TW200718475A - Coating applicator - Google Patents

Coating applicator

Info

Publication number
TW200718475A
TW200718475A TW095132456A TW95132456A TW200718475A TW 200718475 A TW200718475 A TW 200718475A TW 095132456 A TW095132456 A TW 095132456A TW 95132456 A TW95132456 A TW 95132456A TW 200718475 A TW200718475 A TW 200718475A
Authority
TW
Taiwan
Prior art keywords
pigment
dispersed resist
resist solution
coating
coating applicator
Prior art date
Application number
TW095132456A
Other languages
Chinese (zh)
Other versions
TWI310325B (en
Inventor
Koji Harada
Kiyoshi Uchikawa
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200718475A publication Critical patent/TW200718475A/en
Application granted granted Critical
Publication of TWI310325B publication Critical patent/TWI310325B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Photolithography (AREA)

Abstract

The invention provides a coating applicator for suppressing an aggregation of pigment components of a pigment-dispersed resist. The coating applicator which coats a pigment-dispersed resist solution on a processing substrate comprises a nozzle for discharging the pigment-dispersed resist solution, a coating solution supply for supplying the pigment-dispersed resist solution, and a piping composed of a conductive tube which introduces the pigment-dispersed resist solution supplied from the coating solution supply to the ozzle. Thus, when the pigment-dispersed resist solution passes through the onductive tube, an aggregation of the pigment components can be uppressed.
TW095132456A 2005-11-10 2006-09-01 Coating applicator TW200718475A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005325903A JP2007134487A (en) 2005-11-10 2005-11-10 Coating device

Publications (2)

Publication Number Publication Date
TW200718475A true TW200718475A (en) 2007-05-16
TWI310325B TWI310325B (en) 2009-06-01

Family

ID=38082770

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095132456A TW200718475A (en) 2005-11-10 2006-09-01 Coating applicator

Country Status (4)

Country Link
JP (1) JP2007134487A (en)
KR (1) KR100835161B1 (en)
CN (1) CN1963670B (en)
TW (1) TW200718475A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103487993A (en) * 2013-10-17 2014-01-01 深圳市华星光电技术有限公司 Alignment liquid nozzle
CN109212907A (en) * 2018-11-05 2019-01-15 江苏博砚电子科技有限公司 A method of manufacture black matrix" film

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06348023A (en) * 1993-06-03 1994-12-22 Nippon Kayaku Co Ltd Coating method with resist for color filter containing pigment
JP3363666B2 (en) * 1995-05-25 2003-01-08 大日本スクリーン製造株式会社 Substrate processing equipment
KR100521701B1 (en) * 1996-11-27 2006-01-12 동경 엘렉트론 주식회사 Coating film forming apparatus and coating film forming method
JPH10328614A (en) * 1997-05-30 1998-12-15 Mitsubishi Chem Corp How to apply colored resist
JP2000291848A (en) * 1999-04-02 2000-10-20 Toho Kasei Kk Resin tube for spherical semiconductor
JP2001066784A (en) * 1999-08-24 2001-03-16 Toppan Printing Co Ltd Discharge device for photosensitive colored resin composition
JP2002177858A (en) * 2000-12-13 2002-06-25 Dainippon Screen Mfg Co Ltd Substrate processing equipment
TW569288B (en) * 2001-06-19 2004-01-01 Tokyo Electron Ltd Substrate processing apparatus, liquid processing apparatus and liquid processing method
JP3936556B2 (en) * 2001-06-22 2007-06-27 東京エレクトロン株式会社 Antistatic fluoropolymer tube for flammable fluids
CN1294429C (en) * 2002-03-27 2007-01-10 阪田油墨株式会社 Pigment-dispersed resist composition for color filter
JP2005236040A (en) * 2004-02-19 2005-09-02 Sekisui Chem Co Ltd Method for arranging conductive fine particles

Also Published As

Publication number Publication date
CN1963670A (en) 2007-05-16
TWI310325B (en) 2009-06-01
KR20070050385A (en) 2007-05-15
CN1963670B (en) 2010-08-18
JP2007134487A (en) 2007-05-31
KR100835161B1 (en) 2008-06-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees