TW200624733A - Air supply system - Google Patents

Air supply system

Info

Publication number
TW200624733A
TW200624733A TW094142550A TW94142550A TW200624733A TW 200624733 A TW200624733 A TW 200624733A TW 094142550 A TW094142550 A TW 094142550A TW 94142550 A TW94142550 A TW 94142550A TW 200624733 A TW200624733 A TW 200624733A
Authority
TW
Taiwan
Prior art keywords
air
clean room
duct connects
conditioning cabinet
transporting
Prior art date
Application number
TW094142550A
Other languages
Chinese (zh)
Other versions
TWI273201B (en
Inventor
Po-Sung Kuo
Yung-Dar Chen
Jheng-Long Chou
Tung-Li Wu
Ming-Wen Huang
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Publication of TW200624733A publication Critical patent/TW200624733A/en
Application granted granted Critical
Publication of TWI273201B publication Critical patent/TWI273201B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0086—Filter condition indicators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4263—Means for active heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
    • B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/90—Odorous compounds not provided for in groups B01D2257/00 - B01D2257/708
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
    • B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S116/00—Signals and indicators
    • Y10S116/25—Air filter condition indicator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/34—Indicator and controllers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Ventilation (AREA)
  • Air Conditioning Control Device (AREA)
  • Accommodation For Nursing Or Treatment Tables (AREA)

Abstract

An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, transporting air outside the clean room thereinto. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, transporting the air flowing through the make-up air unit thereinto. The first chemical filter removes airborne molecular contamination in the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, transporting the air flowing through the first chemical filter of the air conditioning cabinet thereinto. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine thereto.
TW094142550A 2004-12-02 2005-12-02 Air supply system TWI273201B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/001,770 US7285147B2 (en) 2004-12-02 2004-12-02 Air supply systems and pressure adjustment devices for use therewith

Publications (2)

Publication Number Publication Date
TW200624733A true TW200624733A (en) 2006-07-16
TWI273201B TWI273201B (en) 2007-02-11

Family

ID=36572637

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094142550A TWI273201B (en) 2004-12-02 2005-12-02 Air supply system

Country Status (4)

Country Link
US (1) US7285147B2 (en)
CN (1) CN1831440A (en)
SG (1) SG122862A1 (en)
TW (1) TWI273201B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2006278463B2 (en) * 2005-08-05 2011-03-10 Wrd Corporation Adaptive cooling method for computer rack enclosure
CN100472142C (en) * 2006-06-12 2009-03-25 亚翔工程股份有限公司 Clean room and air conditioning method thereof
JP5254226B2 (en) * 2006-07-14 2013-08-07 エクセレレックス インク． Environmental protection containment system
JP2008181968A (en) * 2007-01-23 2008-08-07 Toshiba Corp Semiconductor manufacturing system and semiconductor device manufacturing method
JP2009002634A (en) * 2007-06-25 2009-01-08 Unitec Inc Unit type clean room
CN101373171B (en) * 2007-08-21 2011-05-18 中芯国际集成电路制造(上海)有限公司 Air molecule pollution sampling auxiliary device and sampling method
US20090095157A1 (en) * 2007-10-15 2009-04-16 Kirch Joseph F Smokestack
US8603217B2 (en) * 2011-02-01 2013-12-10 Universal Laser Systems, Inc. Recirculating filtration systems for material processing systems and associated methods of use and manufacture
US20130188311A1 (en) * 2012-01-23 2013-07-25 International Business Machines Corporation Cooling and noise-reduction apparatus
US20190056122A1 (en) * 2015-04-20 2019-02-21 Synexis Llc Clean Rooms Having Dilute Hydrogen Peroxide (DHP) Gas and Methods of Use Thereof
US10989429B2 (en) * 2017-03-31 2021-04-27 Daikin Industries, Ltd. Air conditioning system
JP7291003B2 (en) * 2018-09-28 2023-06-14 三機工業株式会社 Pressure measuring devices and systems
US10989431B2 (en) * 2018-12-11 2021-04-27 Honeywell International Inc. Actuator slippage sensor
KR20220053854A (en) * 2020-10-23 2022-05-02 피코앤테라(주) EFEM, Equipment Front End Module
CN112097349B (en) * 2020-11-11 2021-04-27 晶芯成(北京)科技有限公司 Filter device for clean room

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2746146A (en) * 1954-01-13 1956-05-22 Stephen C Schiro Cutting tool
US2746416A (en) * 1954-06-23 1956-05-22 Rex Metal Craft Inc Filter clogging indicator
US5099751A (en) * 1989-05-02 1992-03-31 Gpac, Inc. Control system for doors of a negative air pressure enclosure
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
US6190442B1 (en) * 1999-08-31 2001-02-20 Tishken Products Co. Air filter gauge
US6960244B2 (en) * 2001-12-17 2005-11-01 American Safe Air, Inc. System and method for removing contaminates from the air in a mail-sorting room

Also Published As

Publication number Publication date
TWI273201B (en) 2007-02-11
SG122862A1 (en) 2006-06-29
CN1831440A (en) 2006-09-13
US7285147B2 (en) 2007-10-23
US20060117722A1 (en) 2006-06-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees