200920493 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種具備有喷墨記錄喷頭（以下稱「噴墨 喷頭」）的喷墨塗佈裝置之清洗方法、喷嘴檢查方法、、塗 佈控制方法、及成膜方法，特別係關於一種用以將在喷黑 喷頭的喷嘴面及其周邊所附著的髒汙、碎屬、雜質等去^ 的清洗方法、喷嘴檢查方法、塗佈控制方法、及成膜方法。 另外，本§兄明書中的喷墨噴頭，在無特別聲明之前提 下，係指具備有單一或複數喷嘴的喷墨噴頭。 【先前技術】 噴墨記錄裝置中，為了維持高品質的記錄質量，便必須 將在噴墨5己錄噴頭的油墨吐出面所殘留油墨、雜質 以 去除。 ’、 專利文獻1所揭示係在使擦拭刮板相對向於噴頭的油 =吐出面，藉由進行擦拭動作而清洗的方法中，為了提升 /月洗丨生此便就擦拭刮板的材質、角度、接觸方式等下工 夫。 專:文獻2所揭示係相對吐出口在上述刮板清洗之回 木作方向的下游側設置油墨吸收用狹縫，將經上述刮柄 刮取的油墨利用具有平行於複數個吐出口且t = =的油墨吸收用狹縫，吸取上述油墨以提== 嘴獻3中有揭示：從喷霧器喷嘴朝噴墨噴頭的嘴 背及八周邊口人出而施行上述噴嘴面的洗淨之後，將附著於 97106211 200920493 噴墨喷頭㈣叙其周叙洗 專利文獻4中所揭示配Γ^之⑷以“刮除等。 依既定間距排列之複數喷嘴的喷 移動，而從上述喷嘴將配向膜的液滴子==相對 方法’其中’上述嘴墨喷頭對 :上34基板上的 # M l· 'f ^ ^ ϋ 、 'L 土板相對移動的方向， 述基板中構成格子狀的像素排列方向，呈既定角度 專利文獻5所揭示薄臈形成裝置，係 -或複數喷墨•喷頭（其係分別具有m .排^ =:)之？支撐構造體；以及具有在該等複數喷:： 動之二：：、,：：上，可於該等複數噴嘴之間進行相對移 動之基板搬达平σ的基板搬送機構；而 薄膜形成用溶液喷射於在上述美:複數贺嘴將 基板表面上，而施行塗佈並斜台上所搭載的 裝置；其特徵在於具備有：至少薄膜形成 台、噴墨•喷頭、及上述喷頭支撐構造體之===平 直以及為了能在減壓環境下施:喷射= 成膜，而將上述真空槽㈣施行減壓的減壓手段。 專利文獻6所揭示配向膜形成方法，係且 圖材料依液滴進輸^ 3案，核查上述贺墨噴嘴異常的檢查步驟；以及當 查步驟判斷液滴圖案在既定範圍内時，便使上述；墨心 := 向，並使用上述噴墨噴嘴將配向臈材料利用液二 在該基板上進行落滴而成的配向膜之成膜步驟。 97106211 200920493 專利文獻7所揭示裝置 圖案形成區域，從液滴吐出法’係包括有對基板的 置之製造方法；其特徵在It頭吐出液體材料之步驟的装 域以外的既定區域吐出上^括有：對除上相案形成區 (專利文獻υ曰本專 (專利文獻2)日本# 04—291364號公報 个寻才Η寺開2004-42571號公報 (專利文獻3)日本專利特開2〇〇2 —ΐ9ΐ32號公報 (專利文獻4)日本專利特開2006-32關號公報 (專利文獻5)曰本專利特開2006-289355號公報 (專利文獻6)日本專利特開2006-058772號公報 (專利文獻7)日本專利特開2003-282245號公報 【發明内容】 (發明所欲解決之問題） 本發明之目的在於提供—種可解決後述技術問題的喷 墨塗佈裝置之清洗方法、噴嘴檢查方法、塗佈控制方法、 及成膜方法。 (解決問題之手段） +第1發月的喷墨喷頭之清洗方法，其特徵在於，將噴墨 喷頭之洗淨區域，利用具有洗淨液供應口與抽吸口的單元 構件覆蓋，並藉由從抽吸口產生抽吸力作用，而從與抽吸 口相對向的洗淨液供應口，朝洗淨區域喷射洗淨液而加以 第2發明係就第丨發明，其中，在上述洗淨後，使喷墨 噴碩與單元構件僅些微離開，藉由對單元構件作用抽吸 97106211 200920493 力’而使噴墨喷頭的洗淨區域乾燥。 第3發明係就第1或2項發明，其中，洗淨液係使用由 具備使液材溶解之因子的溶劑所構成之液體。 第4發明的噴墨喷頭之檢查方法，係使從噴墨喷頭具有 的喷嘴所噴射出的液材，落滴於檢查用構件，並根據落滴 的液滴圖案檢查上述噴嘴異常者；其特徵在於，上述檢查 用構件係由液材落滴處與非落滴處的反： 所構成。 …（京材 明係就第4發明’其中’上述檢查用構件係由液 材的洛滴而溶解的薄膜。 嗜：：墨塗佈控制方法’其特徵在於，在從噴墨 業後，將在喷墨喷頭内的流路所填充的吐出 材：：為低揮發性取代材料，並於剛要開始吐出作業 之則，將取代材料再次取代為吐出用液材。 一 第7發明係就第6發明，其中，^ ^ ^ 有使液材〉 谷解之因子的溶劑所構成之液體。 、 第8發明的喷墨製膜方法，係藉 膜者；其特徵在於，等待由兮^ 數噴射ッ驟鈿仃製 乾燥至未流動程度之驟所嘴射的工件上液滴 又ι俊將液材朝接觸或 步驟所落滴之液材液滴的位置處。 且則 第9發明係就第8發明，其 並減少每一次的噴射量。 ㈢加喷射步驟的次數， 第10發明係就第8或9項發明，1 圖案。 ，、中，由膜形成佈線 97106211 200920493 (發明效果） (Ο就喷墨喷頭的清洗，因為刮板等固體物不接觸到噴 墨喷頭之噴嘴及其周邊，因而可在不發生磨損粉塵的情況 下’清洗噴墨喷頭。 再者’因為制洗淨液’因此在油,1#液材已乾燥等情 況’仍可以強力洗淨力進行清洗。 再者’亦具有可縮短作業時間，可廉價製作的特徵。 別1类可广檢視性檢測出嘴墨噴頭的噴嘴不良情況，特 別係透明液材中可明顯地提高檢視性。 (3)解決噴墨喷頭的塗佈控制問題，可 動作。特別係對高揮發性的液材具更高的效果出 面1=/。墨的綱’相較鳴手法，可縮小整體 【實施方式】 本發明係以噴墨塗佈裝置相 基礎。 的下述4個技術思想為 (1)清洗方法及機構 [i ]課題 第1技術思想的課題在於改盖 所附著液滴之去除能力較低情形°。贺墨喷頭的射出面上 再者’因為習知清洗機構的尺 目標亦屬待解决問題。 大’因而更小型化的 題 再者’如習知不使用堅硬刮板施 。理由係若使刮板接觸 累广洗亦屬待解決問 97106211 土贺碩的噴嘴或其周邊部 200920493 ΐ嘴粉塵的問題。當產生磨損粉塵，便成為 貧化堵塞的原因，有導致周邊環境遭汗染的問題。此 艾若有磨損粉塵之產生可能性’在無塵室内使用 p艮制。 [Π]主旨 =將喷墨喷頭射出面上所附著的液材去除，使所附著的 ^以接觸到將液材溶解的洗淨液（洗淨劑），利用洗淨液 將液材溶解較具效果。 =者’在上述射出面上形成將液材射出的射出口，而 遺:地使其周邊接觸到洗淨液屬為重要。此就射出面設 有稷數射出口的噴墨喷頭而言，特別重要。 第1技術思想係從喷墨嘴頭射出面一端所供應的洗淨 二〜t述射*面的表面上流動，並從距供應洗淨液之--端進行回收。一邊使用洗淨液從射出面之一端 的液材溶解，一邊流動至射出面的相 、:而猎4可無遺漏且效率佳地將射出面施行清洗。 子從射出面—端的複數位置將洗淨液供應給射出 洗淨對向端的複數位置將洗淨液回收。此處就供應 /之、立置數並不需要與將洗淨液回收的位置數相同。 ，者係從喷墨噴頭射出面的長邊方向側之—端供應 口你亚從相同射出面長邊方向側的相對向端將洗淨液 離，可提升洗淨效：墨射出面上的洗淨液流動距 -有複數射出口的喷墨噴頭，對於尺寸變大的單元亦 97106211 200920493 為有效。 再者’經洗淨的射出面因洗 機時間，最好絲Λ ·、、、1但為能縮短待 ^ ’好知仃乾趣。經洗淨的射出面丹 為自然乾燥或吹氣錢，目為可防止射出面、=攻好 由上述’若在喷墨喷頭射出液于染。 從喷墨喷頭所射出液滴的量精度及： 位置精度。 1千上的洛滴 較佳態樣的洗淨液係由具有將油墨溶 溶劑（例如使油墨溶解之主成分的溶劑）構成。的無色 但是广般就噴墨印表機所使用的油墨可分類為 :二員料糸。所謂「染料」係指利用載體介質將分子進行： =洛合的著色劑。載體介質係在室溫下呈液態或固離。 :吊用的載體介質係水、或水與有機共溶劑的混合 I係以水為主成分，並在其中含有著色劑、以及在 :止堵塞等情況之目的下所含有之諸如甘油等濕潤劑。當 載體介質係使用水的情況’一般此種油墨亦出現耐水堅牢 性偏低的缺點。 ^謂「顏料」係指雖不溶於載體介質中，但依小粒子形 散或懸浮，平常為了不致發生凝聚與沉澱現象，便由 二政劑之使用而呈安定化的著色劑。此種化合物多數已為 省知例如存在將有機顏料或礙黑等顏料使用界面活性劑 或分散劑予以微粒子化，並藉由分散於水等介質中而使用 作為著色劑的顏料油墨等。 本技術思想係無關染料系或顏料系均可適用。油墨的黏 97106211 11 200920493 度係以數十cps程度的低黏度者為主流，但是在可進行飛 散喷出的前提下，亦可適用在數百cps程度的 者。 ’又工 另外，本技術思想尚可使用於諸如印刷基板的佈線圖案 印刷、對微小零件施行潤滑劑之塗佈、或户外耐光性顯示 材料印刷,硬化油墨印刷等情況所使料功能性油墨。 [111 ]實施順序 噴墨噴頭的清洗係依照A〜D步驟的順序實施（參昭圖 6)。另外，「B.洗淨作業」係就圖3所示構造的順序例進 行說明。 《A.噴墨喷頭對清洗機構的安置》 使喷墨喷頭1〇與清洗機構的洗淨單元2〇相抵接。即， 使喷墨喷頭10下面，依覆蓋在洗淨單元20中央部呈凹狀 設置的受液部21之方式，抵接於洗淨單元20上面。清洗 凸唇23(cleaner lip)便成為噴墨噴頭1〇下面與洗淨單 元20上面的接觸面。 《B.洗淨作業》 1) 開啟洗淨液嘴嘴電磁閥31a、31b，而 電磁閥仏、训相連接的流路。 2) 利用側喷嘴大氣開放閥32a、32b阻斷與大氣間之連 通二而位於與經由該開放閥32a、32b相連接流路呈連通 狀態的位置處。（利用開放閥32a將洗淨單元2〇與電磁閥 31a相連通，而利用開放閥3扑將電磁閥31b與排放 相連通。） ' ^ 97106211 12 200920493 3)利用排放閥2 2，使嘴射器3 7 部21相連通，並開啟負壓用電磁 4)利用截至上述3)為止 路由喷射器37作用負壓， 淨液供應至洗淨單元2〇。 、與洗淨單元2〇的受液 閥 34a 、 34b 。 的步驟，便對洗淨單元20的流 便將洗淨液瓶丨3内所儲存的洗 =供應至洗淨單元2〇的洗淨液，便從洗淨液供應 供應於噴墨喷頭1〇。洗淨液供應口 25係靠近嘴墨 下面外周形成’從洗淨液供應口 25所排出的洗淨液 效率地供應於喷墨噴頭10下面的外周端附近。 旁 6)對喷墨喷頭1G下面所供應的洗淨液，在喷墨喷頭 :面流動’並從與喷墨1〇下面的洗淨液供應側之 ，附近所形成的洗淨液回收σ 26，再度回收於洗淨單元 中’或在到達洗淨液回收口 26之前，便離開喷墨喷頭 10下面，而回收於洗淨單元20的受液部21中。受液邛 H通於排放閥22’而排放闕22則位於將經由排放闕 的:、他流路、與受液部21間之連通阻斷之位置處，因 而在爻液部21中滯留洗淨液。 從洗/爭液回收口 26流入於洗淨單元2〇的洗淨液，經由 排放閥22及噴射器3 7而回收於廢液槽4 〇中。 7)經充分施行洗淨之後，便將洗淨液喷嘴31a、31b關 閉’並將負壓用電磁閥34a、34b關閉’而使侧喷嘴大氣 4放閥32a、32b位於與大氣相連通的位置。藉此，便停 止洗淨液對洗淨單元2Q的供應，受液部21的壓力從負壓 轉移為大氣壓。 ' 97106211 13 200920493 《c.喷墨噴頭自清洗機構的脫離》 頭二喷下墨喷頭1〇下面離開洗淨單元20上面，便在噴墨喷 頭10下面盘法秦置；〇 n , 、 接著要於/沾於 20上面之間形成間隙。該間隙基於 ::的乾煉作業’而設為產生適當 《D.乾燥作業》 * 1)為將廢液槽40與洗淨單亓？ 22’將負壓用電磁間一開啟叫 通US受與廢液槽4°便相連 洗淨液便朝廢液槽二C部21中所儲存的 液槽40回收。 成為廢液的洗 >尹液便由廢 置者二下面與洗淨單元20上面之間設 宁亚從上述間隙將抵銷受 入於受液部21中。在該間隙中。 負甏的大氣流 喷頭1 ίΊ nr & μ㈢隙中、机動的大氣具有使在喷f 贺碩10下面所附著的洗淨 在贺墨 /淨液滴落於受液部21上，並=用，而所滴下的洗 可藉由對噴墨喷頭10下面虚洗^ 回收。另外，亦 而調整氣流（負壓力）。 /早凡20間的距離調整， 4)在受液部21 t所儲存 後，當亦保持該狀態，則在上：經由廢液槽4〇回收之 嘴墨噴頭10下面乾燥的作用 T尹流動的空氣具有使 射出液材的射出口，因為可在兮賀墨喷頭10下面形成有 的情況進行乾燥，因此 =下面不會接觸到其他物質 態。 將上吨射出口保持於極潔淨的狀 97106211 200920493 5)將噴墨噴頭1G下面充分乾燥後，使負壓用電磁闕 4a 34b產生動作而位於封閉位置，停止洗淨單元2〇 受液部21的負壓供應。 6)然後，使供應閥33產生動作，而將噴墨噴頭丨〇與液 材供應瓶12相連通，便將液材流路整合成可將液材供應 於噴·墨喷頭1 〇的狀態。 一 [i v ]效果 據如上述所說明的第1技術思想，因為利用洗淨液施 行清洗，因此不會產生磨損粉塵。 再者，因為為利用負壓的作用而將洗淨液喷射的原理， 因此若喷墨噴頭未密接洗淨單元便不供應洗淨液。所以， 即使萬一喷墨喷頭與洗淨單元相離開，仍可藉由真空破壞 而停止洗淨液的供應，可防止將洗淨液喷出於洗淨單元外 的情況發生。 再者，因為乾燥作業亦是利用負壓作用實施，因此可防 U止洗淨單元的外部遭受洗淨液的污染。 (2 )噴嘴檢查方法及機構 [i ]課題 立t知的喷墨塗佈裝置由於屬於油墨方式，所以因噴嘴故 p早噴嘴朝向、噴嘴被液材阻塞等原因，導致有發生無法 對必要處適當地塗佈必要量液滴的問題。 再者，如專利文獻6所揭示，就於檢查用薄膜上滴下液 :而實施2檢查方法中’因為經落滴後，在到達影像辨識 …、相機之則’液滴的形狀便將崩散，因而即使對液滴形狀 97106211 15 200920493 施行影像辨識，仍無法精度佳地施行檢查。 [⑴主旨 第2技術思想係如專利文獻6所揭示，屬於藉由將液材 滴下於檢查用構件（受滴物）而執行喷嘴檢查。不同於專利 文獻6之處在於：並非著眼於所塗佈的液材（液滴），而是 屬於：滴物中就經液材塗佈的部分、與其他部分的對比。 士杈佳形態的本發明係受滴物由具溶解性材質的檢查用 :尊膜構成。藉此’即使對檢視性差的透明液材，該液材所 =滴處仍會溶解，使檢查用薄膜產生渾濁（透明度改變、 或呈不透明）。所以，提高所落滴處的檢視性，便可 地k測出所落滴之處。特別係使用高透明度液體材料 效果更為顯著。 的 液材所落滴的受滴物配合所射出的液材而適當選擇，重 液材落滴部分的反射率會改變。若受滴物的落滴處 便因亂反射等而改變反射率，因此便可利用爹傻 ==取落滴處。可為由落滴改變反射率的；滴 、 ，’且σ亦可為液材滲入受滴物中的態樣。液材 ::广受滴物中的態樣，就非以溶劑為主成分的液體材料 (例如以水為溶劑的液體材料）特別有效。 文滴，最好在液材落滴的瞬間便迅速溶解（或渗透 跡=1=”:上f的液材之保持時間偏長，落滴痕 Μ或滲透二==散的材質，而是使用溶 穿 態材質的受滴物。例如以甲茉 為洛劑的液體材料，最好使用聚苯乙烯系薄膜。受滴物2 97106211 16 200920493 子：：：：θ因液材的落滴而溶解達受滴物背面的厚度。 文缝最好為透明，料必—定要透明，亦可著色。重 由-#刀與非^滴部分的識別性佳。受滴物當然係 層I:。料構成，但涵蓋表面經塗佈者、依複數薄膜形成 就對叉滴物落滴的液材識別，可使用諸如⑽照相機等 攝像農置、雷射感測器等感測裝置。 ’V像處理係例如針對涵蓋落滴處的攝像視野影像，施行 邊緣擷取或二值化，藉此便擷轉滴處。 [i i i ]實施順序 針對噴嘴的檢查步驟，就圖7(a)所示構造的 行說明。 1)使捲取用輥82旋轉，使新的檢查用薄膜72位於喷墨 噴頭10下方。此處，位於喷墨喷頭1〇下方的檢查用薄膜 72係由板73定位，正確地保持與喷墨喷頭丨〇間之距離。 + 2)從喷墨噴頭10中吐出正式液體71 ’並落滴於檢查用 薄膜72上面。由落滴使檢查用薄膜72溶解，而留下落滴 的痕跡。 3) 更使捲取用輥82旋轉，而使檢查用薄膜72的落滴位 置位於攝像裝置74上方。 4) 利用攝像裝置74拍攝檢查用薄膜72。另外，攝像裝 置74的拍攝可使檢查用薄膜72停止後再實施，亦可在使 檢查用薄膜72移動的狀態下實施。 5) 根據由攝像裝置74所取得的影像資料，檢查嗔墨喷 97106211 17 200920493 頭10的狀態。從落滴痕的「脫 「 堵塞事項，而從落滴位置的偏離」之直徑」便可檢查 (3 )塗佈控制方法 σ檢查飛散不良情況。 [i ]問題 課題在於：藉由防止喑 況，而實現穩㈣不良情 液材吐出動作停止時，嘴墨更了具有所需精度。 燥’因液材的增黏化、從液材之固形^出口料之流路乾 所吐出液材的飛行彎曲情況，導致 而發生堵塞、 作的課題。 …、法進行穩定吐出動 再者，若液材的吐出穩定性惡化 所需精度產品之問題，在量有…、法“出要求 吐出作業起至撕下一伽 氣知中，從對一工件進行的 、 個工件施行吐出作孝之門ν /Έ 工件搬出、下一工件的搬入/定 乍業之間，必須施行 此期間，喷墨喷頭不進行吐 丰處理專處理。在 機而導致在噴黑須待機，但卻因待 的課題。喷财所填充的液材^發生乾燥現象 ΠΠ主旨 =技術思想的特徵在於：經吐出作業後， 碩内的流路中所填充的吐出 =墨嗔 (取代材料)，並於正要開始吐出二為：揮發性液材 再卢m U 開始土出作業之别，便將取代材料 且:為。出用液材。此處’取代材料最好屬於對液材 /、心解作用的液體、或具洗淨作用的液體。 最好在將取代材料填充於喷墨噴頭内的流路之後，追加 97106211 18 200920493 對形成將液材射出之射出口的喷墨噴頭下面施行洗淨的 洗淨步驟。 、’星上述取代材料填充與洗淨步驟的喷墨喷頭，不會有液 材殘留’即便在吐出作業待機中，仍無液材增黏化、從液 材中之固形成分析出的顧慮。所以，可徹底地排除上述問 題的發生。 根據本技術思想，即使因意外的故障等因素導致長時間 Π處於吐出作業待機時間，仍不致發生固形成分的析出/固 化、喷嘴堵塞情形。更進一步，因為液材在正要進行吐出 作業之前便填充於噴墨喷頭内，因此可將全新液材使用於 工件上。 、 [i i i ]實施順序 k佈作業係依如下順序實施。首先，將在喷墨喷頭下面 所裝接的喷頭蓋單元脫離。喷頭蓋單元係為可將在喷墨喷 頭下面所形成的射出口保持潔淨，並防止在與上述射出口 =連通的噴墨喷頭内之流路中所填充之流體（取代材料） 發生不必要蒸發情形，而在塗佈作業待機時進行裝接。 在實碩蓋單元脫離後，便在喷墨喷頭内填充所射出的液 材：該液材填充前的喷墨嘴頭内之流路，填充有通稱取代 材料之不同於液材的流體物。取代材料係如前所說明，最 好具有將液材溶解的作用。此種液材填充作業係利用吸取 /沖洗單元將喷墨噴頭的上述射出口覆蓋’並施加負壓而 抽吸噴墨嘴頭内的取代材料而加以排出後，再同樣地利用 抽吸動作進行油墨填充。即，所實施的喷墨噴頭之維修方 97106211 19 200920493 法，係將喷墨喷頭所具有的噴 _ 生負壓而抽吸液體的維修方法：二構件覆蓋，並產 負屋產生機構相連通的廢液槽；連通^=單元構件與 液體儲存部；連通於喷墨嘴頭的嘴頭的低黏性 喷頭擇—與低㈣㈣儲存以及使嘴墨 體切換機構，·而使低黏性液體儲存部通的液 並使單元構件產生負屢 ϋ墨噴碩相連通， 體，接著使油^ γ Α 1喷頭中填充低黏性液 令填充部與噴4翻相連通，並在喷墨喷頭 便將在噴墨噴 依將取代材料 並確§忍是否從 件液材之後，便將液_於工 噴射動作）。特別係當^墨喷並頭確:8有是否有確實射出（虛擬 必須確魏是否有從所有的射喷二:有二，的情況’ 所有的射4^ 取代j液材全料4，並再度填充 取代為液材的方法實施。 所==後’便再度施行虛擬喷射動作，並確-是否％ :有的射出口射出液材。若確認已從所有射 材，便使嘴墨噴 射出口射出液 將喷墨喷頭配置=有 業。 午上的塗佈位置處，再實施塗佈作 件成，工件便被排出於通稱卸载機的工 依照上述要領，：：行Γ件排出的期間’針對喷墨噴頭 將在，墨内的流路中所填充之液材排出， 97106211 20 200920493 並施行填充取代材料的<乍業β ϋ由該項作業，纟墨喷頭的 流路内之液材便被取代為取代材料。#取代材料具有將液 材溶解作用的情況，即使^在流路内僅些微殘留液材，因 為由該經填充的取代材料溶解，因而在喷墨喷頭的流路内 便不致發生液材固化情況。 取代材料的填充亦有靜靜地將喷墨喷頭内的流路施行 溶解洗淨。待取代材料填充作業完成後，便將噴墨喷頭下 面施行清洗。清洗最好利用在上述第j技術思想中所說明 之使用洗淨液的手法實施。若已完成至喷嘴清洗，喷墨喷 =内部外部均被洗淨，而成無液材附著的潔淨狀態。 =洗已完成後’便在噴嘴單元下面裝接喷頭蓋單元， :防止取代材料之揮發。對每個工件重複實施以上 (4)成膜方法 [i ]課題 t知使用喷墨的成膜法有 向(膜厚)的問題，另一係問靖。其-係高度方 決成膜面的端部周邊出 ’、”，、法解 stain phe咖en〇n) 2 潰現象― 絲去孫卢屮时 导致…、法成臈為均勻膜厚的問題。 後者係在成膜面的端部（邊緣 成清晰邊緣線的問題。 。政“，導致無法形 專利文獻4申有描干.主站 一體，導致配“ f為解決因將液滴間相連繫而形成 呈既定角度傾斜的便使基板 仁疋部尚未徹底解決膜厚不 97106211 21 200920493[Technical Field] The present invention relates to a cleaning method and a nozzle inspection method for an inkjet coating device including an inkjet recording head (hereinafter referred to as "inkjet nozzle"). The coating control method and the film forming method are particularly related to a cleaning method, a nozzle inspection method, and a coating method for removing dirt, debris, impurities, and the like adhering to the nozzle surface of the black jet nozzle and its periphery. Cloth control method and film formation method. In addition, the inkjet heads in this § Brother's book, unless otherwise stated, refer to ink jet heads having single or multiple nozzles. [Prior Art] In the ink jet recording apparatus, in order to maintain high quality recording quality, it is necessary to remove ink and impurities remaining on the ink discharge surface of the ink jet recording head. In the method of cleaning the wiping blade against the oil/discharge surface of the head, the wiping blade is wiped by the wiping operation, and the material of the blade is wiped for the purpose of lifting/month washing. Angle, contact method, etc. Specifically, as disclosed in Document 2, an ink absorbing slit is provided on the downstream side of the squeegee cleaning backing direction with respect to the discharge port, and the ink scraped by the above-mentioned squeegee has parallel to a plurality of discharge ports and t = = ink absorbing slit, sucking the ink to extract == 嘴 献 3 有 有 中 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 嘴 , , , , , , , , , , , , , , , , , , , , , It will be attached to the inkjet nozzle of the 97106211 200920493 inkjet nozzle (4), and the (4) disclosed in Patent Document 4 will be "scraping, etc.. The spray movement of the plurality of nozzles arranged at a predetermined pitch, and the alignment film will be applied from the above nozzle. Droplet == relative method 'where 'the above nozzle head pair: # M l · 'f ^ ^ ϋ on the upper 34 substrate, 'L direction of relative movement of the earth plate, the lattice-shaped pixels in the substrate Aligning direction, at a predetermined angle, disclosed in Patent Document 5, a thin-film formation device, a system of - or a plurality of ink-jet nozzles (each having m. row =:); a support structure; and having the plurality of sprays :: Activity 2::,,:: on, can be in these plural a substrate transporting mechanism that moves relative to each other between the nozzles is moved to a flat σ; and the film forming solution is ejected onto the surface of the substrate by applying the coating on the surface of the substrate; It is characterized in that at least a film forming stage, an ink jet head, and the above-described head supporting structure are === straight and in order to be able to be applied under a reduced pressure environment: jetting = film formation, and the vacuum tank (four) A method for forming a decompression pressure is disclosed in Patent Document 6. The method for forming an alignment film according to the method of the invention is to check the abnormality of the above-mentioned ink nozzle according to the droplet feeding method, and to check the droplet pattern at the step of checking When it is within the predetermined range, the above-mentioned ink jet: = direction, and the film formation step of the alignment film in which the alignment enthalpy material utilization liquid is dropped on the substrate by the above-described inkjet nozzle is used. 97106211 200920493 Patent Document 7 The device pattern forming region of the present invention includes a method of manufacturing a substrate from a droplet discharge method, and the method is characterized in that a predetermined region other than the region in which the liquid material is discharged from the head is discharged. (Japanese Patent Laid-Open No. 2004-42571 (Patent Document 3) Japanese Patent Laid-Open No. 〇〇 专 专 ( ( ( ( ( ( ( 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 2004 Japanese Laid-Open Patent Publication No. 2006-289355 (Patent Document 5), Japanese Laid-Open Patent Publication No. 2006-289355 (Patent Document 6), Japanese Patent Laid-Open No. Publication No. 2006-058772 [Problem to be Solved by the Invention] An object of the present invention is to provide a cleaning method and nozzle inspection of an inkjet coating apparatus capable of solving the technical problems described later. Method, coating control method, and film forming method. (Means for Solving the Problem) + The method for cleaning an ink jet head according to the first month, characterized in that the cleaning area of the ink jet head is covered by a unit member having a cleaning liquid supply port and a suction port, According to the second invention, the second invention is the third invention, in which the cleaning liquid is supplied from the suction port and the cleaning liquid supply port facing the suction port is sprayed toward the cleaning area. After the above washing, the ink jet blasting and the unit member are only slightly removed, and the cleaning area of the ink jet head is dried by suctioning the unit member by suction 97106211 200920493. According to a third aspect of the invention, in the first or second aspect of the invention, the liquid is a liquid composed of a solvent having a factor for dissolving the liquid material. In the method of inspecting the ink jet head according to the fourth aspect of the invention, the liquid material ejected from the nozzle included in the ink jet head is dropped on the inspection member, and the nozzle abnormality is inspected based on the droplet pattern of the drop; It is characterized in that the inspection member is composed of a liquid material drop and a non-drop drop. (Kyosuke-Ming, the fourth invention, in which the above-mentioned inspection member is a film which is dissolved by the liquid droplets of the liquid material. The method of controlling the ink application is characterized in that, after the inkjet industry, The discharge material filled in the flow path in the ink jet head is a low-volatility replacement material, and the replacement material is replaced with the liquid material for discharge immediately after the discharge operation is started. According to a sixth aspect of the invention, there is provided a liquid comprising a solvent for causing a liquid material to be a solution of the solution; and the inkjet film forming method according to the eighth aspect of the invention is a film-forming method; The nozzle is sprayed to the surface of the workpiece which is sprayed to the point where the liquid is not flowing, and the liquid droplet is placed at the position of the liquid droplet which is dropped by the contact or the step. According to the eighth aspect of the invention, the amount of injection per injection is reduced. (3) The number of times of the injection step, the 10th invention is the invention of the 8th or 9th, 1 pattern, and the wiring is formed by the film 97106211 200920493 (effect of the invention) ΟThe cleaning of the inkjet nozzle is because the solid objects such as the squeegee are not in contact. The nozzle of the ink jet head and its periphery can be used to 'clean the inkjet head without wearing dust. In addition, 'because of the cleaning liquid', the oil, 1# liquid material has been dried, etc. It can be cleaned with strong cleaning power. In addition, it also has the feature of shortening the working time and making it cheaper to manufacture. It can detect the nozzle failure of the nozzle ink nozzle in a wide range of inspections, especially in transparent liquid materials. (3) Solve the problem of coating control of inkjet nozzles, and it can be operated. Especially for high-volatility liquid materials, it has a higher effect on the surface 1=/. The ink's outline is better than the sound method. [Embodiment] The present invention is based on the inkjet coating device. The following four technical ideas are: (1) Cleaning method and mechanism [i] Problem The first technical idea is to change the attached droplets. The removal ability is lower. ° The injection surface of the ink nozzle is also 'because the rule of the cleaning mechanism is also a problem to be solved. The big 'and thus the more compact problem' is not as hard as the conventional use. Scraper application. The reason is if the scraper is connected Touching and washing is also a problem to be solved. 97106211 The nozzle of Tu Heshuo or its peripheral part 200920493 The problem of dusting the mouth. When the wear dust is generated, it becomes a cause of depletion and blockage, which causes problems in the surrounding environment. Ai Ruo has the possibility of wearing dust. 'In the clean room, p艮 is used. [Π] Subject = Remove the liquid material attached to the injection surface of the inkjet nozzle, so that the attached material can be contacted with the liquid material. The dissolved cleaning solution (cleaning agent) is more effective in dissolving the liquid material by the cleaning liquid. = 'The above-mentioned emitting surface forms an ejection opening for discharging the liquid material, and the ground is brought to the periphery to be washed. It is important to clean the liquid. This is especially important for an inkjet head that has a number of exits on the exit surface. The first technical idea is to wash the two from the end of the exit surface of the inkjet nozzle. * The surface of the surface flows and is recovered from the end of the supply of the cleaning liquid. While using the cleaning liquid to dissolve from the liquid material at one end of the emitting surface, the liquid flows to the surface of the emitting surface, and the hunting surface 4 can be cleaned without any omission and efficiently. The sub-supply is supplied from the plurality of positions of the exit surface to the end of the washing position at the plurality of positions of the washing end to recover the washing liquid. Here, the number of supplies/sets does not need to be the same as the number of positions where the cleaning liquid is recovered. From the side of the long side of the exit surface of the ink jet head, the end of the supply port is separated from the opposite end of the same exit side of the same exit surface to improve the cleaning effect: on the ink ejection surface The flow distance of the cleaning liquid - the ink jet head with a plurality of injection ports, is also effective for the unit with a large size of 97106211 200920493. In addition, the washed surface of the washing is best because of the washing time, but it is better to shorten the waiting time. The washed surface of the exposed surface is naturally dry or blown, and the purpose is to prevent the exit surface, and the attack is carried out by the above-mentioned ink jetting nozzle. Accuracy of the amount of droplets ejected from the inkjet head and: positional accuracy. A preferred embodiment of the cleaning solution is composed of a solvent having an ink solvent (e.g., a solvent which dissolves the main component of the ink). Colorless but widely used in inkjet printers can be classified as: two-person material. The term "dye" refers to a coloring agent that uses a carrier medium to carry out the molecule: The carrier medium is liquid or solid at room temperature. The carrier medium for hanging is water or a mixture of water and an organic co-solvent. I is a humectant such as glycerin which contains water as a main component and contains a coloring agent and, for the purpose of stopping clogging or the like. . When the carrier medium is water, the ink generally has a disadvantage of low water fastness. ^ "Pigment" means a coloring agent that is insoluble in the carrier medium but is dispersed or suspended in small particles, and is usually stabilized by the use of a second agent in order to prevent aggregation and precipitation. In many cases, it is known that a pigment such as an organic pigment or a black pigment is micronized by using a surfactant or a dispersing agent, and a pigment ink or the like is used as a coloring agent by being dispersed in a medium such as water. The technical idea is irrelevant to dye systems or pigment systems. The viscosity of the ink 97106211 11 200920493 is mainly based on the low viscosity of several tens of cps, but it can also be applied to the degree of hundreds of cps if it can be sprayed. Further, the technical idea can be applied to a functional ink such as a wiring pattern printing of a printed substrate, a lubricant application to a minute part, or an outdoor light-resistant display material printing, a hardened ink printing, or the like. [111] Implementation sequence The cleaning of the inkjet heads is carried out in the order of steps A to D (see Fig. 6). Further, "B. Cleaning operation" will be described with respect to the sequence example of the structure shown in Fig. 3. "A. Placement of the ink jet head to the cleaning mechanism" The ink jet head 1 is brought into contact with the cleaning unit 2 of the cleaning mechanism. In other words, the lower surface of the ink jet head 10 is brought into contact with the upper surface of the cleaning unit 20 so as to cover the liquid receiving portion 21 which is provided in a concave shape at the center of the cleaning unit 20. The cleaning lip 23 serves as a contact surface between the lower surface of the ink jet head 1 and the upper surface of the cleaning unit 20. "B. Washing operation" 1) Opening the cleaning nozzle nozzle solenoid valves 31a and 31b, and connecting the solenoid valve to the flow path of the training phase. 2) The side nozzle air opening valves 32a and 32b block the communication with the atmosphere and are located at a position in communication with the flow path through the open valves 32a and 32b. (The cleaning unit 2 is connected to the solenoid valve 31a by the open valve 32a, and the solenoid valve 31b is connected to the discharge by the open valve 3.) ' ^ 97106211 12 200920493 3) Using the discharge valve 22 to make the nozzle The seventh portion 21 of the unit 3 is in communication with each other, and the electromagnetic force for negative pressure is turned on. 4) The negative pressure is applied by the route ejector 37 as described above in the above 3), and the clean liquid is supplied to the cleaning unit 2A. And the liquid receiving valves 34a and 34b of the cleaning unit 2〇. In the step of the cleaning unit 20, the washing liquid stored in the washing liquid bottle 3 is supplied to the washing liquid of the washing unit 2, and is supplied from the washing liquid to the ink jet head 1 Hey. The cleaning liquid supply port 25 is close to the mouth ink. The cleaning liquid discharged from the cleaning liquid supply port 25 is efficiently supplied to the vicinity of the outer peripheral end of the lower surface of the ink jet head 10. Next, 6) the cleaning liquid supplied under the ink jet head 1G is flowed on the surface of the ink jet head: and the washing liquid formed in the vicinity of the washing liquid supply side below the ink jet 1 is recovered. σ 26 is again recovered in the cleaning unit or before it reaches the cleaning liquid recovery port 26, and is discharged from the lower surface of the inkjet head 10, and is recovered in the liquid receiving portion 21 of the cleaning unit 20. The liquid helium H passes through the discharge valve 22' and the discharge port 22 is located at a position where the flow path and the communication between the liquid receiving portion 21 and the liquid receiving portion 21 are blocked via the discharge port, and thus the washing is retained in the liquid portion 21. Clean liquid. The cleaning liquid that has flowed into the cleaning unit 2 from the washing/collection recovery port 26 is recovered in the waste liquid tank 4 through the discharge valve 22 and the ejector 37. 7) After the cleaning is sufficiently performed, the cleaning liquid nozzles 31a and 31b are closed and the negative pressure solenoid valves 34a and 34b are closed, and the side nozzle atmosphere 4 valves 32a and 32b are placed in communication with the atmosphere. . Thereby, the supply of the cleaning liquid to the cleaning unit 2Q is stopped, and the pressure of the liquid receiving portion 21 is shifted from the negative pressure to the atmospheric pressure. ' 97106211 13 200920493 "c. Disengagement of the inkjet nozzle from the cleaning mechanism" The first two sprayed ink nozzles 1 below the cleaning unit 20, and then placed under the inkjet nozzle 10; 〇n, , A gap is then formed between/applied to the top of 20. This gap is set to be appropriate based on the "drying operation of ::". "D. Drying operation" * 1) Is the waste liquid tank 40 and the washing unit single? 22' is used to open the negative pressure electromagnetic chamber and the US liquid is connected to the waste liquid tank 4°. The cleaning liquid is recovered in the liquid tank 40 stored in the second liquid portion 21 of the waste liquid tank. The washing liquid into the waste liquid is disposed between the lower portion of the wasteer 2 and the upper surface of the cleaning unit 20 from the gap to be received by the liquid receiving portion 21. In this gap. The negative airflow nozzle 1 ίΊ nr & μ (three) gap, the maneuvering atmosphere has the cleaning attached to the hemi/clean droplets under the spray f Heshuo 10 on the liquid receiving portion 21, and = And the dripped wash can be recovered by the virtual washing under the ink jet head 10. In addition, the air flow (negative pressure) is also adjusted. / 20 distance adjustment, 4) After the liquid receiving portion 21 t is stored, when this state is maintained, then: the effect of drying under the nozzle ink head 10 recovered through the waste liquid tank 4 T The air has an ejection opening for ejecting the liquid material, and since it can be dried under the formation of the inkjet head 10, it is not exposed to other physical states. The upper ton ejection port is kept in an extremely clean state. 97106211 200920493 5) After the ink jet head 1G is sufficiently dried, the negative pressure electromagnetic cymbal 4a 34b is operated to be in a closed position, and the cleaning unit 2 〇 the liquid receiving portion 21 is stopped. Negative pressure supply. 6) Then, the supply valve 33 is actuated, and the ink jet head 丨〇 is connected to the liquid supply bottle 12, and the liquid material flow path is integrated into a state in which the liquid material can be supplied to the ink jet head 1 〇. . [Iv] Effect According to the first technical idea described above, since the cleaning is performed by the cleaning liquid, abrasion dust does not occur. Further, since the cleaning liquid is ejected by the action of the negative pressure, the cleaning liquid is not supplied if the ink jet head is not closely attached to the cleaning unit. Therefore, even if the ink jet head is separated from the cleaning unit, the supply of the cleaning liquid can be stopped by vacuum destruction, and the occurrence of spraying the cleaning liquid outside the cleaning unit can be prevented. Further, since the drying operation is also carried out by the action of the negative pressure, it is possible to prevent the exterior of the cleaning unit from being contaminated by the cleaning liquid. (2) Nozzle inspection method and mechanism [i] The inkjet coating device of the related art is an ink system. Therefore, due to the nozzle, the nozzle orientation is early, the nozzle is blocked by the liquid material, and the like. The problem of properly coating the necessary amount of droplets. Further, as disclosed in Patent Document 6, the liquid is dropped on the film for inspection: in the method of performing the inspection 2, the shape of the droplet will collapse due to the image recognition after the drop is reached, and the image is recognized by the camera. Therefore, even if the image identification of the droplet shape 97106211 15 200920493 is performed, the inspection cannot be performed with high precision. [(1) The purpose of the second technical idea is as disclosed in Patent Document 6, which is to perform nozzle inspection by dropping a liquid material onto a member for inspection (dropping matter). The difference from Patent Document 6 is that it does not focus on the liquid material (droplet) to be applied, but on the portion of the droplet that is coated with the liquid material, in comparison with other portions. In the present invention, the present invention is composed of a film having a solubility material for inspection. Therefore, even in the case of a transparent liquid material having poor visibility, the liquid material is dissolved in the dropping place, and the film for inspection is turbid (transparent change, or opaque). Therefore, by improving the visibility of the drop, it is possible to measure the drop. In particular, the use of highly transparent liquid materials is more effective. The drop of the liquid material is appropriately selected in accordance with the liquid material to be ejected, and the reflectance of the drop portion of the heavy liquid material changes. If the drop rate is changed by the reflection of the drop, it is possible to use the stupid == drop drop. It may be that the reflectance is changed by the drop; the drop, , ' and σ may also be the state in which the liquid material penetrates into the drip. Liquid material: A wide range of liquid materials that are not solvent-based (such as liquid materials that use water as a solvent) are particularly effective. The text drop, it is best to dissolve quickly at the moment when the liquid material drops (or the permeation trace = 1 = ": the liquid material on the f is kept for a long time, the drop marks or the infiltration of the second == scattered material, but It is preferable to use a polystyrene film, for example, a liquid material containing a methyl jasmine agent. The drop material 2 97106211 16 200920493 Sub:::: θ is due to the falling of the liquid material. Dissolve up to the thickness of the back of the drop. The seam is preferably transparent, the material must be transparent, or colored. The weight of the -# knife and non-drop parts is good. The drop is of course layer I: The composition of the material, but covers the surface of the coated object, the liquid material is recognized by the complex film, and the liquid material such as (10) camera, such as a camera, a laser sensor, etc. can be used. For example, the processing system performs edge extraction or binarization for the image of the field of view covering the drop, thereby facilitating the transfer of the drop. [iii] The sequence of inspection steps for the nozzle is shown in Figure 7(a). Description of the line of construction 1) Rotating the take-up roller 82 to place the new inspection film 72 under the inkjet head 10 Here, the inspection film 72 located under the ink jet head 1 is positioned by the plate 73 to correctly maintain the distance from the ink jet head. + 2) Discharge the official liquid 71 from the ink jet head 10. The drop is applied to the upper surface of the test film 72. The test film 72 is dissolved by the drop to leave a mark of the drop. 3) The take-up roll 82 is rotated, and the drop position of the test film 72 is located. 4) The inspection film 72 is imaged by the imaging device 74. The imaging device 74 can be imaged after the inspection film 72 is stopped, or can be carried out while the inspection film 72 is being moved. According to the image data acquired by the image pickup device 74, the state of the head 10 of the ink jet 97106211 17 200920493 is checked. From the "displacement of the drop mark", the diameter of the deviation from the drop position can be checked ( 3) The coating control method σ checks for poor dispersion. [i] Problem The problem is: to prevent the situation by stabilizing (4) bad conditions. When the liquid material discharge operation is stopped, the nozzle ink has the required accuracy. The problem of clogging is caused by the increase in viscosity of the liquid material and the flight bending of the liquid material discharged from the flow path of the solid material of the liquid material. ..., the method of stable spit and discharge, if the discharge stability of the liquid material deteriorates the problem of precision products required, in the amount of ..., the law "requires the discharge operation to tear off a gas, know from a workpiece When the workpiece is carried out, the door is opened and the door is moved to the door. ν /Έ The workpiece must be carried out, and the next workpiece must be loaded and fixed. This must be performed during this period, and the inkjet nozzle does not perform the processing of the processing. The black spray is on standby, but it is due to the problem. The liquid material filled in the spray is dry. The main idea is that the technical idea is that after the discharge operation, the discharge in the flow path inside the Shuo = ink 嗔(Replace the material), and is about to start to spit out two: the volatile liquid material will be replaced by the material, and the material will be replaced and the liquid material will be used. For the liquid material, the solution of the liquid, or the liquid with the cleaning effect, it is preferable to add 97106211 18 200920493 to the injection port for forming the liquid material after the filling material is filled in the ink jet nozzle. Washing under the inkjet nozzle The washing step. 'The ink jet nozzle with the above-mentioned replacement material filling and washing steps does not have any liquid material remaining.' Even in the standby operation, there is no liquid material to be thickened and solidified from the liquid material. The above-mentioned problem can be completely eliminated. According to the technical idea, even if the long-term enthalpy is in the standby time of the discharge operation due to an unexpected failure or the like, the precipitation/solidification of the solid component does not occur, and the nozzle In the case of clogging, further, since the liquid material is filled in the inkjet head before the discharge operation is being performed, a new liquid material can be used on the workpiece. [iii] The implementation sequence is performed in the following order. First, the nozzle cover unit attached under the inkjet head is detached. The nozzle cover unit is configured to keep the ejection opening formed under the inkjet head clean and prevent communication with the above-mentioned ejection opening. The fluid filled in the flow path in the ink jet head (instead of the material) is unnecessarily evaporated, and is attached during the standby operation of the coating operation. After that, the liquid material is filled in the ink jet head: the flow path in the ink jet head before filling the liquid material is filled with a fluid substance different from the liquid material, which is called a substitute material. It is preferred to have the effect of dissolving the liquid material. This liquid filling operation uses the suction/rinsing unit to cover the above-mentioned ejection opening of the ink jet head and apply a negative pressure to suck the replacement material in the ink jet head. After the discharge is performed, the ink filling is performed in the same manner by the suction operation. That is, the ink jet head maintenance method of the ink jet head is 97106211 19 200920493, which is to suck the liquid by the negative pressure of the ink jet head. Maintenance method: two components cover, and produce a waste liquid tank connected to the negative housing generating mechanism; connect ^ = unit member and liquid storage portion; low viscosity nozzle connected to the mouth of the ink jet nozzle - low (4) (4) storing and changing the ink body switching mechanism, and allowing the liquid of the low-viscosity liquid storage portion to pass through, and causing the unit member to generate a negatively-connected ink jet, thereby filling the body with a low filling of the oil γ Α 1 Viscous liquid to make the filling and spray 4 Communicating, and put in an inkjet ejection by the ink jet head and the material substituted determine whether tolerance § member after the liquid material, was put to work _ ejection operation). In particular, when the ink is sprayed and the head is correct: 8 is there a true shot (virtual must be sure whether there are any shots from all two: there are two, the case of 'all shots 4^ replaces j liquid material all 4, and The method of refilling and replacing the liquid material is carried out. After == then 'the virtual injection action is performed again, and it is confirmed whether or not %: some of the injection ports are ejected from the liquid material. If it is confirmed that all the shots have been removed, the nozzle ink ejection outlet is made. The injection liquid will be arranged in the inkjet nozzle = there is a business. At the coating position at noon, the coating is made, and the workpiece is discharged to the worker who is called the unloader according to the above method. 'For the inkjet head, the liquid material filled in the flow path in the ink is discharged, 97106211 20 200920493 and the filling of the replacement material is carried out by the operation of the ink jet nozzle. The liquid material is replaced by a substitute material. The #substituted material has a situation in which the liquid material is dissolved, even if there is only a slight residual liquid material in the flow path, since the filled substitute material is dissolved, so in the ink jet head The solidification of the liquid material does not occur in the flow path. The filling of the substitute material also quietly dissolves and washes the flow path in the ink jet head. After the filling operation of the material to be replaced is completed, the ink jet head is cleaned underneath. The cleaning is preferably utilized in the above jth technology. The method of using the cleaning solution described in the idea is implemented. If the nozzle cleaning is completed, the inkjet spray = the inside and the outside are washed, and the liquid state is cleaned without the liquid material attached. The nozzle cover unit is attached to the lower surface of the unit to prevent volatilization of the replacement material. The above (4) film formation method is repeated for each workpiece. [i] The problem is that the film formation method using inkjet is directed (film thickness). Another department asks Jing. It is the height of the edge of the film-forming surface around the ',", the solution to the stain phe coffee en〇n) 2 collapse phenomenon - when the silk to Sun Luzhen caused ..., Fa Cheng The problem of uniform film thickness. The latter is at the end of the film-forming surface (the edge becomes a problem of clear edge lines. The government), resulting in the inability to shape the patent document 4, the description of the main station, resulting in the distribution of "f for the solution Forming a base at a predetermined angle due to the connection between the droplets Jen radical 103 has not been completely solved thickness of not 9,710,621,121,200,920,493
另外，咖啡潰現象係在低黏度的溶液出現的現象，成為 液晶顯示元件的配向膜致命問題。當屬於配向膜的情況， 因為主成分的聚醯亞胺較不易溶解，因而便大量使用溶解 材料的r-丁内酯、N-曱基吡咯啶酮或丁基赛珞蘇等，並 依低黏度施行喷射塗佈，因而將容易發生咖啡潰現象。 [Π]主旨 ' 發明者發現絲*會發生液體流動的^施行塗佈 整體成均勾膜厚的成膜，以及發現若從喷墨喷頭吐 ^洛滴於工件表面上的複數液滴間相結合，邊緣線 現务漏情形，遂創作出第4技術思想。 作2技術思想的特徵在於：利用喷墨噴頭之第1射出動 後，當對經該射出所落滴的液材液滴： ==::::::=等_工件… 狀態在内），然後才施行射出。匕fv止移動的半乾燥 滴之乾燥後在動作朝工件上所射出的第1液 在工件上仍4二ΪΓ時’第2射出動作以後的液滴 出動作所射合情形。即，因為由第1射 發生所謂液滴間結合而形成為=2液滴）的接觸，而 形。 成為一液滴現象的流體結合情 97106211 22 200920493 釺入㈣Γ ’虽如習知在第1液滴與第2液滴出現流體性 二水下’因為更明顯地出現咖啡潰現象，因而相較 η」：的：厚之下，膜邊緣部的膜厚增厚。即，相較於 由液滴心處4、與邊緣處膜厚間之厚度差， 間之厚^差變^更而的液滴中央處膜厚與邊緣處膜厚 m抹是’當液滴間相結合並形成單-經结“況便^為因液材的流動而形成高度均句化，因而 二觸區域或重疊區域進行檢視。 乾燥且形成膜，因而一巾因為在母—次射出動作時便 體結合的手法可縮小面的整體厚度差在相較於習知產生流 *:。12二了、，中f知射出方法與本發明方法的比 合而呈一樣的習知方法， 牛上射出的液材相結 射出所射出第丨该 ° 所示係對工件上由第1 而配置，然後再依埋藏滴’離開相鄰接的另一液滴 置朝右側射出的第2:出、 下側射出的第3射出、 液滴群的射出位置朝 下側射出的第4射出。此處，4 =的射出位置朝右斜 4射出以後的射出中，當 人射出、第3射出、第 射出所形成液滴的流動制=別在乾燥達由前-步驟 下-步驟的射出。 制之程度的狀態之後，才施行 另外，本技術思想當然並非僅 971〇6211 、口 U所例不的射 23 200920493 出位置順序。只要為利用複 工件整面上施行均勺塗佑夕_人射出广驟(喷射步驟）’在 以，射出步驟的次數亦 m射出位置便可。所 若增加射出步驟的次數，人二下’亦可達1次以上。 量，便可縮小I件表面的凹凸^次射出步驟的塗佈 有縮短乾燥時=Γ此外’若減少塗佈量，亦具In addition, the phenomenon of coffee collapse is caused by a phenomenon of a low-viscosity solution, which is a fatal problem of the alignment film of the liquid crystal display element. In the case of an alignment film, since the polyimine of the main component is less soluble, a large amount of the dissolved material of r-butyrolactone, N-decylpyrrolidone or butyl quercetin is used, and is low. The viscosity is applied by spray coating, and thus the coffee collapse phenomenon is likely to occur. [Π] The main idea of the inventor found that the silk* will flow through the liquid, and the film is formed into a uniform film thickness, and it is found that if the ink is ejected from the inkjet nozzle, the droplets are dropped on the surface of the workpiece. In combination, the edge line is leaking, and the fourth technical idea is created. The second technical idea is characterized in that after the first shot of the ink jet head, the liquid material droplets that have fallen through the shot are: ==::::::=, etc. Then it is executed.匕fv The semi-drying of the movement of the movement of the liquid after the drying of the droplets is carried out on the workpiece after the drying of the droplets, and the droplets are discharged after the second ejection operation. In other words, the contact is formed by the first shot, which is formed by the so-called droplet bonding, and is formed as =2 droplets. The fluid combination that becomes a droplet phenomenon 97106211 22 200920493 Intrusion (four) Γ 'Although it is known that the first droplet and the second droplet appear fluid under water' because the coffee collapse phenomenon is more obvious, so compared with η ”: Under the thickness, the film thickness at the edge of the film is thickened. That is, compared to the difference between the thickness of the film at the center of the droplet 4 and the thickness of the film at the edge, the difference between the film thickness at the center of the droplet and the film thickness at the edge of the film is 'when the droplet The interphase combines and forms a single-knot junction. The condition is that the liquid is formed by the flow of the liquid material, so that the two-touch area or the overlapping area is examined. The film is dried and formed, so that a towel is produced in the mother-time. The method of combining the body during the action can reduce the overall thickness difference of the surface in the same manner as the conventionally generated flow *:12, and the conventional method is the same as the method of the present invention. The liquid material ejected from the cow is ejected to emit the third 丨. The line shown on the workpiece is placed on the workpiece by the first one, and then the other droplet that leaves the adjacent connection according to the buried drop is placed on the right side of the second: The third shot emitted from the lower side and the fourth shot emitted from the lower side of the discharge position of the droplet group. Here, when the shot position of 4 = is emitted to the right oblique 4, the shot is emitted, and the third shot is emitted. The flow of the droplets formed by the first shot is not produced by drying out the pre-step-step-out process. After the state of the degree, the implementation of the technical idea is of course not only the 971 〇 6211, the mouth U is not the shot 23 200920493 out position order. As long as the use of the complex workpiece on the whole surface of the spoon 佑 夕 _ people shoot wide In the step (injection step), the number of times of the injection step is also m. The position of the injection step can be increased by one or more times. The amount can be reduced by the amount of the surface of the I piece. The coating of the secondary injection step has a shortened drying time = Γ in addition, if the coating amount is reduced,
動當噴墨單元具有複數射出口的情況，由第1射出 動作所射出的複數液滴(第i液滴 ::開的位置處，液滴間並未相接觸。此情況；，：:於 :::::::的複數液滴(第―^ =達不會流動程度之後才實施’當然亦可獲得同樣的效 工件上的液滴乾燥係可為自然乾燥，但是藉由使載置工 件的平台溫度上升’便可更迅速地加以乾燥。 使液滴乾燥的溫度依照液材種類、間距、射出量等條件 而適田調整’例如設定為實驗環境溫度（例如15〜25。〇加 上150°C的圍内，最好實驗環境溫度加上⑽。c的範圍 内尤以實驗環境溫度加上5 0 °C的範圍内為佳。 a再者關於使液滴乾燥達不會流動程度的乾燥時間，亦 =依照平台溫度、液材種類、間距、射出量等條件而適當 24 1 周整’例如最好設定為從落滴起算的20〜100秒左右。 如以上所說明的本發明成膜方法，相較於習知成膜方 、、因為了減少邊緣部的滲出量’因而可適用諸如液晶顯 97106211 200920493 示元件的配向膜形成等各種用 用於如圖13所示在基板上 發月的成臈方法亦適 的成膜方法因為滲出量較多，佈線圖案。即，習知 情況，因而將無法高密声 ^字¥致佈線間出現相連接 的成膜方法，便可高…照本發明 的成膜方法可大幅減少橫向（水;^佈^理/曰係本發明 施例3中，擴散量為習知成膜方σ 、擴散$(後述實 膜方牛胜m 成膜方法的約1/10)。本發明成 m厚為數•數十“的薄臈形成 成=中的成臈方法亦可輕易地控制膜厚。習知的 =膜方法中’經洛滴後的液材與下—次射出的液材相姓 5，而形成-樣的液滴’並朝橫向 ： 較難控制，。就此點而言，本發明的成膜方法:對= 滴後呈無",匕動狀態的液材，射出下一液材並累積，藉此增 加膜厚’因此藉由控制累積次數便可輕易地控制膜厚。 以下，針對本發明的詳細内容利时施例進行說明，惟 本發明並不受實施例的任何限制。 [實施例1] 本實施例的清洗機構係具備有洗淨部2,該洗淨部2係 具有對喷墨喷頭1噴射出洗淨液丨2的功能、與喷射出空 氣的功能。 圖la所示係具備本實施例清洗機構的裝置之整體概略 俯視圖’圖lb所示係該裝置的整體概略側視圖。 本實施例的裝置係在使喷墨喷頭1 〇、與位於其下方的 工件平台14進行相對移動之情況下，施行塗佈的噴墨塗 97106211 25 200920493 佈裝置。 喷墨喷頭10係經由Z軸移動機構123與 構125而安装於橫梁110上。 機 工件平台14係真空吸附式工件平台。於工件平台14 可附加溫調操控器。 喷墨喷頭10與工件平台14的相對移動、以及喷墨喷頭 ίο的清洗等動作控制，可從在塗佈褒置旁邊所設置的操 作桌16上之個人電腦（PC)15執行。 、 圖2所示係本實施例清洗機構一形態的概要說明圖。 ^中二:符號42係來自CDA(潔淨乾燥空氣)的壓 44:二號43係⑽吸入口開閉球間，元件符號 控器;:一開閉球閥’元件符號45係排氣過遽器(操 洗淨早几20係用以在喷墨喷頭1 飛散於周邊用的零件。洗淨單==二時’防止洗淨液 的喷嘴面及其周邊：下係構成將喷墨嘴頭10 元20 型等形H爭單 因Μ使用經考慮洗淨液等耐藥性的材質，因 使用例如不錄鋼、鐵氟龍（註冊商標）等構成。 著墨嗔頭10的喷嘴面與其周邊所附 ::由墨儿全沖洗掉’因而使用具備將油墨溶解之因」 無色溶劑(使油墨溶解之主成分的溶劑)。 因子的 =所:係洗淨單元20的構造 洗…20的概略構造侧面剖視圖。 所不係 97106211 26 200920493 洗淨單元20係在抵接於喰黑 央處1F1 口 M J 碩1〇的清洗凸唇㈡中 數;淨液回複數洗淨液供應口 圖5(a)所不係清洗時的說明圖。如該抑 元m系抵接於噴墨嘴頭1〇，洗淨_從洗淨^早 朝^贺頭1〇下面的外周端附近喷射，並從洗淨i回收 口 26 ^液部21進行回收，藉此便施行清洗。 ^^^時㈣明圖。如該圖所示，待清洗 、-口米俊，便使f墨嘴頭1 〇盘When the ink jet unit has a plurality of ejection openings, the plurality of droplets emitted by the first ejection operation (the i-th droplet: at the position where the droplets are opened, the droplets are not in contact with each other. This case;::: The ::::::: multiple droplets (the first ^ ^ = can not be carried out after the degree of flow), of course, can also obtain the same effect on the workpiece drying system can be naturally dry, but by placing The temperature of the workpiece can be dried more quickly. The temperature at which the droplets are dried can be adjusted according to the type of liquid material, the pitch, and the amount of injection. For example, the temperature is set to the experimental environment (for example, 15 to 25. In the upper 150 ° C, the best experimental ambient temperature plus (10).c range is especially in the range of the experimental ambient temperature plus 50 ° C. A further about drying the droplets will not flow The drying time of the degree is also appropriately determined according to the conditions of the platform temperature, the type of the liquid material, the pitch, the amount of the injection, and the like. For example, it is preferably set to about 20 to 100 seconds from the dropping. Inventing the film forming method, compared with the conventional film forming method, because of the reduction The amount of bleed out of the edge portion is thus applicable to various film forming methods for forming a film on the substrate as shown in Fig. 13 such as the alignment film formation of the liquid crystal display 97106211 200920493, because the amount of bleeding is relatively high. Many, wiring patterns, that is, the conventional situation, and therefore, it is impossible to form a film forming method in which the wiring is connected in a high-density sound, and the film forming method according to the present invention can greatly reduce the lateral direction (water; In the third embodiment of the present invention, the amount of diffusion is a conventional film forming side σ and a diffusion amount (about 1/10 of the film forming method of the solid film Fang Niusheng m described later.) The present invention becomes m thick in number and several tens of times. The film formation method can also easily control the film thickness. In the conventional method, the liquid material after the drop is separated from the liquid material of the next-shot, and forms a sample. The droplet 'and the lateral direction: it is difficult to control. In this regard, the film forming method of the present invention: for the liquid material after the drop is not ", the state of the turbulent state, the next liquid material is injected and accumulated, borrowed This increases the film thickness' so that the film thickness can be easily controlled by controlling the cumulative number of times. The details of the present invention will be described by way of example, but the present invention is not limited by the examples. [Embodiment 1] The cleaning mechanism of the present embodiment is provided with a cleaning unit 2 having a pair The ink jet head 1 has a function of ejecting the cleaning liquid 丨 2 and a function of ejecting air. Fig. 1a is a schematic overall plan view of the apparatus including the cleaning mechanism of the present embodiment, and the overall outline of the apparatus is shown in Fig. 1b. The apparatus of the present embodiment is a device for applying a coated inkjet coating 97106211 25 200920493 in the case where the inkjet head 1 is moved relative to the workpiece stage 14 located below it. The 10 series is attached to the beam 110 via the Z-axis moving mechanism 123 and the structure 125. The machine workpiece platform 14 is a vacuum suction type workpiece platform. A temperature control manipulator can be attached to the workpiece platform 14. The relative movement of the ink jet head 10 to the workpiece stage 14 and the cleaning control of the ink jet head ίο can be performed from a personal computer (PC) 15 on the operation table 16 provided beside the coating unit. Fig. 2 is a schematic explanatory view showing a form of the cleaning mechanism of the embodiment. ^中二: Symbol 42 is the pressure from CDA (clean dry air) 44: No. 43 series (10) suction opening and closing ball, component symbol controller;: one open and close ball valve 'component symbol 45 series exhaust filter (fighting Wash the early 20 series for the parts used in the inkjet head 1 to fly around. When cleaning the single == two hours, the nozzle surface of the cleaning liquid is prevented and the periphery thereof: the lower part constitutes the ink jet nozzle head 10 yuan The type 20 conformal H is a material that is resistant to chemicals such as a cleaning solution, and is made of, for example, non-recording steel or Teflon (registered trademark). The nozzle face of the ink head 10 is attached to the periphery thereof. :: The ink is completely rinsed off, so that the ink is dissolved. The colorless solvent (solvent which dissolves the main component of the ink) is used. The factor = the structure of the structure of the cleaning unit 20 Cross-sectional view. 97106211 26 200920493 The cleaning unit 20 is in the middle of the cleaning lip (2) of the MJ 〇1〇 at the 1F1 mouth of the 喰黑中央处; the cleaning solution of the cleaning solution is shown in Figure 5(a) If you do not clean the instructions, if the m is in contact with the inkjet nozzle 1〇, wash _ from the cleaning ^ early to the ^ Hetou 1 喷射 is sprayed near the outer peripheral end of the lower side, and is recovered from the washing liquid recovery port 26 ^ liquid portion 21, thereby performing cleaning. ^^^ 时(四)明图. As shown in the figure, to be cleaned, - mouth rice Jun, so that the mouth of the ink is 1
離開，利用在該等心流動的大，稍微(例如W 上所附著的洗淨液吹飛，而使喷：墨喷頭10 好。W…on 使嘴墨喷頭10與洗淨單元20 、木尹早兀〇係設有底部抽吸口 24，而所抽吸的麻 液儲存於廢液槽4〇中。 、廢 概略說明的本實施例噴墨噴頭10之洗淨步驟及 乾耜步驟的流程圖，如圖6所示。 洗淨單元20内產生負㈣況時’喷墨喷頭 下面^喷頭面）與洗淨單元20間的密接性便趨於重要。 “問η，2G對喷頭面的傾斜較大’則有產生間 爐，本實施例中，藉由可追蹤噴頭面傾斜的 ^ 可確實地達洗淨單元20的密接性與㈣性。即， =由將支撐洗淨單元20的支撲構件，利用軟化彈性體構 更具有可追蹤噴頭面傾斜的自由度，可維持密封性。 ^者’洗淨單元2G係設有使其抵接或非抵接於喷墨嘴 5的_機構。_機構係、可採用—般使用作為升降 97106211 27 200920493 用之諸如手動式、滾珠螺桿式、線性式等移動平台而構 成，例如移動平台製造商有駿河精機公司製、THK公司制。 《噴嘴檢查機構》 衣。 本實施例的噴嘴檢查機構係如圖7所示構成。 首先，使噴墨噴頭10朝配置檢查用薄膜的檢查區域移 動。在檢查區域中，就喷墨噴頭1〇所具有的各噴墨 狀態進行檢查。 、 在私查區域中，設置有依橫切噴墨噴頭1 〇下方之方弋 進行移動的透明檢查用薄膜72。檢查用薄膜72係對正:气 液體71具溶解性的薄膜。檢查用薄膜72係由饋進用輥捲 取呈捲筒狀’藉由捲取用親的捲取，便可經常將新的檢查 用薄膜7 2用於檢查。 來自喷墨喷頭1〇的落滴液滴由攝像裝置74進行攝像。 攝像裝置74係、可由-般習知的⑽照相機等構成。圖⑽ 所丁，攝像$置由2台影像辨識照相機（區域感測器）構 j的態樣’圖7(b)所示係攝像裝置74由線感測器構成的 心榼圖7(b)中，藉由合併使用反射照明75與穿透照明 76’便提高辨識性。不管選擇何種態樣均屬於設計事項， 依照檢查用薄膜72的寬度、檢測精度等要素而決定。 檢查用薄膜72中，當無正式液體71的落滴之情況、或 洛滴位置發生偏離喊位置的情況，喷嘴檢查機構便視為 出現喷嘴堵塞等意外，並顯示出錯誤資訊。 圖9所示係喷墨喷頭1〇的動作說明之簡略化概念構造 圖。如圖9所示，喷墨噴頭1〇係利用液材切換單元⑽， 97106211 28 200920493 便可將正式液體（射出的液材）與洗淨液選擇性的連通。 在工件平台側面深度側配置3個單元。所配置的3個單 几，在圖9中從左側朝右側依序係將喷墨喷頭流路内的液 材取代為取代材料、或產生用以將取代材料取代為液材用 =壓的吸取/沖洗單元1G2、將噴嘴下面施行洗淨的洗淨 單元20、將喷嘴下面進行封蓋的喷頭蓋單元1〇3。 圖1〇所示係圖9構造的喷墨噴頭1〇之前處 圖。針對圖1〇所示6個分圖進行說明。另外= 1 05令，貝線係表連通狀態，虛線係表阻斷狀態。 [10-1]表示在喷墨噴頭1G下面安裝喷頭蓋單元⑽， 士：用切換單元而與洗淨液呈相連通狀態的圖。屬於塗 作業待機時的狀態。 ^10-2]表示為進行塗佈作業，而從喷墨喷頭μ將喷頭 二二°3脫離的狀態之圖。切換單元係位於將喷墨 贺頭10與洗淨液相連通的位置。 狀表示嘴墨喷頭10安置於吸取/沖洗單元1G2上的 [10-4]係將喷墨喷頭1G #置於吸取/沖洗單j 二：利用切換單元105切換成液材與喷墨喷頭10呈相 而對吸取/沖洗單元102作用諸， 「1 η ςΓ -、 的液體取代動作（填充動作）。 喷射係並非先利早二行虛㈣^ 攝像裝置或感測裝置，確認是否有從 97106211 29 200920493 喷墨喷頭l 〇確實射出液材的作業 流路内的液材進行正式射出作掌二 ：、墨噴頭10 業。當施 業别所鉍仃的預備流動作 仃用以進仃赁嘴檢查的確認作業時，田 行預備流動作業。當然，藉 取好事先施 具預備流動作業。確爾中的射出，亦可兼 二==墨喷頭]°進行移動的情況下，施行 針==:嘴墨嘴頭1〇之後處理動作說明圖。 所不的6個分圖進行說明。 [11-1]表示待塗佈作章社击 取/沖洗單元lfl2的狀態t圖噴墨相10便移動至吸 2]表示將喷墨喷頭史里士人 上，液材切拖显-吸取/沖洗單元1〇2 液材切換早兀1G5切換成喷墨 通位置的狀態之圖。 /、洗平液相連 表示待噴墨嘴頭1〇内的液體取代作業处束 ^ ^ ^ ^ ^ 〇 2 ^ ：、 1 4]表不將策墨喷頭μ立里从山 行洗淨作業的圖。液===單元2〇上’並施 10與洗淨液相連通的位置處m係保持於將喷墨喷頭 單=]=:淨步驟後，喷墨喷…移至喷頭蓋 的圖。葬]在：墨嘴碩10下面裝接有喷頭蓋單元103 且：阻：：：103的裝接，射出口便保持潔淨， I噴頭1G内的流路中所填充的取代材料發 97106211 30 200920493 生不必要的蒸發情形。 [實施例2] 圖圖14所不係本實施例喷墨塗佈裝置的維修機構構造 、甫1G係具有複數喷嘴6 ’將在由連通構件9連 ^噴-頁1: 12中所儲存的油墨2吐出而施行列印者。噴 ;修係f喷嘴6利—^ 油累等，排妨/冲洗早兀1〇2内產生負壓’並將所抽吸的 的=槽於t吸取所洗單元1G2與連通構件9連通 抿接，由π播吸取/冲洗單凡102與喷墨噴頭10間的 二 π相對移動者，亦可使吸取/沖洗單元102進 仃相對移動者。另外，依昭產掌早70102進 行吸取/沖洗單元102開閉1域，亦可構成依手動進 本實施例的維修機構係就上述習知構 喷頭10與連通構件9而相連通的第2槽13、以：喷2 切換喷墨噴頭10與第1槽12或第2槽13 =性 體切換單元105。在第2槽13中儲存右於連通的液 先流入之低黏性液體的洗淨液3。本實施二始:=最 係使用將油墨2溶解的溶劑。藉此，即使油黑 /文 出現凝固的情況亦可溶解。 X 流路内 再者’如圖15所示，本實施例的吸取/ 構成具有可追蹤喷頭面傾斜之自由度。/早凡1〇2係 抵接於喷頭面的抵接構件21，係^硬化彈性體之蕭^ 97106211 200920493 T度泰80度（最好5G〜7G度）（JIS K6253規格）的橡膠構 利用黏合或螺固等方式裝接於框架62上面。 框架62係由依黏合或螺固等方式固接且依軟化彈性構 件（例如橡膠或彈簧）構成的支撐構件63支撐。支撐構件 63為了可追蹤噴墨喷頭1的喷嘴面安裝誤差（三維的傾 斜），亦可穿透深度達4〇〜8〇(最好50〜70度）。支撐構件 63固接於板狀安裝構件64。在框架62的底面部配設可將 至少一個以上之抽吸用貫穿孔的底部抽吸口 24、與連通 構件9相連接的接頭66。 根據如上述所構成的本實施例吸取/沖洗單元1 〇2，便 可在不嗳噴嘴面傾斜影響下，確保完全的密接性與密封 性。 本實施例的負壓產生機構係由：信號產生裝置8、壓力 供應泵19、δ周節器3 8、及喷射器3 7構成，並經由廢液槽 40連通於吸取/沖洗單元1〇2。另外，負壓產生機構中亦 可附加可吸收空氣聲的消音器。 “唬產生裝置8係設定並登錄複數圖案時間與電壓信 號波形’且從複數登錄的圖案中僅可選擇、輸出任一圖 案。調節器38係可配合信號產生裝置8的信號波形電壓， 進行壓力供應。信號產生裝置8亦可由諸如脈衝產生器、 PC等構成。 ° 噴射器37係可配合從調節器38所供應的壓力而產生負 壓。調節器38與喷射器37係可由市售空壓機器構成。 即使不對由調節器38與由喷射器37所產生的負壓進行 97106211 32 200920493 控制在從調喊器38保持一定壓力的情況下，藉由對在 喷射器37的廢棄側所設置節流閥之節流量進行調整， 進行負壓的控制。 本貝％例的負壓產生機構，特徵在於使吸取/沖洗單元 ，1^内所產生的負壓緩和地回復至大氣壓。即，本實施例 係藉由發出預設信號波形的信號產生裝置8，緩和地產生 吸取/冲洗單凡102内的負麗變化，藉此可防止氣泡的再 混入。 (； & 一 所设疋的信號波形係在使吸取/沖洗單元1〇2内的負壓 緩和變化之前提下，可為直線性、亦可為曲線性、亦可為 細微階段性變化的信號波形。曲線性波形係有如圖Μ所 示的Sin波形。如圖16(a)所示，若將從信號產生裝置8 所輸出的信號波形設為Sin波形，則從調節器⑽所供應 的壓力便如圖16(b)所示變化，而喷射器37的負壓如圖 16(c)所示，可防止對喷墨噴頭1〇的噴嘴6前端之半月板 I /賦予振動。 本實施例的塗佈控制方法，係依照圖8中左圖流程圖所 示的順序實施。首先，將液材塗佈裝置的電源開啟（開 始）液材塗佈裝置便執行起始化動作（初期動作）。然後， 設定所生產產品（品種）的相關裝置參數（資料設定）。該裝 置參數係諸如：工件尺寸、塗佈區域、射出條件等。若該 等設定完成’便完成執行生產的準備。 接著，將工件從通稱裝載機的工件供應裝置中，供應於 液材塗佈裝置的平台。在平台上所載置的工件，經定位於 97106211 33 200920493 平台上之後，便確認工件上的塗佈位置，並對液材塗佈裝 置與工件上之塗佈位置的相對位置偏差進行校正（對 準）為項杈正係就工件位置利用CCD照相機等攝像裝 置、及對所拍攝影像施行影像處理而實施。此時，除進行 .使平〇旋轉移動的物理式校正之外，亦就機器人移動之相 關程式’執行其座標位置校正的程式校正。藉由施行戴至 此的處理，便完成用以對在裝置平台上經定位的工件上正 確地於既定塗佈位置施行塗佈的準備。當以上的校正處理 結束後，便開始進行塗佈作業。 [實施例3 ] 本實施例的成膜方法係經乾燥至所落滴的液滴不流動 程度之後，才射出下-個液滴，並藉由落滴而形成膜的喷 墨塗佈方法。液材係使用％醯亞胺溶液，基板係使用 基板。 *聚醯亞胺溶液係用以形成半導體絕緣層、液晶面板絕緣 U臈。玻璃基板係為了乾燥所落滴液材達不會流動程度，便 載置於可進行溫度調整的平台上。 [比較例] 利用習知喷墨塗佈方法，對25mm方塊的塗佈區域，依 3〇p 1 /滴、70微米間距施行塗佈後，出現下述狀況。 (A) 橫向（水平方向）：相對於規定的塗佈區域，外圍擴散 〇· 5〜1. Omm程度。 (B) 縱向（高度方向）：塗佈區域中央部為80〜85nm，邊緣 部則為lOOOnm左右的高度。 97106211 34 200920493 [實施例3] 由本實施例的喷墨塗佈方法，同樣地對25min方塊的塗 佈區域’依8pl/滴、4次喷射、70微米間距施行塗佈後， 出現如下述狀況。 (A) 橫向（水平方向）：相對於規定的塗佈區域，外圍擴散 〇· 05〜0· 1mm 程度。 (B) 縱向（高度方向）：塗佈區域中央部為8〇nm〜1〇〇nm， 邊緣部則為80nm〜lOOnm左右的高度。 如上述，可確認到本實施例的成臈方法相較於比較例所 示習知成膜方法，達到有利的效果。更具體而言，可確認 到本實施例的方法可達減少在膜上所形成的凹凸，減少膜 整面的高低差，更進一步邊緣部渗出量亦減少的效果。、 (產業上之可利用性） ^發明衫料㈣噴墨印表機，尚可適用於精密喷霧 ’入裝置（包括塗佈裝置在内）、精密塗佈裝置種 V... 墨記錄。亦可適用於喷墨式圖宰 種噴 板、大圃莱化例如有機EL顯示面 板大型形色面板的印刷、工 /描繪裝置/印刷裝置。 寻用途的塗佈裝置 關於噴墨記錄方法亦是無關壓 電阻熱噴射式等氣泡產生方式均可適/械轉換方式、或 再者，亦可利用於透鏡製造業界 型印刷產㈣海報與建材裝飾方面。㈣色步驟、或大 【圖式簡單說明】 圖la為具備有實施例丨 月洗機構的裴置之整體概略 97106211 35 200920493 俯視圖。 圖1 b為具備有實施例1之清洗機構的裝置之整體概略 側視圖。 圖2為貫施例1之清洗機構一形態的概要說明圖。 圖3為實施例1之清洗機構另一形態的概要構造圖。 圖4a為實施例1的洗淨單元之構造俯視圖。 圖4b為實施例丨的洗淨單元之概略構造侧面剖視圖。 圖5(a)及（b)為實施例i的洗淨單元所施行的洗淨步驟 與乾燥步驟說明圖。 圖6為實施例1的喷墨喷頭之洗淨步驟與乾燥步驟流程 圖7(a)及（b)為實施例丨的喷嘴檢查機構說明圖。 圖8為喷墨噴頭的塗佈控制實施順序流程圖。 圖9為說明喷墨喷頭動作的簡略化概念構造圖。 圖1〇為圖9構造的喷墨喷頭之前處理動作說明圖。 圖11為圖9構造的喷墨喷頭之後處理動作說明圖。 圖=及⑻為習知的厚膜形成手法、與本發明的厚 膜开^成手法之對比說明圖。 回為可由本發明製膜方法形成的佈線圖案。 圖14為實施例2的維修機構構造圖。 :15為實施例2的吸取/沖洗單元之透視側視圖。 形 (a)至(〇為從實施例2的機器類所輸出的信號波 【主要元件符號說明】 97106211 36 200920493 1、10 喷墨喷頭 2 油墨 2 洗淨部 2 液材 3、12 洗淨液 4 使用過洗淨液（廢液） 5 負壓 6 喷嘴 7 開閉機構 8 信號產生裝置 9 連通構件 11 液材吐出面 12 液材供應瓶 12 第1槽 12a 、 12b 液材瓶 13 洗淨液瓶 13 第2槽 14 工件平台 15 個人電腦（PC) 16 操作桌 19 壓力供應泵 20 洗淨單元 21 受液部 21 ' 61 抵接構件 97106211 37 200920493 22 排放閥 23 清洗凸唇 24 底部抽吸口 25 洗淨液供應口 26 洗淨液回收口 28 開口 31a、 31b 洗淨液喷嘴電磁閥 32a、 32b 側喷嘴大氣開放閥 33 供應閥 34a、 34b 負壓用電磁閥 35 洗淨液供應閥 36 材料切換閥 37 喷射器 38 調節器 40 廢液槽 41 手動接頭 42 壓縮空氣 43 CDA吸入口開閉球閥 44 排氣空氣開閉球閥 45 排氣過濾器 51 開閉電磁闕 52 滿量感測器 62 框架 63 支撐構件 97106211 38 200920493 64 安裝構件 66 接頭 71 正式液體 72 檢查用薄膜 73 板 74 攝像裝置 75 反射照明 76 穿透照明 77 攝像裝置的視野 78 落滴的正式液體 81 饋進用輥 82 捲取用輥 101 喷墨喷頭控制盒 102 吸取/沖洗單元 103 喷頭蓋單元 104 影像照相機 105 液材切換單元 106 噴墨控制基板 107 液材槽 108 緊急開關 109 底板 110 橫梁 112 各種空壓機器 113 儀器盒 97106211 39 200920493 114 控制盒 121 X軸移動機構 122 Y軸移動機構 123 Z軸移動機構 124 Θ軸轉動機構 125 Η 0轴轉動機構 151 第1閥 152 第2閥 97106211 40When leaving, the flow of the centripetal flow is slightly (for example, the washing liquid adhered to W is blown, and the ink jet head 10 is made good. W...on the nozzle ink head 10 and the washing unit 20, The wood Yin early sputum system is provided with a bottom suction port 24, and the sucked hemp liquid is stored in the waste liquid tank 4 。. The cleaning step and the drying step of the ink jet head 10 of this embodiment are schematically illustrated. The flow chart is shown in Fig. 6. The adhesion between the "header surface of the ink jet head" and the cleaning unit 20 in the negative (four) condition in the cleaning unit 20 tends to be important. "Ask η, 2G has a large inclination to the nozzle face", and there is a generation furnace. In this embodiment, the adhesion of the cleaning unit 20 can be reliably achieved by tracking the inclination of the nozzle surface. = The support member that supports the cleaning unit 20 can maintain the sealing property by using the softening elastic structure to have the degree of freedom of tracking the inclination of the nozzle face. ^The 'cleaning unit 2G is provided to abut or The mechanism that is not in contact with the inkjet nozzle 5 can be used as a lifting platform such as a manual type, a ball screw type, a linear type, etc., for example, a mobile platform manufacturer has a general use as a lifting platform 97106211 27 200920493 The nozzle inspection mechanism of the present embodiment is configured as shown in Fig. 7. First, the inkjet head 10 is moved toward the inspection region where the inspection film is placed. In the area, each of the ink-jetting states of the ink-jet head 1 is inspected. In the private inspection area, a transparent inspection film 72 is formed which is moved by the square below the ink-jet head 1 . Film 72-series alignment: a gas film 71 having a solubility film. The inspection film 72 is taken up in a roll shape by a feeding roller. 7 2 is used for inspection. The droplets from the inkjet head 1 are imaged by the imaging device 74. The imaging device 74 can be constituted by a conventional (10) camera or the like. The image of the two image recognition cameras (area sensors) is shown in Fig. 7(b). The camera device 74 is composed of a line sensor. In Fig. 7(b), the reflected illumination is used in combination. 75 and the penetrating illumination 76' improve the visibility. It is a design matter regardless of the selected state, and is determined according to factors such as the width of the inspection film 72, the detection accuracy, etc. In the inspection film 72, when there is no formal liquid 71 In the case of falling drops or the position where the drop position deviates from the shouting position, the nozzle check mechanism is regarded as an accident such as nozzle clogging, and displays an error message. Fig. 9 is a schematic diagram of the operation of the ink jet head 1 〇 Conceptual diagram of the concept. As shown in Figure 9, the inkjet nozzle 1 Material switching unit (10), 97106211 28 200920493 The formal liquid (ejected liquid material) can be selectively connected to the cleaning liquid. Three units are arranged on the side of the workpiece platform side. The three single sheets are arranged in Figure 9. The liquid material in the ink jet head flow path is replaced with a substitute material from the left side to the right side, or a suction/rinsing unit 1G2 for replacing the substitute material with the liquid material is used, and the nozzle is washed under the nozzle. The clean unit 20 and the head cover unit 1〇3 for sealing the nozzle. Fig. 1A is a front view of the ink jet head 1 constructed in Fig. 9. For the six parts shown in Fig. 1 In addition, the =1 05 command, the shell line is connected to the state, and the dotted line is blocked. [10-1] shows that the head cover unit (10) is attached to the lower surface of the ink jet head 1G, and the drawing unit is in a state of being in communication with the cleaning liquid by the switching unit. It is the state when the job is in standby. ^10-2] is a view showing a state in which the head is separated from the ink jet head μ by the ink jet head μ for performing the coating operation. The switching unit is located at a position where the inkjet head 10 is in communication with the cleaning liquid phase. The image indicating that the nozzle ink head 10 is placed on the suction/rinsing unit 1G2 is such that the ink jet head 1G # is placed in the suction/rinsing unit j: switching to the liquid material and the ink jet by the switching unit 105 The head 10 is in phase and acts on the suction/rinsing unit 102, and the liquid replacement operation (filling operation) of "1 η ςΓ -, " is not the first to use the second line of virtual (four) ^ camera device or sensing device to confirm whether there is From 97106211 29 200920493 Inkjet nozzle l 〇The liquid material in the working flow path of the liquid material is actually emitted as the palm of the hand: the ink nozzle 10 industry. When the preparatory flow action of the industry is used to enter When confirming the operation of the mouth-mouth inspection, the field is ready to flow. Of course, it is necessary to perform the preparatory flow operation in advance. If the injection is in the middle of the test, it can also be carried out under the condition of two == ink nozzles. Needle==: Description of the processing action after the nozzle head 1〇. The description of the six parts is not shown. [11-1] indicates the state of the nozzle to be coated and the flushing unit lfl2. Phase 10 moves to the suction 2], which means that the inkjet nozzle will be cut and sucked by the liquid material. The drawing/flushing unit 1〇2 is switched to the state in which the liquid material is switched to the ink-jet-on position as early as 1/5. /, the washing liquid is connected to indicate that the liquid in the head of the ink-jet head 1 is replaced by the working beam ^ ^ ^ ^ ^ 〇 2 ^ :, 1 4] Table of the cleaning operation of the ink nozzle from the mountain line. Liquid === unit 2 〇 'and 10 where the connection with the cleaning liquid phase is After the inkjet head is single ===: after the net step, the inkjet spray is moved to the nozzle cover. The funnel is attached: the nozzle cover unit 103 is attached under the ink nozzle 10 and: resistance:::103 After the attachment, the ejection opening is kept clean, and the replacement material filled in the flow path in the 1G nozzle of the I nozzle generates an unnecessary evaporation condition. [Embodiment 2] FIG. 14 is not the inkjet of the embodiment. The maintenance mechanism structure of the coating device, the 甫1G system has a plurality of nozzles 6', and the ink is stored by the ink 2 stored in the communication member 9-injection-page 1:12. The printer is sprayed; Li-^ oil tired, etc., the negative pressure is generated within 1〇2, and the pumped suction tank 1G2 is connected to the communication member 9 by the suction of the suction tank. The two π relative movement between the suction/rinsing unit 102 and the inkjet head 10 can also cause the suction/flushing unit 102 to move relative to the moving person. In addition, the absorbing/rinsing unit 102 opens and closes the domain 1 according to the Zhaozhao production early 70102. The maintenance mechanism according to the embodiment may be configured to switch the inkjet head 10 and the first groove 12 by the second slot 13 in the above-described conventional nozzle 10 and the communication member 9 or The second tank 13 is the physical body switching unit 105. The second tank 13 stores the cleaning liquid 3 of the low-viscosity liquid in which the liquid immediately before the flow flows. In the second embodiment of the present invention: = The solvent which dissolves the ink 2 is used most. Thereby, even if the oil black/text is solidified, it can be dissolved. In the X flow path, as shown in Fig. 15, the suction/configuration of the present embodiment has a degree of freedom in tracking the inclination of the head surface. / The first one is the abutting member 21 that abuts the nozzle face, and the rubber structure of the hardened elastomer is 97106211 200920493 T degree 80 degrees (preferably 5G to 7G degrees) (JIS K6253 specification) Attached to the frame 62 by means of bonding or screwing. The frame 62 is supported by a support member 63 which is fixed by means of bonding or screwing and is formed by a softened elastic member such as rubber or spring. The support member 63 can also penetrate the nozzle surface mounting error (three-dimensional tilt) of the ink jet head 1, and can also penetrate a depth of 4 〇 to 8 〇 (preferably 50 to 70 degrees). The support member 63 is fixed to the plate-like mounting member 64. A bottom suction port 24 for connecting at least one of the suction through holes and a joint 66 connected to the communication member 9 are disposed on the bottom surface portion of the frame 62. According to the suction/rinsing unit 1 〇 2 of the present embodiment constructed as described above, it is possible to ensure complete adhesion and sealing without affecting the inclination of the nozzle surface. The negative pressure generating mechanism of the present embodiment is composed of a signal generating device 8, a pressure supply pump 19, a delta circulator 38, and an ejector 37, and is connected to the suction/rinsing unit 1〇2 via the waste liquid tank 40. . In addition, a silencer that absorbs air sound may be added to the negative pressure generating mechanism. The "唬 generating device 8 sets and registers the complex pattern time and the voltage signal waveform" and selects and outputs only one pattern from the plurality of registered patterns. The adjuster 38 can perform the pressure in accordance with the signal waveform voltage of the signal generating device 8. The signal generating device 8 may also be constituted by, for example, a pulse generator, a PC, etc. The injector 37 is capable of generating a negative pressure in cooperation with the pressure supplied from the regulator 38. The regulator 38 and the injector 37 are commercially available air pressure. The machine is constructed. Even if the negative pressure generated by the regulator 38 and the injector 37 is not controlled, 97106211 32 200920493 is controlled to maintain a certain pressure from the trigger 38, by setting the section on the discarded side of the injector 37. The flow rate of the flow valve is adjusted to control the negative pressure. The negative pressure generating mechanism of the example of the present invention is characterized in that the negative pressure generated in the suction/rinsing unit is gently restored to atmospheric pressure. For example, by the signal generating device 8 that emits the preset signal waveform, the negative change in the suction/rinsing unit 102 is gently generated, thereby preventing the re-mixing of the bubbles. & A set of signal waveforms is taken before the negative pressure in the suction/rinsing unit 1〇2 is moderately changed, and may be linear, curved, or slightly phased. The curvilinear waveform is a Sin waveform as shown in Fig. 16. As shown in Fig. 16(a), if the signal waveform output from the signal generating device 8 is set to the Sin waveform, the pressure supplied from the regulator (10) is used. As shown in Fig. 16 (b), the negative pressure of the ejector 37 prevents vibration of the meniscus I / at the tip end of the nozzle 6 of the ink jet head 1 as shown in Fig. 16 (c). The coating control method is carried out in the order shown in the flow chart on the left in Fig. 8. First, the liquid material application device of the liquid material application device is turned on (starting) to perform the initializing operation (initial operation). Then, the relevant device parameters (data setting) of the produced product (variety) are set. The device parameters are, for example, the workpiece size, the coating area, the injection condition, etc. If the setting is completed, the production preparation is completed. Working the workpiece from the generic loader In the supply device, the platform is supplied to the liquid material coating device. After the workpiece placed on the platform is positioned on the platform of 97106211 33 200920493, the coating position on the workpiece is confirmed, and the liquid material coating device is Correction (alignment) of the relative positional deviation of the coating position on the workpiece is performed by using an image pickup device such as a CCD camera and performing image processing on the captured image on the workpiece position. In addition to the physical correction of the rotational movement, the program for correcting the coordinate position of the robot is also performed. The correction of the coordinate position correction is performed by the execution of the processing to complete the correct positioning of the workpiece on the device platform. Preparation for coating at a given coating location. When the above correction processing is completed, the coating operation is started. [Embodiment 3] The film forming method of the present embodiment is an ink jet coating method in which a film is formed by drying to a lower droplet after the droplets of the dropped droplets do not flow, and forming a film by dropping. For the liquid material, a % imipenem solution was used, and for the substrate, a substrate was used. * Polyimine solution is used to form a semiconductor insulating layer and a liquid crystal panel insulating layer. The glass substrate is placed on a platform that can be temperature-adjusted in order to dry the liquid to the extent that it does not flow. [Comparative Example] Using a conventional inkjet coating method, after coating a 25 mm square coated region at a pitch of 3 〇 p 1 /drop and 70 μm, the following conditions occurred. (A) Horizontal (horizontal direction): Peripheral diffusion 〇·5~1. Omm degree with respect to a predetermined coating area. (B) Longitudinal direction (height direction): the center of the coating area is 80 to 85 nm, and the edge portion is about 100 nm. 97106211 34 200920493 [Example 3] In the inkjet coating method of the present example, the coating area of 25 minutes was applied in the same manner as 8 pp / drop, 4 shots, and 70 μm pitch, and the following situation occurred. (A) Transverse (horizontal direction): Peripheral diffusion 〇· 05~0·1mm with respect to the specified coating area. (B) Longitudinal direction (height direction): the center of the coating region is 8 〇 nm to 1 〇〇 nm, and the edge portion is at a height of about 80 nm to 100 nm. As described above, it was confirmed that the enthalpy forming method of the present embodiment achieves an advantageous effect as compared with the conventional film forming method shown in the comparative example. More specifically, it has been confirmed that the method of the present embodiment can reduce the unevenness formed on the film, reduce the height difference of the entire surface of the film, and further reduce the amount of bleeding at the edge portion. (Industrial Applicability) ^Inventive clothing (4) Inkjet printer, still suitable for precision spray 'into the device (including coating device), precision coating device V... Ink recording . It can also be applied to the printing, drawing/drawing device/printing device of the large-sized color panel of the organic EL display panel, such as the inkjet type inkjet sprayer. The coating device for the purpose of the inkjet recording method is also an irrelevant pressure-resistance thermal spray type or the like, which can be adapted to the mechanical conversion method, or can be used in the lens manufacturing industry-type printing production (4) posters and building materials decoration aspect. (4) Color step, or large [Simplified description of the drawings] Fig. la is a general outline of a device equipped with an embodiment 丨 monthly washing mechanism 97106211 35 200920493 Top view. Fig. 1b is a schematic overall side view of a device equipped with the cleaning mechanism of the first embodiment. Fig. 2 is a schematic explanatory view showing a form of a cleaning mechanism of the first embodiment. Fig. 3 is a schematic structural view showing another embodiment of the cleaning mechanism of the first embodiment. Fig. 4a is a plan view showing the structure of the cleaning unit of the first embodiment. Fig. 4b is a side cross-sectional view showing a schematic configuration of a cleaning unit of the embodiment 。. Fig. 5 (a) and (b) are explanatory views of the washing step and the drying step performed by the washing unit of the example i. Fig. 6 is a flow chart showing the steps of cleaning and drying the ink jet head of the first embodiment. Figs. 7(a) and (b) are explanatory views of the nozzle inspecting mechanism of the embodiment. Fig. 8 is a flow chart showing the execution sequence of the coating control of the ink jet head. Fig. 9 is a schematic conceptual view showing the operation of the ink jet head. Fig. 1 is an explanatory view of a pre-processing operation of the ink jet head constructed in Fig. 9. Fig. 11 is an explanatory view showing the post-processing operation of the ink jet head of the structure of Fig. 9. Fig. = and (8) are comparative illustrations of a conventional thick film forming method and a thick film opening method of the present invention. The wiring pattern which can be formed by the film forming method of the present invention is returned. Fig. 14 is a structural view showing a maintenance mechanism of the second embodiment. : 15 is a perspective side view of the suction/rinsing unit of Example 2. Shapes (a) to (〇 are signal waves output from the machine of the embodiment 2 [Description of main component symbols] 97106211 36 200920493 1,10 Inkjet head 2 Ink 2 Washing part 2 Liquid material 3, 12 Washing Liquid 4 Used cleaning solution (waste liquid) 5 Negative pressure 6 Nozzle 7 Opening and closing mechanism 8 Signal generating device 9 Connecting member 11 Liquid material discharge surface 12 Liquid material supply bottle 12 First tank 12a, 12b Liquid bottle 13 Washing liquid Bottle 13 2nd slot 14 Workpiece platform 15 Personal computer (PC) 16 Operating table 19 Pressure supply pump 20 Cleaning unit 21 Fluid receiving part 21 ' 61 Abutment member 97106211 37 200920493 22 Discharge valve 23 Cleaning lip 24 Bottom suction port 25 Cleaning liquid supply port 26 Cleaning liquid recovery port 28 Openings 31a, 31b Cleaning liquid nozzle solenoid valves 32a, 32b Side nozzle air opening valve 33 Supply valves 34a, 34b Negative pressure solenoid valve 35 Cleaning liquid supply valve 36 Material Switching valve 37 Injector 38 Regulator 40 Waste tank 41 Manual joint 42 Compressed air 43 CDA suction opening and closing ball valve 44 Exhaust air opening and closing ball valve 45 Exhaust filter 51 Opening and closing electromagnetic 阙52 Full-Sensor 62 Frame 63 Support member 97106211 38 200920493 64 Mounting member 66 Connector 71 Formal liquid 72 Inspection film 73 Plate 74 Camera 75 Reflective illumination 76 Penetration illumination 77 Field of view of the camera 78 Dropped formal liquid 81 Feed Feed roller 82 Winding roller 101 Inkjet nozzle control box 102 Suction/rinsing unit 103 Head cover unit 104 Image camera 105 Liquid material switching unit 106 Inkjet control substrate 107 Liquid tank 108 Emergency switch 109 Base plate 110 Beam 112 Various Air compressor 113 Instrument box 97106211 39 200920493 114 Control box 121 X-axis moving mechanism 122 Y-axis moving mechanism 123 Z-axis moving mechanism 124 转动-axis rotating mechanism 125 Η 0-axis rotating mechanism 151 First valve 152 Second valve 97106211 40