TW200924960A - Method and device for mechanical processing of semiconductor products in a press - Google Patents
Method and device for mechanical processing of semiconductor products in a press Download PDFInfo
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- TW200924960A TW200924960A TW97102314A TW97102314A TW200924960A TW 200924960 A TW200924960 A TW 200924960A TW 97102314 A TW97102314 A TW 97102314A TW 97102314 A TW97102314 A TW 97102314A TW 200924960 A TW200924960 A TW 200924960A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000012545 processing Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 7
- 230000033001 locomotion Effects 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims description 25
- 239000013013 elastic material Substances 0.000 claims description 20
- 239000002699 waste material Substances 0.000 claims description 16
- 230000009471 action Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000006378 damage Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 238000005303 weighing Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 239000012876 carrier material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 241000289581 Macropus sp. Species 0.000 description 1
- 241000555745 Sciuridae Species 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 238000013329 compounding Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
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- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B1/00—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen
- B30B1/26—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by cams, eccentrics, or cranks
- B30B1/266—Drive systems for the cam, eccentric or crank axis
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B1/00—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen
- B30B1/26—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by cams, eccentrics, or cranks
- B30B1/28—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by cams, eccentrics, or cranks the cam, crank, or eccentric being disposed below the lower platen or table and operating to pull down the upper platen or slide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/14—Control arrangements for mechanically-driven presses
- B30B15/148—Electrical control arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/30—Feeding material to presses
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Presses (AREA)
- Press Drives And Press Lines (AREA)
Abstract
Description
200924960 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於在壓機中之半導體產品機械處 理之方法與裝置。 【先前技術】 在半導體產品的製造中，通常會有大量產品集合於半 導體產品之集體組件中之載體（其亦稱為（例如）引線框 架或板）上。在半導體產品之製造步驟的一部分（諸如， © 通常為將電子組件置放於載體上及對電子組件之囊封）完 成之後，藉由分離操作而將已裝配之半導體產品彼此分 離。對載體之穿孔或衝壓（例如，以薄片材料條帶之形式） 頻繁應用於半導體之製造中。另外，亦可對電子組件進行 其他機械處理，諸如使載體材料變形。在此等機械處理期 間，通常必須將相當大的作用力局部施加於載體材料上（以 每cm2數千公斤的數暈級距）。半導體產品之機械處理的 ❹ 另—特徵為：此亦可產生廢料（例如，呈金屬塊形式）。 用於半導體產品之機械處理的現有壓機係昂貴的，且在使 用期間亦為嘈雜的（遠高於90 dB的噪音壓作用力為典型 的）。 【發明内容】 本發明之目標為提供用於在壓機中之半導體產品機械 處理之改良方法與改良裝置，藉由該改良方法及改良 ，機械處理可比先前技術相對便宜且安全地執行且具有 極小機率使產品及/或壓機損壞。 5 200924960 為此目的，本發明提供—種如 述之用於在壓機中之半 專J範圍第1項所 -方“辟， ♦體產機械處理之方法。在至小200924960 IX. Description of the Invention: [Technical Field] The present invention relates to a method and apparatus for mechanical processing of semiconductor products in a press. [Prior Art] In the manufacture of semiconductor products, a large number of products are usually collected on a carrier (also referred to as, for example, a lead frame or a board) in a collective assembly of semiconductor products. After a part of the manufacturing steps of the semiconductor product, such as © usually placing the electronic component on the carrier and encapsulating the electronic component, the assembled semiconductor products are separated from each other by a separating operation. Perforation or stamping of the carrier (for example, in the form of a strip of sheet material) is frequently used in the manufacture of semiconductors. In addition, other mechanical treatments of the electronic components may be performed, such as deforming the carrier material. During such mechanical processing, it is generally necessary to apply a considerable amount of force locally to the carrier material (several halo pitches of thousands of kilograms per cm2). Mechanical treatment of semiconductor products ❹ Another feature is that this can also produce waste (for example, in the form of metal blocks). Existing presses for mechanical processing of semiconductor products are expensive and also noisy during use (typically above 90 dB of noise pressure). SUMMARY OF THE INVENTION It is an object of the present invention to provide an improved method and an improved apparatus for mechanical processing of a semiconductor product in a press, by which the mechanical processing can be performed relatively inexpensively and safely and with minimal Probability of damage to the product and / or press. 5 200924960 For this purpose, the present invention provides a method for mechanical treatment of a body, such as the one used in the press, as described in the first section of the press.
方向上饋送產品的作 至V 產品、饋送構件及/或應纟防止將大作用力施加於 壞。換言之，在至少=機;1而使得此等中之一或多者損 力。因此，可能方向上限制饋送期間所施加的作用 J月b在（例如）停潘 饋送構件損壞。亦有Μ ^丨止產品損壞或 錯誤類型組件、組株尤改σ曰 逆用於處理之 目 、 ，足取低規袼或破壞性地存在侵入 因素（5垢、廢料、脫落部 t 4- ΛΑ ^ m ^ 寺）的凊況下所引起的（相 作本貝^用力限制之另一優勢在於其導致對於操 者的增加之安全性…例如）身體局部受困，則可因 此而防止傷害1此，本發明亦導致改良之工作條件V7因 :('J如）實施饋送而使得待處理之半導體產品的饋 送“包含複數個相互不同路徑部分的饋送路徑而發生， §亥等路徑部分具有# ^ 有變化之移動、组件，此等不同移動組件具 備早獨的作用力限击彳5¾ + π制益此處，可設想（例如）具有單獨 的水平及垂直移動組件的袋鼠式饋送移動。在更複雜饋送 路k之情況下’上文已描述在至少一方向上對饋送之作用 幻艮制的優勢同樣可在多個方向上實現；在該複雜館送路 徑中，用於饋送之產品在不同方向上連續位移。 紅轉移動亦稱為非均勻旋轉移動，亦即，旋轉移動具 有非均勻運動特性。進一步聞明：肖句運動（UM)亦定 義為所覆蓋之路徑與運動之持續肖間的t匕率在任何時刻恆 定之運動，此意味著速度亦在任何時刻恆定。根據熟習此 200924960 項技術者，迄今為止，處理元件之相對移動理想地為平滑 移動此係因為與非平滑移動相比，平滑移動可快速且可 罪地實現。個別壓機部分較佳實質上相對於彼此線性位 移且接著通常藉由（例如）電動馬達之非均勻旋轉移動 而以經濟方式起始此相對線性位移。The product is fed in the direction to the V product, the feed member and/or the tamper to prevent the application of a large force to the bad. In other words, at least = machine; 1 makes one or more of these losses. Therefore, it is possible to restrict the effect applied during the feeding in the direction of J month b, for example, to stop the pan feeding member from being damaged. There are also Μ 丨 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品 产品ΛΑ ^ m ^ Temple) caused by the situation (another advantage of the force limitation is that it leads to increased safety for the operator... for example) if the body is trapped, it can prevent injury 1 , the present invention also results in improved operating conditions V7 due to: ('J as) implementation of the feed such that the feed of the semiconductor product to be processed "contains a plurality of feed paths of mutually different path portions, the path portion has # ^ There are changing movements, components, and these different moving components have the ability to limit the force of the singularity. Here, for example, a kangaroo-type feed movement with separate horizontal and vertical moving components is conceivable. In the case of a more complex feed path k, the advantages of the above-described effect of the illusion of feeding in at least one direction can also be achieved in multiple directions; in the complex pavilion path, the product for feeding Continuous displacement in different directions. Red-turn motion is also called non-uniform rotational motion, that is, rotational motion has non-uniform motion characteristics. Further, the koji motion (UM) is also defined as the path and motion duration. The inter-axis t匕 rate is constant at any moment, which means that the speed is also constant at any time. According to those skilled in the art of 200924960, the relative movement of the processing elements has so far been ideally smoothed because of the non-smoothing Smooth movement can be achieved quickly and sinfully compared to movement. Individual press sections are preferably linearly displaced substantially relative to each other and then typically initiated in an economical manner by, for example, non-uniform rotational movement of the electric motor. Linear displacement.
當廢機部分之所要相對移動並未根據正弦曲線而平滑 地運行時（亦即’當移動時間的二次導數Aw在任何情 況下並非不連續時），存在由此所引起之準確控制問題且 D亥相對可位移組件之f量慣性導致可能關於處理速度限制 的（預想）觀念。根據先前技術，用於進一步指定平滑移 動之已知較佳值為處理元件在時間上之㈣（时）必須 具有恆定進程，或仍更佳地限於低於2〇〇 的數值。另 ❹ 外，熟習此項技術者假設’作為均勻旋轉驅動至線性位移 之通常轉換結果之已為正弦狀的壓機部分移動特性係導致 壓機部分的平緩終止。結合饋送產品之作用力限制，尤其 當隨著個別壓機部分接近最短相互距離，而具有與壓機部 分之正弦狀移動特性相比發生更大的減速時，本發明提二 壓機部分之非均勻旋轉驅動的優勢。壓機部分之接刻 實際上不位於死點（亦即，不處於移動特性之峰或谷處 而是在距死點位置的某距離處。由連接至壓機部分之工 必須亦形r操作衝程”的事實可造成此情形。因此，二 (例如）穿孔期間，穿孔元件必須仍被推入穿孔板中。 結果為，在壓機部分相互接觸，或在形成壓機部分之= 或耦合至壓機部分的工具進入相互接冑（或在此應用。中二 200924960 * 等效者）的時刻中，其仍 於卢押“ 1/5 J -有相虽大的線逮度。不僅用 饋送可以受控方式發生，對其之進-步處理 ^ 的境況下發生，其—起導致對產品之高可控制 若現在可特定地修改移動特性則尤其有利， 到達正弦曲後之坏甲Α ' 裏之死點之刖，甚於根據通常正弦曲 對於增加減速之需要。更特定言之，在連續操作之平均速 纟相同的條件下發生驅動之旋轉速度的變化。亦即，進行 特定努力以在單一處理循環内減速及加速。更特定言之， 此與歷時複數個連續處理循環之旋轉速度的改變的相關程 度不大，而與移動之單一移動循環内之減速及加速相關。 移動特性之峰可因此“加寬”。出乎意料地，發現壓機因 此更，安靜地運行（發現大於20 dB之聲音減小在實務上 為可此的）。尤其在壓機附近之聲音衝擊顯示為—重要因 素之條件下’未發現非均勻旋轉驅動之缺陷抵消此情形可 〇 提供的優勢。此處須X其考慮經言史定用於工作條件之標 準另一重要優勢為，因為壓機以較小速度終止，故其以 更平滑地”冑行，此減小工具之磨損。此係因為形成壓 機卩刀之邛刀的工具以比通常速度低的速度相互接觸。萨 由，工具需要較少維護，但亦因此增加壓機之有效操作時 間，所以減小之磨損當然為有利的。另外，由於結合饋送 之作用力限制，本發明亦允許更高速度，此提供關於生產 率的極顯著優勢。發現30%至50%之生產率增加為可能的。 本發明亦提供一種用於在壓機中之半導體產品機械處 8 200924960 理之万法 你钒行半導體產品之 別壓機部分的相對位 機械處理期間的個 相耵位移期間，於容器中收 中，自動監視對容p , ”少成廢料，其 悦3了 4态之至少一填充水準的 藉由於測定具有内含 。此（例如） 也切 < 合态的重量而變得 从士 * 空容器係重要的。若在容器含有所確定之按時清 前清空容器，料行了不必要之X作。另廢料之 超過所確定填充水準的^可導致不合以m空已When the relative movement of the waste machine portion is not smoothly operated according to the sinusoidal curve (that is, when the second derivative Aw of the movement time is not discontinuous in any case), there is an accurate control problem caused thereby. The amount of inertia of the D-hai relative to the displaceable component results in a (predictive) concept that may be related to processing speed limitations. According to the prior art, the known preferred value for further specifying smooth motion must have a constant progression of the processing element in time (four) (hours), or still more preferably be limited to values below 2 。. In addition, those skilled in the art have assumed that the sinusoidal partial movement characteristic of the sinusoidal rotation as a result of the normal rotation drive to the linear displacement results in a gentle termination of the press portion. In combination with the force limitation of the feed product, especially when the individual press parts are close to the shortest mutual distance and have a greater deceleration than the sinusoidal movement characteristic of the press part, the present invention provides a second part of the press The advantage of evenly rotating drive. The connection of the press part is not actually located at the dead point (that is, not at the peak or valley of the moving characteristic but at a certain distance from the dead point position. The work connected to the press part must also be operated by r The fact that stroke can cause this situation. Therefore, during the second (for example) perforation, the perforating elements must still be pushed into the perforated plate. The result is that the press parts are in contact with each other, or in the formation of the press part = or coupled to The tools of the press section enter each other (or in this application. In the second. 200924960 * equivalent), it is still in Lube "1/5 J - there is a large line catch. Not only with the feed It can occur in a controlled manner, in the case of its advance processing ^, which leads to high controllability of the product. It is especially advantageous to modify the mobile characteristics specifically now, after reaching the sinusoidal bad armor ' The point of death in the sequel is more than the need to increase the deceleration according to the usual sinusoidal curve. More specifically, the change in the rotational speed of the drive occurs under the same conditions of the average speed of continuous operation. That is, a specific effort is made. In a single place Deceleration and acceleration in the cycle. More specifically, this is not related to the change of the rotational speed of a plurality of consecutive processing cycles, but is related to the deceleration and acceleration in a single moving cycle of movement. As a result, it was “widened.” Unexpectedly, it was found that the press was operated more quietly (detecting a sound reduction of more than 20 dB is practically possible). Especially the sound impact near the press is shown as important. Under the condition of the factor, 'the defect of non-uniform rotation drive is not found to offset the advantage that this situation can provide. Another important advantage that it must be considered for the standard of working conditions is because the press is smaller. The speed is terminated, so it is smoother, which reduces the wear of the tool. This is because the tools that form the boring tool of the press are in contact with each other at a lower speed than the normal speed. Maintenance, but also increases the effective operating time of the press, so it is of course advantageous to reduce the wear. In addition, the invention allows for higher limits due to the force limitation of the combined feed. Degree, this provides a very significant advantage with respect to productivity. It is found that a productivity increase of 30% to 50% is possible. The present invention also provides a semiconductor product machinery for use in a press 8 200924960 During the relative displacement of the press part of the product, during the phase shift of the mechanical processing, the container is received in the container, and the volume p is automatically monitored, "the waste is reduced, and the filling level of at least one of the four states is due to The measurement has an internal content. This (for example) also cuts the <synthesis weight and becomes important from the empty container. If the container contains the determined time to clear the container before the time, it is unnecessary X The other waste that exceeds the determined fill level can result in a mismatch
或導致阻《機之操作。此處，對容 乍:件及/ 偵測可提供一觫沐士也 戰程度的自動 徒供解决方案1為容器通常為 小污染物（灰塵）通堂卢六认—„』乂換的且因為 故，番吾 子在於谷盗中之其他污染物當中， ㈣測形成對於提供此仙的尤其可#解決方案。 之壓機二：較佳方法中’借助於安全系統來監視指向彼此 之壓機部分的移動柞 ^〇 之产、m動作用力’以因此防止在錯誤地置放產品 八的工且、置（例如，壓機部分或形成壓機部分之部 刀的工具）損壞。 合，而可能 改變。由於 且可發生快 更有利的是：（例如）可透過快速行動耦 在較佳位置中’進行在決取於產品設定中的 (例如）不正確調整之錯誤的幾率因此受限， 速操作。 為了限制聲音壓力，壓機部分經由彈性材料部分彼此 連接係有利的。接著，使此連接與界定最終大小之形狀保 .:(丄準確定尺寸）停止件共同行動；彈性材料部分接著 提供阻尼仍然、界定精確最終大小。 本發明亦提供_種如申請專利範圍第"之用於機械 9 200924960 處理半導體產品之壓機裝置。藉由設有用於待處理之半導 體產品之饋送構件的此裝置，可經由作用力限制器來驅動 饋运構件；該半導體產品係連接至壓機部分。因此，可實 現上文已指出之優勢。可恢復釋放耗合（諸如磁性耗合、 失持耦合、滑動耦合或另一類型之安全性）來形成作用力 限制器’該可恢復釋放叙合（例如）在超過待傳動之最大 作用力時分離。若在分離之後，耦合可容易地恢復至經耦 ΟOr cause the operation of the machine. Here, for the 乍:: and / detection can provide a 觫 也 也 的 的 的 自动 自动 自动 为 为 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器 容器Because of this, Fan Wuzi is among the other pollutants in the Valley Pirates. (4) The formation of the test is particularly feasible for providing this immortal. Press 2: The preferred method is to monitor the presses pointing to each other by means of a safety system. Part of the movement, the m action force 'to prevent the erroneous placement of the product eight, and the damage (for example, the press part or the tool forming the part of the press part) is damaged. It may change. Because it may happen faster, it is more advantageous that, for example, the probability of performing an error in the product setting that is determined by the quick action coupling in the preferred position, for example, incorrectly adjusted, is therefore limited. In order to limit the sound pressure, it is advantageous for the press parts to be connected to each other via the elastic material portion. Next, the connection is made to define the final size of the shape.: (丄 sizing) the stop member acts together; The portion of the material material then provides the damping still, defining the exact final size. The present invention also provides a press device for processing semiconductor products, such as the patent scope " machinery for use in 2009 9960. By providing a semiconductor product for disposal The device of the feed member can drive the feed member via a force limiter; the semiconductor product is coupled to the press portion. Thus, the advantages already noted above can be achieved. Recoverable release consumables (such as magnetic fit) , a loss-of-coupling coupling, a slip coupling or another type of safety) to form a force limiter 'this recoverable release sum, for example, separates when the maximum force to be transmitted is exceeded. If after separation, the coupling can be easily Return to coupling
::置’則係有利的’雖然亦可能設想：…必須由新 释放部分替換用過的釋放區段。 貫施饋送構件 ~ 丫 n 7观姐什之補 數個路徑部分。待施加於不同路徑部分上之作用力 地加以個別限制。此處，可設想（例如U有移動元件的 水平及垂直路徑部分；該移動开杜 犬” "η 移動70件-起需要複合的“袋鼠 :饋送移動。如上所述’對待施加之最大作用力的限制 對裝s (及產βσ)知壞的減小機率’且亦提供對於操 者之更大安全性之優勢^將對裝置之特定移發 生較小機械磨損。 刀赞 在一較佳變異中，該裂置亦包含：一用於自 品收集廢料之容器，及用於谓測該廢料容器之至 ： 水準的偵測構件。此等廢料容器通常 、 、㊉馮可釋放的，以 此夠容易地清空。對填充程度之偵 ^ 滿以致於其變得過重而無法（手 變仔過 、丁勒）清空，盆 而使得其開始阻礙壓機之適當操作 /、雙件過滿 „ 除了可減小被清办讲 遲之危險的優勢之外，亦有可能抻 月二過 此控制由操作者移除之容器 200924960 的最大重量。，14· jLi . 此措施因此亦導致改良之工作條件。 在車乂佳具體實施例中，用於偵測廢料容器之至少一 填充水準的偵測構件包含用於容器之重量偵測器。此可有 利地與壓機之框架―起裝配。因為廢料為有灰塵的，所以 、見偵測係、（例如）困難的。在亦可能的情況下：超重為 ° f作條件具有不利影響之因素，且因ifc，以此方式， J重要數值。藉由裝配偵測器及框架，可以簡單方式實 施可交換容器，且增強裝置之可靠性。 在又一有利具體實施例變異中，經由具有反饋旋轉驅 動之偵測系統來保護壓機部分中的至少一者。此偵測可經The following is advantageous. Although it is also possible to envisage: ... the replacement portion must be replaced by a new release portion. The feed member is applied to ~ 丫 n 7 to the sister's complement of the path portion. The forces to be applied to the different path portions are individually limited. Here, it is conceivable (for example, U has horizontal and vertical path parts of the moving element; the mobile open dog) "η moves 70 pieces - the "kangaroo: feed movement that requires compounding. As mentioned above, the maximum effect of the application" The limitation of force on the s (and the production of βσ) knows the probability of reduction 'and also provides the advantage of greater safety for the operator ^ will result in less mechanical wear on the specific movement of the device. In the variation, the splitting also includes: a container for collecting waste materials from the product, and a detecting member for measuring the waste container to: level. The waste containers are usually, and can be released by This is easy to empty. The degree of filling is so full that it becomes too heavy to be emptied (hands changed, Dingle) empty, the basin makes it start to hinder the proper operation of the press /, the two pieces are too full „ In addition to the advantage of reducing the risk of being cleared of the delay, it is also possible to control the maximum weight of the container 200924960 removed by the operator on the second day of the month. 14· jLi . This measure also leads to improved work. Condition. In a specific embodiment, the detecting component for detecting at least one filling level of the waste container comprises a weight detector for the container. This can advantageously be assembled with the frame of the press. Because the waste is dusty, So, see the detection system, for example, difficult. If possible, the overweight is a condition that has a negative influence on the condition f, and because of ifc, in this way, the important value of J. By assembling the detector And the framework, the exchangeable container can be implemented in a simple manner, and the reliability of the device is enhanced. In yet another advantageous embodiment variation, at least one of the press portions is protected via a detection system with feedback rotational drive. Testable
由安全插腳來發&。, U 此處再次陳述，為清楚起見，術語“壓 機部分應理解為非可交換機器部分，該機器部分係結合 連接至其之可父換工具部分。對壓機部分之損壞的幾率進 一步因該安全性而減小。 在又較佳具體實施例中，該裝置具備至少一快速行 動搞σ Θ仃動輕合係用於位移該裝置之視產品而定之可 調整組件。以類似古 — 顯似方式，裝置具備用於交換裝置之視產品 而疋之組件的至少一快速行動耦合係有利的。此等措施簡 化了裝置之轉換’此可導致時間節省，且對於工作條件是 。優勢另優勢為，藉此在無需相關操作者具有一可觀 專門♦識及技能情況下，增加正確設定之可靠性。 壓機之又-較佳變異的特徵在於，壓機部分中之至少 者在私向另壓機部分的一侧面上具備一停止件，此停 止件提供於與彈性材料部分之接觸側面上。此處，此彈性 200924960 材料部分理想地置放於形狀保持凹座中，且進一步由提供 於鄰接形狀保持材料部分之側面上的全材料部分所組成， =全材料部分具有斜切至在形狀保持材料部分下方位置的 0„ 彈性材料部分中之通常先前技術中央 在此構故中之彈性材料部分的邊緣仍為彈性材料部 为以在由形狀保持材料部分保持空_之空間中之變形提供 =空間、。然而’彈性材料部分較佳係大的，以使得其不 會元全被迫進入由形狀你姓Send & by the safety pin. , U Again stated here, for the sake of clarity, the term "press section" shall be understood to mean a non-switchable part that incorporates the part of the replaceable tool that is connected to it. The probability of damage to the press section is further Reduced by this safety. In a further preferred embodiment, the device is provided with at least one quick action squirrel swaying light coupling for displacing the device depending on the product. In a similar manner, the device is advantageously provided with at least one fast acting coupling for the component of the switching device. These measures simplify the conversion of the device. This can result in time savings and is advantageous for working conditions. The advantage is that, by eliminating the need for the relevant operator to have a considerable expertise and knowledge, the reliability of the correct setting is increased. The press-best variation is characterized in that at least one of the press parts is private. On the other side of the press part, there is a stop member which is provided on the side contacting the elastic material portion. Here, the elastic portion of the 200924960 material is ideal. Placed in the shape retaining recess and further consisting of a full material portion provided on the side abutting the shape retaining material portion, = full material portion having a 0' elastic material portion chamfered to a position below the shape retaining material portion In general, the edge of the portion of the elastic material in the center of the prior art is still that the portion of the elastic material provides a space for deformation in the space in which the portion of the shape retaining material remains empty. However, the portion of the elastic material is preferably large so that it will not be forced into the shape by your last name.
Φ狀保持材料部分保持空曠的空間。由 俘：：性材料部分之形狀及體積的精碟控制，故防止形狀 保持材料在任何時間界定停止件之最終大小。因此，除了 減小聲音壓力之外，盔中 ^ 材料部分具有長於分，此彈性 勢。 、巧之材料部分的壽命之優 【實施方式】 不之非限制性例示性具體實施例 將基於以下圖式中所 來進一步闡明本發明。 展不用於機械處理半導體產 視圖，其具傷饋送輸送機2C⑼用於f置1的透 〜例4、仏應用於處理之產 放輸送機3 (排放經處理之通常 β Μ V a 1.4, ± 離之產0 口）。排放輸送 機3具備快速行動終止件4， 错.σ ^ 田快逮仃動終止件4可在 早—刼作中獲得對排放輸送機3 在 ^ ,, * „ ^ ^ (例如)以移除 卡住的產…切其放回成直線。使用快 - 可接著在單一操作中使排放輸送機3再次返^止件4, 置。圖1進-步展示連接至麼機部分6 至受保護位 宁之一者的電 12 200924960 Ο ❹ 動馬達5;下文將參看圖2Α及圖2Β以更詳細地閣明此情 形。不同處理元件（未圖示）可耦合至壓機部分6、7;裝 置1尤其結合穿孔機及穿孔板使用。驅動器5係可見的 因為…示於打開位置。因此，具備把手1〇之廢料容 器9亦在圖i中可見。在（例如）產品之穿孔及分離期間， 廢料可排放至容器9。容器9 —滿，則操作者必須打開門 8且替換或清空容器9。將參看圖3A及圖把進―步閣明 此情形。借助於罩"來保護壓機部分6、7免受外界影響， 打開罩U可啟動使裝置i之操作停止的感應器。門8及 所有其他組件與框架12 —起裝配。 圖2A展示自框架12截取之驅動器及壓機部分μ因 為此等形成如圖i中所示之裝置i的部分）之—部分的透 視圖。電動馬達5經由驅動滾筒26及驅動帶2〇叙合至驅 =2卜驅動輪21經由偏心輪22 (此處參見圖2B) 機部Μ之垂直位移。偏心輪22至厂堅機部分7 合可由谓測糸，统（未圖示）保護，藉此有可能介入於 電動馬達5中。使用第二驅動器2 、 ’、，、工由驅動帶28及在 地：動Μ =後的具有作用力限制麵合的至少-機構而間歇 ^動-饋送元件（此處未詳細展示）。此麵合可（例如） ^性H使得錄_合在超過所錢之貞載時釋放。 僅須再次將該等組件置放在—起以恢復Μ。另一 k項為在一耗合位置中以―決 田—含 /夫疋偏壓而固定連接插腳。若 —負載而超過插腳之偏壓，㈣腳㈣㈣合 驅動器因此自遲機部分7分離。另外，作用力限制驅動器 13 200924960 亦可應用於裝置1中之其他被迫移動。e 2A#另外示意 性展示電動馬達5 & 27之控制器25,根據本發明，可： 由該控制器25_控制（例如）電動馬達5之非均勻旋轉。曰 圖3A展示具有把手1〇夕虑λ 丁 U之廢料谷器9的透視圖，容器 9支撐於稱重條帶（―〜邮）30上。如亦在圖3Β 中展示’稱重條帶30與裝置 又柩朱12 一起裝配，藉此 可得以監視具有内含物之容^ 9的重量。若需要， ❹ :將抽吸裝置連接至連接至容器3Q之溢出端31而在容器 中產生負壓。承受例如用於處 '恿理之產ασ之敏感性、所釋放 之小顆粒的數量及類型、局 七〜 匈°丨了應用標準等等的情況，亦 有可能選擇允許溢出端31與環境自由連通。 圖4Α展示根據先前技 古+ 杈術之第一停止件40，其係由具 之接觸側面42之形狀保持基座41 所形成。彈性材料部分43係 的古 係以其大出於接觸側面42上方 的方式由形狀保持基座41 性材料部分43中。Κ持。中央凹座44提供於彈 45 田弟一停止件41與相對的第二停止件 接觸時’亦由於彈性材料部分43中之中央開口 44，而 可壓縮彈性材料部分43 、 定大小的接觴彳目丨^ 使侍第二停止件45與經研磨以 J的接觸侧面42接觸 停止 丧觸成為可能；因此，可精確確定 了止件大小。彈性材料部 在於J: 288 中之中央開口 44的一缺陷 任於，、限制彈性材料部分43 ^ β ,, 之哥命及可變形性，但更重 女的疋此件止件4〇有 塵機裝置的聲音產生。 在圖4Β中以橫截 _ 料部分46,复 V的停止件展示-完全彈性材 /、鄰接—形狀保持停止件部分47之側面48係 14 200924960 ，讀切’使得其延伸至形狀保持材料部分4 侧面49下方的位置 '然而’彈性材料部分 二 的中央部分50遠於形狀保持材料部分 ：觸側面 49而突出。如…所示之停止…優勢=出:藉面 此減小屢機部分關閉的聲音而不會損失停止準確性可： 處之條件為彈性材科部分46之體積_擇使得其》 、’、邑不會破完全迫入形狀保持材料部分Ο 、The Φ-like retaining material portion maintains an empty space. Controlled by the shape of the capture material: the shape and volume of the material, it prevents the shape retention material from defining the final size of the stop at any time. Therefore, in addition to reducing the sound pressure, the material portion of the helmet has a length longer than the minute, which is the elastic potential. The life of the material portion is excellent. [Embodiment] The present invention will be further clarified based on the following drawings. The exhibition is not used for mechanical processing of the semiconductor production view, its insult feeding conveyor 2C (9) is used for the setting of 1 to 4, and the crucible is applied to the processing conveyor 3 (the emission is usually treated as β Μ V a 1.4, ± 0 from the production). The discharge conveyor 3 is provided with a quick action terminator 4, and the error σ ^ field fast catching the slinger 4 can be obtained in the early 刼 对 排放 排放 排放 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The stuck product...cut it back into a straight line. Use fast - then the discharge conveyor 3 can be returned to the stop 4 again in a single operation. Figure 1 shows the connection to the machine part 6 to the protected One of the bits of electricity 12 200924960 ❹ 马达 motor 5; will be referred to in more detail below with reference to Figure 2A and Figure 2B. Different processing elements (not shown) can be coupled to the press parts 6, 7; The device 1 is used in particular in connection with a perforator and a perforated plate. The drive 5 is visible because it is shown in the open position. Therefore, the waste container 9 with the handle 1 is also visible in Figure i. During, for example, perforation and separation of the product The waste can be discharged to the container 9. When the container 9 is full, the operator must open the door 8 and replace or empty the container 9. This will be explained by referring to Fig. 3A and Fig. 3, by means of a cover " The machine parts 6, 7 are protected from the outside world, and the opening of the cover U can be activated to stop the operation of the device i. The sensor 8 and all other components are assembled with the frame 12. Figure 2A shows the drive and the press portion μ taken from the frame 12 as part of the device i as shown in Figure i. The electric motor 5 is rectified via the drive roller 26 and the drive belt 2 to the vertical displacement of the drive wheel 21 via the eccentric 22 (see Fig. 2B here). The eccentric 22 to the factory The machine part 7 can be protected by a system (not shown), whereby it is possible to be involved in the electric motor 5. Using the second drive 2, ',,, the drive belt 28 and the ground: The latter has at least a mechanism to limit the face-to-face and intermittently-feed elements (not shown in detail here). This face can be, for example, ^H, which causes the record to be released when the load exceeds the load. It is only necessary to place the components again to restore the Μ. The other k term is to fix the connection pins in a consumable position with a bias of “Diantian-including/fuss.” If the load exceeds the pin The bias voltage, (four) foot (four) (four) combined drive is therefore separated from the late machine part 7. In addition, the role The limit drive 13 200924960 can also be applied to other forced movements in the device 1. The e2A# additionally schematically shows the controller 25 of the electric motor 5 & 27, according to the invention, can be: controlled by the controller 25_ (eg The non-uniform rotation of the electric motor 5. Fig. 3A shows a perspective view of the waste granulator 9 having the handle 1 and the container 9 supported on the weighing strip 30. Figure 3A shows that the 'weighing strip 30 is assembled with the device 柩朱12, whereby the weight of the contents can be monitored. If necessary, ❹: connect the suction device to the container 3Q The overflow end 31 creates a negative pressure in the container. It is also possible to accept, for example, the sensitivity of the ασ used for the 'career', the number and type of small particles released, the application of the standard, the application of the standard, etc., and it is also possible to choose to allow the overflow end 31 and the environment to be free. Connected. Figure 4A shows a first stop 40 according to the prior art, which is formed by a shape holding base 41 having a contact side 42. The ancient portion of the elastic material portion 43 is held in shape by the susceptor 41 in the material portion 43 in such a manner that it is large above the contact side 42. Hold on. The central recess 44 is provided for the elastic material portion 43 and the size of the joint when the stop member 41 is in contact with the opposite second stop member, also because of the central opening 44 in the elastic material portion 43. The target ^ makes it possible to contact the second stop member 45 in contact with the contact side 42 of the J to stop the contact; therefore, the size of the stopper can be accurately determined. The elastic material portion is in a defect of the central opening 44 in J: 288, restricting the elastic material portion 43 ^ β, the sacred life and deformability, but the heavier female 疋 this piece 4 〇 dust machine The sound of the device is generated. In Fig. 4A, with the cross-section portion 46, the stop member of the complex V is shown - the fully elastic material /, the abutment - shape retaining stop portion 47 side 48 series 14 200924960, the read cut 'extends it to the shape retaining material portion 4 The position below the side 49 'but' the central portion 50 of the elastic material portion 2 protrudes farther than the shape retaining material portion: the contact side 49. Stop as shown in... Advantage = Out: By this, the sound of the closed part of the machine is reduced without losing the stop accuracy. The condition is that the volume of the elastic material part 46 is selected to make it, ',邑Do not break completely into the shape to keep the material part Ο ,
由t狀保持材料料47所確定；停止件終究由 形成。此處，彈性材料部分46之 春 然形成臨界尺寸。 干啼注田 【圖式簡單說明】 圖1展示根據本發明之裝置的透視圖， 圖2A及圖2B展示圖1中所示之裝置之組件的透視 圖，尤其是關於裝置之驅動的組件， 祝 Ο ，…圖3B為圖！中所示之裝置之組件的透視圖， 尤其疋用於移除廢料的組件，及 圖4A及圖4B為具備一置放於形狀保持凹座中之中央 開口的先前技術彈性停止件部分及根據本發明之彈性停止 件部分的透視圖。 【主要元件符號說明】 1 :壓機裝置 2 :饋送輸送機 3 :排放輸送機 4 ··快速行動終止件 15 200924960 η 5 :電動馬達/驅動器 6 :壓機部分 7 :壓機部分 8 :門 9 :廢料容器 1 0 :把手 11 :罩 12 :框架 ❹ 20 :驅動帶 21 :驅動輪 2 2 .偏心輪 24 :凸輪 25 :控制器 26 :驅動滾筒 27 :第二驅動器 28 :驅動帶 ❿ 30 :稱重條帶 3 1 :溢出端 40 :第一停止件 41 :形狀保持基座 42 :接觸側面 43 :彈性材料部分 44 :中央凹座/中央開口 45 :第二停止件 16 200924960 46 :完全彈性材料部分 47 :形狀保持停止件部分/形狀保持材料部分 48 :側面 49 :最遠突出側面 50 :中央部分 51 :停止件It is determined by the t-shaped holding material 47; the stopper is finally formed. Here, the elastic material portion 46 springs to a critical dimension. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 shows a perspective view of a device according to the present invention, and Figures 2A and 2B show perspective views of the components of the device shown in Figure 1, particularly with respect to the components of the device. I wish you, ... Figure 3B is a picture! a perspective view of the components of the device shown, particularly for removing waste, and Figures 4A and 4B are prior art resilient stop portions having a central opening disposed in the shape retaining recess and according to A perspective view of a portion of the resilient stop of the present invention. [Description of main component symbols] 1 : Press device 2 : Feed conveyor 3 : Discharge conveyor 4 · Quick action stopper 15 200924960 η 5 : Electric motor / driver 6 : Press part 7 : Press part 8 : Door 9 : Waste container 1 0 : Handle 11 : Cover 12 : Frame ❹ 20 : Drive belt 21 : Drive wheel 2 2 . Eccentric wheel 24 : Cam 25 : Controller 26 : Drive roller 27 : Second drive 28 : Drive belt ❿ 30 : Weighing strip 3 1 : overflow end 40 : first stop 41 : shape holding base 42 : contact side 43 : elastic material portion 44 : central recess / central opening 45 : second stop 16 200924960 46 : completely Elastic material portion 47: shape retaining stopper portion/shape retaining material portion 48: side surface 49: farthest protruding side surface 50: central portion 51: stopper
1717
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2000449A NL2000449C2 (en) | 2007-01-22 | 2007-01-22 | Method and device for mechanically processing semiconductor products in a press. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200924960A true TW200924960A (en) | 2009-06-16 |
Family
ID=38234906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97102314A TW200924960A (en) | 2007-01-22 | 2008-01-22 | Method and device for mechanical processing of semiconductor products in a press |
Country Status (3)
| Country | Link |
|---|---|
| NL (1) | NL2000449C2 (en) |
| TW (1) | TW200924960A (en) |
| WO (1) | WO2008091146A1 (en) |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0302936B1 (en) * | 1986-12-29 | 1993-12-01 | ISHII, Mitoshi | Servo controller for a press machine |
| NL9001999A (en) * | 1990-09-11 | 1992-04-01 | Asm Fico Tooling | SYSTEM OF PROCESSING DEVICES. |
| JP2755164B2 (en) * | 1994-03-31 | 1998-05-20 | 株式会社栗本鐵工所 | Abnormality detection device by monitoring torque of transfer device |
| US5588344A (en) * | 1994-06-13 | 1996-12-31 | Murata Machinery, Ltd. | Electric servo motor punch press ram drive |
| JP2890169B2 (en) * | 1994-07-15 | 1999-05-10 | 岩谷産業株式会社 | Press machine operation method |
| NL1006402C2 (en) * | 1997-06-25 | 1998-12-29 | Fico Bv | Method for separation of a lead frame, device for separation and separated lead frame. |
| NL1006560C2 (en) * | 1997-07-11 | 1999-01-12 | Fico Bv | Pressing device for processing lead frames. |
| US5878789A (en) * | 1997-08-25 | 1999-03-09 | Trimecs Co., Ltd. | Mechanical press machine for forming semiconductor packages |
| JP4109775B2 (en) * | 1998-12-21 | 2008-07-02 | 株式会社アマダエンジニアリングセンター | Press machine |
| JP2001062591A (en) * | 1999-08-24 | 2001-03-13 | Amada Co Ltd | Press machine |
| DE19947689C2 (en) * | 1999-09-24 | 2002-02-07 | Sms Demag Ag | Press with eccentric crank drive for upper punch unit and operating method |
| DE10138664A1 (en) * | 2001-08-02 | 2003-02-20 | Komage Gellner Maschf | Press and method of operating the press |
| JP3789337B2 (en) * | 2001-09-18 | 2006-06-21 | 株式会社栗本鐵工所 | Transfer device control and monitoring device |
| EP2261018B1 (en) * | 2002-06-18 | 2018-10-17 | AMADA Company, Ltd. | Method of regulating a servo drive system and servo drive system of a press machine |
-
2007
- 2007-01-22 NL NL2000449A patent/NL2000449C2/en not_active IP Right Cessation
-
2008
- 2008-01-21 WO PCT/NL2008/050037 patent/WO2008091146A1/en not_active Ceased
- 2008-01-22 TW TW97102314A patent/TW200924960A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008091146A1 (en) | 2008-07-31 |
| NL2000449C2 (en) | 2008-07-23 |
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