TW200722247A - Link device and carrying robot - Google Patents

Link device and carrying robot

Info

Publication number
TW200722247A
TW200722247A TW095123300A TW95123300A TW200722247A TW 200722247 A TW200722247 A TW 200722247A TW 095123300 A TW095123300 A TW 095123300A TW 95123300 A TW95123300 A TW 95123300A TW 200722247 A TW200722247 A TW 200722247A
Authority
TW
Taiwan
Prior art keywords
gear
link device
link arms
carrying robot
link
Prior art date
Application number
TW095123300A
Other languages
Chinese (zh)
Other versions
TWI307307B (en
Inventor
Akira Miyamoto
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of TW200722247A publication Critical patent/TW200722247A/en
Application granted granted Critical
Publication of TWI307307B publication Critical patent/TWI307307B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

This link device includes: a pair of first gears 100, 110 provided to rotate in a body with the respective first link arms 10, 11 in two first spindles f1 on an intermediate member 12; and a pair of second gears 200, 210 provided to rotate in a body with the respective second link arms 20, 21 on two second spindles f2 on the intermediate member 12, wherein one second gear 210 is rotated in the state of meshing with one first gear 110 only when the first link arms 10, 11 are rocked in a predetermined direction to move a moving member forward, and the other second gear 200 is rotated in the state of meshing with the other first gear 100 only when the first link arms 10, 11 are rocked in the opposite direction to the predetermined direction to move the moving member backward.
TW095123300A 2005-07-05 2006-06-28 Link device and carrying robot TW200722247A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005195893A JP4490341B2 (en) 2005-07-05 2005-07-05 Link device and transfer robot

Publications (2)

Publication Number Publication Date
TW200722247A true TW200722247A (en) 2007-06-16
TWI307307B TWI307307B (en) 2009-03-11

Family

ID=37596737

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095123300A TW200722247A (en) 2005-07-05 2006-06-28 Link device and carrying robot

Country Status (4)

Country Link
JP (1) JP4490341B2 (en)
KR (1) KR100788304B1 (en)
CN (1) CN100450727C (en)
TW (1) TW200722247A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382904B (en) * 2007-06-19 2013-01-21 愛發科股份有限公司 Substrate transfer method

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101730613B (en) * 2007-05-15 2013-11-06 株式会社爱发科 Conveying device and vacuum processing device using the same
KR20100052525A (en) * 2007-09-10 2010-05-19 가부시키가이샤 알박 Substrate transfer robot and vacuum processing apparatus
JP5304601B2 (en) 2009-11-10 2013-10-02 株式会社安川電機 Arm mechanism and vacuum robot equipped with the same
JP5463174B2 (en) * 2010-03-12 2014-04-09 株式会社アルバック Joint device and substrate transfer device
CN102840462B (en) * 2011-06-20 2015-11-25 海洋王照明科技股份有限公司 Lighting device
KR101255674B1 (en) 2011-11-02 2013-04-17 연세대학교 산학협력단 In pipe driving robot
WO2014087879A1 (en) * 2012-12-04 2014-06-12 タツモ株式会社 Link-type transportation robot
JP6157396B2 (en) * 2014-03-31 2017-07-05 Ｓｐｐテクノロジーズ株式会社 Link device
KR20150142361A (en) 2014-06-11 2015-12-22 삼성전자주식회사 Link structure
KR101639137B1 (en) * 2014-12-10 2016-07-12 박권식 displacement gear assembly having multiple joint structure
CN106516525A (en) * 2016-11-16 2017-03-22 北京融安汇智科技有限公司 Guarantee extraction system of financing institution
KR101934203B1 (en) * 2017-07-28 2018-12-31 김성수 Coupling device
JP6478168B2 (en) * 2017-08-07 2019-03-06 株式会社ダイヘン Substrate transfer device
JP7097760B2 (en) * 2018-06-25 2022-07-08 東京エレクトロン株式会社 Transport equipment and transport method
KR102191528B1 (en) * 2019-03-21 2020-12-15 한국기계연구원 Mobile robot
CN110561407A (en) * 2019-09-19 2019-12-13 知行机器人科技（苏州）有限公司 linear mechanical arm and robot
JP7565191B2 (en) * 2020-11-09 2024-10-10 ニデックインスツルメンツ株式会社 Industrial Robots
CN112975910A (en) * 2021-03-03 2021-06-18 无锡邑文电子科技有限公司 Wafer conveying arm for photoresist removing machine
CN118615000B (en) * 2024-06-04 2025-04-04 柘城中医院有限公司 Bone carrier for tibia

Family Cites Families (16)

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JPS634457U (en) * 1986-06-26 1988-01-12
JPS6323064A (en) * 1986-07-15 1988-01-30 Fanuc Ltd Backlash removing device for speed reduction drive mechanism
GB2298934B (en) * 1993-11-22 1998-03-25 Sony Corp Multi-articulate arm type transport device
JPH07227778A (en) * 1994-02-22 1995-08-29 Toshiba Corp Carrier
KR100487879B1 (en) * 1996-03-22 2005-08-02 로제 가부시키가이샤 Processing Robot
JPH106258A (en) * 1996-06-19 1998-01-13 Metsukusu:Kk Thin form work conveying robot
KR980008470A (en) * 1996-07-15 1998-04-30 조셉 제이. 스위니 Double plane robot
JPH10249757A (en) * 1997-03-18 1998-09-22 Komatsu Ltd Transfer robot
JPH1138909A (en) * 1997-07-18 1999-02-12 Toa Resin Kk Signboard
JPH11188671A (en) * 1997-12-26 1999-07-13 Daihen Corp Two-arm transfer robot device
JPH11333778A (en) * 1998-05-29 1999-12-07 Daihen Corp Carrying robot device
JP2000195923A (en) * 1998-12-28 2000-07-14 Hitachi Ltd Transfer robot, transfer device, transfer device in vacuum chamber and process processing device
JP2002066966A (en) * 2000-08-25 2002-03-05 Ishii Hyoki Corp Transfer robot
CN2461719Y (en) * 2000-12-19 2001-11-28 沈宗麟 Multi-link manipulator
JP4757404B2 (en) * 2001-06-04 2011-08-24 株式会社ジェーイーエル Transfer arm
JP4291709B2 (en) * 2003-04-16 2009-07-08 株式会社ダイヘン Linear movement mechanism and transfer robot using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382904B (en) * 2007-06-19 2013-01-21 愛發科股份有限公司 Substrate transfer method

Also Published As

Publication number Publication date
JP2007015023A (en) 2007-01-25
CN1891415A (en) 2007-01-10
CN100450727C (en) 2009-01-14
KR100788304B1 (en) 2007-12-27
KR20070005479A (en) 2007-01-10
TWI307307B (en) 2009-03-11
JP4490341B2 (en) 2010-06-23

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