TW200718927A - Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method - Google Patents

Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method

Info

Publication number
TW200718927A
TW200718927A TW095127208A TW95127208A TW200718927A TW 200718927 A TW200718927 A TW 200718927A TW 095127208 A TW095127208 A TW 095127208A TW 95127208 A TW95127208 A TW 95127208A TW 200718927 A TW200718927 A TW 200718927A
Authority
TW
Taiwan
Prior art keywords
data
acoustic
analysis diagnosis
diagnosis device
acoustic analysis
Prior art date
Application number
TW095127208A
Other languages
Chinese (zh)
Other versions
TWI294514B (en
Inventor
Toshiyuki Matsumoto
Naoki Ikeuchi
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200718927A publication Critical patent/TW200718927A/en
Application granted granted Critical
Publication of TWI294514B publication Critical patent/TWI294514B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G01H3/08—Analysing frequencies present in complex vibrations, e.g. comparing harmonics present

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Since each of acoustic sensors (11-15) resonates with a different sound, a data collection/transmission circuit (30) detects only a sound in a different frequency band in the entire band and data conversion circuits (21-25) convert it into data. A control unit (31) transmits the data from a data transmission circuit (32) via an antenna (33). A data reception/analysis diagnosis circuit (40) receives data corresponding to the acoustic sensors (11-15) and compares a sound pressure stored in advance to a sound pressure obtained by the received data so as to determine whether the measurement object is normal.
TW095127208A 2005-08-18 2006-07-26 Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method TW200718927A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005237884A JP2007051952A (en) 2005-08-18 2005-08-18 Acoustic sensor device, acoustic analysis diagnostic device, and acoustic sensor manufacturing method

Publications (2)

Publication Number Publication Date
TW200718927A true TW200718927A (en) 2007-05-16
TWI294514B TWI294514B (en) 2008-03-11

Family

ID=37757433

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095127208A TW200718927A (en) 2005-08-18 2006-07-26 Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method

Country Status (3)

Country Link
JP (1) JP2007051952A (en)
TW (1) TW200718927A (en)
WO (1) WO2007020767A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10594874B2 (en) 2016-01-15 2020-03-17 Ricoh Company, Ltd. Malfunction determining apparatus, malfunction determining system, malfunction determining method, and recording medium
JP6798265B2 (en) * 2016-01-15 2020-12-09 株式会社リコー Abnormality judgment device, abnormality judgment system and abnormality judgment method
JP2018179626A (en) * 2017-04-07 2018-11-15 新日本無線株式会社 Ultrasound receiver
JP7467317B2 (en) 2020-11-12 2024-04-15 株式会社東芝 Acoustic inspection device and acoustic inspection method
JP7608383B2 (en) * 2022-02-16 2025-01-06 株式会社東芝 Plate wave detector, plate wave detection device, and composite plate wave detection device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10157257A (en) * 1996-11-22 1998-06-16 Xerox Corp Trouble detecting oscillation sensor and printer system equipped with the same
JP3248452B2 (en) * 1997-05-26 2002-01-21 住友金属工業株式会社 Acoustic sensor
JP3374775B2 (en) * 1999-01-12 2003-02-10 住友金属工業株式会社 Vibration wave sensor
JP2003075284A (en) * 2001-08-31 2003-03-12 Daikin Ind Ltd Leak inspection method
JP2004020484A (en) * 2002-06-19 2004-01-22 Yamatake Corp Error monitoring device and error monitoring program
JP3867057B2 (en) * 2003-02-20 2007-01-10 三井造船株式会社 Acoustic sensor array, acoustic diagnostic apparatus, and acoustic diagnostic method

Also Published As

Publication number Publication date
TWI294514B (en) 2008-03-11
WO2007020767A1 (en) 2007-02-22
JP2007051952A (en) 2007-03-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees