TW201214943A - A three DOF vibration actuator with flat mechanism - Google Patents

A three DOF vibration actuator with flat mechanism Download PDF

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Publication number
TW201214943A
TW201214943A TW99132280A TW99132280A TW201214943A TW 201214943 A TW201214943 A TW 201214943A TW 99132280 A TW99132280 A TW 99132280A TW 99132280 A TW99132280 A TW 99132280A TW 201214943 A TW201214943 A TW 201214943A
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ultrasonic motor
motor device
degree
spherical ultrasonic
group
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TW99132280A
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Chinese (zh)
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TWI404321B (en
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Shuo-Hung Chang
Shun-Chieh Chiang
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Univ Nat Taiwan
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Abstract

The invention discloses a 3 DOF vibration actuator with flat mechanism, and the operating frequency is the resonance frequency of stator and preload mechanism. The invention is very low operating voltage and very close angular velocity in each rotation axis, which can simply the input signals and can reduce the volume of control system.

Description

201214943 六、發明說明: 【發明所屬之技術領域】 本發明為-種三自*度球_音1 ^ 一種具有賴元件之三自由度球狀超音波馬達ί 【先前技術】 傳統的三自由度球狀超音波馬達,I妒从店 片之使用以激發金屬彈性體的振:模態理 進而產生驅動力以提供動力來源。故 多會使用長度較長,且幾何形料殊:: f大面積片狀特徵之金屬彈性體。但儘管如此,且^ 刖述特徵之金屬彈性體仍舊無法使超音波馬達且有 性’且無法使用於極扁平化频的應用領域, _ 增加了較多的加工步驟,產生了繁複的加工製 姑卞目二在傳統上,另—種三自由度球狀超音波馬達 係使用了多個行進波式定子,以合成轉動的方 式達到二自由度的運動,但因為每個定子均會遮蔽或 是^制某-程度的轉動與可能的運用,反而使其應用 領域受到了限制。 在傳統的相目專利文獻中,f知技術如美國專 編號第5678099號即是以四個行進波式超音波馬達 定子口成轉矩’進而達到多自由度驅動之目的,但多 201214943 個疋子會造成球狀轉子所被遮蔽的表面積增加,以及 控制系統的複雜化,故而不符合實際狀況之使用。又 如美國專利編號第6404104號之三自由度振動裝置, 其幾何外型為一圓柱狀定子,以兩組壓電片(一組為 圓柱長度方向之振動,一組為圓柱彎曲之振動),設 計y特殊的幾何外型與長度,可使整體裝置(包括金 f圓柱與壓電片)之共振頻率與兩組壓電片的輸入頻 率互相符合並藉此而驅動,但因需使用金屬圓柱的丘 振頻率以進行驅動,故而需要相當長度的金屬圓柱Γ 故造成了裝置的體積過於龐大,無法符合實際狀況之 使用。續參考如美國專利編號第6819⑽號中所提出 之-自由度振動致動裝置,其雖可達成4平化之目 :铁以八個排成米字型的壓電片,以激發具有 士术ΐ何、構之金屬彈性體的振動模態,但因其形狀 高了製造成本"或繁硬之加工製程,進而提 3達’ 產生更有效率的三自由度球狀超音波 =達3要研發提出新式之具有高剛性,極扁平 握更St之壓電馬達技術,提供產業界能掌 產聿;夢以W又球狀超音波馬達,且可運用於相關 且能降:1自由度球狀超音波馬達的應用範圍 且月b降低其相關的製造成本。 【發明内容】 201214943 立、;ir if:月之一種具有預壓元件之三自由度球狀赶 音波馬達裝置’1台田度衣狀超 擦管之圓盤,轉;:ί「基座,具有摩 而成。轉子,懸元件以及彈簧等元件所組合201214943 VI. Description of the Invention: [Technical Field of the Invention] The present invention is a three-self-degree ball _ sound 1 ^ a three-degree-of-freedom spherical ultrasonic motor having a component ί [Prior Art] Traditional three-degree-of-freedom Spherical ultrasonic motors, I use from the store to excite the vibration of the metal elastomer: the modality and then the driving force to provide a source of power. Therefore, it is often used in a long length and geometrical shape:: f A large-area sheet-like metal elastomer. However, despite the fact that the metal elastomers described in the above description still cannot make the ultrasonic motor and can't be used in the application field of extremely flat frequency, _ more processing steps have been added, resulting in complicated processing. In the traditional case, another three-degree-of-freedom spherical ultrasonic motor uses multiple traveling wave stators to achieve two-degree-of-freedom motion in a synthetic rotation, but because each stator is shielded or It is a certain degree of rotation and possible use, but it has limited its application field. In the traditional patent literature, the known technology, such as the US No. 5678099, is the torque of the stator wave of four traveling wave ultrasonic motors, and thus achieves the purpose of multi-degree of freedom driving, but more than 201214943 The sub-surface will cause an increase in the surface area that the spherical rotor is shielded, and the complexity of the control system, so it does not conform to the actual use. Another example is the three-degree-of-freedom vibration device of U.S. Patent No. 6,404,104, which has a geometric shape of a cylindrical stator, and two sets of piezoelectric sheets (one set is a vibration of a cylinder length direction, and one set is a vibration of a cylindrical bend). The special geometry and length of the design y can make the resonance frequency of the whole device (including the gold f-cylinder and the piezoelectric piece) and the input frequencies of the two sets of piezoelectric plates match each other and drive, but the metal cylinder is required. The frequency of the hills is driven to drive, so a considerable length of metal cylinder is required, which causes the device to be too bulky to meet the actual conditions. Continued reference to the -degree-of-freedom vibration actuating device as proposed in U.S. Patent No. 6,819 (10), which achieves the goal of four flattenings: iron in eight rows of piezoelectric plates to excite a mansion Anything, the vibration mode of the metal elastomer, but because of its high manufacturing cost " or a rigorous processing process, and then raises 3' to produce a more efficient three-degree-of-freedom spherical ultrasonic wave = up to 3 It is necessary to develop a new type of piezoelectric motor technology with high rigidity, extremely flat grip and more St, to provide the industry with the ability to produce 聿; dream with W and spherical ultrasonic motor, and can be used for correlation and can reduce: 1 degree of freedom The range of applications of spherical ultrasonic motors and the monthly b reduces their associated manufacturing costs. [Summary of the Invention] 201214943 Li, ir if: a three-degree-of-freedom spherical rushing wave motor device with a pre-stressing element '1Taiwan smock-like super-cleaning tube disc, turn;: ί" pedestal, Made of friction, rotor, suspension and spring

號至同Γ之特徵㈣由輸人具有相位差的驅動信 進行傾斜的i:兩片,可使得圓盤上的摩擦管 管可進行形料賴斜運㈣使得摩擦 本發明之频絲❹金屬雜體的共振 ==而係以懸元件中的彈菁加上壓電片的 一振頸率進行驅動。 元件設計成扁平化形 以無須進行設計成長度 之幾何形狀’故具有輕 本發明之特徵係將預麼 狀,而使得壓電馬達之定子可 過長,體積過大或是特殊複雜 便之特性。 π本發明之特徵敍超音波馬達具有扁平化,簡 =化之結構形狀’並使得超音波馬達結構之剛性提 向’降低生產成本。 為讓本發明的上述和其他目的、特徵和優點能更 明顯易懂’下文特舉較佳實施例,並配合附圖以詳細 說明如下。 【實施方式】 本發明係為一種具有預壓元件之三自由度球狀 201214943 超音波馬達裝置,詳如下列說明所示: 如第1圖所示為本發明之—種三自由度球狀超音 波馬達褒置之基本構造示意圖,其元件包括了由基座 1卜四片廢電片12’以及具有摩擦管之圓盤13等所 組合而成。 仍如第1圖所示’基座u係以銘金屬所製成, 二:約ί 5〇公釐(咖)’高約6公釐,其功能係用 从固疋4片壓電片(以陶£屬電材料或是以電致 所製成)12與吸收該三自由度球狀超音波馬 達裝置本體之振動。 Ά第1圖所不’定義出χ座標轴,Y座標軸, 標軸的方向’而其中4片糊12分別裝設 广丄的x座標轴’Y座標轴’―X座標轴,以及-Y 座払轴等位置上。 片圖所示:具有摩擦管之圓盤13裳設於4 釐_、上,其直徑約為40公釐,厚度約為1公 古回皿或是可形成為方型’三角等形狀,而於且上 二:一㈣狀凸起(外徑約為12公羞,内徑約為、10 :二公餐)而形成具有摩擦管之圓盤13, “力用係為進行摩擦—轉子14 (如第2_ =Η可為陶細製成之球,或 。或為歸材料製成之球,而轉子之直捏約為 如第2圖所示為本發明之一種具有預塵元件之三 201214943 自由度球狀超音波馬達裝置的整體剖面示意圖,其元 件包括了基座η,4片壓電片12,具有摩擦管之圓盤 13外,更包括了轉子14 ,預壓元件丨5以及彈性裝置 16。即在每一個壓電片12上均有一個預壓元件I”其 包括如夾子,以及金屬片等所製成),而其功能係將 基,1卜4片壓電片12,具有摩擦管之圓盤13夾住 固定,並施以一適當的預壓力,且共計有4個預壓 • f。而彈性裝置16可採用各種彈簧,例如拉伸彈 簧、壓縮彈簧、扭力彈簧、板狀彈簧以及片狀 各式彈簧。 古“本發明主要驅動方式為分別在4個壓電片輸入交 流電訊號以進行驅動,包括輸人具有相位差的正弦 ^ —角波,鋸齒波或其他電壓周期性改變之交流電 信號,且其交流電信號之頻率為其全體預壓元件與全 ,壓電片之共振模態頻率。而可藉由輸入前述交流電 鲁㈣以進行各種運動,且由各種運動的組合以達到驅 動’其驅動運動原理詳述如下: 西如第3A圖所示之X座標軸方向驅動原理,即在γ 座標轴與巧座標軸上的壓電片12,如第3Α圖中所示 之D通道(channel)與C通道,分別輸入具有相位 差’通常為60度至1〇5度的正弦波電流。故而如第 3β圖所不,使得具有圓盤之摩擦管13於YZ座標軸平 面上依序的進行傾斜運動,並造成類似橢圓型的運 動軌跡,進而帶動轉子14進行θχ方向之轉動,而欲 201214943 :,方向的轉動’如_㊀χ方向的轉動,則對換〇 H每C通道的輸入信號即可。 第4A圖所示之γ座標軸方向驅動原理,即在X 座,轴與—X座標轴上的壓電片12,分別輸入具有相 =,通常為60度至105度的正弦波電流。故而如第 圖所示,使得具有圓盤之摩擦管13於^座標軸平 面上’依序的進行傾斜運動,並造成類似橢 圓型的運 動執跡,進而帶動轉子14進行ey方向之轉動,而欲 進仃反方向的轉動’如,方向轉動,則對換a通道 與B通道的輸入信號即可。 ⑪如第5 A圖所示之z座標軸方向驅動原理,即在χ 座‘軸,Υ座標軸,_χ座標軸,以及_γ座標軸上的壓 電片12,分別依序輸入具有相位差,通常為9〇度的 =弦波電流。故而如第5Β圖所示,使得具有圓盤之 摩擦管13於ΧΥ隸财面上,依序的進行傾斜運 動,並造成類似橢圓型的運動執跡,進而帶動轉子 14進仃θζ方向之轉動,而欲進行反方向的轉動,如 =ΘΖ方向的轉動,則將原輸入Α通道,d通道,8通 道’以及G通道等各通道的順時針信號 入c通道通道,D通道,以及A通道等各通道= 時針信號順序即可。 〇〇與傳統技術之原理相比較,本發明未使用金屬 彈性體的共振頻率以進行驅動,卻採用預壓元件中的 彈簧加上壓電片的共振頻率原理以進行驅動,主要因 201214943 為預壓7L件具有扁平化之形狀,使得壓電馬達之定 長度過長,體積過大或是其他之特殊 以上所述僅為本發明之較佳實施例而已,並非用 1 限定本發0狀申料·圍;凡其它未脫離本發明 所揭不之精神下所完成之等效改變或修飾,均應包含 在下述之申請專利範圍内。The characteristics of the number to the same (4) i: two pieces by the input drive signal with phase difference, can make the friction tube on the disc can be transported by the material (4) to make the frequency of the wire of the invention The resonance of the hybrid == is driven by the elastic phase of the suspension element plus a necking rate of the piezoelectric piece. The element is designed to be flattened so that it does not have to be designed as a length geometry. Therefore, it is light. The features of the present invention are pre-shaped, so that the stator of the piezoelectric motor can be too long, too bulky or particularly complicated. π The present invention features a flat motor, a simplified structural shape and a rigid orientation of the ultrasonic motor structure to reduce production costs. The above and other objects, features and advantages of the present invention will become more apparent < [Embodiment] The present invention is a three-degree-of-freedom spherical 201214943 ultrasonic motor device having a pre-stressing element, as shown in the following description: As shown in Fig. 1, the three-degree-of-freedom spherical super is the present invention. A schematic diagram of the basic structure of the sonic motor device, the components of which are composed of a base 1 and four pieces of waste electric piece 12' and a disc 13 having a friction tube. Still as shown in Figure 1 'The pedestal u is made of Ming metal, two: about 5 〇 mm (coffee)' is about 6 mm high, and its function is to use four pieces of piezoelectric film ( The vibration of the body of the three-degree-of-freedom spherical ultrasonic motor device is absorbed by the electric material or the electric body. ΆThe first figure does not 'define the coordinate axis, the Y coordinate axis, the direction of the target axis' and 4 of the pastes 12 are respectively equipped with a wide x coordinate axis 'Y coordinate axis' - X coordinate axis, and -Y seat Position on the 払 axis. As shown in the picture: the disc 13 with the friction tube is set at 4 PCT, and has a diameter of about 40 mm, a thickness of about 1 cc or a square triangle shape. And the second two: one (four) shaped protrusion (outer diameter of about 12 hum, inner diameter of about 10: two meals) to form a disc 13 with a friction tube, "force for friction - rotor 14 (For example, the 2_=Η can be a ball made of ceramic, or a ball made of a material, and the straight pinch of the rotor is about the third of the present invention having a pre-dust component as shown in Fig. 2; 201214943 A schematic overall cross-sectional view of a free-spherical spherical ultrasonic motor device, the components of which include a base η, four piezoelectric sheets 12, a disk 13 having a friction tube, and a rotor 14, a pre-stressing element 丨5, and The elastic device 16. That is, each of the piezoelectric sheets 12 has a pre-compression element I" including a clip, and a metal sheet, etc., and its function is a base, and 4 piezoelectric sheets 12 The disc 13 having the friction tube is clamped and fixed, and a proper pre-pressure is applied, and a total of four pre-pressures are provided. The elastic device 16 can employ various springs such as a tension spring, a compression spring, a torsion spring, a plate spring, and a sheet-like spring. "The main driving method of the present invention is to input an alternating current signal for driving in four piezoelectric sheets, respectively, including inputting a sinusoidal angle wave having a phase difference, a sawtooth wave or other alternating current signal whose voltage is periodically changed, and The frequency of the alternating current signal is the resonant modal frequency of the total pre-compressed component and the full, piezoelectric piece, and the various alternating motions can be input by inputting the aforementioned alternating current (4), and the combination of various motions can be used to drive the driving motion. The principle is detailed as follows: The X-axis axis direction driving principle shown in Figure 3A is the piezoelectric sheet 12 on the γ-coordinate axis and the coordinate axis, as shown in Figure 3, the D channel and the C channel. Inputting a sinusoidal current having a phase difference of '60 degrees to 1 to 5 degrees, respectively. Therefore, as in the 3rd figure, the friction tube 13 having the disk is sequentially tilted on the YZ coordinate axis plane, and It causes an elliptical-like motion trajectory, which in turn drives the rotor 14 to rotate in the θχ direction, and if the direction of the rotation '2012_943' is rotated, the input signal of each C channel is changed. The gamma coordinate axis direction driving principle shown in Fig. 4A, that is, the piezoelectric sheet 12 on the X seat, the shaft and the -X coordinate axis, respectively input a sine wave current having a phase =, usually 60 to 105 degrees. Therefore, as shown in the figure, the friction tube 13 having the disk is sequentially tilted on the plane of the coordinate axis, and causes an elliptical motion to be performed, thereby driving the rotor 14 to rotate in the ey direction. If you want to enter the opposite direction of rotation 'If the direction is rotated, then the input signals of the a channel and the B channel can be changed. 11 The driving principle of the z coordinate axis direction shown in Fig. 5A is the axis of the ' seat, Υ The coordinate axis, the _ χ coordinate axis, and the piezoelectric sheet 12 on the _ γ coordinate axis are sequentially input with a phase difference, usually 9 的 = sine wave current, so as shown in Fig. 5, the friction tube having the disk is made 13 on the ΧΥ ΧΥ 财 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , the original input channel, d The clockwise signals of the channels of the 8 channels 'and the G channel are input to the c channel, the D channel, and the A channel, etc. = the hour hand signal sequence. 本 Compared with the principle of the conventional technology, the present invention is not used. The resonant frequency of the metal elastomer is driven, but the spring in the pre-compression element is added to the resonant frequency principle of the piezoelectric piece to drive, mainly because the 201214943 is a pre-pressed 7L piece having a flat shape, so that the piezoelectric motor The length is too long, the volume is too large, or the other special ones are only the preferred embodiments of the present invention, and the present invention is not limited to 1. The other claims are not deviated from the spirit of the present invention. Equivalent changes or modifications made below are included in the scope of the following patent application.

【圖式簡單說明】 ^第1圖所示為本發明之三自由度球狀超音波馬達 &amp;置之基本構造示意圖β 第2圖所示為本發明之具有預壓元件之三自由度 球狀超音波馬達裝置的剖面示意圖。 第3Α圖所示為X座標軸方向驅動原理。 第3Β圖所示為於ΥΖ座標軸平面上的運動執跡。 第4Α圖所示為Υ座標軸方向驅動原理。 第4Β圖所示為於ΧΖ座標軸平面上的運動執跡。 第5Α圖所示為Ζ座標軸方向驅動原理。 第5Β圖所示為於ΧΥ座標軸平面上的運動執跡。 【主要元件符號說明】 11基座 12四片壓電片 13具有摩擦管之圓盤 201214943 14轉子 15預壓元件 16彈簧BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing the basic structure of a three-degree-of-freedom spherical ultrasonic motor according to the present invention. FIG. 2 is a three-degree-of-freedom ball with a preloading member according to the present invention. A schematic cross-sectional view of a supersonic motor device. The third figure shows the principle of the X coordinate axis drive. Figure 3 shows the motion trace on the plane of the coordinate axis. Figure 4 shows the driving principle of the Υ coordinate axis. Figure 4 shows the motion trace on the plane of the coordinate axis. Figure 5 shows the driving principle of the Ζ coordinate axis. Figure 5 shows the motion trace on the plane of the coordinate axis. [Main component symbol description] 11 pedestal 12 four piezoelectric sheets 13 disc with friction tube 201214943 14 rotor 15 pre-compression element 16 spring

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Claims (1)

201214943 七201214943 seven 、申請專利範圍: 二自由度球狀超音波馬達裝 一種具有預壓元件之 置’至少包含: —基座;Patent application scope: a two-degree-of-freedom spherical ultrasonic motor mounted with a pre-stressed component' includes at least: a base; 複數片壓電片,複數片壓電片裝設於該基座上; 一具有摩擦管之圓盤,裝設於複數個壓電片上; 圓盤上 轉子,該轉子置放而非固定於該具有摩擦管之 ,預壓元件,該預壓元件夾住固定該基座,該複 數片壓電片,該具有摩擦管之圓盤並施以—適當的預 壓力;以及 .—彈性裝置以形成該具有預壓元件之三自由度球 狀超音波馬達裝置。 2·如申請專利範圍第1項所述之具有預壓元件之三自 由度球狀超音波馬達裝置,其中該基座係由一金屬a plurality of piezoelectric sheets, a plurality of piezoelectric sheets mounted on the base; a disc having a friction tube mounted on the plurality of piezoelectric sheets; and a rotor on the disc, the rotor being placed rather than fixed to the a pre-stressing member having a friction tube, the pre-stressing member clamping the base, the plurality of piezoelectric sheets, the disc having the friction tube and applying a proper pre-pressure; and - elastic means to form The three-degree-of-freedom spherical ultrasonic motor device with a pre-stressing element. 2. A three-degree-of-freedom spherical ultrasonic motor device having a preload element according to claim 1, wherein the base is made of a metal 材料以及塑膠材料等材料群組中所選出。 如申請專利範圍第丨項所述之具有顏元件之三自 由度球狀超音波馬料置,其中該壓以之材料係 由陶莞壓電材料與一電致伸縮材料等群組中所選 出0 女申明專利|&amp;圍第!項所述之具有預壓元件之三自 :度球狀超音波馬達裝置,其中該具有摩擦管之圓 盤更包含-方型形狀以及—三角形狀。 如申明專利㈣第1項所述之具有預壓元件之三自 其中3亥轉子係由一陶究 塑膠材料等材料群組中Selected in materials and materials such as plastic materials. The three-degree-of-freedom spherical ultrasonic wave horse material device with a face element as described in the scope of the patent application, wherein the pressure material is selected from the group consisting of a ceramic material and an electrostrictive material. 0 Women's Declaration Patent|&amp; Wai! The three-spherical ultrasonic motor device having a preloading member, wherein the disk having the friction tube further comprises a square shape and a triangular shape. For example, the three pre-compressed components described in item 1 of the patent (4) are from the group of materials such as ceramics and plastic materials. 201214943 由度球狀超音波馬達裝置, 材料,一金屬材料,以及一 所選出。 I如申請專利範圍第1項所述之具有預壓元件之三自 岐球狀超音波馬達裝置,其令該預壓科係^ 夾子,以及一金屬片等群組中所選出。 7·如申請專·圍第】項所述之具有顏元件之三自 ==超音波馬達裝置’其中該彈性裝置係由- =:::塵縮彈簧、一扭力彈簧、-板狀彈簧 片狀彈簧等群組中所選出。 8.:=預廢元件之三自由度球狀超音波馬達裝置 法’係分财複數健電片輸人交流電訊 唬以進行驅動。 申月專利範圍第8項所述之具有預ylit件之三自 由度球狀超音波馬達裝置之_方法 電訊號係由一正弦 / 乂机 組中所選出。二角波’以及一鑛齒波群 申:專利1巳圍帛8項所述之具有預壓元件之三 d 2。求狀超音波馬達裝置之驅動方法,其中該交 “ °虎的頻率為全體預壓元件與全體壓電片之一 共振模態頻率。 12201214943 Selected by a spherical ultrasonic motor device, material, a metal material, and one. A three-spheroidal ultrasonic motor device having a preload member as described in claim 1 of the patent application, which is selected from the group of the preloading system clips and a metal sheet. 7. The three-self == ultrasonic motor device with a face element as described in the application of the article, wherein the elastic device is composed of - =::: dust-reducing spring, a torsion spring, - plate spring piece Selected in groups such as springs. 8.:=Three-degree-of-freedom spherical ultrasonic motor device for pre-disposal components The law is divided into several power-savings, and the power is transmitted to the user. The method of the three-volume spherical ultrasonic motor device having the pre-ylit member described in the eighth paragraph of the patent application of the present invention is selected from a sine/spindle group. Two-corner wave 'and one-toothed tooth wave group Application: Patent No. 3, which has three pre-stressed elements as described in Item 8. The driving method of the ultrasonic motor device is as follows, wherein the frequency of the "Tiger" is the resonant mode frequency of one of the entire pre-stressing element and the entire piezoelectric piece.
TW99132280A 2010-09-24 2010-09-24 A three dof vibration actuator with flat mechanism TWI404321B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI562529B (en) * 2015-03-31 2016-12-11 Univ Nat Cheng Kung Piezoelectric energy harvester
LT7104B (en) 2024-03-04 2024-11-11 Vilniaus Gedimino technikos universitetas Inertial four-degree-of-freedom piezoelectric actuator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW548893B (en) * 2001-08-24 2003-08-21 Min-Sheng Ouyang Piezoelectric axis-pushing ultrasound motor
TWI271024B (en) * 2002-12-30 2007-01-11 Jeng-Dao Lee Development of high-gain six-order resonant technique for linear piezoelectric ceramic motor driving circuit
TWM286995U (en) * 2005-10-19 2006-02-01 Univ Nat Kaohsiung Applied Sci Ultrasonic motor
TWI327813B (en) * 2006-12-14 2010-07-21 Univ Nat Kaohsiung Applied Sci Linear ultrasonic motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI562529B (en) * 2015-03-31 2016-12-11 Univ Nat Cheng Kung Piezoelectric energy harvester
US10079560B2 (en) 2015-03-31 2018-09-18 National Cheng Kung University Piezoelectric energy harvester
LT7104B (en) 2024-03-04 2024-11-11 Vilniaus Gedimino technikos universitetas Inertial four-degree-of-freedom piezoelectric actuator

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