TW200418152A - Semiconductor package positionable in encapsulating process and method for fabricating the same - Google Patents
Semiconductor package positionable in encapsulating process and method for fabricating the same Download PDFInfo
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- TW200418152A TW200418152A TW092105566A TW92105566A TW200418152A TW 200418152 A TW200418152 A TW 200418152A TW 092105566 A TW092105566 A TW 092105566A TW 92105566 A TW92105566 A TW 92105566A TW 200418152 A TW200418152 A TW 200418152A
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- semiconductor package
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
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- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Description
200418152 五、發明說明α) [發明所屬之技術領域] 本發明係指一種可於封膠製程中定位之半導體封裝件 及其製法,尤指一種可避免該半導體封裝件於該封膠製程 中受損之半導體封裝件及其製法 [先前技術] 多媒體卡(Multi-Media Card, MMC)封裝件係為一小 型積體電路(I n t e g r a t e d C i r c u i t)裝置,其係配置有例如 多媒體晶片、可抹寫可程式化唯讀記憶體"EPR0Mn或電子 式可抹寫可程式化唯讀記憶體n EEPR0JT等記憶體晶片及控 制晶片等,以發揮儲存及處理有^數位圖片或影像資料等 多媒體資訊之功能,其中,該記憶體晶片及/或控制晶片 係載接至一晶片承載件(C h i p C a r r i e r )上,藉之以使該晶 片電性連接至外界裝置而發揮晶片之功能。 習.知晶片承載件之種類包括有基板、TAB膠片及導線 架三種,但基板與膠片在製造過程中需輔以精密之線路佈 局,且其單價較導線架為高,故若以此為晶片承載件則將 導致封裝成本的提高,例如美國專利第6,0 4 0,6 2 2號案所 揭示以基板為承載件之多媒體卡封裝件,即有成本之問題 (基板單價往往佔整體成本之一半以上),因此,我國專利 公告號第4 8 4,2 2 2號即使用一種以導線架為晶片承載件之 多媒體卡封裝件,以解決上述問題,其係如第1 0圖所示, 使用具有一晶片座1 1 (Die Pad)及多數位於該晶片座1 1一 側之導腳1 2的導線架1 0,各導腳1 2係由一外導腳段1 3及一 内導腳段1 5所構成,且令該外導腳段1 3與内導腳段1 5間形200418152 V. Description of the invention α) [Technical field to which the invention belongs] The present invention refers to a semiconductor package that can be positioned in a sealing process and a method for manufacturing the same, and particularly to a semiconductor package that can be protected from the sealing process. Damaged semiconductor package and its manufacturing method [prior art] Multi-Media Card (MMC) package is a small integrated circuit (Ic) device, which is configured with, for example, a multimedia chip, rewritable Programmable read-only memory " EPR0Mn or electronic rewritable programmable read-only memory n EEPR0JT and other memory chips and control chips, etc., to play the role of storing and processing multimedia information with ^ digital pictures or image data The function, wherein the memory chip and / or the control chip are mounted on a chip carrier (Chip Carrier), so that the chip is electrically connected to an external device to perform the function of the chip. I know that there are three types of wafer carriers: substrate, TAB film and lead frame, but the substrate and film need to be supplemented with precise circuit layout during the manufacturing process, and the unit price is higher than the lead frame, so if this is a wafer Carriers will lead to increased packaging costs. For example, the U.S. Patent No. 6, 0 0, 62, 2 discloses a multimedia card package with a substrate as a carrier, which has a cost problem (the unit price of the substrate often accounts for the overall cost). More than one and a half), therefore, China's Patent Publication No. 4 8 4, 2 2 2 uses a multimedia card package with a lead frame as a chip carrier to solve the above problem, which is shown in FIG. 10 A lead frame 10 having a die pad 11 and a plurality of guide pins 12 located on one side of the die pad 11 is used. Each guide pin 12 is composed of an outer guide pin segment 13 and an inner lead. The guide leg section 15 is formed, and the outer guide leg section 13 and the inner guide leg section 15 are shaped between
17153.ptd 第9頁 200418152 i、發明說明(2) 成一兩度差;以至少一半導體晶片i 6黏接至該晶片座i 1上 並藉多數銲線1 7 (如金線)電性連接至該内導腳段1 5 ;接 著]進行一模壓作業,以形成一封裝膠體i 8 (Encapsulant)包覆該晶片1 6、銲線1 7、晶片座} i及導腳 -1 2,並令該外導腳段1 3之一表面丄3 〇外露出該封裝膠體 1 8 ’以作為輸入/輸出端而與外界形成電性連接。 此一半導體封裝件雖可降低晶片承載件的成本,惟卻 衍生出其他製程問題,例如其整體封裝結構係架構於該導 線架1 0上且令導線架1 0為該封裝膠體丨8所包覆,此將使導 秦架1 0與封裝膠體1 8之材料用量相對增加,同時,於形成 封裝膠體1 8之模壓作業中,該導線架丨〇欲外露之外導腳段 1 3往往無法為模具所穩固夾持,而使用以形成該封裝膠體 1 8之樹脂材料極易溢膠(F 1 a s h )至該外導腳段1 3之表面1 3 0 上,進而降低其與外界之電性連接品質,而若欲去除溢 膠,則需額外進行一去膠(Def lash)作業,將形成不必要 之製程成本,難以量產;因此,習知上另提供一種以導線 架為晶片承載件之半導體封裝件製法,以解決前述問題, 所製成之成品係如第11圖所示,以具有一晶片座2 1及多數 與該晶片座2 1間隔有一預定距離之導腳2 2的導線架2 0,並 馨一第一封裝膠體2 8包覆接置於該晶片座2 1上之晶片2 6、 銲線2 7及該導腳2 2之内導腳段2 3,而形成一封裝單元 2 0 0 ;復藉一射出(I n j e c t i ο η)成型之封膠製程,形成一第 二封裝膠體2 9包覆該封裝單元2 0 0及該導腳2 2之外導腳段 2 4,以令該外導腳段2 4末端之外露端部2 5的一表面2 5 0外17153.ptd Page 9 200418152 i. Description of the invention (2) The difference is one or two degrees; at least one semiconductor wafer i 6 is bonded to the wafer holder i 1 and most of the bonding wires 17 (such as gold wires) are electrically connected. To the inner guide leg section 15; then] a molding operation is performed to form an encapsulant i 8 (Encapsulant) covering the wafer 16, the bonding wire 17, the wafer holder} i and the guide pin 12, and A surface 丄 30 of the outer guide leg section 13 is exposed to expose the encapsulant gel 18 'as an input / output terminal to form an electrical connection with the outside. Although this semiconductor package can reduce the cost of the chip carrier, it also generates other process problems. For example, its overall packaging structure is structured on the lead frame 10 and the lead frame 10 is covered by the packaging gel. 8 This will increase the relative amount of material used in the lead frame 10 and the packaging gel 18. At the same time, in the molding operation of forming the packaging gel 18, the lead frame 13 is often unable to be exposed. For the stable clamping of the mold, the resin material used to form the encapsulation gel 18 easily spills glue (F 1 ash) onto the surface 1 3 0 of the outer guide leg section 13, thereby reducing its electrical connection with the outside world. Quality, and if you want to remove the overflow glue, you need to perform an additional Def lash operation, which will result in unnecessary process costs and it is difficult to mass-produce. Therefore, it is customary to provide a lead frame for chip loading. The method of manufacturing a semiconductor package to solve the foregoing problems is shown in FIG. 11. The finished product is provided with a wafer holder 21 and a plurality of guide pins 2 2 at a predetermined distance from the wafer holder 21. Lead frame 20, and the first seal The gel 2 8 covers the wafer 26 placed on the wafer holder 21, the bonding wire 27, and the inner guide leg section 23 of the guide leg 22 to form a packaging unit 2 0; (I njecti ο η) forming a sealing process to form a second encapsulation gel 2 9 to cover the encapsulation unit 2 0 0 and the guide leg 2 2 and the outer guide leg segment 2 4 to make the outer guide leg segment 2 4Except the surface of the end 2 5 outside the end 2 5 0
17153. ptd 第10頁 200418152 五、發明說明(3) 露出該第二封裝膠體2 9,並藉該外露之表面2 5 0作為該半 導體封裝件的輸入/輸出端;此一製法即係藉由該形成第 二封裝膠體之射出成型封膠製程,包覆習知之薄型小外型 封裝件(TSOP, Thin Small Outline Package)以符合多媒 體卡等封裝件之需求,解決前述導線架與膠體用料過多、 導線架外露端難以定位與溢膠等習知問題。 因此,此製法確可改善習知封裝件製法之缺點,降低 生產成本並滿足產業界的量產需求,惟此製法在實際生產 上仍有其製程缺陷,難以達至最佳良率,並將產生多餘之 製程步驟,此係由於該射出成型封膠步驟需以如第1 2圖所 示之上、下各四根頂針2 9 5 ( E j e c t〇r P i η ),以將該封裝 單元2 0 0夾持定位於該上、下射出模2 9 1、2 9 2所形成之模 穴2 9 3 (Cavi ty)中,惟此一頂針設計將使該封裝單元200 之表面.於射出脫模步驟後,於該頂針2 9 5先前的頂抵位置 留下如第1 3 A、 1 3 B圖所示之凹洞2 9 6 (第1 3 B圖係為第1 3 A 圖之下視圖),此一凹洞區域2 9 6與頂針先前之位列區域 2 9 8均需再額外以樹脂填滿,以維持成品之外觀,而此一 額外充填動作不但將增加製程之複雜性,同時該凹洞區域 2 9 6亦極可能出現未完全充填之現象而形成孔洞(V 〇 i d ), 並於高溫時破壞該封裝件結構;此外,以頂針2 9 5夾持該 封裝單元2 0 0雖可發揮定位牢固之功效,惟若進行射出成 型封膠之時間過長,該頂針2 9 5亦極可能於該封裝膠體内 留下一殘餘應力(Residual Stress),進而於該封裝件使 用一段時間後造成該封裝膠體内之裂痕或缺陷,實為此製17153. ptd Page 10 200418152 V. Description of the invention (3) Exposing the second packaging gel 29, and borrowing the exposed surface 2 50 as the input / output terminal of the semiconductor package; this manufacturing method is implemented by The injection molding process for forming the second package colloid covers the conventional thin small outline package (TSOP) to meet the needs of packages such as multimedia cards, and solves the aforementioned excessive use of lead frames and colloids. 2. The exposed ends of the lead frame are difficult to locate and have problems with glue overflow. Therefore, this method can indeed improve the shortcomings of the conventional package method, reduce production costs and meet the mass production needs of the industry. However, this method still has its process defects in actual production, and it is difficult to achieve the best yield. There are redundant process steps. This is because the injection molding sealing step needs to use four upper pins 2 9 5 (E ject〇r P i η) as shown in Figure 12 to the package unit. 2 0 0 is clamped and positioned in the mold cavity 2 9 3 (Cavi ty) formed by the upper and lower injection molds 2 9 1 and 2 9 2. However, a thimble design will make the surface of the packaging unit 200. After the demolding step, a cavity 2 9 6 as shown in Figures 1 3 A and 1 3 B is left at the previous pushing position of the ejector pin 2 9 5 (Figure 1 3 B is shown in Figure 1 3 A Bottom view), this recessed area 2 9 6 and the previous position area 2 9 8 of the thimble need to be filled with additional resin to maintain the appearance of the finished product, and this additional filling action will not only increase the complexity of the process At the same time, the cavity area 2 9 6 is also very likely to have a phenomenon of incomplete filling to form a hole (V oid), which will break at high temperatures. The structure of the package is damaged. In addition, holding the packaging unit 2000 with a thimble 2 95 can play a role of firm positioning, but if the time for injection molding is too long, the thimble 2 9 5 is also very likely A residual stress is left in the encapsulant, which causes cracks or defects in the encapsulant after using the package for a period of time.
17153.ptd 第11頁 200418152 S、發明說明(4) 法的一大限制。 -因此,如何提供一種可於封膠製程中定位、同時可降 低於該封膠製程中之受損可能的半導體封裝件及其製法, 以&決前述問題而提昇產品之良率及可靠性,確為此相關 —研發領域所亟待解決之問題。 [發明内容] 本發明之一目的即在提供一種可於封膠製程中牢固定 位之半導體封裝件及其製法。 本發明之另一目的即在提供一種半導體封裝件及其製 ||,以避免該半導體封裝件於封¥製程中受損。 本發明之又一目的即在提供一種半導體封裝件及其製 法,以避免該半導體封裝件之内部於封膠製程中形成孔 洞。 本發明之再一目的即在提供一種半導體封裝件及其製 法,以避免該半導體封裝件之内部於封膠製程中產生殘餘 應力。 為達前述及其他目的,本發明所提供之可於封膠製程 中定位的半導體封裝件製法,係包括下列步驟:製備一具 有至少一種類型之多數導腳及一晶片預置區的導線架,該 •腳係由至少一内導腳段與外導腳段所構成;接置至少一 晶片於該導線架之晶片預置區上,並電性連接該晶片至該 導腳;以一第一封裝膠體包覆該晶片、晶片預置區及該導 腳之内導腳段而形成一封裝單元,並令該封裝單元相對應 之第一表面與第二表面上分別形成有至少一第一突出部與17153.ptd Page 11 200418152 S. Description of Invention (4) A major limitation of the law. -Therefore, how to provide a semiconductor package which can be positioned in the sealing process and can reduce the possibility of damage in the sealing process, and a manufacturing method thereof, so as to improve the yield and reliability of the product by solving the aforementioned problems. It is indeed related to this-an urgent problem in the field of research and development. [Summary of the Invention] An object of the present invention is to provide a semiconductor package which can be firmly fixed in a sealing process and a manufacturing method thereof. Another object of the present invention is to provide a semiconductor package and its manufacturing |, so as to prevent the semiconductor package from being damaged during the sealing process. Another object of the present invention is to provide a semiconductor package and a method for manufacturing the same, so as to prevent the inside of the semiconductor package from forming holes in the sealing process. Another object of the present invention is to provide a semiconductor package and a method for manufacturing the same, so as to prevent the internal stress of the semiconductor package during the sealing process. In order to achieve the foregoing and other objectives, a method for manufacturing a semiconductor package capable of being positioned in an encapsulation process provided by the present invention includes the following steps: preparing a lead frame having at least one type of majority of pins and a chip preset area, The foot is composed of at least an inner guide leg section and an outer guide leg section; at least one chip is connected to a chip preset area of the lead frame, and the chip is electrically connected to the guide pin; a first The encapsulation gel covers the chip, the chip pre-set area and the inner guide leg of the guide pin to form a package unit, and at least one first protrusion is formed on the first surface and the second surface corresponding to the package unit, respectively. Ministry and
17153. ptd 第12頁 200418152 五 、發明說明 (5) 至 少 — 第 二 突 出 部 y 以 及 進 行 一 封 膠 製 程 y 以 令 該 封 裝 ΐ7〇 早 元 之 第 突 出 部 與 第 -- 突 出 部 分 別 頂 抵 住 上 、 下 模 具 而 將 ‘ 該 封 裝 單 元 定 位 於 該 上 Λ 下 模 具 所 形 成 之 模 穴 中 使 一 第 。 二 封 裝 膠 體 包 覆 該 封 裝 單 元 並 令 該 外 導 腳 段 之 一 表 面 外 路 出 該 第 二 封 裝 膠 體 〇 而 經 由 前 述 製 法 所 製 成 之 半 導 體 封 裝 件 1 係 包 括 ; 具 有 至 少 一 種 類 型 之 多 數 導 腳 及 — 晶 片 預 置 區 的 導 線 架 5 該 導 腳 係 由 至 少 内 導 腳 段 與 外 導 腳 段 所 構 成 y 至 少 一 晶 片 係 接 置 於 該 導 線 架 之 晶 片 預 置 區 上 並 .電 性 連 接 該 晶 片 至 該 導 腳 一 第 一 封 裝 膠 體 用 以 包 覆 該 晶 片 Λ 晶 片 預 置 區 及 該 導 腳 之 内 導 腳 段 而 形 成 一 封 裝 單 元 且 該 封 裝 單 元 相 對 應 之 第 一 表 面 與 第 二 表 面 上 係 分 別 形 成 有 至 少 一 第 一 突 出 部 與 至 少 一 第 二 突 出 部 7 並 令 該 第 •-- 突 出 部 與 第 二 突 * 部 分 別 具 有 第 一 高 度 與 第 二 度 y 以 及 一 第 二 封 裝 膠 體 係 用 以 包 覆 該 封 裝 單 元 而 令 該 外 導 腳 段 之 一 表 面 外 露 出 該 第 二 封 裝 膠 體 並 使 分 別 包 覆 於 該 第 一 突 出 部 與 第 — 突 出 部 周 圍 的 第 二 封 裝 膠 體 厚 度 不 大 於 該 第 一 度 與 第 二 南 度 〇 前 述 用 以 形 成 該 第 二 封 裝 膠 體 之 封 膠 製 程 係 可 為 一 射 出 成 型 封 膠 製 程 或 模 壓 製 程 而 該 第 一 、 第 ---- 突 出 部 則 係 藉 由 用 以 形 成 該 第 一 封 裝 膠 體 之 模 壓 製 程 而 分 別 形 成 於 該 第 一 Λ 第 --- 表 面 上 且 為 使 該 第 一 突 出 部 與 第 -- 突 出 部 定 位 該 封 裝 早 元 之 效 果 達 至 曰 取 佳 該 第 — 突 出 部 於 該 第 一 表 面 上 之 位 置 係 對 應 於 該 第 突 出 部 於 該 第 表 面 上 之 位17153. ptd Page 12 200418152 V. Description of the invention (5) At least-the second protrusion y and a glue process y so that the first protrusion and the first protrusion of the package 〇70 early yuan abut against the protrusion respectively. The upper and lower molds are positioned in the cavity formed by the upper and lower molds. Two packaging colloids cover the packaging unit and cause one surface of the outer guide leg section to exit the second packaging colloid. The semiconductor package 1 made by the aforementioned manufacturing method includes: a plurality of guide pins having at least one type And — the lead frame 5 of the chip preset area. The guide pin is composed of at least an inner guide leg portion and an outer guide leg portion. At least one chip is connected to the chip preset area of the lead frame and is electrically connected to the A first packaging gel from the chip to the guide pin is used to cover the chip Λ chip preset area and the inner guide pin section of the guide pin to form a package unit, and the first surface and the second surface corresponding to the package unit At least one first protrusion and at least one second protrusion 7 are formed, respectively, and the first protrusion and the second protrusion * have a first height and a second degree y and a The second packaging glue system is used to cover the packaging unit so that one surface of the outer guide leg section exposes the second packaging glue body and covers the second package around the first protruding portion and the first protruding portion, respectively. The thickness of the colloid is not greater than the first degree and the second degree. The aforementioned sealing process for forming the second encapsulating colloid may be an injection molding sealing process or a molding process, and the first and the second are prominent. The parts are formed on the first Λ --- surface by a molding process for forming the first encapsulating colloid, and for positioning the first protruding part and the --- protruding part to position the early part of the package. The best effect is achieved. The position of the first protrusion on the first surface corresponds to the position of the first protrusion on the first surface.
17153. ptd 第13頁 200418152 i、發明說明(6) 置。 -該第一突出部與第二突出部係可設計成至少一凸點, 亦可設計成圍置有一圍置空間的連續件,或為複數個分別 間隔適當距離的不連續件;惟若該第一突出部與第二突出 部之數目為複數個時,不論其設計為凸點或不連續件,每 一突出部均需具有相同之高度,以避免高度較低之突出部 未能頂抵該上、下模具之表面,造成該封裝單元未能牢固 定位之偏移現象。 因此,本發明之可於封膠製程中定位的半導體封裝件 φ其製法,確可於封膠製程中對‘封裝單元進行牢固定 位,同時由於該突出部本身即為形成於該封裝單元上之第 一封裝膠體,將可避免習知製程之頂針對該封裝單元造成 破壞,不但可減少後續所必須進行之填膠步驟,且亦不致 於該封_裝膠體中出現孔洞或殘餘應力,可充分改善習知技 術所面臨之問題。 [實施方式] 以下即配合所附第1 A至1 G圖詳細說明本發明之可於封 膠製程中定位的半導體封裝件製法。 首先,如第1 A及1 B圖所示(第1 B圖係為第1 A圖之上視 •),製備一導線架3 0,其具有一可供接置晶片3 6用之晶 片座3 1、以及多數與該晶片座3 1間隔一預定距離d之導腳 3 2 ’其中’該晶片座3 1係設置於略低於該導腳3 2之位置處 而與該導腳3 2形成一高度差,且晶片座3 1係藉多數繫桿 3 0 0 (Tie Bar)連結至該導線架30;而各導腳32係由内導17153. ptd p. 13 200418152 i. Description of Invention (6). -The first protrusion and the second protrusion may be designed as at least one bump, or as a continuous piece surrounding a surrounding space, or as a plurality of discontinuous pieces spaced at an appropriate distance; When the number of the first protrusions and the second protrusions are plural, no matter whether they are designed as bumps or discontinuities, each protrusion must have the same height to prevent the lower protrusions from failing to abut. The surface of the upper and lower molds causes an offset phenomenon in which the packaging unit cannot be firmly positioned. Therefore, the method for manufacturing the semiconductor package φ that can be positioned in the sealing process of the present invention can indeed firmly position the 'packaging unit' in the sealing process. At the same time, the protrusion itself is formed on the packaging unit. The first packaging colloid can prevent the top of the conventional manufacturing process from causing damage to the packaging unit, which can not only reduce the subsequent glue filling steps, but also avoid the occurrence of holes or residual stress in the packaging gel, which can fully Problems in improving conventional technologies. [Embodiment] The method for manufacturing a semiconductor package which can be positioned in a sealing process according to the present invention will be described in detail below with reference to the attached drawings 1A to 1G. First, as shown in Figures 1 A and 1 B (Figure 1 B is a top view of Figure 1 A •), a lead frame 30 is prepared, which has a wafer holder for receiving wafers 36. 3 1, and most of the guide pins 3 2 spaced a predetermined distance d from the wafer holder 31, where 'the' wafer holder 3 1 is disposed at a position slightly lower than the guide pin 3 2 and is separated from the guide pin 3 2 A height difference is formed, and the wafer base 31 is connected to the lead frame 30 by a majority of tie bars 3 0 (Tie Bar); and each of the guide pins 32 is internally guided.
17153. ptd 第14頁 200418152 五、發明說明(7) 腳段3 3與外導腳段3 4構成,以令該内導腳段3 3以該預定距 離d與晶片座3 1相鄰,並使該外導腳段3 4之末端具有一外 露端部3 5。 如第1C圖所示,製備至少一例如多媒體晶片(Memory C h i p )、控制晶片(C〇n t r ο 1 1 e r C h i p )、記憶體晶片 (Memory Chip,如可抹寫可程式化唯讀記憶體” EPROM1,或 電子式可抹寫可程式化唯讀記憶體n EEPR0Mn )之晶片36, 遠晶片3 6具有一佈設有電子元件與電子電路之作用表面 3 6 0及與其相對之非作用表面3 6 1 ;進行一黏晶 (Die-Bonding )作業以將該晶片3 έ接置於該晶片座31上, 而使該晶片3 6之非作用表面3 6 1可藉由一例如銀膠之膠黏 劑(Adhesive’未圖不)黏接於該晶片座31上。 接著,進行一銲線(Wire-Bonding)製程以於導線架30 上形成.多數如金線之銲線3 7,以使該銲線3 7之兩端分別銲 接至該晶片3 6之作用表面3 6 0與該導腳之内導腳段3 3上, 而能藉該銲線3 7電性連接該晶片3 6與該導線架3 0。 然後,如第1D圖所示,進行一模壓(Mol ding)作業以 於該導線架3 0與晶片3 6周圍形成一第一封裝膠體3 8,其係 將完成黏晶與銲線作業之導線架3 0置入傳送式模具4 5、4 6 (Transfer Mold)内,並於該模具45、46中注入一如環氧 樹脂(Ε ρ ο X y R e s i η )等之熱固性(T h e r m〇s e ΐ t i n g )樹脂材 料,使該熱固性樹脂材料吸收來自模具之熱能而令其樹脂 分子產生交互鏈結(Cross-Link)以固化成第一封裝膠體 3 8,此第一封裝膠體3 8係用以包覆該晶片3 6、銲線3 7、晶17153. ptd Page 14 200418152 V. Description of the invention (7) The leg section 3 3 is formed with the outer guide leg section 3 4 so that the inner guide leg section 3 3 is adjacent to the wafer holder 31 at the predetermined distance d, and The extremity of the outer guide leg section 3 4 has an exposed end 35. As shown in FIG. 1C, at least one, for example, a multimedia chip (Memory Chip), a control chip (Contr ο 1 1 er Chi), and a memory chip (for example, a rewritable and programmable programmable read-only memory) are prepared. Body "EPROM1, or electronic rewritable and programmable read-only memory n EEPR0Mn) chip 36, remote chip 36 has a working surface 3 6 0 arranged with electronic components and electronic circuits and a non-working surface opposite thereto 3 6 1; A die-bonding operation is performed to place the wafer 3 on the wafer holder 31 by hand, so that the non-active surface 3 6 1 of the wafer 36 can be obtained by a method such as silver glue. Adhesive (Adhesive 'not shown) is adhered to the wafer holder 31. Next, a wire-bonding process is performed to form on the lead frame 30. Most of the bonding wires are gold wires 3 7 to The two ends of the bonding wire 3 7 are respectively welded to the active surface 3 6 0 of the chip 36 and the inner leg section 3 3 of the guide pin, and the chip 3 6 can be electrically connected by the bonding wire 3 7. And the lead frame 30. Then, as shown in FIG. 1D, a molding operation is performed on the lead frame 30 and the wafer 36. A first encapsulating gel 3 8 is formed around, and the lead frame 30 that completes the die bonding and wire bonding operations is placed in a transfer mold 4 5, 4 6 (Transfer Mold), and injected into the molds 45, 46. Like thermosetting resin materials such as epoxy resin (E ρ ο X y R esi η), the thermosetting resin material absorbs the heat energy from the mold and causes the resin molecules to generate cross-links (Cross -Link) to solidify into the first encapsulant 38, which is used to cover the wafer 36, bonding wires 37, and crystals.
17153.ptd 第15頁 200418152 i、發明說明(8) 片座3 1及導腳之内導腳段3 3,而使該外導腳段3 4外露出該 第,封裝膠體38,並形成如圖所示具有上、下之第一、第 二表面4 1、4 2的封裝單元4 0 ;該傳送式模具之上、下模具 4 5、4 6之模壓表面上係開設有分別用以於該第一、第二表 面41、 4 2上形成第一、第二突出部50a、 51 a的第一、第二 凹設區4 7、4 8,該第一、第二凹設區4 7、4 8之開設位置係 可對應於第1 E圖所示之突出部5 0 a,該圖係為該封裝單元 4 0之第一表面4 1的上視圖,其係可藉由該第一凹設區4 7之 模壓與第一封裝膠體3 8之充填而形成四個分布呈方形的第 —突出部5 0 a,該四個第一突出部"5 0 a均係為對應於該第一 凹設區4 7之形狀的凸點,且係具有一相同之第一高度h 1 ; 其中,該上模具4 5之第一凹設區4 7的高度與位置於最初開 模時需進行一精準加工,因為若該四個由第一封裝膠體3 8 形成之,第一突出部50a未具有相同的第一高度hi,則於後 續再進行封膠製程時將可能導致高度較低之第一突出部無 法頂抵住該上模具4 5之模壓表面,使該封裝單元4 0難以被 穩固頂抵定位,而形成封裝單元4 0偏移或膠體充填不均等 製程問題,或使該導線架之外露表面未完全外露而降低其 電性,同時,若該第一突出部5 0 a之位置因開模精度不足 i產生較大偏差,亦可能形成模壓力量不均或如前述等製 程問題;該第二凹設區4 8與第二突出部5 1 a之形狀與位置 均係對應於圖示之第一凹設區4 7與第一突出部5 0 a,惟其 所設計之第二高度h 2並不需與該第一高度hi完全相同,得 視所欲成型之例如多媒體卡等半導體封裝件的尺寸設計而17153.ptd Page 15 200418152 i. Description of the invention (8) The film holder 31 and the inner guide leg section 33 of the guide leg, so that the outer guide leg section 3 4 is exposed to the outside, and the encapsulation gel 38 is formed as The package unit 40 with upper and lower first and second surfaces 4 1 and 4 2 shown in the figure; the molding surfaces of the conveying mold upper and lower molds 4 5 and 46 are respectively provided on the mold surfaces. First and second recessed areas 4 7 and 4 8 are formed on the first and second surfaces 41 and 4 2 with first and second protruding portions 50 a and 51 a, and the first and second recessed areas 4 7 The opening positions of 4 and 8 can correspond to the protruding portion 50 a shown in FIG. 1E, which is a top view of the first surface 41 of the packaging unit 40, which can be obtained by using the first The molding of the recessed area 4 7 and the filling of the first encapsulant 3 8 form four square-shaped first protrusions 5 0 a. The four first protrusions " 5 0 a are corresponding to the The bumps in the shape of the first recessed areas 47 have the same first height h 1; wherein the height and position of the first recessed areas 47 in the upper mold 4 5 need to be initially opened. For a precise machining, In order that if the four are formed by the first encapsulant 3 8, the first protrusions 50 a do not have the same first height hi, then the subsequent lower encapsulation process may result in the failure of the first protrusions having a lower height. Abutting against the molding surface of the upper mold 45 makes it difficult for the packaging unit 40 to be firmly positioned against the surface, thereby causing the manufacturing process of the packaging unit 40 to be offset or unevenly filled with colloid, or the exposed surface of the lead frame is not It is completely exposed and reduces its electrical properties. At the same time, if the position of the first protruding portion 50 a is greatly deviated due to insufficient mold opening accuracy i, it may also cause uneven mold pressure or process problems as described above; the second concave The shapes and positions of the area 4 8 and the second protruding portion 5 1 a correspond to the first concave area 4 7 and the first protruding portion 5 0 a shown in the figure, but the designed second height h 2 is not It must be exactly the same as the first height hi, depending on the size design of the semiconductor package such as a multimedia card to be molded.
17153.ptd 第16頁 200418152 五、發明說明(9) 定。 接著,該外露之外導腳段3 4末端的外露端部3 5可經第 1F圖所示之彎腳成型(Forming)步驟,變形以使其與所對 應之内導腳段3 3成一高度差,而設置於低於該内導腳段3 3 之位置處,且該外露端部3 5之外露表面3 5 0亦如圖示與該 封裝單元4 0之第二表面4 2形成一不大於該第二高度h 2的高 度差,以令該第二突出部5 1 a的凸點尖端5 1 0 a可與該外露 端部3 5之外露表面3 5 0對齊,或令該凸點尖端5 1 0 a之位置 向下略低於該外露表面3 5 0,以確保後續封膠製程之定位 效果與該半導體封裝件外露端之良好電性。 接著,如第1 G圖所示,進行一射出成型(I n j e c t i〇η Mol ding)封膠製程,其係將該封裝單元40置入一射出成型 模具5 5、5 6中以藉一熱塑性(T h e r m〇p 1 a s t i c )樹脂材料形 成一第二封裝膠體3 9,並藉該封裝單元4 0上之第一突出部 5 〇 a與第二突出部5 1 a,分別向上、下頂抵住該射出模具之 上、下模具5 5、5 6表面,以取代習知頂針之夾持定位功 能,而可令該封裝單元4 0穩固定位於該上、下模具55、56 所形成之射出模穴5 7中,不致於射出成型之封膠製程中產 生偏移,同時亦不致如習知頂針般破壞該封裝單元4 0之第 一封裝膠體3 8表面;其中,該上、下射出模具5 5、5 6與其 所形成之模穴5 7高度可依前述製程之突出部5 0 a、5 1 a高 度、與該外露表面3 5 0及内導腳段3 3之高度差而定,務使 分別具有第一、第二高度h 1、h 2突起之封裝單元4 0的總高 度不小於該射出模穴5 7之高度,且使該外露端部3 5之外露17153.ptd Page 16 200418152 V. Description of Invention (9). Next, the exposed end portion 3 5 at the end of the exposed outer guide leg section 3 4 may be deformed so as to have a height with the corresponding inner guide leg section 3 3 through the forming step shown in FIG. 1F. Poor, and is located at a position lower than the inner guide leg section 3 3, and the exposed surface 3 5 0 of the exposed end portion 3 5 also forms an inconsistency with the second surface 4 2 of the packaging unit 40 as shown in the figure. A height difference greater than the second height h 2 so that the protruding tip 5 1 0 a of the second protruding portion 5 1 a can be aligned with the exposed surface 3 5 0 of the exposed end portion 3 5 or the protruding point The position of the tip 5 10 a is slightly lower than the exposed surface 3 50 to ensure the positioning effect of the subsequent sealing process and the good electrical properties of the exposed end of the semiconductor package. Next, as shown in FIG. 1G, an injection molding (I njecti η mol ding) sealing process is performed, which places the packaging unit 40 into an injection molding mold 5 5, 5 6 to borrow a thermoplastic ( Thammop 1 astic) resin material forms a second encapsulation gel 39, and borrows the first protrusions 50a and the second protrusions 5a from the packaging unit 40 to abut upward and downward respectively. The upper and lower mold 5 5 and 5 6 surfaces of the injection mold replace the conventional positioning function of the ejector pin, so that the packaging unit 40 can be stably fixed to the injection mold formed by the upper and lower molds 55 and 56. In the cavity 5 7, no offset will occur during the molding process of injection molding, and the surface of the first packaging gel 3 8 of the packaging unit 40 will not be damaged like the conventional thimble; among them, the upper and lower injection molds 5 The height of 5, 5 6 and the formed cavity 5 7 can be determined according to the heights of the protrusions 5 0 a, 5 1 a in the aforementioned process, and the height difference between the exposed surface 3 5 0 and the inner guide leg section 33. The total height of the package unit 40 having protrusions of the first and second heights h 1 and h 2 is not less than the projection height. The height of the mold cavity 5 7 is exposed, and the exposed end portion 3 5 is exposed.
17153.ptd 第17頁 200418152 i、發明說明(10) 表面3 5 0可平抵於該下模具5 6之表面上。 -该熱塑性樹脂材料可為聚碳酸酯(p 0丨y c a r b 〇 n a ΐ e Ester )、丙烯酸樹脂、聚氯化曱烯或聚酯類(p〇丨yester ) 等樹脂材料,其所形成之第二封裝膠體3 9將包覆該封裝單 元4 0,而令該外導腳段3 4之外露端部3 5的外露表面3 5 0夕卜 露出該第二封裝膠體3 9並與第二封裝膠體3 9之下表面390 齊平,其中,由於該第二封裝膠體3 9係用以包覆該第一封 裝膠體3 8,因此該第二封裝膠體3 9係可選用與該第一封裝 膠體3 8之熱膨脹係數相近的樹脂材料,以避免受熱後兩膠 •之接觸表面間出現間隙;其中,該第二封裝膠體3 9亦可 如第一封裝膠體3 8,可使用傳送式模具以於該模具中注入 如環氧樹脂等之熱固性樹脂材料。 完成前述步驟並進行射出脫模後,該外露端部35的外 露表面.3 5 0即可作為該例如多媒體卡之半導體封裝件的輸 入/輸出鈿,俾使该晶片3 6得藉該輸入/輸出端電 二=界裝置(未圖示);如此即完成本發明之半導體封裝件 本發明之半導體封裝件即係如第2圖所示, 呈 有晶片座31及多數與該晶片座31間隔有一預定導腳 響的導線架3 0,其中,夂墓挪q 9总山七、曾 雕心夺浙丨 而八二•由内導腳段33及外導腳 羧34構成,而々该内導腳段33以該預定距離與 鄰’且該外導腳段34末端係具有一外露端部35;工1: 置於该晶片座31上的晶# 36,係藉多數銲線 該内導腳段33;用以將該晶片36、銲線37及内導腳=包17153.ptd Page 17 200418152 i. Description of the invention (10) The surface 3 50 can rest on the surface of the lower mold 56. -The thermoplastic resin material may be a resin material such as polycarbonate (p 0 丨 ycarb 〇na ΐ e Ester), acrylic resin, polychlorinated chloride or polyester (p〇 丨 yester), and the second material formed by the thermoplastic resin material The encapsulating gel 39 will cover the encapsulating unit 40, so that the exposed surface 3 5 of the exposed end portion 35 of the outer guide leg section 3 4 will expose the second encapsulating gel 39 and be in contact with the second encapsulating gel. The lower surface 390 is flush with 390. The second encapsulant 3 9 is used to cover the first encapsulant 3 8. Therefore, the second encapsulant 3 9 is optional with the first encapsulant 3. Resin material with similar thermal expansion coefficient of 8 to avoid gaps between the contact surfaces of the two glues after being heated; among them, the second encapsulant 39 can also be like the first encapsulant 38, and a transfer mold can be used for this. A thermosetting resin material such as epoxy resin is injected into the mold. After completing the foregoing steps and performing injection mold release, the exposed surface of the exposed end portion 35 can be used as the input / output of the semiconductor package such as a multimedia card, so that the chip 36 can borrow the input / The output terminal is an electrical device (not shown); thus, the semiconductor package of the present invention is completed. The semiconductor package of the present invention is shown in FIG. There is a predetermined lead frame 3 0, among which, the tomb of the tomb moves q 9 Zongshan Qi, Zeng Diaoxin drew Zhejiang, and eighty two • consists of the inner guide leg section 33 and the outer guide foot carboxyl 34, and The guide leg section 33 is adjacent to the predetermined distance, and the end of the outer guide leg section 34 has an exposed end 35; the work: the crystal # 36 placed on the wafer base 31, the inner guide is by most of the bonding wires Leg section 33; used to connect the chip 36, bonding wire 37 and inner guide pin = package
17153. ptd 第18頁 200418152 五、發明說明(11) 覆成一封裝單元4 0的第一封裝膠體3 8,該第一封裝膠體3 8 並可藉該封裝製程而於該封裝單元4 0之第一、第二表面 4 1、4 2上分別形成具有第一、第二高度h 1、h 2的第一、第 二突起部5 0 a、5 1 a ;以及以射出成型或模壓成型包覆該封 裝單元4 0的第二封裝膠體3 9,以令該外導腳段3 4之外露端 部3 5的外露表面3 5 0外露出該第二封裝膠體3 9外,且令分 別包覆於該第一突出部5 0 a與第二突出部5 1 a周圍的第二封 裝膠體3 9厚度不大於該第一高度hi與第二高度h2。' 本發明所揭示之第一、第二突出部並非僅限於前述實 施例之設計,就該突出部所欲達A的定位功能而言,其形 狀與位置之設計僅需令該複數個第一突出部與第二突出部 分別具有相同之突起高度與一定的對稱分布位置即可,因 此,符合此原則的任何突出部設計均可運用於本發明中, 僅需考f量製程上所能達至之模具的開模精度即可,例如第 3圖所示之封裝單元的第一表面4 1上視圖,即圖示另一種 第一突出部5 0 b的位置分布設計,亦可達至相同的頂抵模 具功能;此外,若考量開模成本,亦可如第4圖所示,將 該突出部設計成僅為一位列於該第一表面4 1正中央的凸點 5 0 c,惟其頂抵模具之定位牢固性將略低於前述之實施17153. ptd page 18 200418152 V. Description of the invention (11) The first packaging colloid 38 covered with a packaging unit 40, and the first packaging colloid 38 can be used in the packaging unit 40th by the packaging process. First and second surfaces 4 1 and 4 2 are formed with first and second protrusions 50 a and 5 1 a having first and second heights h 1 and h 2 respectively, and are covered by injection molding or compression molding. The second encapsulation body 39 of the encapsulation unit 40 allows the exposed surface 3 5 0 of the exposed end portion 35 of the outer guide leg section 3 4 to be exposed outside the second encapsulation body 39 and to be respectively covered. The thickness of the second encapsulant 39 around the first protruding portion 50a and the second protruding portion 51a is not greater than the first height hi and the second height h2. '' The first and second protrusions disclosed in the present invention are not limited to the design of the foregoing embodiment. As far as the positioning function of the protrusions is intended to be A, the shape and position design need only make the plurality of first It suffices that the protruding portion and the second protruding portion have the same protruding height and a certain symmetrical distribution position. Therefore, any protruding portion design conforming to this principle can be applied to the present invention. The mold opening accuracy of the mold can be achieved, for example, the top view of the first surface 41 of the packaging unit shown in FIG. 3, that is, the position distribution design of another first protruding portion 50b, which can also achieve the same. In addition, if the cost of mold opening is considered, as shown in FIG. 4, the protruding portion can also be designed to be only one convex point 5 0 c located in the center of the first surface 41, However, the firmness of its positioning against the mold will be slightly lower than the previous implementation
17153. ptd 第19頁 20041815217153.ptd page 19 200418152
V 五、發明說明(12) 亦可為分別間隔有適當距離的四個不連續件,如第7、8圖 所示之配置5 0 f、5 0 g,同樣可依其對稱性而使該封裝單元 於模穴中牢固定位且均勻受力,此一不連續件設計與前述 之凸點式突出部設計相同,同一表面上的突出部數目並無 限制,僅需考量該複數個突出部之位置分布是否將令該封 裝單元於封膠時形成不均句之受力或偏移即可。 該第二表面4 2上之第二突出部的形狀、高度、位置並 無需與前述第一表面41上的第一突出部相同,但若就頂抵 定位之牢固性、封膠之均勻性與開模成本考量,設計以形 #相同之第一、第二突出部將可i生較佳的頂抵效果,亦 即使該第二突出部於該第二表面4 2上之位置對應於該第一 突出部於該第一表面4 1上之位置為佳。 若考量開模之成本,亦可以其他方式形成前述各類型 的第 '突出部與第二突出部,亦即以習知未具有凹設區的 上、下模具進行壓模以形成該第一封裝膠體,復於呈水平 的封裝單元第一、第二表面上,分別以點膠之方式依設計 塗佈特定形狀的熱固性樹脂,使其固化後成為該特定形狀 的第一、第二突出部,亦可發揮本發明之功效,惟此方法 雖可省去精密開模之成本,卻可能產生高度控制上的誤 _,因為在點膠製程中欲使同一表面上的突出部均具有相 同之突出高度將是困難的,且量產性亦不若以模具成型突 出部之方法來得佳。 此外,於進行第二封裝膠體3 9之封膠製程時,若該外 露端部3 5之外露表面3 5 0略高於該下模具5 6之表面而未與V. Description of the invention (12) It can also be four discontinuous pieces spaced at an appropriate distance, as shown in Figures 7 and 8. The configurations 50 f and 50 g can also be made according to their symmetry. The packaging unit is firmly positioned in the cavity and is uniformly stressed. The design of this discontinuous piece is the same as the aforementioned bump-type protrusion design. There is no limit on the number of protrusions on the same surface. Only the number of protrusions need to be considered. Whether the position distribution will cause the packaging unit to form an uneven force or offset when sealing is performed. The shape, height, and position of the second protrusions on the second surface 42 need not be the same as those of the first protrusions on the first surface 41. Considering the cost of mold opening, designing the first and second protrusions with the same shape # will produce a better abutment effect, even if the position of the second protrusion on the second surface 42 corresponds to the first A position of a protrusion on the first surface 41 is preferred. If the cost of mold opening is considered, other types of the first and second protruding portions may be formed in other ways, that is, the upper and lower molds that are conventionally not provided with a recessed area are pressed to form the first package. The colloid is coated on the first and second surfaces of the horizontal packaging unit, and the thermosetting resin of a specific shape is coated according to the design by dispensing, so that it becomes the first and second protrusions of the specific shape after curing. The effect of the present invention can also be exerted, but although this method can save the cost of precise mold opening, it may cause a high degree of control error, because in the dispensing process, it is necessary to make the protrusions on the same surface have the same protrusions. The height will be difficult, and the mass productivity is not as good as the method of forming the protrusion by the mold. In addition, during the sealing process of the second encapsulant 39, if the exposed surface 3 5 0 of the exposed end 3 5 is slightly higher than the surface of the lower mold 5 6
17153.ptd 第20頁 200418152 五、發明說明(13) 其接觸,或該第二封裝膠體3 9射出充填不完全時,將可能 導致該外露表面3 5 0未外露、或該突出部突出至該第二封 裝膠體3 9外之現象,此時可利用習知之研磨(G r 1 n d )法, 去除多餘之第二封裝膠體或突出部(第一封裝膠體),以令 該外露端部3 5之外露表面3 5 0充分外露,或令向外突出之 突出部受研磨而部分移除而可維持該半導體封裝件之表面 平整度。 本發明所使用之導線架其導腳亦可與該晶片座連接, 而該導腳之外露端部亦可改變設計使其較該内導腳段為 高,並向上外露出該第二封裝膠ιέ之上表面,除此設計 外,任何習知所使用之導線架均可運用於本發明,而該晶 片座所接置之晶片數量與所接置之上、下表面亦無一定限 制;此外,該晶片座3 1之底面3 1 0亦可設計以外露出該封 裝單元之第二表面4 2,同時令該外露端部3 5之外露表面 3 5 0切齊該第二表面4 2,如此,即可於完成所有製程並移 除該突出至第二封裝膠體3 9外的第二突出部5 1 a後,形成 如第9圖所示之半導體封裝件,此種設計將得令該晶片3 6 運作所產生之熱能藉由該外露之晶片座3 1底面3 1 0而散逸 至外界,進而提昇本半導體封裝件之散熱效率。 綜上所述,本發明所揭示之半導體封裝件及其製法, 確可於封膠製程中對該封裝單元進行牢固定位,同時可避 免習知封膠製程中對該封裝單元表面所致之破壞,不但可 減少所進行之製程步驟,且亦不致於該封裝膠體中出現孔 洞或殘餘應力而影響該半導體封裝件之良率品質;此外,17153.ptd Page 20 200418152 V. Description of the invention (13) The contact, or incomplete filling of the second encapsulant 39, may result in the exposed surface 3 5 0 not being exposed, or the protrusion protruding to the For the phenomenon outside the second encapsulant 39, at this time, a conventional grinding (G r 1 nd) method can be used to remove the excess second encapsulant or protrusion (first encapsulant) to make the exposed end 3 5 The exposed surface 3500 is fully exposed, or the protruding portion protruding outward is partially removed by grinding to maintain the surface flatness of the semiconductor package. The lead of the lead frame used in the present invention can also be connected to the chip holder, and the exposed end of the lead can also be changed to make it higher than the inner guide leg, and the second encapsulant is exposed upwards. til the upper surface, in addition to this design, any conventionally used lead frame can be used in the present invention, and the number of wafers placed on the wafer holder and the upper and lower surfaces are not limited; The bottom surface 3 1 0 of the wafer holder 31 can also be designed to expose the second surface 4 2 of the packaging unit, and at the same time, the exposed surface 3 5 of the exposed end 3 5 can be aligned with the second surface 4 2. Then, after completing all processes and removing the second protruding portion 5 1 a protruding outside of the second packaging colloid 3 9, a semiconductor package as shown in FIG. 9 is formed. This design will make the chip 3 6 The thermal energy generated during operation is dissipated to the outside through the exposed bottom surface 3 1 of the wafer holder 3 1, thereby improving the heat dissipation efficiency of the semiconductor package. In summary, the semiconductor package and its manufacturing method disclosed in the present invention can indeed firmly position the packaging unit during the sealing process, and can avoid the damage to the surface of the packaging unit during the conventional sealing process. , Not only can reduce the process steps performed, but also will not cause holes or residual stress in the packaging colloid to affect the yield quality of the semiconductor package; in addition,
17153.ptd 第21頁 200418152 i、發明說明(14) 僅需完成可形成該突出部之模具,即可開始進行低成本的 快速量產,充分符合產業界所需。 惟以上所述者,僅係用以說明本發明之具體實施例而 以;並非用以限定本發明之可實施範圍,舉凡熟習該項技 藝者在未脫離本發明所指示之精神與原理下所完成之一切 等效改變或修飾,例如形成任何具有等效作用的突出部, 或以其他方式形成該突出部等,仍應皆由後述之專利範圍 所涵蓋。 ,‘17153.ptd Page 21 200418152 i. Description of the invention (14) Only need to complete the mold that can form the protruding part, and start low-cost rapid mass production, which fully meets the needs of the industry. However, the above are only used to explain the specific embodiments of the present invention; they are not used to limit the implementable scope of the present invention. For those skilled in the art, those skilled in the art will not depart from the spirit and principles indicated by the present invention. All equivalent changes or modifications completed, such as forming any protrusions with equivalent effects, or otherwise forming the protrusions, etc., should still be covered by the scope of patents described below. , ‘
17153. ptd 第22頁 200418152 圖式簡單說明 [圖式簡單說明] 第1 A至1 G圖係本發明之半導體封裝件的製法示意圖, 其中,第1 B圖係為第1 A圖所示之導線架上視圖,而第1 E圖 係為第1 D圖所示之封裝單元第一表面上視圖; 第2圖係本發明之半導體封裝件的實施例剖視圖; 第3圖係形成於第一表面上之本發明第一突出部的第 二實施例上視圖; 第4圖係形成於第一表面上之本發明第一突出部的第 三實施例上視圖; 第5圖係形成於第一表面上之^本發明第一突出部的第 四實施例上視圖; 第6圖係形成於第一表面上之本發明第一突出部的第 五實施例上視圖; 第,7圖係形成於第一表面上之本發明第一突出部的第 六貫施例上視圖; 第8圖係形成於第一表面上之本發明第一突出部的第 七貫施例上視圖; 第9圖係本發明之半導體封裝件的另一實施例剖視 圖; 第1 0圖係我國專利公告第4 8 4 2 2 2號案所揭露之半導體 封裝件之剖視圖; 第1 1圖係另一習知半導體封裝件之剖視圖; 第1 2圖係第1 1圖所示之半導體封裝件於封膠製程中之 示意圖;以及17153. ptd Page 22 200418152 Brief description of the drawings [Simplified description of the drawings] Figures 1A to 1G are schematic diagrams of the method for manufacturing the semiconductor package of the present invention, in which Figure 1B is shown in Figure 1A A top view of the lead frame, and FIG. 1E is a top view of the first surface of the packaging unit shown in FIG. 1D; FIG. 2 is a sectional view of the embodiment of the semiconductor package of the present invention; and FIG. 3 is formed in the first A top view of a second embodiment of the first protrusion of the present invention on the surface; FIG. 4 is a top view of a third embodiment of the first protrusion of the present invention formed on the first surface; and a fifth view is formed on the first A top view of a fourth embodiment of the first protrusion of the present invention on the surface; FIG. 6 is a top view of a fifth embodiment of the first protrusion of the present invention formed on the first surface; and FIG. 7 is formed on Top view of the sixth embodiment of the first protrusion of the present invention on the first surface; Figure 8 is a top view of the seventh embodiment of the first protrusion of the present invention formed on the first surface; Figure 9 is Sectional view of another embodiment of the semiconductor package of the present invention; FIG. 10 is a Chinese patent A cross-sectional view of the semiconductor package disclosed in Announcement No. 4 8 4 2 2 2; FIG. 11 is a cross-sectional view of another conventional semiconductor package; FIG. 12 is a semiconductor package shown in FIG. Schematic diagram of the sealing process; and
17153. ptd 第23頁 200418152 圖式簡單說明 第1 3A及1 3B圖係第1 1圖所示之半導體封裝件於封膠製 程所形成之凹洞示意圖,其中,第1 3B圖係為第1 3A圖之下 視圖。 10 導 線 架 11 晶 片 座 12 導 腳 13 外 導 腳 段 130 外 導 腳 段 外 露表面 15 内 導 腳 段 16 晶 片 17 銲 線 18 封 裝 膠 體 20 導 線 架 封 裝 單 元 21 晶 片 座 22 導 腳 23 内 導 腳 段 24 外 導 腳 段 25 外 露 端 部 250 外 露 表 面 26 晶 片 27 銲 線 28 第 一 封 裝 膠 體 29 第 二 封 裝 膠 體 291 上 模 具 292 下 模 具 293 模 穴 295 頂 針 296 凹 洞 298 頂 針 位 列 區 域 30 導 線 架 300 繫 條 31 晶 片 座 • 導 腳 33 内 導 腳 段 34 外 導 腳 段 35 外 露 端 部 350 外 露 表 面 36 晶 片 360 晶 片 作 用 表 面 361 晶 片 非 作 用 表面 37 銲 線 38 第 一 封 裝 膠 體17153. ptd Page 23 200418152 Brief description of the drawings Figures 1 3A and 1 3B are schematic diagrams of the pits formed by the semiconductor package shown in Figure 11 during the sealing process, of which Figure 1 3B is Figure 1 View below 3A. 10 Lead frame 11 Wafer holder 12 Guide pin 13 Outer guide leg section 130 Outer guide leg exposed surface 15 Inner leg section 16 Wafer 17 Welding wire 18 Packaging gel 20 Lead frame packaging unit 21 Wafer holder 22 Guide leg 23 Inner guide leg 24 Outer guide leg 25 Exposed end 250 Exposed surface 26 Wafer 27 Welding wire 28 First encapsulant 29 Second encapsulant 291 Upper mold 292 Lower mold 293 Cavity 295 Thimble 296 Cavity 298 Thimble position area 30 Lead frame 300 Tie 31 Wafer seat • Guide pin 33 Inner guide leg segment 34 Outer guide leg segment 35 Exposed end 350 Exposed surface 36 Wafer 360 Wafer active surface 361 Wafer non-active surface 37 Welding wire 38 First package gel
17153.ptd 第24頁 200418152 圖式簡單說明 3 9 第二封裝膠體 4 1 第一表面 4 5 上模具 4 7 第一凹設區 50a 凸點式第一突出部 50c 第一突出部 50e 第一突出部 50g 第一突出部 5 10 凸點尖端 56 下模具 d 預定距離 h 2 第二高度 40 封裝單元 4 2 第二表面 46 下模具 48 第二凹設區 50b 第一突出部 50d 第一突出部 5 0 f 第一突出部 5 1a 凸點式第二突出部 5 5 上模具 5 7 /模穴 hi 第一高度17153.ptd Page 24 200418152 Brief description of the drawing 3 9 The second encapsulant 4 1 The first surface 4 5 The upper mold 4 7 The first recessed area 50a The bump-type first protrusion 50c The first protrusion 50e The first protrusion Part 50g first protruding part 5 10 bump tip 56 lower die d predetermined distance h 2 second height 40 packaging unit 4 2 second surface 46 lower die 48 second recessed area 50b first protruding part 50d first protruding part 5 0 f first protrusion 5 1a bump-type second protrusion 5 5 upper die 5 7 / cavity hi first height
第25頁 17153. ptdPage 25 17153.ptd
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| CN100505246C (en) * | 2006-09-30 | 2009-06-24 | 卓恩民 | Semiconductor package structure and method for fabricating the same |
| TWI564135B (en) * | 2014-06-12 | 2017-01-01 | 台灣積體電路製造股份有限公司 | Molding device and molding method |
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| TWI728528B (en) * | 2019-10-25 | 2021-05-21 | 京元電子股份有限公司 | Memory card structure and method for manufacturing the same |
| TWI732732B (en) * | 2019-10-25 | 2021-07-01 | 京元電子股份有限公司 | Memory card structure and method for manufacturing the same |
| JP7240339B2 (en) * | 2020-01-20 | 2023-03-15 | Towa株式会社 | Method for manufacturing resin molded product and resin molding apparatus |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100505246C (en) * | 2006-09-30 | 2009-06-24 | 卓恩民 | Semiconductor package structure and method for fabricating the same |
| TWI564135B (en) * | 2014-06-12 | 2017-01-01 | 台灣積體電路製造股份有限公司 | Molding device and molding method |
| US10020211B2 (en) | 2014-06-12 | 2018-07-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer-level molding chase design |
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