TW200736155A - A method for fabricating a micro-optical element and an apparatus thereof - Google Patents

A method for fabricating a micro-optical element and an apparatus thereof

Info

Publication number
TW200736155A
TW200736155A TW095109932A TW95109932A TW200736155A TW 200736155 A TW200736155 A TW 200736155A TW 095109932 A TW095109932 A TW 095109932A TW 95109932 A TW95109932 A TW 95109932A TW 200736155 A TW200736155 A TW 200736155A
Authority
TW
Taiwan
Prior art keywords
micro
optical element
fabricating
substrate
amount
Prior art date
Application number
TW095109932A
Other languages
English (en)
Other versions
TWI294402B (en
Inventor
Chin-Tai Chen
Ching-Long Chiu
Chun-Te Chuang
Zhao-Fu Tseng
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW95109932A priority Critical patent/TWI294402B/zh
Publication of TW200736155A publication Critical patent/TW200736155A/zh
Application granted granted Critical
Publication of TWI294402B publication Critical patent/TWI294402B/zh

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Micromachines (AREA)
TW95109932A 2006-03-22 2006-03-22 A method for fabricating a micro-optical element and an apparatus thereof TWI294402B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95109932A TWI294402B (en) 2006-03-22 2006-03-22 A method for fabricating a micro-optical element and an apparatus thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95109932A TWI294402B (en) 2006-03-22 2006-03-22 A method for fabricating a micro-optical element and an apparatus thereof

Publications (2)

Publication Number Publication Date
TW200736155A true TW200736155A (en) 2007-10-01
TWI294402B TWI294402B (en) 2008-03-11

Family

ID=45068141

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95109932A TWI294402B (en) 2006-03-22 2006-03-22 A method for fabricating a micro-optical element and an apparatus thereof

Country Status (1)

Country Link
TW (1) TWI294402B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114632557A (zh) * 2020-12-16 2022-06-17 合肥京东方光电科技有限公司 一种微流控芯片的对置基板及微流控芯片

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201113568A (en) 2009-10-09 2011-04-16 Coretronic Corp Light guide plate and backlight module
TWI413585B (zh) * 2010-10-13 2013-11-01 Univ Nat Kaohsiung Applied Sci Method of manufacturing microelements using inkjet technology

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114632557A (zh) * 2020-12-16 2022-06-17 合肥京东方光电科技有限公司 一种微流控芯片的对置基板及微流控芯片
CN114632557B (zh) * 2020-12-16 2024-05-28 合肥京东方光电科技有限公司 一种微流控芯片的对置基板及微流控芯片

Also Published As

Publication number Publication date
TWI294402B (en) 2008-03-11

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees