TW200519328A - Purification device for harmful gas - Google Patents

Purification device for harmful gas

Info

Publication number
TW200519328A
TW200519328A TW093124910A TW93124910A TW200519328A TW 200519328 A TW200519328 A TW 200519328A TW 093124910 A TW093124910 A TW 093124910A TW 93124910 A TW93124910 A TW 93124910A TW 200519328 A TW200519328 A TW 200519328A
Authority
TW
Taiwan
Prior art keywords
harmful gas
purification device
walls
gas
decomposition chamber
Prior art date
Application number
TW093124910A
Other languages
Chinese (zh)
Inventor
Takashi Shimada
Yasuhiko Koiso
Naoki Muranaga
Takashi Kasaya
Tomohisa Ikeda
Original Assignee
Japan Pionics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics filed Critical Japan Pionics
Publication of TW200519328A publication Critical patent/TW200519328A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/02—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment
    • F23G5/027—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment pyrolising or gasifying stage
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/102—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)

Abstract

This invention relates to a purification device for harmful gas. It provides a kind of purification device. The said purification device in a case without adopting a large or complicated structure is aimed at the harmful gas emitted from the processes of semiconductor manufacturing to lower the decomposition rate of harmful gas of processed objects and inhibit the accumulation of power objects on the walls of decomposition chamber. In long term the purification process of harmful gas proceeds safely and stably. A kind of purification device for harmful gas comprising: proceeding heat decomposition of harmful gas emitted from the processes of semiconductor manufacturing by the use of burning gas which is obtained from the burning fuel or frame to purify; walls with thermal insulation and ventilation at the sides of heat decomposition chamber and the gas with oxygen being directed to heat decomposition chamber by passing through said walls.
TW093124910A 2003-08-20 2004-08-19 Purification device for harmful gas TW200519328A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003296475 2003-08-20

Publications (1)

Publication Number Publication Date
TW200519328A true TW200519328A (en) 2005-06-16

Family

ID=34611371

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093124910A TW200519328A (en) 2003-08-20 2004-08-19 Purification device for harmful gas

Country Status (3)

Country Link
KR (1) KR20050023120A (en)
CN (1) CN1584400A (en)
TW (1) TW200519328A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630347B (en) * 2014-05-12 2018-07-21 日本派歐尼股份有限公司 Combustion type purification device for exhaust gas

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100877144B1 (en) * 2007-08-31 2009-01-07 주식회사 케이피씨 Gas scrubber
KR100901267B1 (en) * 2008-01-25 2009-06-09 고등기술연구원연구조합 Oxygen Enriched Syngas Combustor
KR101689166B1 (en) * 2014-10-20 2016-12-26 씨에스케이(주) Scrubber System
CN105864801A (en) * 2015-02-09 2016-08-17 日本派欧尼株式会社 Waste gas combustion type purifying device
CN105597517B (en) * 2015-10-30 2018-08-17 广东美的制冷设备有限公司 Remove device and its application of smog smoke
CN109595568B (en) * 2018-12-11 2020-04-03 江苏普蓝特节能技术有限公司 High-purity waste ammonia gas incinerator, system and process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630347B (en) * 2014-05-12 2018-07-21 日本派歐尼股份有限公司 Combustion type purification device for exhaust gas

Also Published As

Publication number Publication date
CN1584400A (en) 2005-02-23
KR20050023120A (en) 2005-03-09

Similar Documents

Publication Publication Date Title
EP2495493A3 (en) Combustion system
US20100303699A1 (en) Method of removing n20 from waste gas
TW200519328A (en) Purification device for harmful gas
MX347409B (en) Device and method for purifying air from non-desired components and for eliminating such components.
TW200501242A (en) Semiconductor manufacturing device and heating unit thereof
WO2012134125A3 (en) Apparatus and method for decomposing carbon dioxide using microwaves
JP2011078876A (en) Method and apparatus for reduction of nitrous oxide
ATE476538T1 (en) EPITAXIAL REACTOR WITH DEVICE FOR INTRODUCING REACTION GASES
JP5767204B2 (en) Detoxification treatment apparatus and detoxification treatment method
WO2008077204A3 (en) Catalytic combustion process with rejuvenation step
JP2016093762A (en) Ammonia treatment apparatus and treatment method using microwave non-equilibrium plasma
EA201100141A1 (en) DEVICE TO REDUCE CARBON DIOXIDE IN Flue Combustion Gases
KR20170050616A (en) Plasma pre-treatment reactor
RU2008127042A (en) METHOD FOR PRODUCING METAL OXIDE NANOPARTICLES
JP2009210210A (en) Exhaust gas decomposing device
JP2024054606A (en) Gas removal device and gas treatment method
JP2006003024A (en) Device for burning/detoxifying exhaust gas
JP4937548B2 (en) Perfluorocarbon gas removal method and removal device
RU2004101745A (en) METHOD FOR CLEANING GAS EMISSIONS AND DEVICE FOR ITS IMPLEMENTATION
KR20120009198A (en) AC Plasma Generator for PO Scrubber
KR101227441B1 (en) System for scrubing exhausted gas
KR101435421B1 (en) Low nox scrubber
ES2235639B1 (en) METHOD AND ITS CORRESPONDING INSTALLATION FOR THE ELIMINATION OF VOLATILE ORGANIC COMPOUNDS BY MICROWAVE PLASMA.
KR200462279Y1 (en) Apparatus for heat treatment of waste
EA201490863A1 (en) METHOD FOR OBTAINING HEAT ENERGY IN THE COMBUSTION OF HYDROGEN WITH ADDITION OF CARBON OXIDES, NITROGEN OXIDES AND / OR SULFUR OXIDES AND INSTALLATION FOR THE IMPLEMENTATION