401637 T4 TR200401637 T4 TR 200401637T4 TR 2004/01637 T TR2004/01637 T TR 2004/01637T TR 200401637 T TR200401637 T TR 200401637T TR 200401637 T4 TR200401637 T4 TR 200401637T4
Authority
TR
Turkey
Prior art keywords
recovery method
helium recovery
treatment
exhaust gas
gas
Prior art date
Application number
TR2004/01637T
Other languages
English (en)
Inventor
Wenchang Ji
Shirley Arthur Irving
Original Assignee
The Boc Group, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Boc Group, Inc. filed Critical The Boc Group, Inc.
Publication of TR200401637T4 publication Critical patent/TR200401637T4/tr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0743—Purification ; Separation of gaseous or dissolved chlorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/102—Nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/11—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0031—Helium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Gas Separation By Absorption (AREA)
  • Drying Of Gases (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Furnace Details (AREA)

Abstract

Mevcut bulus optik liflerin üretiminde konsolidasyon (katilastirma) firinindan helyumun geri kazanilmasina iliskin bir yöntemi açiklamaktadir.
TR2004/01637T 2000-01-14 2001-01-08 Helyum geri kazanma yöntemi TR200401637T4 (tr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48331400A 2000-01-14 2000-01-14

Publications (1)

Publication Number Publication Date
TR200401637T4 true TR200401637T4 (tr) 2004-08-23

Family

ID=23919583

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2004/01637T TR200401637T4 (tr) 2000-01-14 2001-01-08 Helyum geri kazanma yöntemi

Country Status (8)

Country Link
US (1) US20020178913A1 (tr)
EP (1) EP1116696B1 (tr)
JP (1) JP2001233607A (tr)
AT (1) ATE270255T1 (tr)
AU (1) AU7185900A (tr)
DE (1) DE60104025T2 (tr)
DK (1) DK1116696T3 (tr)
TR (1) TR200401637T4 (tr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7261763B2 (en) * 2003-07-17 2007-08-28 The Boc Group, Inc. Method for the recovery and recycle of helium and chlorine
US7780764B2 (en) * 2008-06-27 2010-08-24 Praxair Technology, Inc. Methods and systems for helium recovery
CN101973689B (zh) * 2010-09-30 2012-10-03 天壕节能科技股份有限公司 调节玻璃窑窑压的烟气系统
US9649590B2 (en) 2014-01-13 2017-05-16 Versum Materials Us, Llc System and method for gas recovery and reuse
GB2588908B (en) * 2019-11-13 2022-04-20 Edwards Ltd Inert gas recovery from a semiconductor manufacturing tool
CN111302617B (zh) * 2020-04-27 2022-04-08 黄宏琪 一种气相法制备光纤预制棒的尾气循环利用系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261223A (ja) * 1985-05-13 1986-11-19 Furukawa Electric Co Ltd:The 多孔質ガラス母材用透明ガラス化炉
US5344480A (en) * 1992-05-05 1994-09-06 Praxair Technology, Inc. Pressurizing with and recovering helium
US5632803A (en) * 1994-10-21 1997-05-27 Nitrotec Corporation Enhanced helium recovery
AU714363B2 (en) * 1996-06-24 1999-12-23 Corning Incorporated Helium recycling for optical fiber manufacturing
ID17537A (id) * 1996-07-26 1998-01-08 Praxair Technology Inc Perolehan kembali helium bagi manupaktur serat optis
JPH10316443A (ja) * 1997-05-19 1998-12-02 Furukawa Electric Co Ltd:The 多孔質ガラス母材のガラス化装置

Also Published As

Publication number Publication date
AU7185900A (en) 2001-07-19
DE60104025T2 (de) 2005-08-25
DE60104025D1 (de) 2004-08-05
DK1116696T3 (da) 2004-09-06
JP2001233607A (ja) 2001-08-28
US20020178913A1 (en) 2002-12-05
ATE270255T1 (de) 2004-07-15
EP1116696A1 (en) 2001-07-18
EP1116696B1 (en) 2004-06-30

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