TW200727472A - Lateral bipolar transistor - Google Patents

Lateral bipolar transistor

Info

Publication number
TW200727472A
TW200727472A TW095112649A TW95112649A TW200727472A TW 200727472 A TW200727472 A TW 200727472A TW 095112649 A TW095112649 A TW 095112649A TW 95112649 A TW95112649 A TW 95112649A TW 200727472 A TW200727472 A TW 200727472A
Authority
TW
Taiwan
Prior art keywords
region
cmos
bipolar transistor
lateral bipolar
base
Prior art date
Application number
TW095112649A
Other languages
English (en)
Chinese (zh)
Inventor
Philippe Meunier-Beillard
Raymond Josephus Engelbart Hueting
Johannes Josephus Theodorus Marinus Donkers
Erwin Hijzen
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Publication of TW200727472A publication Critical patent/TW200727472A/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/01Manufacture or treatment
    • H10D10/021Manufacture or treatment of heterojunction BJTs [HBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/80Heterojunction BJTs
    • H10D10/821Vertical heterojunction BJTs
    • H10D10/891Vertical heterojunction BJTs comprising lattice-mismatched active layers, e.g. SiGe strained-layer transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0107Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs
    • H10D84/0109Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs the at least one component covered by H10D12/00 or H10D30/00 being a MOS device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401Combinations of FETs or IGBTs with BJTs

Landscapes

  • Bipolar Transistors (AREA)
  • Thin Film Transistor (AREA)
TW095112649A 2005-04-13 2006-04-10 Lateral bipolar transistor TW200727472A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05102908 2005-04-13

Publications (1)

Publication Number Publication Date
TW200727472A true TW200727472A (en) 2007-07-16

Family

ID=37087404

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095112649A TW200727472A (en) 2005-04-13 2006-04-10 Lateral bipolar transistor

Country Status (2)

Country Link
TW (1) TW200727472A (fr)
WO (1) WO2006109221A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140073106A1 (en) 2012-09-12 2014-03-13 International Business Machines Corporation Lateral bipolar transistor and cmos hybrid technology
US9059230B1 (en) 2014-01-10 2015-06-16 International Business Machines Corporation Lateral silicon-on-insulator bipolar junction transistor process and structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628266B2 (ja) * 1986-07-09 1994-04-13 株式会社日立製作所 半導体装置の製造方法
US5952706A (en) * 1997-10-29 1999-09-14 National Semiconductor Corporation Semiconductor integrated circuit having a lateral bipolar transistor compatible with deep sub-micron CMOS processing
JP2001338988A (ja) * 2000-05-25 2001-12-07 Hitachi Ltd 半導体装置及びその製造方法
US6569744B2 (en) * 2001-06-15 2003-05-27 Agere Systems Inc. Method of converting a metal oxide semiconductor transistor into a bipolar transistor
US6861325B1 (en) * 2002-09-24 2005-03-01 Advanced Micro Devices, Inc. Methods for fabricating CMOS-compatible lateral bipolar junction transistors

Also Published As

Publication number Publication date
WO2006109221A2 (fr) 2006-10-19
WO2006109221A3 (fr) 2007-03-29

Similar Documents

Publication Publication Date Title
TW200509259A (en) Highly integrated semiconductor device with silicide layer that secures contact margin and method of manufacturing the same
TW200620676A (en) Thin film transistor and its manufacturing method
TW200511508A (en) Semiconductor device, method for manufacturing the semiconductor device, and integrated circuit including the semiconductor device
TW200518206A (en) Metal-oxide-semiconductor device formed in silicon-on-insulator
TW200705674A (en) Thin film transistor and manufacturing method thereof
WO2006066265A3 (fr) Transistors pmos a extension de drain et leurs procedes de fabrication
TW200638545A (en) MOS transistor including multi-work function metal nitride gate electrode, CMOS integrated circuit device including same, and related methods of manufacture
TW200802811A (en) Semiconductor structure and method for forming the same
EP1030363A3 (fr) Intégration des transistors bipolaires et CMOS pour transistors sub-0.1-micrométriques
EP1641046A3 (fr) MOSFET et sa méthode de fabrication
TW200625645A (en) Trench MOSFET and method of manufacturing same
EP1274134A3 (fr) Transistor MOS et sa méthode de fabrication
EP1571711A4 (fr) Mos lateral a double diffusion, a canal court, son procede de fabrication et dispositif a semiconducteur
TW200507262A (en) BiCMOS integration scheme with raised extrinsic base
TW200620629A (en) Semiconductor device
EP2405482A3 (fr) Circuit intégré comprenant une diode de puissance
TW200505030A (en) MOS type semi conductor device
WO2011056391A3 (fr) Transistor mosfet à fort courant d'attaque
TW200633220A (en) Lateral double-diffused MOS transistor and manufacturing method therefor
EP1443570A3 (fr) Transistor organique à hétérojonction avec une porte avec une couche d'isolation
TW200608610A (en) Process for fabricating a strained channel MOSFET device
WO2007072655A3 (fr) Dispositifs a semi-conducteurs et procede de fabrication
WO2007072405A3 (fr) Dispositif semi-conducteur comprenant une plaque de champ et procédé associé
TW200727472A (en) Lateral bipolar transistor
EP1403930A3 (fr) Dispositif à semi-conducteur et méthode de fabrication associée