TW200716948A - Micro gyroscope - Google Patents

Micro gyroscope

Info

Publication number
TW200716948A
TW200716948A TW094137094A TW94137094A TW200716948A TW 200716948 A TW200716948 A TW 200716948A TW 094137094 A TW094137094 A TW 094137094A TW 94137094 A TW94137094 A TW 94137094A TW 200716948 A TW200716948 A TW 200716948A
Authority
TW
Taiwan
Prior art keywords
oscillating
sensing
deformation
driving
rings
Prior art date
Application number
TW094137094A
Other languages
Chinese (zh)
Other versions
TWI281975B (en
Inventor
Fan-Gang Tseng
Chiung-Wen Tsai
Lung-Yung Lin
Sywe-Pin Chien
Yuan Lo
Original Assignee
Chung Shan Inst Of Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chung Shan Inst Of Science filed Critical Chung Shan Inst Of Science
Priority to TW94137094A priority Critical patent/TWI281975B/en
Publication of TW200716948A publication Critical patent/TW200716948A/en
Application granted granted Critical
Publication of TWI281975B publication Critical patent/TWI281975B/en

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  • Gyroscopes (AREA)

Abstract

A micro gyroscope including a substrate, an oscillating body, driving electrodes, and sensing electrodes is provided. The oscillating body formed over the substrate includes many oscillating rings arranged to form a symmetrical pattern. Wherein, the geometric centers of the neighboring oscillation rings are apart π/4 radian from each other by using the geometric centers of the symmetrical pattern as a referring point. The driving electrodes disposed on the substrate are used for driving the oscillating rings to deform. Wherein, the oscillating body has a driving deformation while the oscillating rings deformed. On the other hand, the oscillating rings deform as suffering the Coriolis force. At this moment, the oscillating body has a sensing deformation. Wherein, the directions of the driving deformation and the sensing deformation are apart π/4 radian from each other. Furthermore, the sensing electrodes disposed on the substrate are used for sensing the sensing deformation of the oscillating body.
TW94137094A 2005-10-24 2005-10-24 Micro gyroscope TWI281975B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94137094A TWI281975B (en) 2005-10-24 2005-10-24 Micro gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94137094A TWI281975B (en) 2005-10-24 2005-10-24 Micro gyroscope

Publications (2)

Publication Number Publication Date
TW200716948A true TW200716948A (en) 2007-05-01
TWI281975B TWI281975B (en) 2007-06-01

Family

ID=38777580

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94137094A TWI281975B (en) 2005-10-24 2005-10-24 Micro gyroscope

Country Status (1)

Country Link
TW (1) TWI281975B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI470483B (en) * 2008-11-12 2015-01-21 Cywee Group Ltd Controller combination

Also Published As

Publication number Publication date
TWI281975B (en) 2007-06-01

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