TW200934957A - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

Info

Publication number
TW200934957A
TW200934957A TW098100324A TW98100324A TW200934957A TW 200934957 A TW200934957 A TW 200934957A TW 098100324 A TW098100324 A TW 098100324A TW 98100324 A TW98100324 A TW 98100324A TW 200934957 A TW200934957 A TW 200934957A
Authority
TW
Taiwan
Prior art keywords
rotor
stator
vanes
annular groove
turbomolecular pump
Prior art date
Application number
TW098100324A
Other languages
English (en)
Chinese (zh)
Inventor
Heinrich Englaender
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of TW200934957A publication Critical patent/TW200934957A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW098100324A 2008-01-15 2009-01-07 Turbomolecular pump TW200934957A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008004297A DE102008004297A1 (de) 2008-01-15 2008-01-15 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
TW200934957A true TW200934957A (en) 2009-08-16

Family

ID=40405030

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098100324A TW200934957A (en) 2008-01-15 2009-01-07 Turbomolecular pump

Country Status (7)

Country Link
US (1) US20100322799A1 (de)
EP (1) EP2235377B1 (de)
JP (1) JP5546464B2 (de)
CN (1) CN101952602A (de)
DE (1) DE102008004297A1 (de)
TW (1) TW200934957A (de)
WO (1) WO2009089958A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444127B2 (en) * 2009-12-14 2013-05-21 The Boeing Company High temperature composite patch tool
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842902A (en) * 1973-07-05 1974-10-22 Hayes Albion Corp Labyrinthian fan
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
JPS6314893U (de) * 1986-07-11 1988-01-30
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
JPH0687691U (ja) * 1993-05-28 1994-12-22 セイコー精機株式会社 ターボ分子ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
US6508624B2 (en) * 2001-05-02 2003-01-21 Siemens Automotive, Inc. Turbomachine with double-faced rotor-shroud seal structure
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
DE10331932B4 (de) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US20050031710A1 (en) * 2003-08-08 2005-02-10 D'adamo Peter James Method of personal care and cosmetic product preparation and composition using human blood type
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same

Also Published As

Publication number Publication date
US20100322799A1 (en) 2010-12-23
EP2235377A1 (de) 2010-10-06
EP2235377B1 (de) 2014-12-31
DE102008004297A1 (de) 2009-07-16
WO2009089958A1 (de) 2009-07-23
JP5546464B2 (ja) 2014-07-09
CN101952602A (zh) 2011-01-19
JP2011510201A (ja) 2011-03-31

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