TR201901754T4 - Lazer optik koruması. - Google Patents

Lazer optik koruması. Download PDF

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Publication number
TR201901754T4
TR201901754T4 TR2019/01754T TR201901754T TR201901754T4 TR 201901754 T4 TR201901754 T4 TR 201901754T4 TR 2019/01754 T TR2019/01754 T TR 2019/01754T TR 201901754 T TR201901754 T TR 201901754T TR 201901754 T4 TR201901754 T4 TR 201901754T4
Authority
TR
Turkey
Prior art keywords
component
laser optical
optical protection
expendable
damage
Prior art date
Application number
TR2019/01754T
Other languages
English (en)
Inventor
w murray Michael
j lima Melvin
Original Assignee
Novanta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novanta Corp filed Critical Novanta Corp
Publication of TR201901754T4 publication Critical patent/TR201901754T4/tr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/007—Pressure-resistant sight glasses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H01S3/027—Constructional details of solid state lasers, e.g. housings or mountings comprising a special atmosphere inside the housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Laser Surgery Devices (AREA)

Abstract

Tarifname ve çizimler, bir feda edilebilir optik bileşen konseptinden ve bu feda edilebilir bileşende cereyan eden bu bileşenin delinmesi gibi ehemmiyetli bir hasara dair bir basınç göstergesini esas alarak lazerin otomatik kapatılmasından istifade edilerek, lazerler ya da diğer yüksek optik güç kaynaklarının dış kirlilik kaynaklarından ötürü cereyan eden hasardan korunması için bir aygıt ve usulü sunmaktadır.
TR2019/01754T 2013-03-15 2014-03-17 Lazer optik koruması. TR201901754T4 (tr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/838,128 US9031110B2 (en) 2013-03-15 2013-03-15 Laser optic protection

Publications (1)

Publication Number Publication Date
TR201901754T4 true TR201901754T4 (tr) 2019-03-21

Family

ID=50729788

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2019/01754T TR201901754T4 (tr) 2013-03-15 2014-03-17 Lazer optik koruması.

Country Status (8)

Country Link
US (1) US9031110B2 (tr)
EP (1) EP2973893B1 (tr)
JP (1) JP6220046B2 (tr)
KR (1) KR101766571B1 (tr)
CN (1) CN105229874B (tr)
ES (1) ES2717669T3 (tr)
TR (1) TR201901754T4 (tr)
WO (1) WO2014145525A1 (tr)

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JP6251956B2 (ja) * 2013-01-22 2017-12-27 セイコーエプソン株式会社 光学素子収納用パッケージ、光学フィルターデバイス、光学モジュール、および電子機器
CN104966981B (zh) * 2015-07-14 2018-03-13 京东方科技集团股份有限公司 激光器
CN105068211B (zh) * 2015-09-24 2017-07-07 江苏卓远激光科技有限公司 一种激光器反射镜片安装座的限位结构
CN105527686B (zh) * 2016-02-03 2018-03-02 上海仪万光电科技有限公司 一种保护激光扩束镜的装置
JP6808459B2 (ja) * 2016-11-29 2021-01-06 Dmg森精機株式会社 レーザ加工装置
RU2019120098A (ru) * 2016-12-29 2021-01-29 Айпиджи Фотоникс Корпорэйшн Высокотемпературная оптическая молекулярная геттерная система, предохраняющая от загрязнений
LU100538B1 (de) * 2017-12-11 2019-06-12 Highyag Lasertechnologie Gmbh Vorrichtung zum Schutz von Laseroptiken
FR3077686B1 (fr) * 2018-02-05 2020-09-25 Commissariat Energie Atomique Element d'un systeme optique, pour recevoir un fluide fonctionnel sous pression.
JP2019165087A (ja) * 2018-03-19 2019-09-26 株式会社リコー レーザ装置、点火装置および内燃機関
US10865962B2 (en) 2018-06-12 2020-12-15 Stmicroelectronics (Grenoble 2) Sas Protection mechanism for light source
FR3085465B1 (fr) 2018-08-31 2021-05-21 St Microelectronics Grenoble 2 Mecanisme de protection pour source lumineuse
CN210153731U (zh) * 2018-06-12 2020-03-17 意法半导体(格勒诺布尔2)公司 安装在基板上的光源的外壳以及电子设备
US11211772B2 (en) 2018-06-12 2021-12-28 Stmicroelectronics (Grenoble 2) Sas Protection mechanism for light source
DE102018131887B3 (de) * 2018-09-28 2020-02-13 Scansonic Mi Gmbh Laserbearbeitungsvorrichtung mit Optikschutz und Verfahren zum Schutz der Optik einer Laserbearbeitungsvorrichtung
WO2020126387A2 (en) * 2018-12-18 2020-06-25 Asml Netherlands B.V. Sacrifical device for protecting an optical element in a path of a high-power laser beam
CN113287234B (zh) * 2019-02-20 2023-08-01 极光先进雷射株式会社 气体激光装置、气体激光装置的激光的出射方法、以及电子器件的制造方法
DE102019111531B3 (de) * 2019-05-03 2020-10-22 Trimble Jena Gmbh Vermessungsinstrument und Spiegelanordnung
FR3101928B1 (fr) * 2019-10-14 2023-04-21 Saint Gobain système d’étanchéité d’une interface
CN113872025A (zh) * 2020-06-30 2021-12-31 北京科益虹源光电技术有限公司 准分子激光器放电腔的窗片结构及准分子激光器
US12459058B2 (en) 2021-09-24 2025-11-04 Ii-Vi Delaware, Inc. Laser processing head having contamination resistance
US12244115B2 (en) * 2022-12-16 2025-03-04 Fei Company Laser device with safety interlock and scientific instrument for use with the same
EP4632970A1 (en) * 2024-04-10 2025-10-15 TRUMPF Lasersystems for Semiconductor Manufacturing SE Optical amplifier for amplifying laser radiation, lithography system and method for amplifying laser radiation in an optical amplifier
EP4697096A1 (en) * 2024-08-16 2026-02-18 ASML Netherlands B.V. Laser system and laser generation method
DE102024124395A1 (de) * 2024-08-27 2026-03-05 TRUMPF Laser SE Druckkammer, Verfahren zum Betreiben einer solchen Druckkammer und Steuervorrichtung

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Publication number Priority date Publication date Assignee Title
US4439862A (en) 1981-02-25 1984-03-27 Cooper Lasersonics Rigid laser mirror mount and protection assembly
JPS60123080A (ja) 1983-12-06 1985-07-01 Hitachi Ltd ガスレ−ザ装置
US4575610A (en) * 1984-03-12 1986-03-11 Cincinnati Milacron Inc. Laser shielding device
JPH01218081A (ja) 1988-02-26 1989-08-31 Fanuc Ltd レーザ発振装置
US5359176A (en) 1993-04-02 1994-10-25 International Business Machines Corporation Optics and environmental protection device for laser processing applications
AU7390796A (en) 1995-10-06 1997-04-28 Robert D. Herpst Protective window assembly for a laser beam generating apparatus
US5898522A (en) 1995-10-06 1999-04-27 Herpst; Robert D. Protective window assembly and method of using the same for a laser beam generating apparatus
JPH09122962A (ja) * 1995-10-30 1997-05-13 Amada Co Ltd レーザ加工ヘッド
JPH1084149A (ja) * 1996-09-06 1998-03-31 Toshiba Corp 炭酸ガスレーザ装置
JP3789999B2 (ja) * 1997-01-20 2006-06-28 株式会社アマダ レーザ加工装置
US6240110B1 (en) * 1997-06-04 2001-05-29 Cymer, Inc. Line narrowed F2 laser with etalon based output coupler
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Also Published As

Publication number Publication date
WO2014145525A9 (en) 2014-11-20
KR101766571B1 (ko) 2017-08-08
JP2016520994A (ja) 2016-07-14
JP6220046B2 (ja) 2017-10-25
US9031110B2 (en) 2015-05-12
US20140269794A1 (en) 2014-09-18
ES2717669T3 (es) 2019-06-24
EP2973893A1 (en) 2016-01-20
KR20150139527A (ko) 2015-12-11
EP2973893B1 (en) 2018-12-26
WO2014145525A1 (en) 2014-09-18
CN105229874B (zh) 2019-08-27
CN105229874A (zh) 2016-01-06

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