TW200743405A - Laser evaporation apparatus and method thereof - Google Patents

Laser evaporation apparatus and method thereof

Info

Publication number
TW200743405A
TW200743405A TW095116616A TW95116616A TW200743405A TW 200743405 A TW200743405 A TW 200743405A TW 095116616 A TW095116616 A TW 095116616A TW 95116616 A TW95116616 A TW 95116616A TW 200743405 A TW200743405 A TW 200743405A
Authority
TW
Taiwan
Prior art keywords
laser
evaporation apparatus
evaporating
substance
evaporating substance
Prior art date
Application number
TW095116616A
Other languages
Chinese (zh)
Other versions
TWI313570B (en
Inventor
Li-Chen Wei
Pei-Hsun Yeh
Original Assignee
Toppoly Optoelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppoly Optoelectronics Corp filed Critical Toppoly Optoelectronics Corp
Priority to TW95116616A priority Critical patent/TWI313570B/en
Publication of TW200743405A publication Critical patent/TW200743405A/en
Application granted granted Critical
Publication of TWI313570B publication Critical patent/TWI313570B/en

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  • Physical Vapour Deposition (AREA)

Abstract

A laser evaporation apparatus is for evaporating a first evaporating substance and a second evaporating substance. The laser evaporation apparatus includes a beam-splitting element, a first containing element and a second containing element. In this case, the beam-splitting element receives a source laser to separate the source laser to a first laser light and a second laser light. The first containing element contains the first evaporating substance, and the first laser light illuminates the first evaporating substance to evaporate the first substance. The second containing element contains the second evaporating substance, and the second laser light illuminates the second evaporating substance to evaporate the second evaporating substance. Besides, a laser evaporation method applied with the laser evaporation apparatus is provided.
TW95116616A 2006-05-10 2006-05-10 Laser evaporation apparatus and method thereof TWI313570B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95116616A TWI313570B (en) 2006-05-10 2006-05-10 Laser evaporation apparatus and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95116616A TWI313570B (en) 2006-05-10 2006-05-10 Laser evaporation apparatus and method thereof

Publications (2)

Publication Number Publication Date
TW200743405A true TW200743405A (en) 2007-11-16
TWI313570B TWI313570B (en) 2009-08-11

Family

ID=45072793

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95116616A TWI313570B (en) 2006-05-10 2006-05-10 Laser evaporation apparatus and method thereof

Country Status (1)

Country Link
TW (1) TWI313570B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472635B (en) * 2013-09-13 2015-02-11 Univ Nat Taiwan Pulsed laser evaporation system

Also Published As

Publication number Publication date
TWI313570B (en) 2009-08-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees