200902171 九、發明說明： 【發明所屬之技術領域】 本發明係有關搬送物之除塵方法及裝置，特別是有關 在鄰接的2個以上的潔淨室間透過搬送物通過用開口部連 續地搬送平面狀搬送物時的搬送物之除塵方法及裝置。 【先前技術】 近年來，在製造電子產業領域之半導體、液晶顯示器， 醫藥品領域之醫藥用包裝容器，食品領域之充塡容器等製 品當中，大多有一邊搬送薄膜、薄板狀之基板等平面狀搬 送物，一邊進行形成、加工之步驟。爲確保製品品質，防 止異物混入’此形成、加工步驟係設在潔淨室內。各步驟 中’各潔淨室被隔開，於該隔開之邊界部設有對搬送物進 行搬送所需的開口部。 專利文獻1提案，於積層體薄膜轉印設備及轉印方法 中’在二個潔淨室邊界部配置隔著薄膜的二個除塵裝置。 專利文獻2提案’將擦摩處理產生之異物排出系外而不飛 散至集塵箱外’防止其附著於連續基板或沈積於周邊裝置 之方法及裝置。專利文獻3提案，在連續擦摩處理裝置中， 爲抑制擦摩所致之亮點故障，在擦摩輥（捲繞擦摩片的輥） 之除塵及擦摩處理後，進行薄膜之除塵。 專利文獻1 曰本專利特開2003-7 1 9 32號公報 專利文獻2 特開2005-266019號公報 專利文獻3 特開平9-166784號公報 【發明內容】 200902171 發明所欲解決之課題 然而，專利文獻1有因搬送張力變動等，於薄膜搬送 物發生振動，而使薄膜遭擦傷、產生塵埃之問題。製造寬 度不同的製品時，超出製品寬度之部分亦碰撞除塵裝置之 氣流而造成薄膜端部振動，附著之塵埃於室內吹起，成爲 污染室內原因。而專利文獻2具有所謂伴隨於薄膜附近之 空氣，無法去除連同薄膜一起搬送之微小異物而飛散至集 塵箱外之問題。專利文獻3則有，於低潔淨度室進行薄膜 之除塵時，除塵後異物再附著，而於高潔淨度室進行時， 除塵前剝落之異物於除塵器下游側再附著之問題。 又、於潔淨室內搬送並除塵之搬送物寬度並非一定， 隨著搬送物種類、批量之變更，搬送物寬度常有不同。此 時，起因於搬送物寬度不同，用以除塵而吹出之氣體產生 亂流，例如光學補償膜之有極微量塵埃附著即於光學特性 有不良影響而必須除塵者，搬送物寬度變更時亦需使氣流 不成爲亂流。 本發明係有鑑於此情事而完成者，其目的在於提供’ 例如於基板等之單片式製程、光學補償膜之製程’抑制因 異物附著於平面狀搬送物所致之缺陷，而能以高良率進行 製造的搬送物之除塵方法及裝置。 用以解決課題之手段 爲達上述目的，申請專利範圍第1項之發明提供’於 介著形成有搬送物通過用開口部之邊界部直列鄰接配置的 複數個潔淨室內被連續搬送之平面狀搬送物的除塵方法’ 200902171 其特徵爲設有，於上述搬送物通過用開口部之位置，以輥 支持上述搬送物正反面之一，同時自與該輥對向配置之加 壓風噴出裝置吹拂氣體於上述搬送物之另一面，藉風壓去 除附著在上述搬送物之異物的除塵步驟。 搬送物之寬度相對小於自加壓風噴出裝置吹出之氣體 的寬度（對應於搬送物寬度方向之寬度），則在無搬送物之 部分氣體被吹出的比率大，易於產生搬送物之寬度變化所 致之氣流紊亂。 因而，本發明因與加壓風噴出裝置對向設有輥，該輥 在被搬送之搬送物的寬度變動時亦能擋住自加壓風噴出裝 置吹出之氣體，氣流即不易紊亂。 依本發明之申請專利範圍第1項，在隔著形成有搬送 物通過用開口部之邊界部直列鄰接配置之複數個潔淨室內 被連續搬送的平面狀搬送物之除塵方法中，於搬送物通過 用開口部，使搬送物爲介於加壓風噴出裝置與輥間之構 造，藉加壓風噴出裝置之風壓去除上游側的潔淨室內之步 驟中產生的附著於搬送物上面之異物，因設於搬送物之另 一面的輥可支持搬送物背面，搬送物端部之振動的發生可 予抑制。又，設在搬送物背面之輥可防止，藉加壓風噴出 裝置的風壓除塵後之異物返回再附著於搬送物背面。 因此可提供，基板等單片式製程、光學補償膜製程中， 抑制異物附著於平面狀搬送物所致之缺陷，而能以高良率 製造之搬送方法。 申請專利範圍第2項係如申請專利範圍第1項，其中 200902171 上述加壓風噴出裝置附加有吸引裝置。 依申請專利範圍第2項，加壓風噴出裝置附加有吸引 裝置’藉加壓風噴出裝置之風壓自搬送物去除異物因由吸 引裝置吸引，可防潔淨室內之再污染。 申請專利範圍第3項係如申請專利範圍第1或2項， 其中上述輥係表面有黏著層之輥。 依申請專利範圍第3項，附著於搬送物背面之異物亦 可藉輥去除。 申請專利範圍第4項係如申請專利範圍第1〜3項中任 一項’其中上述鄰接配置之複數個潔淨室，搬送方向下游 側較之上游側潔淨度係同等或以上。 依申請專利範圍第4項，鄰接配置之複數個潔淨室， 搬送方向下游側較之上游側潔淨度係同等或以上，可抑制 異物附著於平面狀搬送物所致之缺陷故較佳。 申請專利範圍第5項係如申請專利範圍第1〜4項中任 一項’其中上述加壓風噴出裝置附加有超音波產生裝置。 依申請專利範圍第5項，加壓風噴出裝置附加有超音 波產生裝置’吹拂超音波振動之壓縮空氣於搬送物，可有 效去除微小異物。 申請專利範圍第6項係如申請專利範圍第1〜5項中任 一項’其中上述加壓風噴出裝置之加壓風，係使用通過異 物濾除器之空氣。 依申請專利範圍第6項，因加壓風噴出裝置之加壓風 係使用通過異物濾除器之空氣，更能有效去除微小異物。 200902171 申請專利範圍第7項係如申請專利範圍第1〜6項中任 一項’其中上述搬送物係長條狀搬送物。申請專利範圍第 8項係如申請專利範圍第1〜6項中任一項，其中上述搬送 物係單片式搬送物。 爲達成上述目的，申請專利範圍第9項之發明提供搬 送物之除塵裝置，係在隔著形成有搬送物通過用開口部之 邊界部直列鄰接配置的複數個潔淨室內被連續搬送之平面 狀搬送物的除塵裝置’其特徵爲具備，設於上述搬送物通 過用開口部之位置，支持上述搬送物的正反面之一·的輕， 及，與上述輥隔著上述搬送物對向配置之噴氣於於上述搬 送物上面的加壓風噴出裝置。 申請專利範圍第9項之發明係構成申請專利範圍第1 項之方法發明的裝置發明。 申請專利範圍第1 0項係如申請專利範圍第9項，其中 上述搬送物之寬度爲L1’上述加壓風噴出裝置之吹出□的 上述搬送物寬度方向之長度爲L2,上述輥之長度爲L3時， L1<L2SL3之關係成立。 依申請專利範圍第10項之發明，在搬送物之寬度爲 L1，加壓風噴出裝置之吹出口的上述搬送物寬度方向之長 度爲L2 ’輥之長度爲L3時，L1<L2S L3之關係成立則特別 有效。 發明效果 依本發明可提供一種在隔著形成有搬送物通過用開口 部之邊界部直列鄰接配置之複數個潔淨室內被連續搬送之 200902171 平面狀搬送物的除塵方法及裝置，其係可抑制異物附著於 平面狀搬送物所致之缺陷，得以高良率進行製造之搬送物 的除塵方法及裝置。 【實施方式】 以下藉所附圖式詳細說明本發明之搬送物的除塵方法 及裝置之較佳實施形態。此外，茲就光學補償膜製程作說 明，但不限於光學補償膜製程，若搬送物是平面狀則任何 製程皆適用。 第1圖係使用具有配向膜形成用樹脂層之薄膜製造光 學補償膜之製造裝置的一例。如第1圖，從製成光學補償 膜截至捲取後之步驟，可以是連續地進行一貫生產。自附 有配向膜形成用樹脂層之膜卷1 2，附有配向膜形成用樹脂 層之薄膜14由送出機16送出，透過由擦摩輥18、固定於 輥台之導輥20及附設於擦摩輥之除塵機22所構成之擦摩 裝置進行擦摩處理’所形成之配向膜的表面，以鄰接擦摩 裝置而設置的表面除塵機22除塵。形成有配向膜之透明樹 脂膜14由驅動輥搬送’配向膜上，以塗敷機24塗敷含液 晶性碟型化合物之塗液’其次使溶劑蒸發後，在加熱區26 以碟型向列相形成溫度加熱塗層（於此並蒸發塗層之殘留 溶劑），形成碟型向列相液晶層。 其次’上述液晶層以紫外線（U V)燈2 8照射紫外線，液 晶層交聯。爲使交聯，液晶性碟型化合物必須使用有交聯 性官能基之液晶性碟型化合物。使用無交聯性官能基之液 晶性碟型化合物時，省略此紫外線照射步驟，直接冷卻。 -10- 200902171 此時，必須使碟型向列相於冷卻中不變，作 成有配向膜及液晶層之透明樹脂膜由檢查裝 明樹脂膜表面之光學特性，檢查有無異常。 機3 4積層於液晶層表面之保護膜3 2，由捲取 於此，光學補償膜製程主要由1)透明樹月 驟A，2)表面形成有配向膜形成用樹脂層之透 於樹脂層表面施行擦摩處理，於透明樹脂膜 之擦摩步驟B，3 )塗敷含液晶性碟型化合物之 ^ : 上的液晶性碟型化合物塗敷步驟C，4)乾燥該 中之溶劑蒸發之乾燥步驟D，5)將該液晶層 使用有交聯性官能基之液晶性碟型化合物時 晶層之交聯步驟E，6)捲取形成有該配向膜及 樹脂膜的捲取步驟F構成，各步驟A〜F之裝 各設於隔開之潔淨室內。各潔淨室於連接的 設有搬送物通過用開口部40。 本發明係在隔著形成有1搬送物通過用開 i 直列鄰接配置之複數個潔淨室內被連續搬送 物的除塵方法，其特徵爲設有，在上述搬送 部之位置，上述搬送物正反面之一以輥支持 成對向於該輥之加壓風噴出裝置吹拂氣體於 另一面，藉風壓去除附著在上述搬送物之異牛 以下說明擦摩步驟B之潔淨室b及塗敷 室c。 通常，用以去除異物之加壓風噴出裝置 急速冷凍。形 置30測定透 其次，由積層 裝置3 6捲取。 旨膜14送出步 :明樹脂膜上， 上形成配向膜 塗液於配向膜 塗層使該塗層 固化，亦即， ，以光照射液 液晶層之透明 :置如第1圖， 二個潔淨室間 口部之邊界部 之平面狀搬送 物通過用開口 ，同時由配置 上述搬送物之 g的除塵步驟。 步驟C之潔淨 係設在潔淨室 -11- 200902171 C內的塗敷機2 4之上游側。 透明樹脂膜14係由導輥42、44導引行進。本發明中’ 如第2圖，於搬送物通過用開口部40設有藉風壓去除附著 在透明樹脂膜14之異物46的加壓風噴出裝置48°而隔著 透明樹脂膜1 4設有與加壓風噴出裝置4 8對向的輥5 0。加 壓風噴出裝置48宜附加有吸引裝置。加壓風噴出裝置48 如第3圖可考慮（A)噴口 48a、吸口 48b各一者、（B)噴口 48a 有一而吸口 48b有二者、及（C)噴口 48a有二而吸口 48b有 一者等。 在隔著形成有搬送物通過用開口部之邊界部直列鄰接 配置之複數個潔淨室內被連續搬送之平面狀搬送物的除塵 方法中，於搬送物通過用開口部40係透明樹脂膜14介於 加壓風噴出裝置48及輥50間之構造，藉加壓風噴出裝置 48之風壓去除上游側潔淨室b之步驟中產生而附著在透明 樹脂膜14單面之異物46，設在透明樹脂膜14另一面之輥 50可支持透明樹脂膜14，故可抑制透明樹脂膜14的端部 振動之發生。又，因設在透明樹脂膜14另一面之輥，可防 藉加壓風噴出裝置48之風壓除塵後的異物返回透明樹脂 膜14之另一面再附著。並因加壓風噴出裝置48附加有吸 引裝置，藉加壓風噴出裝置48之風壓自透明樹脂膜μ去 除之異物所致的潔淨室b、c內之污染可予防止。支持搬送 物正反面之一的輥50係以如第2圖設在透明樹脂膜1 4上 面爲宜。 因此，光學補償膜製程中’平面狀搬送物之異物附著 -12- 200902171 所致之缺陷受抑制，能以高良率製造。 加壓風噴出裝置48之風壓雖係壓力愈高異物去除能 力愈強，但若以超出i OKPa使用時，搬送物振動而與加® 風噴出裝置4 8接觸之可能性升高，即必須賦予吸引裝置° 加壓風噴出裝置48使用之風壓宜係8〜40KPa。 與加壓風噴出裝置48對向之輥50和透明樹脂膜14之 餘面角通常係38度以上，43〜180度較佳。 使用之透明樹脂膜14 一般含有寬300〜2000mm、長45 〜10000m、厚2〜200# m之聚對酞酸乙二酯（PET)、聚- 2,6-萘酸乙二酯、二乙酸纖維素、三乙酸纖維素、乙酸丙酸纖 維素、聚氯乙烯、聚二氯亞乙烯、聚碳酸酯、聚醯亞胺、 聚醯胺等塑膠膜，紙，塗敷或積層有聚乙烯、聚丙烯、乙 烯丁烯共聚物等碳原子數2〜10之α-聚烯烴類之紙等構成 之撓性帶狀物，或以該帶狀物爲基材其表面形成有加工層 之帶狀物。 塗液於透明樹脂膜14之塗敷量以2〜15mL/m2爲宜。 塗液於透明樹脂膜14之塗敷寬度以500〜2000mm爲宜。 塗液之黏度係以0.8〜10cp(0.8〜10xlCT3Pa· s)爲宜。 以上本發明之搬送方法已就長條狀搬送物光學補償膜 之製程作說明，而不限於長條狀搬送物光學補償膜之製 程，亦適用於搬送物係基板等單片式搬送物之製程。 第4圖示，搬送薄板狀基板等平面狀搬送物，同時作 形成、加工之步驟中，隔著形成於連接二個潔淨室間之搬 送物通過用開口部的邊界部，連續搬送單片式搬送物15之 -13- 200902171 樣態。 平面狀搬送物15係由導輥42、43、44引導行進。如 第4圖（A)，於搬送物通過用開口部40設有藉風壓去除附 著在單片式搬送物15的異物46之加壓風噴出裝置48。而隔 著單片式搬送物15與加壓風噴出裝置48對向設有輥50。 如此，在隔著形成有搬送物通過用開口部之邊界部直 列鄰接配置之複數個潔淨室內被連續搬送之平面狀搬送物 的除塵方法中，搬送物通過用開口部40係單片式搬送物15 介於加壓風噴出裝置48及輥50間之構造，藉加壓風噴出 裝置48之風壓去除上游側潔淨室1之步驟所產生而附著在 單片式搬送物15的一面之異物46，設在單片式搬送物15 另一面之輥50可支持單片式搬送物15,故能抑制單片式搬 送物1 5端部振動之發生。又，以設在單片式搬送物1 5另 一面之輥，可防藉加壓風噴出裝置48之風壓除塵後之異物 返回單片式搬送物15另一面再附著。 因此，不只光學補償膜等長條狀搬送物之製程，搬送 物係基板等單片式搬送物之製程中，亦可抑制平面狀搬送 物的異物附著所致之缺陷，以高良率製造。 加壓風噴出裝置48與搬送物15之距離Η愈小則異物 去除能力愈強，而搬送物1 5之張力低時，因張力變動與加 壓風噴出裝置48接觸之可能性升高。另一方面，加壓風噴 出裝置4 8與搬送物15之距離Η愈大則異物去除能力愈 低，搬送物之附著異物無法全部去除。因此，第4圖（Β)係 第4圖（Α)虛線部分40a之放大圖，而加壓風噴出裝置48。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Dust removal method and device for transporting objects when transporting objects. [Prior Art] In recent years, in the manufacturing of semiconductors, liquid crystal displays, pharmaceutical packaging containers for pharmaceuticals, and filling containers for foods, etc., many of them are used to transport thin films and thin-plate substrates. The step of forming and processing the object while carrying it. In order to ensure the quality of the product, the foreign matter is prevented from entering. The formation and processing steps are set in the clean room. In each step, each of the clean rooms is partitioned, and an opening required for transporting the conveyed material is provided at the boundary portion of the partition. Patent Document 1 proposes to arrange two dust removing devices with a film interposed between the two clean room boundary portions in the laminated film transfer device and the transfer method. Patent Document 2 proposes a method and apparatus for preventing foreign matter generated by rubbing treatment from being discharged outside the dust box and preventing it from adhering to a continuous substrate or deposited on a peripheral device. Patent Document 3 proposes that in the continuous rubbing treatment device, in order to suppress a bright spot failure caused by rubbing, dust removal of the film is performed after the dust removing and rubbing treatment of the rubbing roller (roller for winding the rubbing sheet). Patent Document 1 Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In the document 1, there is a problem that the film conveyance vibrates due to a change in the conveyance tension or the like, and the film is scratched and dust is generated. When a product having a different width is produced, the portion exceeding the width of the product also collides with the air current of the dust removing device to cause the end portion of the film to vibrate, and the adhered dust is blown up inside the room, which causes contamination indoors. On the other hand, Patent Document 2 has a problem that it is accompanied by air in the vicinity of the film, and it is impossible to remove minute foreign matter transported together with the film and to fly out of the dust box. In Patent Document 3, when the dust is removed from the low-cleanness chamber, the foreign matter adheres after the dust is removed, and when the dust is removed in the high-cleanness chamber, the foreign matter peeled off before the dust removal adheres to the downstream side of the dust collector. Moreover, the width of the conveyance conveyed and removed in the clean room is not constant, and the width of the conveyed material often varies depending on the type of the conveyed object and the batch size. In this case, due to the difference in the width of the conveyed material, the gas blown out by the dust is turbulent. For example, if the optical compensation film has a slight amount of dust adhering, the optical property may be adversely affected, and the dust must be removed. Make the airflow not turbulent. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a process for suppressing the adhesion of foreign matter to a planar conveyance by, for example, a process of a monolithic process such as a substrate or an optical compensation film. A method and apparatus for removing dust from a manufactured product. In order to achieve the above-mentioned object, the invention of the first aspect of the invention provides a planar transport in which a plurality of clean rooms are arranged in a row adjacent to each other in a boundary portion in which a boundary portion for a conveyance passage is formed. The dust removing method of the article '200902171 is characterized in that one of the front and back surfaces of the conveyance is supported by a roller at a position where the conveyance passes the opening, and the gas is blown from the pressurized air ejection device disposed opposite the roller. On the other side of the conveyed object, a dust removing step of removing foreign matter adhering to the conveyed object by air pressure is performed. When the width of the conveyed material is relatively smaller than the width of the gas blown from the pressurized air discharge device (corresponding to the width in the width direction of the conveyed object), the ratio of the gas to be blown out in the portion where no conveyed material is blown is large, and the width of the conveyed object is likely to change. The airflow is disordered. Therefore, in the present invention, since the roller is provided opposite to the pressurized air ejection device, the roller can block the gas blown from the pressurized air ejection device when the width of the conveyed material changes, and the air flow is less likely to be disturbed. According to the first aspect of the invention, in the dust removal method of the planar conveyance which is continuously conveyed in a plurality of clean rooms which are arranged adjacent to each other in the boundary portion where the conveyance passage opening portion is arranged, the conveyed object passes through The opening is used to make the conveyed material a structure interposed between the pressurized air discharge device and the roller, and the foreign matter adhering to the upper surface of the conveyed object generated by the step of removing the upstream clean room by the wind pressure of the pressurized air discharge device is used. The roller provided on the other side of the conveyance supports the back surface of the conveyance, and the occurrence of vibration of the conveyance end portion can be suppressed. Further, the roller provided on the back surface of the conveyance can be prevented from returning to the back surface of the conveyed object by the wind pressure of the pressurized air discharge device. Therefore, it is possible to provide a transfer method which can be manufactured at a high yield by suppressing defects caused by foreign matter adhering to a planar conveyance in a single-piece process such as a substrate or an optical compensation film process. The second item of the patent application scope is the first item of the patent application scope, wherein the above-mentioned pressurized air ejection device is attached with a suction device. According to the second item of the patent application, the pressurized air ejection device is provided with a suction device. The wind pressure from the pressurized air ejection device removes foreign matter from the moving object and is attracted by the suction device, thereby preventing recontamination in the clean room. The third item of the patent application scope is the first or second item of the patent application, wherein the roller system has an adhesive layer on the surface thereof. According to item 3 of the patent application, foreign matter attached to the back of the conveyor can also be removed by rollers. The fourth aspect of the patent application is the one of the first to third aspects of the patent application, wherein the plurality of clean rooms adjacent to each other are disposed in the same manner as the upstream side cleanliness in the transport direction. According to the fourth item of the patent application, the plurality of clean rooms disposed adjacent to each other are preferably equal to or higher than the upstream side cleanliness in the transport direction, and it is preferable to prevent foreign matter from adhering to the flat conveyance. The fifth aspect of the patent application is the one of the first to fourth aspects of the patent application, wherein the pressurized air ejection device is provided with an ultrasonic generating device. According to the fifth item of the patent application scope, the pressurized air ejection device is provided with an ultrasonic generating device that blows the compressed air of the ultrasonic vibration to the conveyed object, thereby effectively removing minute foreign matter. The sixth aspect of the patent application is the one of the first to fifth aspects of the patent application, wherein the pressurized air of the pressurized air ejection device uses air passing through the foreign matter filter. According to item 6 of the patent application scope, the pressurized air of the pressurized air ejection device uses the air passing through the foreign matter filter to more effectively remove minute foreign matter. The invention is the seventh aspect of the patent application, wherein the said conveyance is a strip-shaped conveyance. The eighth aspect of the patent application is the one of the first to sixth aspects of the patent application, wherein the conveyance is a one-piece conveyance. In order to achieve the above object, the invention of the ninth aspect of the invention provides a dust-removing device for conveying a conveyance, which is conveyed in a plane in which a plurality of clean rooms disposed adjacent to each other in a boundary portion of the opening passage portion through which the conveyance is formed are continuously conveyed. The dust removing device of the present invention is characterized in that it is provided at a position of the opening for the conveyance passage, and supports one of the front and back surfaces of the conveyed object, and a jet that is disposed opposite to the conveyance by the roller. A pressurized air ejection device on the upper surface of the transport object. The invention of claim 9 of the patent application constitutes the device invention of the method invention of claim 1 of the patent application. According to the ninth aspect of the patent application, the width of the conveyance is L1', and the length of the conveyance in the width direction of the conveyance □ of the pressurized air discharge device is L2, and the length of the roller is At L3, the relationship of L1 < L2SL3 is established. According to the invention of claim 10, when the width of the conveyed object is L1 and the length of the conveyance in the air outlet of the pressurized air discharge device is L2', the length of the roller is L3, the relationship of L1 < L2S L3 It is especially effective when it is established. According to the present invention, it is possible to provide a dust removing method and apparatus for continuously transporting a 200902171 planar conveyance in a plurality of clean rooms arranged adjacent to each other in a boundary portion in which a conveyance passage opening portion is formed, which is capable of suppressing foreign matter. A method and apparatus for removing dust from a conveyor that is adhered to a defect caused by a planar conveyance and manufactured at a high yield. [Embodiment] Hereinafter, preferred embodiments of the dust removing method and apparatus for a conveyed object of the present invention will be described in detail with reference to the accompanying drawings. In addition, the optical compensation film process is described, but it is not limited to the optical compensation film process, and any process is applicable if the conveyance is planar. Fig. 1 is an example of a manufacturing apparatus for producing an optical compensation film using a film having a resin layer for forming an alignment film. As shown in Fig. 1, from the step of forming the optical compensation film up to the winding, continuous production can be carried out continuously. A film roll 1 2 having a resin layer for forming an alignment film, and a film 14 having a resin layer for forming an alignment film are sent out by a feeder 16 and passed through a rubbing roller 18, a guide roller 20 fixed to the roll table, and attached thereto. The rubbing device formed by the rubbing machine 22 of the rubbing roller performs the surface of the alignment film formed by the rubbing treatment, and the surface dust remover 22 provided adjacent to the rubbing device is dedusted. The transparent resin film 14 on which the alignment film is formed is conveyed by the driving roller to the 'alignment film, and the coating liquid containing the liquid crystal dish compound is applied by the coater 24'. Next, the solvent is evaporated, and the heating zone 26 is in the dish type. The phase forming temperature heats the coating (here and evaporates the residual solvent of the coating) to form a dish-shaped nematic liquid crystal layer. Next, the liquid crystal layer is irradiated with ultraviolet rays by an ultraviolet (U V) lamp 28, and the liquid crystal layer is crosslinked. In order to crosslink, a liquid crystal dish compound having a crosslinkable functional group must be used as the liquid crystal dish compound. When a liquid crystal dish compound having no crosslinkable functional group is used, the ultraviolet irradiation step is omitted and directly cooled. -10- 200902171 At this time, it is necessary to make the nematic phase of the dish-like phase constant during cooling, and to form a transparent resin film having an alignment film and a liquid crystal layer, and to check the optical characteristics of the surface of the resin film, and to check for abnormality. The protective film 32 is laminated on the surface of the liquid crystal layer, and is wound up. The optical compensation film process mainly consists of 1) a transparent resin layer A, 2) a resin layer for forming an alignment film forming resin layer. The surface is rubbed, the rubbing step of the transparent resin film is performed B, 3) the liquid crystal disc compound containing the liquid crystal disc compound is coated with the coating step C, 4) the solvent is evaporated. Drying step D, 5) the step of crosslinking the layer of the liquid crystal layer using the liquid crystal layer compound having a crosslinkable functional group, E) 6) winding up the winding step F in which the alignment film and the resin film are formed Each of the steps A to F is installed in a separate clean room. Each of the clean rooms is provided with a transport passage opening 40 for connection. The present invention is a dust removing method in which a plurality of conveyed objects are continuously conveyed in a plurality of clean rooms arranged adjacent to each other by the opening i, and is provided at a position of the conveying portion, the front and back of the conveying material The pressurized air blowing device that is opposite to the roller is supported by the roller to blow the gas to the other surface, and the clean room b and the coating chamber c of the rubbing step B are described below by the air pressure to remove the foreign matter attached to the transported material. Usually, the pressurized air ejection device for removing foreign matter is rapidly frozen. The shape 30 is measured and then taken up by the laminating device 36. The film 14 is sent out on the bright resin film, and an alignment film coating liquid is formed on the alignment film coating to cure the coating layer, that is, the liquid crystal layer is transparent by light irradiation: as shown in Fig. 1, two cleanliness The planar conveyance of the boundary portion at the boundary portion of the chamber portion passes through the opening and is subjected to a dust removing step of arranging the conveyance. The cleaning of step C is provided on the upstream side of the coating machine 24 in the clean room -11-200902171 C. The transparent resin film 14 is guided by the guide rolls 42, 44. In the present invention, as shown in Fig. 2, the moving material passage opening 40 is provided with a pressurized air discharge device 48 for removing the foreign matter 46 adhering to the transparent resin film 14 by the wind pressure, and is provided with a transparent resin film 14 The roller 50 is opposed to the pressurized air ejection device 48. The pressurized air ejection device 48 is preferably provided with a suction device. The pressurized air ejection device 48 can be considered as shown in Fig. 3 (A) one of the nozzle 48a and the suction port 48b, (B) one of the nozzles 48a and the suction port 48b, and (C) the nozzle 48a has two and the suction port 48b has one. Wait. In the dust removing method of the planar conveying material which is continuously conveyed in a plurality of clean rooms which are arranged adjacent to each other by the boundary portion of the opening passage portion, the transparent resin film 14 is disposed in the conveying material passage opening 40. The structure between the pressurized air discharge device 48 and the roller 50 is a foreign material 46 which is generated on the one side of the transparent resin film 14 by the wind pressure of the pressurized air discharge device 48 to remove the upstream side clean room b, and is provided in the transparent resin. The roller 50 on the other side of the film 14 can support the transparent resin film 14, so that the occurrence of vibration of the end portion of the transparent resin film 14 can be suppressed. Moreover, the foreign matter which has been removed by the wind pressure of the pressurized air discharge device 48 can be prevented from returning to the other side of the transparent resin film 14 by the roller provided on the other surface of the transparent resin film 14. Further, the suction device is attached to the pressurized air ejection device 48, and the contamination in the clean rooms b and c by the foreign matter removed from the transparent resin film μ by the wind pressure of the pressurized air ejection device 48 can be prevented. The roller 50 supporting one of the front and back surfaces of the conveyer is preferably provided on the transparent resin film 14 as shown in Fig. 2. Therefore, in the optical compensation film process, the defects caused by the foreign matter adhesion of the planar conveyance -12-200902171 are suppressed, and it can be manufactured at a high yield. Although the wind pressure of the pressurized air ejection device 48 is higher, the foreign matter removal ability is higher, but if it is used beyond the iOKPa, the possibility of the carrier vibrating and coming into contact with the blasting device 48 is increased, that is, it is necessary The suction device is provided. The wind pressure used by the pressurized air ejection device 48 is preferably 8 to 40 KPa. The remaining surface angle of the roller 50 and the transparent resin film 14 opposed to the pressurized air ejection device 48 is usually 38 degrees or more, and preferably 43 to 180 degrees. The transparent resin film 14 used generally contains polyethylene terephthalate (PET), polyethylene-2,6-naphthoate, diacetate having a width of 300 to 2000 mm, a length of 45 to 10,000 m, and a thickness of 2 to 200 #m. Plastic film such as cellulose, cellulose triacetate, cellulose acetate propionate, polyvinyl chloride, polyvinyl divinyl chloride, polycarbonate, polyimine, polyamide, paper, coated or laminated with polyethylene, a flexible ribbon composed of a paper having a carbon number of 2 to 10, such as a polypropylene or an ethylene butylene copolymer, or a paper having a processed layer formed on the surface thereof. Things. The coating amount of the coating liquid on the transparent resin film 14 is preferably 2 to 15 mL/m2. The coating width of the coating liquid on the transparent resin film 14 is preferably 500 to 2000 mm. The viscosity of the coating liquid is preferably 0.8 to 10 cp (0.8 to 10 x 1 CT3 Pa·s). The above-described transfer method of the present invention has been described with respect to the process of the long-length conveyance optical compensation film, and is not limited to the process of the long-length conveyance optical compensation film, and is also applicable to the process of transporting a single-piece conveyance such as a substrate. . In the step of forming and processing the planar conveyance such as the thin plate-shaped substrate, the single-piece type is continuously conveyed via the boundary portion of the opening for the conveyance passing between the two clean rooms. The conveyance 15-13-200902171. The planar conveyance 15 is guided by the guide rollers 42, 43, and 44. In the conveyance material passage opening 40, a pressurized air discharge device 48 for removing the foreign matter 46 attached to the one-piece conveyance 15 by the wind pressure is provided in the conveyance passage opening portion 40. On the other hand, the single-piece conveyance 15 is provided with the roller 50 opposed to the pressurized air discharge device 48. In the dust removal method of the planar conveyance which is continuously conveyed in the plurality of clean rooms which are arranged adjacent to each other in the boundary portion where the conveyance passage opening portion is formed, the conveyance passage opening portion 40 is a single-piece conveyance. 15 is a structure between the pressurized air discharge device 48 and the roller 50, and the foreign matter attached to one side of the one-piece conveyance 15 by the step of removing the upstream clean room 1 by the wind pressure of the pressurized air discharge device 48 The roller 50 provided on the other side of the one-piece conveyance 15 can support the one-piece conveyance 15, so that the occurrence of vibration of the end portion of the single-piece conveyance 15 can be suppressed. Further, the roller provided on the other side of the one-piece conveyance material 15 prevents the foreign matter which has been removed by the wind pressure of the pressurized air discharge device 48 from returning to the other side of the single-piece conveyance material 15 and reattaches it. Therefore, not only the process of the long-length conveyance such as the optical compensation film but also the process of transporting the single-piece conveyance such as the substrate can suppress the defects caused by the adhesion of the foreign matter of the planar conveyance, and can be manufactured at a high yield. When the distance between the pressurized air discharge device 48 and the conveyed material 15 is small, the foreign matter removing ability is increased, and when the tension of the conveying material 15 is low, the possibility of contact with the pressurized air discharging device 48 due to the tension fluctuation is increased. On the other hand, when the distance between the pressurized air discharge device 48 and the conveyed material 15 is increased, the foreign matter removing ability is lowered, and the foreign matter adhering to the conveyed material cannot be completely removed. Therefore, Fig. 4 (Β) is an enlarged view of the broken line portion 40a of Fig. 4 (Α), and the pressurized air ejection device 48
200902171 與搬送物15之距離Η在恰當之範圍。依本案申冒I 驗，通常係以1〜3mm，較佳爲’以1〜2mm對搬 設置加壓風噴出裝置48即可。爲於搬送物寬度變更 風噴出及吸引寬度仍能不變而進行製造，設置加壓 裝置48與輥50之距離H’於如同距離Η之範圍。 輥5 0之直徑小則與搬送物1 5之間隙調整有困難。 徑係1 00mm以上，依本案申請人之實驗，較佳爲，Ϊ 〜3 0 0 m m。 較佳爲，輥50係表面具有以去除異物爲目的 的輥。搬送物15之附著在加壓風噴出裝置48背 亦可藉輥去除之故。使用有以去除異物爲目的之 輥時，黏著力低則異物去除能力低。另一方面， 則搬送速度變動大，且搬送物帶電，於嗣後步驟 問題，污物附著之可能性升高。因此，黏著力有 圍’依本案申請人之實驗，通常係4〇〜135hPa，45 更佳。 鄰接配置之複數個潔淨室，搬送方向下游側 比則潔淨度係以同等或以上爲宜。鄰接配置之複 室’搬送方向下游側與上游側比時潔淨度高，或 同’平面狀搬送物的異物附著所致之缺陷即可予 佳。如第3圖’不於加壓風噴出裝置附加吸引裝 第5圖’爲加壓風噴出裝置48之空氣能往搬送方 行進，使加壓風噴出裝置4 8往下游側傾斜。 更以於加壓風噴出裝置4 8附加有超音波產 ί人之實 送物15 .時加壓 ;風噴出 於此， 通常直 I：徑 1 5 0 .黏著層 丨之異物 ;著層之 i著力大 發其它 :妥適範 ^ lOOhPa :上游側 :個潔淨 :淨度相 I制故較 丨時，如 I上游側 :裝置爲 200902171 宜。於加壓風噴出裝置附加超音波產生裝置，因可吹拂超 音波振動之壓縮空氣於搬送物，可有效去除微小異物。並 且，加壓風噴出裝置48之加壓風係以使用通過異物濾除器 之空氣爲宜。因加壓風噴出裝置之加壓風使用通過異物濾 除器之空氣，可更有效去除微小異物。 如第6圖，搬送物之寬度爲L1，加壓風噴出裝置之吹 出口的搬送物寬度方向之長度爲L2，輥之長度爲L3時， 以L1<L2S L3之關係成立爲宜。L1<L2S L3之關係成立即 可有效抑制搬送物端部振動之發生，可防藉加壓風噴出裝 置之風壓除塵後異物返回搬送物背面再附著。 實施例 其次以第1圖之光學補償膜製造裝置1 0說明實施例。 (光學補償膜用塗液之調製） 對於下述碟型化合物TE-8的R(l)與R(2)重量比4: 1 之混合物’添加環氧乙烷改質三羥甲丙烷三丙烯酸酯 (V#3 60，大阪有機科學（股）製）1〇重量％，乙酸丁酸纖維素 (CAB 531-1，伊士曼化學公司製）〇.6重量％，光聚合引發劑 (Irgacure 907,日本汽巴（股）製）3重量％，增感劑（KAYACURE DET-X，日本化藥（股）製”重量％，最終成爲該混合物之32 重量％丁酮溶液。更於該含液晶性化合物之液添加氟系界面 活性劑（含有氟脂族基之共聚物，MEGA FAC F7 80，大日本 油墨（股）製）0.3重量％，爲塗液。 -16- 200902171200902171 The distance from the conveyor 15 is within the appropriate range. In the case of the present invention, the pressurized air ejection device 48 is usually placed at 1 to 3 mm, preferably at 1 to 2 mm. In order to change the width of the conveyed material, the air ejection and the suction width are still constant, and the distance H' between the pressing device 48 and the roller 50 is set to be in the range of the distance Η. When the diameter of the roller 50 is small, it is difficult to adjust the gap with the conveyance material 15. The diameter of the system is more than 100 mm. According to the experiment of the applicant, it is preferably Ϊ~3 0 0 m. Preferably, the surface of the roller 50 has a roller for the purpose of removing foreign matter. The adhesion of the conveyed material 15 to the back of the pressurized air ejection device 48 can also be removed by a roller. When a roller for the purpose of removing foreign matter is used, the adhesion is low and the foreign matter removal ability is low. On the other hand, the conveyance speed fluctuates greatly, and the conveyance is charged, and the possibility of dirt adhesion increases in the subsequent step. Therefore, the adhesion is surrounded by the applicant's experiment, usually 4〇~135hPa, 45 is better. In the case of a plurality of clean rooms arranged adjacent to each other, the cleanliness of the downstream side of the transport direction is preferably equal to or higher than the clean room. It is preferable that the downstream side of the transfer chamber adjacent to the transport direction has a higher degree of cleanliness than the upstream side, or a defect due to adhesion of foreign matter to the planar transported object. As shown in Fig. 3, the suction air is not attached to the pressurized air discharge device. Fig. 5 is a view in which the air of the pressurized air discharge device 48 travels toward the conveyance side, and the pressurized air discharge device 48 is inclined toward the downstream side. Moreover, the pressurized air ejector device 4 8 is attached with a supersonic wave to produce a solid material. The pressure is applied; the wind is sprayed here, usually straight I: diameter 1 5 0. Adhesive layer of foreign matter; layered i focus on the big hair other: proper range ^ lOOhPa: upstream side: a clean: clarity phase I is more ambiguous, such as I upstream side: the device is 200002171. The ultrasonic generating device is attached to the pressurized air ejection device, and the compressed air that is capable of blowing the ultrasonic vibration is used to transport the object, thereby effectively removing minute foreign matter. Further, it is preferable that the pressurized air of the pressurized air discharge device 48 is air that passes through the foreign matter filter. Since the pressurized air of the pressurized air ejection device uses the air passing through the foreign matter filter, the minute foreign matter can be removed more effectively. As shown in Fig. 6, the width of the conveyed material is L1, the length of the conveyance direction of the blower outlet of the pressurized air discharge device is L2, and when the length of the roll is L3, the relationship of L1 < L2S L3 is preferably established. The relationship between L1 < L2S L3 is immediately suppressed, and the vibration of the end portion of the conveyed object can be effectively suppressed, and the foreign matter can be prevented from returning to the back side of the conveyed object by the wind pressure of the pressurized air ejecting device. [Embodiment] Next, an embodiment will be described with reference to the optical compensation film manufacturing apparatus 10 of Fig. 1. (Modulation of coating liquid for optical compensation film) For the mixture of R(l) and R(2) in a weight ratio of 4:1 of the following dish compound TE-8, 'addition of ethylene oxide-modified trimethylolpropane triacrylate Ester (V#3 60, manufactured by Osaka Organic Science Co., Ltd.) 1% by weight, cellulose acetate butyrate (CAB 531-1, manufactured by Eastman Chemical Co., Ltd.) 6.6% by weight, photopolymerization initiator (Irgacure) 907, manufactured by Nippon Ciba Co., Ltd., 3% by weight, sensitizer (KAYACURE DET-X, manufactured by Nippon Kayaku Co., Ltd.), and finally became a 32% by weight solution of methyl ketone in the mixture. A liquid-based compound was added with a fluorine-based surfactant (a copolymer containing a fluoroaliphatic group, MEGA FAC F7 80, manufactured by Dainippon Ink Co., Ltd.) in an amount of 0.3% by weight, and was a coating liquid. -16- 200902171
(塗敷條件） •刮塗用棒裝置.··直徑8mm之圓柱狀芯材密集捲繞有 0.0 7 m m鐵絲之絲棒 .塗敷速度·· .20m /分鐘 •塗敷張力· · · 200N/m [比較例1 ] 如專利文獻1(特開2003 -7 1 932)，於第1圖之搬送物通 過用開口部40設加壓風噴出裝置48。並於加壓風噴出裝置 48附加吸引裝置。而加壓風噴出裝置48係設成相對於搬送 物之距離Η爲2mm。 [比較例2] 如專利文獻2(特開2005 -2660 1 9)，於第1圖之搬送物 通過用開口部40設吸引裝置。而吸引裝置係設成相對於搬 送物之距離Η爲2mm。 [比較例3 ] 於第1圖之搬送物通過用開口部40無任何裝設。 [實施例1] 200902171 於第1圖之搬送物通過用開口部40設加壓風噴出裝置 4 8。而加壓風噴出裝置4 8係設成相對於搬送物之距離Η爲 2mm。並與加壓風噴出裝置48對向隔著搬送物設輥50。輥 徑係1 5 0 m m。 [實施例2] 於第1圖之搬送物通過用開口部40設加壓風噴出裝置 48。並於加壓風噴出裝置48附加吸引裝置。而加壓風噴出 裝置48係設成相對於搬送物之距離Η爲2mm。並與加壓風 噴出裝置48對向隔著搬送物設輥50。輥徑係150mm。 [實施例3] 於第1圖之搬送物通過用開口部40設加壓風噴出裝置 48。而加壓風噴出裝置48係設成相對於搬送物之距離Η爲 2mm。並與加壓風噴出裝置48對向隔著搬送物設表面有黏 著層之輥50。輥徑係150mm。 [實施例4] 於第1圖之搬送物通過用開口部40設加壓風噴出裝置 48。並於加壓風噴出裝置48附加吸引裝置。而加壓風噴出 裝置48係設成相對於搬送物之距離Η爲2mm。並與加壓風 噴出裝置48對向隔著搬送物設表面有黏著層之輥50。輥徑 係 1 5 0 m m。 (評估） 長條狀搬送物2000m於塗敷、檢查後，異物去除數之 比較結果如表1 °關於振動係藉由目視，通常通過搬送物 通過用開口部40之振動的50 %以下評估爲〇，50〜100 %爲 200902171 △，1 00%以上爲X。關於異物附著評估係塗敷後異物附著所 致之缺陷，以檢査機，通常之異物缺陷數的30%以下w 爲〇〇〇，30〜50%爲〇〇，50〜70%爲〇，70〜1〇〇%爲^， 1 0 0 %以上爲X。 表1 加壓風噴出裝置 吸引裝置 輥 振動 ----- 一異物附_〗古結果 比較例1 有 有 X △ 比較例2 有 X X 比較例3 Δ X 實施例1 有 有 〇 ---- 實施例2 有 有 有 〇 〇〇 實施例3 有 黏著輥 〇 〇 實施例4 有 有 黏著輥 〇 〇〇〇 (試驗結果） 由表1之結果可知，於連接的二個潔淨室間藉由搬送 物通過用開口部連續地搬送之步驟中，於搬送物通過用開 口部，搬送物上面藉加壓風噴出裝置之風壓去除附著在搬 送物上面之異物，同時，與加壓風噴出裝置對向隔著上述 搬送物設有輥之實施例1〜4，相較於並非如此之比較例1 〜3，在振動及異物附著評估中得到良好結果。由實施例1 與實施例2之比較，於加壓風噴出裝置附加吸引裝置則異 物附著評估結果更良好。而由實施例2與實施例4之比較， 輥表面有以去除異物爲目的之黏著層者，在異物附著評估 中的結果更良好。 -19* 200902171 [實施例5〜9 ] 更以實施例1之條件變更距離Η及輥徑進行試驗。變 更之條件及異物附著評估結果如表2。 表2 加壓風噴出裝置與搬送物之距離 H (mm) 輥徑 Φ (mm) 異物附著評估結果 實施例5 1 150 〇〇 實施例6 5 150 △ 實施例1 2 150 〇 實施例7 2 100 〇 實施例8 2 300 〇〇 實施例9 2 80 〇(Coating conditions) • Bar coating device for stripping. · A cylindrical core material with a diameter of 8 mm is densely wound with a wire rod of 0.0 7 mm iron wire. Coating speed · · 20 m / min • Coating tension · · · 200 N [Comparative Example 1] As disclosed in Patent Document 1 (JP-A-2003-7 932), the pressurized air ejection device 48 is provided through the opening 40 in the conveyance of the first embodiment. A suction device is attached to the pressurized air ejection device 48. The pressurized air discharge device 48 is set to have a distance Η of 2 mm with respect to the conveyed object. [Comparative Example 2] As disclosed in Patent Document 2 (Japanese Laid-Open Patent Publication No. Hei No. 2005-2660-9), the object to be conveyed in the first embodiment is provided with a suction device through the opening portion 40. The suction device is set to have a distance Η of 2 mm with respect to the conveyed object. [Comparative Example 3] The conveyance passage opening portion 40 in Fig. 1 was not attached. [Embodiment 1] 200902171 The conveyed material passing through the opening 40 is provided with a pressurized air discharge device 4 8 in Fig. 1 . The pressurized air ejection device 48 is set to have a distance Η of 2 mm with respect to the conveyed object. The roller 50 is placed opposite to the pressurized air discharge device 48. The roll diameter is 1 500 m. [Embodiment 2] The pressurized air discharge device 48 is provided through the opening 40 in the conveyance of the first embodiment. A suction device is attached to the pressurized air ejection device 48. The pressurized air ejection device 48 is set to have a distance Η of 2 mm with respect to the conveyed object. The roller 50 is placed opposite to the pressurized air discharge device 48. The roll diameter is 150 mm. [Embodiment 3] The pressurized air discharge device 48 is provided through the opening 40 in the conveyance of the first embodiment. On the other hand, the pressurized air ejection device 48 is set to have a distance Η of 2 mm with respect to the conveyed object. Further, a roller 50 having an adhesive layer on the surface of the conveyance member is opposed to the pressurized air discharge device 48. The roll diameter is 150 mm. [Embodiment 4] The pressurized air ejection device 48 is provided through the opening 40 in the conveyance of the first embodiment. A suction device is attached to the pressurized air ejection device 48. The pressurized air ejection device 48 is set to have a distance Η of 2 mm with respect to the conveyed object. Further, a roller 50 having an adhesive layer on the surface of the conveyance member is opposed to the pressurized air discharge device 48. The roll diameter is 1 500 m. (Evaluation) The results of the comparison of the number of foreign matter removals after the coating and inspection of the long strips of 2000 m are as shown in Table 1 ° with respect to the vibration system, and are usually evaluated as 50% or less of the vibration of the opening 40 by the conveyance. 〇, 50~100% is 200902171 △, and 100% or more is X. Regarding the foreign matter adhesion evaluation system, the defect caused by the adhesion of the foreign matter after application, in the inspection machine, usually 30% or less of the number of defects of foreign matter is 〇〇〇, 30 to 50% is 〇〇, 50 to 70% is 〇, 70 ~1〇〇% is ^, and 1 0 0% is X. Table 1 Pressure of the suction device of the pressurized air ejection device----- A foreign object attached _〗 Ancient results Comparative example 1 There are X △ Comparative Example 2 XX Comparative Example 3 Δ X Example 1 There is 〇---- Example 2 There are some examples. Example 3 There is an adhesive roller. Example 4 There is an adhesive roller (test result) From the results of Table 1, it is known that the two clean rooms are connected by transfer. In the step of continuously transporting the object through the opening, the object passes through the opening, and the foreign matter adhering to the upper surface of the conveyed object is removed by the wind pressure of the pressurized air discharge device on the conveyed object, and the pressurized air discharge device is In Examples 1 to 4 in which the rolls were placed across the above-mentioned conveyed materials, good results were obtained in vibration and foreign matter adhesion evaluation as compared with Comparative Examples 1 to 3 which were not. From the comparison between Example 1 and Example 2, the foreign matter adhesion evaluation result was better in the case where the suction device was attached to the pressurized air ejection device. On the other hand, in comparison with Example 4, the surface of the roll had an adhesive layer for the purpose of removing foreign matter, and the result of the foreign matter adhesion evaluation was better. -19* 200902171 [Examples 5 to 9] Tests were carried out by changing the distance Η and the roll diameter under the conditions of Example 1. The conditions for the change and the evaluation results of the foreign matter adhesion are shown in Table 2. Table 2 Distance between pressurized air ejection device and conveyed material H (mm) Roll diameter Φ (mm) Foreign matter adhesion evaluation result Example 5 1 150 〇〇 Example 6 5 150 △ Example 1 2 150 〇 Example 7 2 100 〇Example 8 2 300 〇〇Example 9 2 80 〇
(試驗結果） 由表2之結果可知，由實施例1、5及6，加壓風噴出 裝置48與搬送物之距離Η在恰當範圍，較佳為，以1〜2mm 對搬送物設置加壓風噴出裝置48。由實施例1及7〜9知， 輥50之直徑宜在150〜300 mm的範圍。 【圖式簡單說明】 第1圖係光學補償片製程之一例的略圖 第2圖係本發明有關之搬送物通過用開口部的說明圖 第3圖係本發明有關之加壓風噴出裝置及輥的說明圖 第4圖係搬送物係單片式搬送物時的搬送物通過用開 口部之說明圖 第5圖係本發明有關之搬送物通過用開口部的加壓風 噴出裝置之說明圖 -20 - 200902171 第6圖係本發明有關之搬送物通過用開口部的說明前 視圖 【主要元件符號說明】 10 光學補償膜製造裝置 12 膜卷 14 透明樹脂膜 15 搬送物 16 送出機 18 擦摩輥 20 導輥 22 除塵機 24 塗敷機 26 力口熱區 2 8 紫外線（UV)燈 3 0 檢查裝置 3 2 保護膜 34 積層機 3 6 捲取裝置 40 搬送物通過用開口部 42 、 43 、 44 導輥 46 異物 4 8 加壓風噴出裝置 5 0 輥(Test Results) As is apparent from the results of Table 2, in Examples 1, 5, and 6, the distance between the pressurized air discharge device 48 and the conveyed material is within an appropriate range, and it is preferable to pressurize the conveyed material at 1 to 2 mm. Wind blasting device 48. It is understood from Examples 1 and 7 to 9 that the diameter of the roller 50 is preferably in the range of 150 to 300 mm. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing an example of an optical compensation sheet process. FIG. 2 is an explanatory view of a passage for passing a moving object according to the present invention. FIG. 3 is a pressurized air ejection device and a roller according to the present invention. FIG. 4 is an explanatory view of the passage for passing the passage of the conveyance passage when the conveyance is a single-piece conveyance. FIG. 5 is an explanatory view of the pressurized air discharge device for the passage for passing the conveyance of the present invention. 20 - 200902171 Fig. 6 is a front view showing the opening for passing the object according to the present invention. [Description of main components and symbols] 10 Optical compensation film manufacturing apparatus 12 Film roll 14 Transparent resin film 15 Carrier 16 Feeder 18 Wiper roller 20 Guide roller 22 Dust collector 24 Coater 26 Force hot zone 2 8 Ultraviolet (UV) lamp 3 0 Inspection device 3 2 Protective film 34 Laminator 3 6 Winding device 40 Transporting passage opening portions 42, 43, 44 Guide roller 46 foreign matter 4 8 pressurized air ejection device 5 0 roller