TW200712444A - Light wave interference device - Google Patents

Light wave interference device

Info

Publication number
TW200712444A
TW200712444A TW095134217A TW95134217A TW200712444A TW 200712444 A TW200712444 A TW 200712444A TW 095134217 A TW095134217 A TW 095134217A TW 95134217 A TW95134217 A TW 95134217A TW 200712444 A TW200712444 A TW 200712444A
Authority
TW
Taiwan
Prior art keywords
wave interference
light wave
optical axis
reflecting mirror
inspection lens
Prior art date
Application number
TW095134217A
Other languages
Chinese (zh)
Other versions
TWI292033B (en
Inventor
Nobuaki Ueki
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Publication of TW200712444A publication Critical patent/TW200712444A/en
Application granted granted Critical
Publication of TWI292033B publication Critical patent/TWI292033B/zh

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

This invention provides a light wave interference device, capable of adjusting automatically parallel deviation between the optical axis of an inspection lens and the optical axis of a reference spherical reflecting mirror, and automating light wave interference measurement of the inspection lens, in the light wave interference device equipped with a positioning means of the inspection lens. In this invention, a bright spot, based on reflected light of measuring light flux from the surface of the inspection lens 1, is observed, and the image position of the bright spot on an observation screen is operated, and a moving amount of the reference spherical reflecting mirror 7 required for moving the measured bright point image to a prescribed reference position on the observation screen is calculated. Driving the control of the reference spherical reflecting mirror 7 is performed based on the operated moving amount, and thereby the deviation in parallelism between the optical axis of the inspection lens 1 and the optical axis of the reference spherical reflecting mirror 7 is adjusted automatically on the observation screen for the light wave interference measurement.
TW095134217A 2005-09-15 2006-09-15 Light wave interference device TW200712444A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005269217A JP4738949B2 (en) 2005-09-15 2005-09-15 Lightwave interference device

Publications (2)

Publication Number Publication Date
TW200712444A true TW200712444A (en) 2007-04-01
TWI292033B TWI292033B (en) 2008-01-01

Family

ID=37878386

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095134217A TW200712444A (en) 2005-09-15 2006-09-15 Light wave interference device

Country Status (3)

Country Link
JP (1) JP4738949B2 (en)
CN (1) CN1932432B (en)
TW (1) TW200712444A (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4947774B2 (en) * 2006-08-18 2012-06-06 富士フイルム株式会社 Light wave interference measuring apparatus and light wave interference measuring method
JP2009008594A (en) * 2007-06-29 2009-01-15 Konica Minolta Opto Inc Optical element unit and interferometer
JP2009145081A (en) * 2007-12-11 2009-07-02 Fujinon Corp Method and apparatus for measuring error quantity of occurrence factor of rotational asymmetric aberration
JP5025501B2 (en) * 2008-01-17 2012-09-12 オリンパス株式会社 Optical element holding mechanism and optical element measuring apparatus
JP2009236694A (en) * 2008-03-27 2009-10-15 Konica Minolta Opto Inc Lens measuring device, lens measuring method, and lens production method
JP5044495B2 (en) * 2008-07-17 2012-10-10 富士フイルム株式会社 Parallel plate thickness measurement method
JP5095539B2 (en) * 2008-07-17 2012-12-12 富士フイルム株式会社 Aberration measurement error correction method
JP5235591B2 (en) * 2008-10-10 2013-07-10 富士フイルム株式会社 Method for measuring transmitted wavefront of birefringent optical element
JP5208075B2 (en) * 2008-10-20 2013-06-12 富士フイルム株式会社 Lightwave interference measuring device
JP4573252B2 (en) * 2008-11-06 2010-11-04 キヤノンマーケティングジャパン株式会社 Alignment system, alignment system control method, program, and measuring apparatus
JP5473743B2 (en) * 2010-04-20 2014-04-16 富士フイルム株式会社 Off-axis transmitted wavefront measuring device
JP5525367B2 (en) * 2010-07-28 2014-06-18 Ｈｏｙａ株式会社 Lens position adjustment mechanism
CN107430046B (en) * 2015-03-27 2019-08-30 奥林巴斯株式会社 Wavefront measuring device and wavefront measuring method
CN114323582A (en) * 2021-12-22 2022-04-12 光皓光学(江苏)有限公司 A kind of wavefront testing method and device with platform lens
CN119714129B (en) * 2024-12-12 2026-03-13 丹阳丹耀光学股份有限公司 A method for detecting transmission eccentricity of optical components using four references

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195328A (en) * 1985-02-26 1986-08-29 Asahi Optical Co Ltd Interferometer with semispherical lens
JPS63163137A (en) * 1986-12-25 1988-07-06 Hitachi Electronics Eng Co Ltd Lens surface defect inspecting device
JPH07167630A (en) * 1993-10-14 1995-07-04 Asahi Optical Co Ltd Interference measuring device and interference measuring method
JP3758279B2 (en) * 1997-03-06 2006-03-22 ソニー株式会社 Method and apparatus for adjusting objective lens for optical pickup
JP2003066300A (en) * 2001-08-29 2003-03-05 Sony Corp Objective lens manufacturing apparatus and objective lens manufacturing method
JP2005127914A (en) * 2003-10-24 2005-05-19 Fujinon Corp Interferometer device lens mount

Also Published As

Publication number Publication date
CN1932432A (en) 2007-03-21
CN1932432B (en) 2010-09-15
JP4738949B2 (en) 2011-08-03
TWI292033B (en) 2008-01-01
JP2007078593A (en) 2007-03-29

Similar Documents

Publication Publication Date Title
TW200712444A (en) Light wave interference device
CN108007677B (en) Laser projection speckle measurement system
WO2009049834A3 (en) Optical sensor device
ATE447354T1 (en) ALIGNMENT METHOD FOR AN OPHTHALMIC MEASURING DEVICE AND ALIGNMENT DEVICE THEREFOR
WO2010012839A3 (en) Objective for a dental camera, comprising tilted lenses for preventing direct reflected light
CN109358435B (en) Device and method for adjusting perpendicularity of double telecentric lenses
EP2789968A1 (en) Shape-measuring device
EP2549222A1 (en) Abscissa calibration jig and abscissa calibration method of laser interference measuring apparatus
JP2011002439A (en) Inspection apparatus
JP2007078593A5 (en)
CN101650307B (en) Scraper blade surface detection system
JP2014149175A (en) Optical measuring device
DE502006004474D1 (en) MEASURING DEVICE
ES2883932T3 (en) Optical measurement of surface roughness
KR20120136654A (en) Inspection device of illumination and inspection method of illumination
JP2007206550A5 (en)
JP5759270B2 (en) Interferometer
US20250231085A1 (en) Waveguide measurement device
JP2006303196A5 (en)
JP2009092481A (en) Lighting device for visual inspection and visual inspection device
JP2009222614A (en) Surface inspection apparatus
JP2022152867A (en) Optical distance measuring device and method
WO2006070037A3 (en) Aperture diffraction interferometer (adi) for the inspection and measurement of ophthalmic optical components
JP4901118B2 (en) Lens meter
KR102116618B1 (en) Inspection apparatus for surface of optic specimen and controlling method thereof

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees