TW200921937A - Production method of solid-state light-emitting device with high reliability - Google Patents
Production method of solid-state light-emitting device with high reliability Download PDFInfo
- Publication number
- TW200921937A TW200921937A TW96142201A TW96142201A TW200921937A TW 200921937 A TW200921937 A TW 200921937A TW 96142201 A TW96142201 A TW 96142201A TW 96142201 A TW96142201 A TW 96142201A TW 200921937 A TW200921937 A TW 200921937A
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- TW
- Taiwan
- Prior art keywords
- film
- epitaxial
- state light
- solid
- epitaxial film
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 17
- 238000005530 etching Methods 0.000 claims abstract description 16
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 30
- 239000013078 crystal Substances 0.000 claims description 14
- 230000004888 barrier function Effects 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 5
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical group [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims 1
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 1
- 238000004513 sizing Methods 0.000 claims 1
- 238000001039 wet etching Methods 0.000 abstract description 11
- 229910052594 sapphire Inorganic materials 0.000 description 21
- 239000010980 sapphire Substances 0.000 description 21
- 241000238631 Hexapoda Species 0.000 description 11
- 230000005496 eutectics Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 230000006378 damage Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 244000223760 Cinnamomum zeylanicum Species 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000017803 cinnamon Nutrition 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96142201A TW200921937A (en) | 2007-11-08 | 2007-11-08 | Production method of solid-state light-emitting device with high reliability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96142201A TW200921937A (en) | 2007-11-08 | 2007-11-08 | Production method of solid-state light-emitting device with high reliability |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200921937A true TW200921937A (en) | 2009-05-16 |
| TWI351775B TWI351775B (fr) | 2011-11-01 |
Family
ID=44728032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96142201A TW200921937A (en) | 2007-11-08 | 2007-11-08 | Production method of solid-state light-emitting device with high reliability |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200921937A (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103066167A (zh) * | 2011-10-18 | 2013-04-24 | 隆达电子股份有限公司 | 固态发光元件的制作方法 |
| CN115132894A (zh) * | 2022-07-26 | 2022-09-30 | 福建晶安光电有限公司 | 一种复合图形衬底及其制作方法 |
-
2007
- 2007-11-08 TW TW96142201A patent/TW200921937A/zh not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103066167A (zh) * | 2011-10-18 | 2013-04-24 | 隆达电子股份有限公司 | 固态发光元件的制作方法 |
| TWI474507B (zh) * | 2011-10-18 | 2015-02-21 | 隆達電子股份有限公司 | 固態發光元件之製作方法 |
| CN115132894A (zh) * | 2022-07-26 | 2022-09-30 | 福建晶安光电有限公司 | 一种复合图形衬底及其制作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI351775B (fr) | 2011-11-01 |
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Legal Events
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|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |