TW200905151A - Heat treatment equipment - Google Patents

Heat treatment equipment Download PDF

Info

Publication number: TW200905151A
Authority: TW; Taiwan
Prior art keywords: heat treatment; gas; heat; chamber; catalyst
Prior art date: 2007-05-22

Application number

TW097115911A

Other languages

English (en)

Chinese (zh)

Inventor

Hisamitsu Tezen

Original Assignee

Espec Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-05-22

Filing date

2008-04-30

Publication date

2009-02-01

2008-04-30 Application filed by Espec Corp filed Critical Espec Corp

2009-02-01 Publication of TW200905151A publication Critical patent/TW200905151A/zh

Links

238000010438 heat treatment Methods 0.000 title claims abstract description 169
239000003054 catalyst Substances 0.000 claims description 63
239000000463 material Substances 0.000 claims description 19
235000010627 Phaseolus vulgaris Nutrition 0.000 claims 1
244000046052 Phaseolus vulgaris Species 0.000 claims 1
239000007789 gas Substances 0.000 description 93
230000000694 effects Effects 0.000 description 9
238000000034 method Methods 0.000 description 4
238000000926 separation method Methods 0.000 description 4
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
238000010586 diagram Methods 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
239000008267 milk Substances 0.000 description 3
210000004080 milk Anatomy 0.000 description 3
235000013336 milk Nutrition 0.000 description 3
238000006864 oxidative decomposition reaction Methods 0.000 description 3
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
239000011148 porous material Substances 0.000 description 3
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
230000008859 change Effects 0.000 description 2
239000001301 oxygen Substances 0.000 description 2
229910052760 oxygen Inorganic materials 0.000 description 2
238000005192 partition Methods 0.000 description 2
230000008569 process Effects 0.000 description 2
238000000859 sublimation Methods 0.000 description 2
230000008022 sublimation Effects 0.000 description 2
206010036790 Productive cough Diseases 0.000 description 1
241000239226 Scorpiones Species 0.000 description 1
239000000956 alloy Substances 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
239000013078 crystal Substances 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
238000007599 discharging Methods 0.000 description 1
238000000605 extraction Methods 0.000 description 1
239000011521 glass Substances 0.000 description 1
230000008676 import Effects 0.000 description 1
230000006872 improvement Effects 0.000 description 1
235000013372 meat Nutrition 0.000 description 1
239000002184 metal Substances 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
229910000510 noble metal Inorganic materials 0.000 description 1
229910052763 palladium Inorganic materials 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
229910052697 platinum Inorganic materials 0.000 description 1
230000002265 prevention Effects 0.000 description 1
239000002994 raw material Substances 0.000 description 1
230000009467 reduction Effects 0.000 description 1
239000004576 sand Substances 0.000 description 1
239000002689 soil Substances 0.000 description 1
210000003802 sputum Anatomy 0.000 description 1
208000024794 sputum Diseases 0.000 description 1
239000000758 substrate Substances 0.000 description 1
238000009423 ventilation Methods 0.000 description 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Chamber type furnaces specially adapted for treating semiconductor wafers
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
- F27B17/0016—Chamber type furnaces
- F27B17/0083—Chamber type furnaces with means for circulating the atmosphere
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases or liquids
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases or liquids
- F27D2007/023—Conduits
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
- F27D2007/045—Fans

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Furnace Details (AREA)
Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

TW097115911A 2007-05-22 2008-04-30 Heat treatment equipment TW200905151A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2007135291A JP4630307B2 (ja)	2007-05-22	2007-05-22	熱処理装置

Publications (1)

Publication Number	Publication Date
TW200905151A true TW200905151A (en)	2009-02-01

Family

ID=40100403

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW097115911A TW200905151A (en)	2007-05-22	2008-04-30	Heat treatment equipment

Country Status (4)

Country	Link
JP (1)	JP4630307B2 (ja)
KR (1)	KR101461675B1 (ja)
CN (1)	CN101311659B (ja)
TW (1)	TW200905151A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2010144939A (ja) *	2008-12-16	2010-07-01	Tohoku Univ	循環式の基板焼成炉
JP6076631B2 (ja) *	2012-07-12	2017-02-08	光洋サーモシステム株式会社	ヒータユニットおよび熱処理装置
JP6855687B2 (ja) *	2015-07-29	2021-04-07	東京エレクトロン株式会社	基板処理装置、基板処理方法及び基板処理装置のメンテナンス方法及び記憶媒体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH087656Y2 (ja) *	1989-08-15	1996-03-04	千住金属工業株式会社	リフロー炉
JP2921139B2 (ja) *	1991-02-14	1999-07-19	松下電器産業株式会社	リフロー装置
JP3959141B2 (ja) *	1996-11-12	2007-08-15	エスペック株式会社	昇華物対策付き熱処理装置
JP3739233B2 (ja) *	1999-06-28	2006-01-25	光洋サーモシステム株式会社	排気型バッチ式オーブン
JP2001241862A (ja) *	1999-12-20	2001-09-07	Ngk Insulators Ltd	脱臭機能付き焼成炉
JP2005037024A (ja) *	2003-07-18	2005-02-10	Matsushita Electric Ind Co Ltd	プラズマディスプレイパネルの焼成炉
JP2005071632A (ja) *	2003-08-25	2005-03-17	Fujitsu Hitachi Plasma Display Ltd	プラズマディスプレイパネルの製造方法及びその装置
JP2006017357A (ja) *	2004-06-30	2006-01-19	Espec Corp	熱処理装置
JP4331784B2 (ja) *	2008-07-22	2009-09-16	株式会社フューチャービジョン	基板焼成炉の給排気方法

2007
- 2007-05-22 JP JP2007135291A patent/JP4630307B2/ja active Active
2008
- 2008-04-29 CN CN2008100946535A patent/CN101311659B/zh active Active
- 2008-04-30 TW TW097115911A patent/TW200905151A/zh unknown
- 2008-05-19 KR KR1020080046035A patent/KR101461675B1/ko active Active

Also Published As

Publication number	Publication date
KR101461675B1 (ko)	2014-11-13
CN101311659B (zh)	2011-07-13
JP2008292012A (ja)	2008-12-04
CN101311659A (zh)	2008-11-26
JP4630307B2 (ja)	2011-02-09
KR20080102972A (ko)	2008-11-26

Publication	Publication Date	Title
TW484001B (en)	2002-04-21	Cleanroom and cleanroom ventilation method
TW200905151A (en)	2009-02-01	Heat treatment equipment
TW476845B (en)	2002-02-21	Drier, drier assembly and drying method
WO2010093434A1 (en)	2010-08-19	Isotopologues of lenalidomide
TWI275762B (en)	2007-03-11	Heat treatment apparatus
CN101314516B (zh)	2012-05-30	热处理装置
WO2022012751A1 (en)	2022-01-20	Disinfecting device
TWI445914B (zh)	2014-07-21	Plate cooling device and heat treatment system
CN113772245B (zh)	2023-04-07	传递箱
CN206793403U (zh)	2017-12-26	一种废气降解净化设备
JP2010284167A (ja)	2010-12-24	細胞培養施設
TW200302505A (en)	2003-08-01	Ozone processing apparatus
CN217732385U (zh)	2022-11-04	一种基于高寒地区使用具有杀菌节能的通风电梯
CN211595604U (zh)	2020-09-29	反应管底部支架和核酸提取仪
TWI362476B (ja)	2012-04-21
JP6402916B2 (ja)	2018-10-10	細胞培養方法及び細胞培養設備
TWM321674U (en)	2007-11-01	Baking apparatus with venting and condensing device
CN216770008U (zh)	2022-06-17	一种原料药用的烘干设备
CN216961382U (zh)	2022-07-15	紫外线菊渣杀菌装置
CN214953325U (zh)	2021-11-30	一种建筑材料用甲醛含量检测装置
CN216855294U (zh)	2022-07-01	一种儿科护理用便携式奶瓶消毒设备
CN215085939U (zh)	2021-12-10	一种草酸生物工程初步分离设备
JP2003307383A (ja)	2003-10-31	乾燥炉
CN215133889U (zh)	2021-12-14	一种用于核黄素法血液病毒灭活系统的风循环系统
JP2023036497A (ja)	2023-03-14	室内空気清浄器