TW200738542A - Air table for conveying thin material and conveyance device for thin material - Google Patents

Air table for conveying thin material and conveyance device for thin material

Info

Publication number
TW200738542A
TW200738542A TW095137369A TW95137369A TW200738542A TW 200738542 A TW200738542 A TW 200738542A TW 095137369 A TW095137369 A TW 095137369A TW 95137369 A TW95137369 A TW 95137369A TW 200738542 A TW200738542 A TW 200738542A
Authority
TW
Taiwan
Prior art keywords
air
thin material
external wall
wall part
conveying
Prior art date
Application number
TW095137369A
Other languages
Chinese (zh)
Other versions
TWI385115B (en
Inventor
Noriyuki Nagura
Ryomyo Hamanaka
Setsuji Yumiba
Noriyuki Toriyama
Tsutomu Oguri
Tsutomu Makino
Joji Fukuda
Original Assignee
Nihon Sekkei Kogyo Co Ltd
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Sekkei Kogyo Co Ltd, Shibaura Mechatronics Corp filed Critical Nihon Sekkei Kogyo Co Ltd
Publication of TW200738542A publication Critical patent/TW200738542A/en
Application granted granted Critical
Publication of TWI385115B publication Critical patent/TWI385115B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

To provide an air table for conveying a thin material and a conveyance device for a thin material capable of obtaining large amount of levitation of the thin material while suppressing turbulence of air in a clean room and having high reliability. This air table 14 for conveying the thin material has: an external wall part 20 whose upper face part 16 is a substantially flat box-like body and in which a plurality of air feeding holes 18 for supplying air (gas) to a lower face of a glass substrate 12 are formed in the upper face part 16; a bulkhead part 28 provided in the external wall part 20 so as to separate an inner side of the external wall part 20 from a lower side chamber 22 for introducing air into the external wall part 20 and an upper side chamber 24 adjacent to the air feeding holes 18 and forming a plurality of intermediate vent holes 26 passing through in the vertical direction; and an air stream uniformly distributing damper 30 provided in the upper side chamber 24 to achieve uniform distribution of air stream from the intermediate vent holes 26 into the air feeding holes 18 and damp velocity of air stream.
TW095137369A 2005-10-11 2006-10-11 A pneumatic table for conveying a sheet-like material, and a sheet-like material transport device TWI385115B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005296809A JP4889275B2 (en) 2005-10-11 2005-10-11 Air plate for sheet material conveyance and sheet material conveyance device

Publications (2)

Publication Number Publication Date
TW200738542A true TW200738542A (en) 2007-10-16
TWI385115B TWI385115B (en) 2013-02-11

Family

ID=38017755

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137369A TWI385115B (en) 2005-10-11 2006-10-11 A pneumatic table for conveying a sheet-like material, and a sheet-like material transport device

Country Status (4)

Country Link
JP (1) JP4889275B2 (en)
KR (1) KR20070040307A (en)
CN (1) CN1948107B (en)
TW (1) TWI385115B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5239227B2 (en) * 2007-06-29 2013-07-17 株式会社Ｉｈｉ Levitation unit and levitating transfer device
WO2009028279A1 (en) * 2007-08-24 2009-03-05 Sintokogio, Ltd. Air blowout structure and air blowout unit for air-floating conveyor apparatus, and air-floating conveyor apparatus having the same
JP2009149389A (en) * 2007-12-19 2009-07-09 Myotoku Ltd Floating unit and device having the same
JP4589986B2 (en) * 2008-06-10 2010-12-01 東京エレクトロン株式会社 Substrate heating device
US8511461B2 (en) * 2008-11-25 2013-08-20 Corning Incorporated Gas-ejecting bearings for transport of glass sheets
CN102770359B (en) * 2010-02-26 2014-11-05 康宁股份有限公司 Carousel apparatus with air mounts and air curtains and method of use
JP5010019B2 (en) * 2010-09-09 2012-08-29 東京エレクトロン株式会社 stage
WO2012066613A1 (en) * 2010-11-15 2012-05-24 エヌアイシ・オートテック株式会社 Gas-permeable conveyance table
CN102923480A (en) * 2011-08-12 2013-02-13 大银微系统股份有限公司 Pipeline integration structure of air-floating platform
CN108996115A (en) * 2018-10-20 2018-12-14 马险峰 A kind of ring-type air cushion circular pipe belt type combination bushing formula gas tank of fast-assembling conveyer
CN109018840A (en) * 2018-10-20 2018-12-18 马险峰 A kind of photovoltaic blower ring-type air cushion circular pipe belt type combination fast-assembling conveyer
CN109677933A (en) * 2019-03-05 2019-04-26 长春工业大学 A surface horizontal stripe air suspension type glass substrate handling device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960032667A (en) * 1995-02-28 1996-09-17 김광호 Lead frame transfer method
JP3718014B2 (en) * 1996-11-01 2005-11-16 東レエンジニアリング株式会社 Plate-shaped material transfer device and non-contact transfer line
JPH11268831A (en) * 1998-03-19 1999-10-05 Toray Eng Co Ltd Air flow conveying cell
JPH11268830A (en) * 1998-03-19 1999-10-05 Toray Eng Co Ltd Air flow conveying cell
FR2777267B1 (en) * 1998-04-10 2000-06-02 Rafale Technologie DEVICE FOR CONVEYING OBJECTS BY BLOWING AND ELEMENT DEFINING AT LEAST ONE LONGITUDINAL PORTION OF THE BLOWING CHAMBER OF SAID DEVICE
JP2003063643A (en) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk Thin plate conveying system and apparatus
JP2004307152A (en) * 2003-04-08 2004-11-04 Daiichi Shisetsu Kogyo Kk Reclinable non-contact carrier
JP2004345744A (en) * 2003-05-20 2004-12-09 Hitachi Zosen Corp Air levitation device and air levitation transfer device
JP4217963B2 (en) * 2003-07-08 2009-02-04 株式会社ダイフク Plate-shaped body transfer device

Also Published As

Publication number Publication date
JP4889275B2 (en) 2012-03-07
CN1948107A (en) 2007-04-18
TWI385115B (en) 2013-02-11
KR20070040307A (en) 2007-04-16
JP2007106521A (en) 2007-04-26
CN1948107B (en) 2012-07-04

Similar Documents

Publication Publication Date Title
TW200738542A (en) Air table for conveying thin material and conveyance device for thin material
TW200802549A (en) Vertical plasma processing apparatus for semiconductor process
NZ600445A (en) Potential fluidization device for conveying powder materials in a hyperdense bed
MY152254A (en) Ion generating apparatus
CN105407707A (en) plant cultivation device
MY170796A (en) Blower and ventilation system
MX2013004285A (en) Method and apparatus in a pneumatic material conveying system.
PL397852A1 (en) Device for vacuum pneumatic separation of bulk materials
WO2009010667A3 (en) Method for transporting powdery materials without segregation
CN106629054A (en) Suspension conveying device for liquid crystal glass substrate
WO2007015568A3 (en) Bulk component feeder
EP2091706A4 (en) DISPERSION APPARATUS FOR FIBROUS MATERIAL, EG. CHIPS
JP5764575B2 (en) Breathable transfer table
CN102808166B (en) Raw gas generating device
MX2010009716A (en) Device for removing fine-grained or dust-like solids from a container.
CN101660742B (en) Air duct of UV lamp
TW200629350A (en) Substrate processing system
ATE419205T1 (en) CONTACT-FREE PLATE CONVEYOR, ESPECIALLY FOR GLASS PLATES
TW200619018A (en) Antistatic transfer belt for nonwovens process
WO2006062985A3 (en) Proximity sensor nozzle shroud with flow curtain
CN204854267U (en) Corn drying equipment
RU2007121245A (en) COMPOST DEVICE
TW200702266A (en) Apparatus for transferring of glass panel
TW200613890A (en) A cooling apparatus with a mesh structure
TW200622379A (en) Substrate transportation device (air)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees