TW200514967A - Optical level detector - Google Patents

Optical level detector

Info

Publication number
TW200514967A
TW200514967A TW093117202A TW93117202A TW200514967A TW 200514967 A TW200514967 A TW 200514967A TW 093117202 A TW093117202 A TW 093117202A TW 93117202 A TW93117202 A TW 93117202A TW 200514967 A TW200514967 A TW 200514967A
Authority
TW
Taiwan
Prior art keywords
light
light detector
desired position
level detector
optical level
Prior art date
Application number
TW093117202A
Other languages
Chinese (zh)
Other versions
TWI231360B (en
Inventor
Yang-Kuao Kuo
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Application granted granted Critical
Publication of TWI231360B publication Critical patent/TWI231360B/en
Publication of TW200514967A publication Critical patent/TW200514967A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

In an apparatus for monitoring any deviation of a planar surface from its desired position, a light source and a light detector are positioned so that when the surface is at the desired position a beam of light projected by the light source is reflected by the surface and fully registers on the light detector causing the light detector to generate a peak output signal. When the surface derivates from its desired position, the reflected beam of light does not fully register on the light detector, causing the light detector to generate less than peak output signal.
TW093117202A 2003-10-29 2004-06-15 Optical level detector TWI231360B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/696,292 US6832517B1 (en) 2003-10-29 2003-10-29 Optical level detector

Publications (2)

Publication Number Publication Date
TWI231360B TWI231360B (en) 2005-04-21
TW200514967A true TW200514967A (en) 2005-05-01

Family

ID=33511930

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093117202A TWI231360B (en) 2003-10-29 2004-06-15 Optical level detector

Country Status (2)

Country Link
US (1) US6832517B1 (en)
TW (1) TWI231360B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998629B2 (en) * 2003-02-20 2006-02-14 Taiwan Semiconductor Manufacturing Co Ltd Reticle position detection system
US11069929B1 (en) 2016-05-24 2021-07-20 NDSL, Inc. Apparatuses and methods for optically monitoring fluid level in a container, such as a battery, using a non-contact optical detector on an outside surface of the container
CN115165913B (en) * 2022-06-24 2025-07-08 华能国际电力江苏能源开发有限公司 Device and method for detecting micro cracks on surface of weld joint by using light intensity
CN118836827B (en) * 2024-09-20 2025-06-24 上海邦芯半导体科技有限公司 A device for automatically adjusting the level of a hot stage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821558A (en) 1972-08-09 1974-06-28 Fleet Electronics Ltd Determination or monitoring of the distances of surfaces from reference positions
DE2448219A1 (en) 1974-10-09 1976-04-22 Siemens Ag METHOD FOR AUTOMATIC CONTACTLESS HEIGHT MEASUREMENT OF MOVING BLADES OF TURBINES
US4524282A (en) 1982-06-24 1985-06-18 Courser, Incorporated Electro-optical level detector
US5502311A (en) * 1992-01-17 1996-03-26 Nikon Corporation Method of and apparatus for detecting plane position
US5948572A (en) 1997-11-26 1999-09-07 United Microelectronics Corp. Mixed mode photomask for nikon stepper

Also Published As

Publication number Publication date
US6832517B1 (en) 2004-12-21
TWI231360B (en) 2005-04-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees