TW200725645A - Scanning microscope and probe module thereof - Google Patents

Scanning microscope and probe module thereof

Info

Publication number
TW200725645A
TW200725645A TW094145807A TW94145807A TW200725645A TW 200725645 A TW200725645 A TW 200725645A TW 094145807 A TW094145807 A TW 094145807A TW 94145807 A TW94145807 A TW 94145807A TW 200725645 A TW200725645 A TW 200725645A
Authority
TW
Taiwan
Prior art keywords
probe module
scanning microscope
base
probe
frame
Prior art date
Application number
TW094145807A
Other languages
Chinese (zh)
Other versions
TWI301281B (en
Inventor
Chien-Wen Chen
Hung-Ming Tai
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW94145807A priority Critical patent/TWI301281B/en
Publication of TW200725645A publication Critical patent/TW200725645A/en
Application granted granted Critical
Publication of TWI301281B publication Critical patent/TWI301281B/en

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

A probe module comprises a base, a cover and a probe. The probe is disposed on the base. The cover is connected to the base and pivoted between a first orientation and a second orientation. The cover comprises a frame and a fastener. The frame is connected to the base, and the fastener is connected to the frame.
TW94145807A 2005-12-22 2005-12-22 Scanning microscope and probe module thereof TWI301281B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94145807A TWI301281B (en) 2005-12-22 2005-12-22 Scanning microscope and probe module thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94145807A TWI301281B (en) 2005-12-22 2005-12-22 Scanning microscope and probe module thereof

Publications (2)

Publication Number Publication Date
TW200725645A true TW200725645A (en) 2007-07-01
TWI301281B TWI301281B (en) 2008-09-21

Family

ID=45070188

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94145807A TWI301281B (en) 2005-12-22 2005-12-22 Scanning microscope and probe module thereof

Country Status (1)

Country Link
TW (1) TWI301281B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011004214A1 (en) * 2011-02-16 2012-08-16 Carl Zeiss Sms Gmbh Apparatus and method for analyzing and altering a sample surface

Also Published As

Publication number Publication date
TWI301281B (en) 2008-09-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees