TW200927342A - Electrochemical processing method and electrochemical processing device thereof - Google Patents

Electrochemical processing method and electrochemical processing device thereof Download PDF

Info

Publication number: TW200927342A
Authority: TW; Taiwan
Prior art keywords: processing; electrode; workpiece; machining; displacement
Prior art date: 2007-12-28

Application number

TW96150756A

Other languages

English (en)

Chinese (zh)

Other versions

TWI337107B (fr

Inventor

Kuan-Chih Chiu

Wen-Chieh Wu

Da-Yu Lin

Original Assignee

Metal Ind Res & Dev Ct

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-12-28

Filing date

2007-12-28

Publication date

2009-07-01

2007-12-28 Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct

2007-12-28 Priority to TW96150756A priority Critical patent/TW200927342A/zh

2009-07-01 Publication of TW200927342A publication Critical patent/TW200927342A/zh

2011-02-11 Application granted granted Critical

2011-02-11 Publication of TWI337107B publication Critical patent/TWI337107B/zh

Links

238000003672 processing method Methods 0.000 title claims abstract description 19
239000003792 electrolyte Substances 0.000 claims abstract description 26
238000006073 displacement reaction Methods 0.000 claims description 114
238000003754 machining Methods 0.000 claims description 79
238000000034 method Methods 0.000 claims description 21
239000000758 substrate Substances 0.000 claims description 17
230000007246 mechanism Effects 0.000 claims description 9
230000002093 peripheral effect Effects 0.000 claims description 7
230000008569 process Effects 0.000 claims description 7
239000003990 capacitor Substances 0.000 claims description 2
238000005086 pumping Methods 0.000 claims description 2
230000001133 acceleration Effects 0.000 claims 1
238000005530 etching Methods 0.000 description 13
230000009471 action Effects 0.000 description 9
230000000694 effects Effects 0.000 description 9
238000005516 engineering process Methods 0.000 description 6
238000004519 manufacturing process Methods 0.000 description 6
238000010586 diagram Methods 0.000 description 5
239000012530 fluid Substances 0.000 description 3
239000000126 substance Substances 0.000 description 3
230000008901 benefit Effects 0.000 description 2
238000004070 electrodeposition Methods 0.000 description 2
239000000463 material Substances 0.000 description 2
238000002360 preparation method Methods 0.000 description 2
241000251468 Actinopterygii Species 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
238000002848 electrochemical method Methods 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
230000006872 improvement Effects 0.000 description 1
239000007788 liquid Substances 0.000 description 1
239000007769 metal material Substances 0.000 description 1
238000005459 micromachining Methods 0.000 description 1
239000000843 powder Substances 0.000 description 1
230000003014 reinforcing effect Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
229910052715 tantalum Inorganic materials 0.000 description 1
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1

Landscapes

Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

TW96150756A 2007-12-28 2007-12-28 Electrochemical processing method and electrochemical processing device thereof TW200927342A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
TW96150756A TW200927342A (en)	2007-12-28	2007-12-28	Electrochemical processing method and electrochemical processing device thereof

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW96150756A TW200927342A (en)	2007-12-28	2007-12-28	Electrochemical processing method and electrochemical processing device thereof

Publications (2)

Publication Number	Publication Date
TW200927342A true TW200927342A (en)	2009-07-01
TWI337107B TWI337107B (fr)	2011-02-11

Family

ID=44863554

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW96150756A TW200927342A (en)	2007-12-28	2007-12-28	Electrochemical processing method and electrochemical processing device thereof

Country Status (1)

Country	Link
TW (1)	TW200927342A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN103849913A (zh) *	2012-12-06	2014-06-11	先丰通讯股份有限公司	电化学方法及其装置
TWI632967B (zh) *	2017-09-01	2018-08-21	歐群科技股份有限公司	Multi-axis electric discharge machine with composite mechanical arm

2007
- 2007-12-28 TW TW96150756A patent/TW200927342A/zh unknown

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN103849913A (zh) *	2012-12-06	2014-06-11	先丰通讯股份有限公司	电化学方法及其装置
TWI632967B (zh) *	2017-09-01	2018-08-21	歐群科技股份有限公司	Multi-axis electric discharge machine with composite mechanical arm

Also Published As

Publication number	Publication date
TWI337107B (fr)	2011-02-11

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