TW200610580A - Method for preventing coater and coating head from clogging - Google Patents

Method for preventing coater and coating head from clogging

Info

Publication number
TW200610580A
TW200610580A TW094134312A TW94134312A TW200610580A TW 200610580 A TW200610580 A TW 200610580A TW 094134312 A TW094134312 A TW 094134312A TW 94134312 A TW94134312 A TW 94134312A TW 200610580 A TW200610580 A TW 200610580A
Authority
TW
Taiwan
Prior art keywords
outlet
plates
coating
coater
droplets
Prior art date
Application number
TW094134312A
Other languages
Chinese (zh)
Other versions
TWI278351B (en
Inventor
Norio Toyoshima
Akihiro Shigeyama
Takahiro Yamazaki
Masahiko Kurosawa
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200610580A publication Critical patent/TW200610580A/en
Application granted granted Critical
Publication of TWI278351B publication Critical patent/TWI278351B/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)

Abstract

To prevent a coating head in a coater that applies a coating liquid onto a member to be coated (substrate W) from clogging at the outlet of the coating head. In the coater that applies the coating liquid onto the member to be coated by controlling a discharge quantity from the outlet 5ca of a nozzle plate 5c, thin glass-made flat plates 71 disposed as opposed are configured so as to be able to come into contact with coating droplets L at the outlet 5ca by being moved onto the bottom of the plate 5c upwardly by the control of a controller 9. The plates 71 are attached to the plate 5c side because the droplets L are spread between the plates 71 and plate 5c to form a coating liquid film while drawing the plates 71 contacted when the plates 71 are brought into contact with the droplets L. This allows the contact of the coating droplets in the vicinity of the outlet 5ca with the air to be prevented, thereby enabling the system to prevent the nozzle outlet from clogging caused by the solidification of the coating liquid.
TW094134312A 2004-09-30 2005-09-30 Method for preventing coater and coating head from clogging TWI278351B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004287834 2004-09-30

Publications (2)

Publication Number Publication Date
TW200610580A true TW200610580A (en) 2006-04-01
TWI278351B TWI278351B (en) 2007-04-11

Family

ID=36119075

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094134312A TWI278351B (en) 2004-09-30 2005-09-30 Method for preventing coater and coating head from clogging

Country Status (4)

Country Link
JP (1) JP2006122901A (en)
KR (1) KR100826073B1 (en)
TW (1) TWI278351B (en)
WO (1) WO2006035932A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102300644A (en) * 2009-01-29 2011-12-28 芝浦机械电子株式会社 Coating applicator
CN112775141A (en) * 2021-01-29 2021-05-11 苏州高之仙自动化科技有限公司 Dropping liquid plugging structure and cleaning device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055356A (en) * 2006-08-31 2008-03-13 Shibaura Mechatronics Corp Solution applicator
JP2010277700A (en) * 2009-05-26 2010-12-09 Sumitomo Chemical Co Ltd Method for manufacturing organic electroluminescence element
KR101110020B1 (en) * 2009-10-20 2012-02-29 주식회사 탑 엔지니어링 Apparatus for cleaning nozzle and paste dispenser having the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321149A (en) * 1986-07-15 1988-01-28 Ricoh Co Ltd Head cap of ink jet recorder
JPH03151242A (en) * 1989-11-09 1991-06-27 Canon Inc Liquid-jet recorder
JP3386656B2 (en) * 1996-04-25 2003-03-17 大日本スクリーン製造株式会社 Method and apparatus for preventing coating liquid from drying
JP2000015841A (en) * 1998-07-07 2000-01-18 Canon Inc INK JET PRINTING APPARATUS AND INK JET HEAD USED IN THE APPARATUS
JP2000343020A (en) * 1999-06-02 2000-12-12 Toppan Printing Co Ltd Coating head slit tip drying prevention method and apparatus
JP4142546B2 (en) * 2002-10-10 2008-09-03 株式会社九電工 Dryer
JP2004144871A (en) * 2002-10-23 2004-05-20 Mitsubishi Paper Mills Ltd Photosensitive material processing equipment
JP3829791B2 (en) * 2002-10-30 2006-10-04 セイコーエプソン株式会社 Actuator mounting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102300644A (en) * 2009-01-29 2011-12-28 芝浦机械电子株式会社 Coating applicator
CN112775141A (en) * 2021-01-29 2021-05-11 苏州高之仙自动化科技有限公司 Dropping liquid plugging structure and cleaning device

Also Published As

Publication number Publication date
KR100826073B1 (en) 2008-04-29
WO2006035932A1 (en) 2006-04-06
KR20070043029A (en) 2007-04-24
TWI278351B (en) 2007-04-11
JP2006122901A (en) 2006-05-18

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees