201215170 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種平面揚聲器結構及其製造方法。 【先前技術】 現今視覺與聽覺是人類最直接的兩種感官反應，因此 長久以來’科學家們極力的發展各種可再生視覺與聽覺和 關系統。目前包括揚聲器的再生方式，其主要仍是由動塵 式揚聲器來主宰整個市場。但是隨著近幾年來人們對於感 官品質的日益要求’以及3C產品（c〇mputer201215170 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a planar speaker structure and a method of fabricating the same. [Prior Art] Today's vision and hearing are the two most direct sensory responses of human beings, so scientists have long been developing various reproducible visual and auditory and related systems. Currently, the way in which the speaker is regenerated is mainly dominated by moving dust speakers to dominate the market. But with the increasing demand for sensory quality in recent years, and 3C products (c〇mputer
Communication，Consumer Electronics)在追求短小、輕薄 ，則提下，一種省電、輕薄、可依人體工學需求設計的揭 聲器，不管是搭配大尺寸的平面揚聲H，還是小到隨 的耳機、立體聲的手機，在可以預見的明天，此方面的^ 術將有大量的需要與應用的發展。 目前電聲揚聲ϋ分類主要分為直接、間接姉型， =声分為動圈式、壓電式及靜電式揚聲器。動圈 式揚聲益目讀用最廣，技術成熟，不過由於 = ?，，，並，法將體積扁平化，使得面對％產品越^ 小及，庭劇院扁平化的趨勢，將不敷需求。 π 聲器利用壓電材料的壓電效應，以附加-電 琢於[電材料所造成材料變形的特電 的作用原理是將兩片開孔的固定電極板以=】 4 201215170 -種電容器'，藉純給減纽偏壓叹 極音頻的交流電壓，利肛貞電場所發 固疋電 導電振膜振動並將聲音純出去。 、#電力’帶動 傳統靜電式揚聲器的直流偏壓需達 =要繼嫩紅_擴大機， 例如美國第3,894，199號專利所提出的 I作，其料是將兩片開孔的固定電極板挾 ^ 成-種電容H ’藉由供給振膜直流偏壓 電極音頻較流電壓，闕収貞料祕=兩個固疋 帶動導電振膜振動並將聲音輕射出去。此種靜哭 的偏壓需達上百-上千伏特，因此需 2耳。。 積的擴大機。 U㈣㈣接畴價及魔大體 未來於軟性電子的個性應时，聲音(麵⑹是—個 的7G素。但軟性電子須具備軟、薄、低 ”’因此如何突破_習知設計，完錢備 子所品特色的零組件將是一大重點。 【發明内容】 本揭露内容提供一種平面揚聲器結構，包括阻水氧結 ，與揚聲15單體。所述揚聲器單體，在-實施例中，包括 至屬或導體材料的開孔電極以及作為振膜而含金屬層咬導 f材料層的駐極斷料。上述阻水氧結構設計於平面揚聲 裔結構的外側或振膜外侧，湘其龍境中水氧的阻隔效 果來讓揚聲ϋ單體的運作可#度提高。揚聲器單體中的開 201215170 及振膜的金屬層或導體材料層當電極，當交流訊號 極輸人時’將在上下各形成電場，使振膜的駐 動受，的影響而均句產生排斥與吸引的振 吏％聲益單體產生對應的聲音。 p且水水乳結構’在多個實施例其中之―，包括一 以及介於該揚聲器單體與該阻水氧保護層之 間的多個絕緣支撐體。 刊叉曰心 阻水水氧結構，在多個實施例其中之一，包括一 側==;::=電極面對振_ 所迷的阻水氧結構，在多個 阻水氧保護層，位;^揚_^其中之—，包括一 -側面之體的開孔電極面對振膜的另 ί之上从位於開孔電極的多個開孔内。 二述的阻水氧結構，在多個實施例其中之一 水氧保濩層，位於揚聲器單 面上以及位於開孔電極的多個開^孔電極面對振膜的側 所述的阻水氧結構，在多個 第-阻水氧保護層與一第二阻水==中=包括-氣保護層與第二阻水氧保護層立其㈣-阻水 中所述側面其中之-面對開孔電極。振膜之兩側面，其 本揭露内容提供一種適用於 氧結構的製造方法。 、+面铴聲器單體的阻水 所述方法在多個實施例其中之一 —犧牲層。在犧牲;^上方刑& 一，匕括在基底上形成 在犧牲層上林成—保護層，其中此保護層為 6 201215170 包括阻隔水氧特性的保護材質。在保護層上方形成一間隔 層（Spacer Layer)，其中此間隔層用以界定阻水氣 = 域大小。將保護層及其上方的間隔層從犧牲層上;;剝離 將多個絕緣支龍配置在賴層上方在間隔層的區域内， 以便在區域形成絕緣支撐體的—佈局。 所述方法在多個實施例其中之一，形成阻水氧結構包 括形成阻水氧保護層，位於揚聲器單體_孔電極面對振 膜的另一側面之上。 所述方法在多個實施例其中之一，包括形成阻水氧保 護層，位於揚聲器單體的開孔電極面對振膜的側面上以及 位於開孔電極的多個開孔内。 〜 所述方法在多個實施例1^ ,, 構包括-[阻水氧保護料1 ^械的阻水氧結 刊丨丁史弟—阻水氧保護層，1中 層與第二阻水氧保護層分別位於振膜i兩 側面，其中所述側面其中之—面㈣孔電極。 兩 所述方法在多個貫施例其中 — 構’包括一阻水氧保護層，位於揚:的η乳結 對振膜的_面上以及包括開孔電_===電極面 舉實=二 【實施方式】 種平面揚聲器結構，其振膜 在多個實施例中，提供一 201215170 ==駐極體材料’取代傳統靜電式揚聲器需要高達上 用於夹2的偏壓°而所提出的平面揚聲11結構簡單，適 的阻構所需。在本實施例所提出 ^曰'，，。構將可瓖平面揚聲器單體達成壽命延展的 此可_此技術將是她揚聲II結構不可缺失的 =器=的:,!_的金屬層或導體^ 田父/爪〇孔^虎源從上述電極輸入時 田 電場，使顧的轉體材料，受下各形成 排斥與吸引的振動，而使揚聲器均勾產生 在多個實施例其中之一，揭的聲音。 聲器結構，包括第-阻水氧保護層度的平面揚 及位於兩者之間的揚聲器單體。保護層以 施例中，包括金屬或導體材料的第體’在一實 的含金屬層或導體材料層的駐極體材料、極作為振膜 材料的第二開孔電極。上述第—阻水1、，括金屬或導體 氧保護層設計於揚聲器單體結構的最K5蒦層及第二阻水 中水氧的阻隔效果來讓揚聲器單體的運;。’ 2用，對環境 罪度提高。揚 8 201215170 的第一、第二開孔電極以及振膜的金屬層或導 版材料層虽作電極’當交流訊號源從f極輸人時，將^ ^各域②％ ’使巾間層含金屬層的駐極體材料，受 斥與吸引的振動，而使揚聲^ 駐極體材料 士述的財11單體，運餘極體（E1eetret)材料内部 數;:及靜電力效應’當駐極體振膜受到外部電壓刺 表面產生變形，進而驅動振膜週遭的1 = 靜電力公式及能奴律得知振膜受力為ίί 铲耳二：广值乘上内部電場大小及外部輸入聲音電壓气 5虎，而若駐極體_受力越大，則輸岐音越大。 製程上單體構造簡單’且可搭配現有技術進行 可以提$揚舞二可有效降低製造成本。本實施例 術之一。而此揚聲器單體之構造，可: 須採用在撓曲情況τ不會影響特性的材 ^本實施例運用駐極體材料内部的電荷特性及靜電力 效應’當駐極體振膜受麟部電壓做後，產生垂直振膜 ^面的變形。亦即絲膜四邊岐，可避免產生平行振膜 表面方向的變形產生，而有垂直於振膜表面方向的變形產 生，進而驅動振膜週遭㈣氣來產生聲音。藉由靜電力公 201215170 式及能量定律得知_受力為整體揚聲^之電容值乘上 部電場大小及外部輸人聲音電壓減，若駐 越大，則輸出聲音越大，其原理敘述如後。 、又力 用轉：庫if聿，兩帶電物體的電荷乘積正比於相互作 時=體==:距;:方正兩=若同為正或負 吸靜雪太旅AR T冤力電何一正一負時，其物體受相 可以是一種=料， 容器裝置，而前述兩片開孔電^ = 造如一種電 個吸引的和-個排斥的靜體振，將同時受到-力公式可由（式1)表示。 肖，振膜單位面積受靜電 2ΚΚε0 (1 q —+ ~~~L· -(式一） 其中真空電容率10 電常數Se，駐極體材料^8^〇_ Μ ’駐極體材料之介 號電壓Vin，駐極體材料空乱層厚度Sa，輸入訊 -)可知，靜電力正比心〉，振膜早位受力P。由（式 孔電極平板與駐極體振;^訊電壓的乘積’反比於開 離下，揚聲器能提tt。，，若在相同的距 用相對低的電壓即可達到♦電的4，日錢流電壓可以 斤鸹的靜電力。本實施例利用奈 201215170 微米$駐極體壓電複合材料，可提供一數百到上千伏特的 駐龟里依據如述邊電力公式，本實施例音訊電壓可降低 至十數伏特，因而提高本實施例之揚聲器的實用性。 由前述原理，駐極體振膜在兩個開孔電極平板的正、 負偏壓作用下，受到-健·拉靜電力’造成前述駐極體振 膜的振動，壓縮周圍空氣，而產生聲音輸出。 於本實施例設計中，駐極體振膜係可選擇為例如介 (Electrized) (t*^f corona discharge) 處理後而能長期保有靜電荷（Statie Cha哪）之駐極體壓 電振膜，且駐極體振膜係可為單層或多層介電材料 (DielectricMaterials)所製成之振膜，而此介電材料可為 例如氟化乙烯丙烯共聚物(FEP)、聚四氟⑽(ρτ ρ偏r^mF)、部份含氟高分子聚合物（Fiu〇聰 Polymer)及其他適當材料，此介電材料内部包含 洞。由於祕體振_為介㈣料經過後而能 期保有靜電荷，經電暈充電德扃妯姐向加女 便而此長 (D—啡抽產生靜電^ 雙極性電荷 而以目前來說，揚聲器單體之聲壓 因素無法於短時間内達成T―糾或^ 方式以朝駐極體果：^f良設計 短時間内達成音量;研究無法於 tit 成音量提升效果的方法也是本實施例 在另外-實施例中，提出利用揚聲器單體進行組合， 11 201215170 ，在不改，輸人訊號源的設計’即可達成驅動多組揚聲器 單體的發聲效果，迅速解決材料等的限制問題。 電極層材料 在上述多個高可靠度的平面揚聲器結構中，揚聲器單 體具有可撓曲的特性’也就是開孔電極可使用具有透明的 咼刀子材料’如聚碳酸醋(卩咖⑶出⑽攸，pC)、聚乙烯對 苯曱酸S旨(Polyethylene Terephthalate，PET)、環狀烯輕聚 合物(Cyclic Olefin Copolymer，COC)、聚甲基丙烯酸甲酯 (Polymethyl Methacrylate，PMMA)等，而第一、第二開孔 電極了為具有透明性之材料’如銦鍚氧化物（Indiuin τιηCommunication, Consumer Electronics) in the pursuit of short, thin, then, a power-saving, lightweight, ergonomically designed sounder, whether it is with a large-sized flat speaker H, or small headphones Stereo phones, in the foreseeable future, there will be a lot of needs and applications in this area. At present, the classification of electroacoustic Yangsheng is mainly divided into direct and indirect , type, and the sound is divided into moving coil type, piezoelectric type and electrostatic type speaker. The dynamic type of sound is the most widely used and mature technology, but because of the =?,,,,, the method will flatten the volume, making the face of the % product smaller and smaller, the flattening trend of the theater will not be enough. demand. The π-acoustic uses the piezoelectric effect of the piezoelectric material, and the function of the special electric-electricity of the electric material caused by the electric material is to fix the two fixed-electrode plates with holes to form a capacitor. By purely giving the offset voltage to sigh the AC voltage of the polar audio, the anorectal electric field is solidified, the electric conductive diaphragm vibrates and the sound is pure. , #电' drives the DC bias of the conventional electrostatic speaker to reach = to follow the red _ expander, such as the one proposed in the US Patent No. 3,894,199, which is a fixed electrode plate with two holes. ^ As a kind of capacitor H ' by supplying the diaphragm DC bias electrode audio to the current voltage, 阙 贞 = = two solid 疋 drive the conductive diaphragm vibration and light out. The bias of such a crying must be hundreds to thousands of volts, so 2 ears are required. . The expansion of the product. U(4)(4) The price of the domain and the generality of the soft electronics in the future. The sound (face (6) is a 7G element. But the soft electronics must be soft, thin, and low". So how to break through _ custom design, complete the money The components of the sub-products will be a major focus. SUMMARY OF THE INVENTION The present disclosure provides a planar speaker structure including a water blocking oxygen junction, and a speaker 15 unit. The speaker unit, in the embodiment , including an open-cell electrode of a genus or a conductor material, and an electret cut-off material of a material layer containing a metal layer as a diaphragm. The water-blocking oxygen structure is designed on the outer side of the planar sounding structure or outside the diaphragm. The barrier effect of water and oxygen in the dragon's environment allows the operation of the speakerphone to be improved. The opening of the speaker unit 201215170 and the metal layer of the diaphragm or the conductor material layer are electrodes, when the AC signal is extremely input. 'The electric field will be formed in each of the upper and lower sides, and the vibration of the diaphragm will be affected. The sound will be repelled and the sound of the sound is generated by the sound-absorbing monomer. p and the water-hydraulic structure' in various embodiments Among them, including one a plurality of insulating supports interposed between the speaker unit and the water-blocking oxygen protective layer. The core-blocking water-oxygen structure, in one of the embodiments, includes one side ==;::= The electrode faces the vibration _ the water-blocking oxygen structure, in the plurality of water-blocking oxygen protective layers, the position of the water-proof oxygen layer, and the opening electrode of the body including the one-side body faces the diaphragm The upper side is located in a plurality of openings in the open-cell electrode. The water-blocking oxygen structure described in one of the embodiments is a water-oxygen-protective layer on one side of the speaker and a plurality of openings on the open-ended electrode. The water-blocking oxygen structure of the hole electrode facing the side of the diaphragm, in the plurality of first-water-blocking oxygen protective layer and a second water-blocking resistance===including-gas protective layer and second water-blocking oxygen protective layer The (4)-the opposite side of the water-blocking surface faces the aperture electrode. The two sides of the diaphragm, the present disclosure provides a manufacturing method suitable for the oxygen structure. The method is one of a plurality of embodiments - a sacrificial layer. At the sacrifice; ^ above the penalty & one, including the formation on the substrate on the sacrificial layer The layer, wherein the protective layer is 6 201215170 includes a protective material that blocks the water-oxygen property. A spacer layer is formed above the protective layer, wherein the spacer layer is used to define the water-blocking gas = domain size. The upper spacer layer is from the sacrificial layer; the stripping is disposed over the layer of the spacer layer in the region of the spacer layer to form a layout of the insulating support in the region. The method is in various embodiments. 1. Forming a water blocking oxygen structure comprising forming a water blocking oxygen protective layer over the other side of the speaker cell-hole electrode facing the diaphragm. The method comprises forming a water blocking oxygen in one of a plurality of embodiments The protective layer is located on the side of the opening electrode of the speaker unit facing the diaphragm and in the plurality of openings of the aperture electrode. The method is in the embodiment 1^, the structure includes - [water blocking oxygen The protective material 1 ^ mechanical water-blocking oxygen junction Kenting Shidi - water-blocking oxygen protective layer, 1 middle layer and the second water-blocking oxygen protective layer are respectively located on both sides of the diaphragm i, wherein the side of the side - surface (four) hole electrode. The two methods are in a plurality of embodiments, wherein the structure comprises a water-blocking oxygen protective layer, and the y-milk is located on the _ surface of the diaphragm and includes an opening _=== electrode surface is practical = two [Embodiment] A planar speaker structure, the diaphragm of which in a plurality of embodiments provides a plane that is proposed by the 201215170 == electret material to replace the conventional electrostatic speaker with a bias voltage up to the clamp 2 The speaker 11 has a simple structure and is suitable for the structure. In the present embodiment, ^曰',,. This technology will extend the life of the flat-panel speaker unit. This technology will be the structure of the speaker II structure that cannot be missed =, the metal layer or conductor of the !_ ^ father / claw hole ^ tiger source When the electric field is input from the above-mentioned electrodes, the rotating material of the susceptor is subjected to vibrations which are repulsion and attraction, and the speaker is hooked to generate sound in one of the plurality of embodiments. The structure of the sounder includes a plane-thickness of the first-water-blocking oxygen protection layer and a speaker unit located therebetween. The protective layer is exemplified by a first open-cell electrode comprising a metal or a conductor material of the first body of a metal or conductive material layer and a pole as a diaphragm material. The above-mentioned first water blocking 1, the metal or conductor oxygen protective layer is designed to block the water in the most K5 layer of the speaker single structure and the second water blocking effect of the speaker. ‘ 2 use, the environmental crime increased. Yang 8 201215170 The first and second aperture electrodes and the metal layer or the guide material layer of the diaphragm are used as electrodes. When the AC signal source is input from the f pole, the ^^ domain will be 2% 'to make the towel layer The electret material containing the metal layer is repelled and attracted by the vibration, and the internal sound of the eleventh element of the electret material, the internal number of the E1eetret material; and the electrostatic force effect When the electret diaphragm is deformed by the surface of the external voltage, the 1 = electrostatic force formula around the diaphragm and the law of the slave are known as the force of the diaphragm ίί 2: wide value multiplied by the internal electric field size and external Input sound voltage gas 5 tiger, and if the electret _ force is greater, the higher the input sound. The single structure of the process is simple and can be combined with the prior art. It can be raised to reduce the manufacturing cost. One of the embodiments. The structure of the speaker unit can be: It is necessary to use a material that does not affect the characteristics in the case of flexing τ. In this embodiment, the charge characteristics and electrostatic force effects inside the electret material are utilized 'When the electret diaphragm is subjected to the lining After the voltage is applied, the deformation of the vertical diaphragm is generated. That is to say, the four sides of the silk film can avoid the occurrence of deformation in the direction of the surface of the parallel diaphragm, and the deformation perpendicular to the surface of the diaphragm is generated, thereby driving the surrounding (4) gas to generate sound. According to the electrostatic force 201215170 formula and the energy law, it is known that the force value of the overall sound is multiplied by the magnitude of the upper electric field and the external input sound voltage. If the station is larger, the output sound is larger, and the principle is as follows. Rear. And use force to turn: library if聿, the charge product of two charged objects is proportional to each other = body ==: distance;: square two = if the same is positive or negative suction static snow brigade AR T冤 power When positive and negative, the object receiving phase can be a kind of material, container device, and the above two pieces of opening holes ^ = as an electric attraction and - a repulsive static body vibration, will be simultaneously subjected to the - force formula (Formula 1) is indicated. Xiao, the unit area of the diaphragm is subject to static electricity 2ΚΚε0 (1 q —+ ~~~L· - (Formula 1) where the vacuum permittivity is 10 electric constant Se, electret material ^8^〇_ Μ 'electret material No. voltage Vin, the thickness of the electret material air layer layer Sa, input signal -) It can be seen that the electrostatic force is proportional to the heart>, and the diaphragm is subjected to the force P. By (the product of the hole electrode plate and the electret body vibration; the voltage of the signal voltage is inversely proportional to the opening and closing, the speaker can raise tt., if the same distance is used, the voltage can be reached by the relatively low voltage. The money flow voltage can be charged with electrostatic force. This embodiment utilizes the 201215170 micron electret piezoelectric composite material, which can provide a few hundred to thousands of volts in the turtle. According to the equation of the electric power, the audio of this embodiment The voltage can be reduced to ten volts, thereby improving the practicality of the speaker of the embodiment. According to the foregoing principle, the electret diaphragm is subjected to the positive and negative bias of the two apertured electrode plates, and is subjected to The force 'actuates the vibration of the electret diaphragm, compresses the surrounding air, and produces a sound output. In the design of the embodiment, the electret diaphragm can be selected, for example, as an electrified (t*^f corona discharge) After the treatment, the electret piezoelectric diaphragm can be kept for a long time (Statie Cha), and the electret diaphragm can be a diaphragm made of a single layer or a multilayer dielectric material (DielectricMaterials). The dielectric material can be, for example, fluorinated ethylene Ethylene copolymer (FEP), polytetrafluoro (10) (ρτ ρ partial r^mF), partially fluoropolymer (Fiu 〇 Po Polymer) and other suitable materials, the dielectric material contains holes inside. Due to the secret Zhen _ for the medium (four) material after the energy can be maintained with a static charge, after the corona charge De 扃妯 sister to the Canadian woman and this long (D - brown pumping produces static ^ bipolar charge and now, speaker unit The sound pressure factor can't reach the T-correction or ^ way in a short time to reach the electret body: ^f good design to achieve the volume in a short time; the method that can not be used to make the volume boost effect is also in this embodiment - In the embodiment, it is proposed to use the speaker unit to combine, 11 201215170, without changing, the design of the input signal source can achieve the sounding effect of driving the plurality of groups of loudspeakers, and quickly solve the problem of limitation of materials and the like. In the above-mentioned plurality of high-reliability planar speaker structures, the speaker unit has a flexible characteristic 'that is, the apertured electrode can be used with a transparent 咼 knife material such as polycarbonate (卩咖(3)出(10)攸, pC ), polyethylene pair Polyethylene Terephthalate (PET), Cyclic Olefin Copolymer (COC), Polymethyl Methacrylate (PMMA), etc., and the first and second open-cell electrodes are Transparent material such as indium bismuth oxide (Indiuin τιη
Oxide ’ ITO)或銦鋅氧化物（indium zinc Oxide，IZO)等 材料。而若是需要反射特性的材料，則可為鋁、銀等金屬 反射膜等。 在一實施例中，上述揚聲器單體的開孔電極，可包括 單一具有導電效果的金屬層。在另一實施例中，開孔電極 也可以包括一開孔層與一電極層，而此開孔層可以是不具 有導電性質的絕緣層或也可以包括具有導電性質的導電 層。電極層則是包括導電材質的導電層。 若是不考慮透光或是反射特性’當開孔層為絕緣層 時，可以包括塑膠(PET、PC)、橡膠、紙張、不導電布料(棉 纖維、高分子纖維）等不導電材料。而電極層可以包括銘、 金、銀、銅等純金屬材質或其合金或Ni/Au等雙金屬材質、 或是銦錫氧化物（Indium Tin Oxide，ITO)或銦辞氧化物 (Indium Zinc Oxide ’ ΙΖΟ)其中之一或其組合，或是高分 12 201215170 子導電材PEDOT等等。 若是上述揚聲器單體的開孔電極可為單— 質，則可為例如金屬（鐵、銅、鋁等或其合金）、導 電材 或可 為不同導電材質之組合 屬纖維、氧化金屬纖維、碳纖維、石墨纖維)其中之料(金 支撐體 本實施例所提出平面揚聲器單體的設計，在多 ^ 例其中之一，可加入多個支撐體配置於開孔=固實施 間》所述支賴相依需求飾支撐财種圖 ==計’將此平面揚聲器單體置於開孔電極不具 支撐體的分佈，則考量平面揚聲器單體，可 方式、高度_設計。支龍結構輯， 的 量置入最佳化的支撐體設計，可以有配置方式、員言又产： 設計。而此支撐體配置設計可為點 门又：、 任意形狀或是不同類型混合搭配等等設^ 3 = 上St:::實際狀況而達到最佳Sr 孔採用轉印或是轉貼的方式於開 臟ng)等方法形成。在另J :刷法例如網印 可採用直接貼合的方式，如p^种’支撐體的製程亦 第-、第二開孔金屬電触作切體完成後再置入 、X版間’而支撐體可以採取與 13 201215170 振膜（或是開孔金 種設計方式。 屬電極)有黏著(AdhesiGn)或不黏著的兩 底下將以實 疋採用點膠方式來形成。 多個實施㈣巾之合圖喊明本揭露内容所提出的 在多個實施例其中，） 請參照圖1所示。IL 揭不一種平面揚聲器結構， 包括揚聲器單體^)平面揚聲器單體結構100中，至少 m與第二阻水氧=,側的第-阻水氧結檇 一阻水氧保護阻水氧結構120包括一第 水氧保護層於揚聲器單體UG與第一阻 一絕緣支^ ^ 絕緣支龍124。所述第 哭單r ιιΖ、用叫離第—阻水氧保護層122與揚聲 =體110。第二阻水氧結構13G包括—第二阻水氧保護 層132,以及介於揚聲器單體11〇與第二阻水氧保護層⑶ 之間的多個第二絕緣支賴134。所述第二絕緣支樓體134 用以隔離第二財氧保制122與揚聲器單體ιι〇。 上述第一阻水氧保護層122及第二阻水氧保護層132 的材料可以採用例如環烯共聚物（cydic 〇lefin copolymer，COC)薄膜’或是高分子合成樹脂膜板，例如 聚丙烯(polypropylene，PP)、聚乙烯(poly ethylene，PE)、 ♦氣乙稀(polyvinyl chloride ’ PVC)和胺曱酸乙酉旨(urethane) 作為防水材料的薄膜。 上述第一絕緣支撐體124與第二絕緣支撐體134配置 14 201215170 的位置是介於所述揚聲考 述絕緣支稽體可以依祕^ ^的非出音孔的區域。上 / 、上、丨、媒&思形狀或是不同類型混合搭配等等設計。 社構H11物UG ’ w衫同解面揚聲器單體 結構，例如在一實絲你丨由，干收 其兩者巾間而作為#_/以包括兩開孔電極以及位於 :二:施例中’含金屬層或導體材料層的厚度不 膜的厚度。在另-實施例中，也可以是- (開孔電極須位於振膜金屬層的下面)以及位於 二者中間而作為振膜的含金屬層或導體材料層的駐 材料。· 时^ ^圖2Α，為說明本揭露内容其中一實施例的揚 ’耳器單體結構加示㈣。在此揚聲器單體巾，包括第— 開孔電極210、振膜230以及包括第二開孔電極220。第一 開孔電極21Q與第二開孔電極22〇可以是單-具有導電效 果的金，層’或是包括—開孔層與__電極層。在此實施例 中’此第一開孔電極210包括電極層212與開孔層214， 而開孔層214面對振膜23〇。另外，此第二開孔電極22〇 包括電極層222與開孔層224,而開孔層224面向振膜 230。第一開孔電極21〇與第二開孔電極η。分別包括多個 音孔216與226。 振膜230可以包括金屬層或導電材料層以及駐極體材 料’在此實施例中，振膜230包括駐極體材料層232與金 15 201215170 屬層234,而此金屬層234,可採用濺鍍或是電鍍等等方式 形成於駐極體材料層232表面上。 第一開孔電極210與振膜230之間，放置多個第一支 撲體240於第一開孔電極21〇的非音孔區域218，此非音 孔區域218包括是避開第一開孔電極210音孔位置的區 域。第一支撐體240可根據需求而依據一定的配置式樣 (Patterns)而設計。第二開孔電極22〇與振膜23〇之間，放 置多個第二支撐體250於第二開孔電極22()的非音孔區域 228，而且也可根據需求而依據一定的配置式樣而設計。 声。。而如，2B所示，為說明本揭露内容所提出的平面揚 =益結構貫施例剖面示意圖。在此實施例巾，平面揚聲器 了包括圖2A的揚聲器單體結構外，更包括位於揚 =為早體結構兩侧的第—阻水氧結構與第二阻水氧結 你帛—阻水氧結構260與第二阻水氧結才秦270設計 單體結構的最外層，其對環境中水氧的阻隔 政果來讓揚㈣單體的㈣可靠度提高。 以及水氧結構⑽包括—第—阻水氧保護層262， 絕緣支撑體264。第-絕緣=== /孔電極210的非音孔區域218，並用 氣保護層262與揚聲器單體，使t ^ 7Oxide 'ITO' or ITO or Indium Zinc Oxide (IZO). On the other hand, if it is a material requiring reflection characteristics, it may be a metal reflection film such as aluminum or silver. In one embodiment, the apertured electrode of the speaker unit described above may comprise a single metal layer having a conductive effect. In another embodiment, the apertured electrode may also include an aperture layer and an electrode layer, and the aperture layer may be an insulating layer having no conductive properties or may also include a conductive layer having conductive properties. The electrode layer is a conductive layer comprising a conductive material. If the aperture layer is an insulating layer, it may include non-conductive materials such as plastic (PET, PC), rubber, paper, non-conductive fabric (cotton fiber, polymer fiber). The electrode layer may include a pure metal material such as Ming, gold, silver or copper or an alloy thereof or a bimetal such as Ni/Au, or Indium Tin Oxide (ITO) or Indium Zinc Oxide. ' ΙΖΟ 其中 one or a combination thereof, or high score 12 201215170 sub-conductive material PEDOT and so on. If the opening electrode of the speaker unit is a single material, it may be, for example, a metal (iron, copper, aluminum, or the like or an alloy thereof), a conductive material, or a combination of different conductive materials, a oxidized metal fiber, or a carbon fiber. , graphite fiber) material (gold support) The design of the planar speaker unit proposed in this embodiment, in one of the many cases, can be added to a plurality of support bodies arranged in the opening = solid implementation Dependent demand decoration support financial map == 计 'This flat speaker unit is placed in the open hole electrode without support distribution, then consider the flat speaker unit, can be mode, height _ design. Into the optimized support design, can be configured, the staff and production: design. This support configuration can be point and door:, any shape or different types of mixing and so on ^ 3 = upper St ::: The actual situation to achieve the best Sr hole by transfer or transfer method to open dirty ng) and other methods. In another J: brush method, such as screen printing, can be directly bonded, such as p ^ kind of 'support process of the - the second, the second hole metal electrical touch is completed after the body is inserted, X version" The support body can be formed by using the 13 201215170 diaphragm (or the open hole gold design method. The electrode is adhesive) (AdhesiGn) or the non-adherent two bottoms will be formed by dispensing. A plurality of implementations (four) of the drawings are illustrated in the present disclosure. Among the various embodiments, please refer to FIG. IL does not disclose a flat speaker structure, including the speaker unit ^) planar speaker unit structure 100, at least m and the second water-blocking oxygen =, the side of the first - water-blocking oxygen knot - a water-blocking oxygen-protecting water-blocking oxygen structure The 120 includes a water-oxygen protective layer on the speaker unit UG and the first resistor-insulating branch. The first crying r ι Ζ, the use of the first - water blocking oxygen protective layer 122 and the rising sound = body 110. The second water blocking oxygen structure 13G includes a second water blocking oxygen protective layer 132 and a plurality of second insulating spacers 134 interposed between the speaker unit 11A and the second water blocking oxygen protective layer (3). The second insulating branch body 134 is used to isolate the second oxygen protection 122 from the speaker unit ιι. The material of the first water blocking oxygen protective layer 122 and the second water blocking oxygen protective layer 132 may be, for example, a cydic fluorene copolymer (COC) film or a polymer synthetic resin film such as polypropylene ( Polypropylene (PE), polyethylene (PE), ♦ polyvinyl chloride 'PVC, and urethane are used as a film for waterproofing materials. The position of the first insulating support body 124 and the second insulating support body 134 disposed 14 201215170 is a region of the non-sounding hole in which the sounding insulation insulating body can be separated. Up /, up, 丨, media & shape or different types of mix and match design. The structure of the H11 UG 'w shirt with the same face speaker, for example, in a silk you squat, dry the two between the towels as #_ / to include two aperture electrodes and located: two: the example The thickness of the layer containing metal or conductor material is not the thickness of the film. In another embodiment, it may also be - (the apertured electrode must be located below the metal layer of the diaphragm) and a retentate material comprising a layer of metal or conductor material as a diaphragm between the two. · Fig. 2Α, in order to illustrate one embodiment of the present disclosure, the speaker unit structure is shown (4). Here, the speaker unit includes a first opening electrode 210, a diaphragm 230, and a second opening electrode 220. The first aperture electrode 21Q and the second aperture electrode 22A may be single-gold having a conductive effect, and the layer 'or includes an aperture layer and a __ electrode layer. In this embodiment, the first aperture electrode 210 includes an electrode layer 212 and an aperture layer 214, and the aperture layer 214 faces the diaphragm 23A. In addition, the second aperture electrode 22A includes an electrode layer 222 and an aperture layer 224, and the aperture layer 224 faces the diaphragm 230. The first aperture electrode 21A and the second aperture electrode η. A plurality of sound holes 216 and 226 are included, respectively. The diaphragm 230 may include a metal layer or a layer of conductive material and an electret material. In this embodiment, the diaphragm 230 includes an electret material layer 232 and a gold 15 201215170 genus layer 234, and the metal layer 234 may be splashed. It is formed on the surface of the electret material layer 232 by plating or plating. Between the first aperture electrode 210 and the diaphragm 230, a plurality of first baffle bodies 240 are placed in the non-sound hole area 218 of the first aperture electrode 21, and the non-sound hole area 218 is included to avoid the first opening. The area of the hole electrode 210 at the position of the sound hole. The first support body 240 can be designed according to a certain configuration according to requirements. Between the second aperture electrode 22〇 and the diaphragm 23〇, a plurality of second support bodies 250 are placed in the non-sound hole area 228 of the second aperture electrode 22(), and may also be configured according to a certain configuration according to requirements. And design. sound. . For example, as shown in FIG. 2B, a schematic cross-sectional view of a plan for the planar structure of the present disclosure is provided. In this embodiment, the planar speaker includes the speaker unit structure of FIG. 2A, and further includes a first block water-blocking oxygen structure and a second water-blocking oxygen block on the sides of the Yang body for the early body structure. The structure 260 and the second water-blocking oxygen-bonded Qin 270 design the outermost layer of the monomer structure, and the water-oxygenity of the environment is blocked to ensure the reliability of the (four) monomer. And the water oxygen structure (10) includes a first water blocking oxygen protective layer 262 and an insulating support 264. The first insulating layer === / the non-sound hole region 218 of the hole electrode 210, and the gas protective layer 262 and the speaker unit are used to make t ^ 7
Gan^ ^ - 使其間具有一定的空隙(Air 以及介；-7門H構270包括—第二阻水氧保護層272， 衫《 ^ 2極22G與第二阻水氧保護層272之間 的夕㈣-絕緣支賴274。所述第二絕緣支撐體別位 16 201215170 開孔電極220的非音孔區域228，並用以隔離第二 氧保濩層272與揚聲器單體2〇〇，使其間具有一定的 空隙(Air Gap)。 、 在上述平面和聲器結構實施例或是其他實施例中，不 '•冊=位於％聲态單體2〇〇内的第一、第二支樓體25〇, 或疋在第一阻水氧結構26〇的第一絕緣支撐體264，或是 =一阻水氧結構270的第二絕緣支撐體274，可以依規格 需求進行支撐體各種圖樣化或高度變化等設計。 上述支撐體的分佈，可以有配置方式、高度等的設計。 支撐體結構設計，依音頻設計的考量置入最佳化的支撐體 设计，可以有配置方式、高度等的設計。而此支撐體配置 a又汁可為點狀、柵狀或類十字狀等任意形狀或是不同類型 犯合搭配等等設計，而支撐體間的距離，可根據音頻設計 貫際狀況而達到最佳配置的設計。 上述的支撐體的製程可採用轉印或是轉貼的方式於開 孔電極上，也可以直接在開孔電極上採用印製技術如喷墨 印刷（Inkjet Printing)或是直接印刷法例如網印⑼比⑶ Printing)等方法形成。在另一實施例中，支撐體的製程亦 可採用直接貼合的方式，如先行製作支撐體完成後再置 入’而支撐體可以採取有黏著(Adhesion)或不黏著的兩種 配置的設計。在另外實施例中，支撐體的製程亦可採用蝕 刻方式或疋光阻曝光顯影的方式來製作，或是採用點取方 式來形成。 圖2C為說明本揭露内容另一實施例的揚聲器單體結 17 201215170 構剖面示意圖。在此貫施例中’揚聲器單體結構與圖2A 類似，差別在於第一開孔電極210的電極層212面對振膜 230。而第二開孔電極220的電極層222面向振膜230。圖 2D包括為另一平面揚聲器結構實施例剖面示意圖。在此實 施例中，平面％聲器結構除了包括圖2C的揚聲器單體結 構外’更包括位於％聲器單體結構兩側的第一阻水氧結構 260與第二阻水氧結構270。 請參照圖3A〜3G，為說明本揭露内容所提出阻水氧結 構之一貫施例的製程剖面示意圖。請參照圖3a，在一基底 (SubStrate)310上，將表面清洗乾淨後，如圖汨，在=青 洗後的表面形成-犧牲層（Sacriflcial layer)M2，牲声 可以採用旋轉塗佈(Spmnmg c〇atmg)製程在基底31曰〇 上形成此犧牲層312。此犧牲層312的材料可 的材料，但不經過高溫的硬烤，例如溫度不超過攝to 度，或甚至不超過攝氏9〇度。 請參照圖3c，在犧牲層312上方 此保護層314為具有阻隔水氧 ^£層314 ’ m 时 将的保達材質，例如環烯 =二乙：或是高分子合成樹腊膜板，例如聚 丙烯(PP) “ 、聚氣乙烯(pvc (urethane)等等具有防水的材 吹乙酉日 共聚物（COC)薄臈。 在此實把例中，採用環婦 請參照® 3D，在保護層314上方形成一間 Uyer)316,此間隔層316 风叫層（SP· 大小，以便在此界—且水氧結構的區域 在此&域中，可以形成支撐體的佈局。請參照 201215170 圖3E ’將保護層314及其上方的間隔層316從犧牲層312 上方剝離。而如圖3F ,將多個支撐體318配置在保護層 314上方在間隔層316的區域内。上述支撐體318的分佈， 可以有一定的佈局(Pattern)、高度或是不同的配置方式設 計。而如圖3G，利用切割剪裁的方法切割保護層314，讓 間隔層316與部分周邊的保護層314去除，而留下所需要 的阻水氧結構’包括保護層314與其表面的支撐體318。 本揭露内容所提出阻水氧結構，除了可以與圖2a的 揚聲器單體結合之外，在多個實施例其中之一，也可與圖 4的揚聲态單體結構結合，而組成成為平面揚聲器結構。 請參照圖4A與4B，為說明本揭露内容多個實施例其 中之一的揚聲器單體結構剖 面示意圖。 如圖4A，在此揚聲器單體4〇〇中，包括開孔電極41〇 以及振膜420。開孔電極410包括多個音孔413。開孔電極 410可以是單一具有導電效果的金屬層，或是包括一開孔 層與一電極層。在此實施例中，此開孔電極41〇包括電極 層412與開孔層414，而開孔層414面對振膜420。 當開孔電極410包括單一層的金屬層時，其材料包括 鐵、銅、鋁或其合金材料。而當開孔電極41〇的開孔層414 為絕緣層時，此絕緣層材料包括塑膠、橡膠、紙張、棉纖 維、高分子纖維材料。而當開孔層414為導電層時，此導 電層包括鋁、金、銀、銅或其合金、或Ni/Au雙金屬材質、 或是銦錫氧化物（Indium Tin Oxide，ΓΓΟ)或銦鋅氧化物 (Indium Zinc Oxide，IZO)其中之一或其組合，或是高分 201215170 子導電材PEDOT。或是當開孔層414為導電層時，此導電 層材料包括金屬纖維、氧化金屬纖維、碳纖維、石墨纖維 其中之一或組合。 上述開孔電極410在一實施例中，可以包括具有透光 特性的材料，此材料例如是選自銦錫氧化物（IT〇)、銦 鋅氧化物（ιζο)或鋁鋅氧化物（ΑΖ〇)其中之一或其組 合。 振膜420可以包括金屬層或導電材料層以及駐極體材 料，在此貫施例中，振膜420包括駐極體材料層422與金 屬層424’而此金屬層424’可採用濺鍍或是電鍍等等方式 形成於駐極體材料層422表面上。開孔電極41〇與振膜42〇 之間放置夕個支接體430於開孔電極41〇的非音孔區域， 此非音孔區域主要是避開開孔電極41〇上的音孔位置。一這 些支撐體430可根據需求而依據—定的配置式 _ 而設計。 ’ 阻水氧結構440設計於揚聲器單體結構的最外層，利 =其對環境中水氧雜隔效果，來讓揚聲器單體的^作可 =度提高。在此實施例中’ &阻水氧結構44〇 ，極4U)相對於振膜420的另一侧面。此阻水氧結構· 保f層442，以及介於揚聲器單體的開孔電極 於開孔電極410的非音孔區域，並用以隔離 隙(Air(jap)。 使，、間具有一定的空 20 201215170 分則個揚t器單體400結構’與圖4A相同部 圖所示，在圖4^中丁，門一^^的部分在於配置的位置，如 孔層，電丄 '編觸恤構的多個 揚聲☆結構中，至少包括阻水氧保護層與 電極以及作為振施射，包括開孔 :揚護層的設計，在部分實施例中，位於平 揚辦哭雕的卜側，利用其對環境中水氧的阻隔效果讓 外7二早版2運作的可靠度提高，如圖5Α與5Β所示。另 〇〇蝴肉另外實細*例中，此阻水氧保護層也可配置於揚聲器 而達到對環境中水氧的阻隔，例如圖5C將阻水 側㈣Γ於，孔電極上面，或是圖5D所^，*在振膜兩 y且水氧保護層後，再配置開孔電極以及之間的支撐 體。詳細實_岐如底下所示。 沾 ]、勺％參照圖5A，在此實施例中，平面揚聲器單體結構至 乂 i括揚聲器單體以及位於其兩側的第一阻水氧結構 540A 楚—I? ^ 〔、弟二阻水氧結構550A。在此，揚聲器單體是以兩 =孔電極以及彳轉其巾_轉雜冊為實施例說明， 但f非以此為限制，例如揚聲器單體包括多層堆疊的架構 也屬本實施例的範®壽。 揚聲器單體包括第-開孔電極510、第二開孔電極 21 201215170 =0'以及位於其中間的振膜52G。此振膜5 ::及振膜520與第二開孔電極伽之間配置多個支 此實施例中’第-阻水氧結構54GA包括 聲科體與第—財氧鋪ί ⑽=:Γ:=支撐體544。所述第-絕緣 44用以隔離第-阻水氧保護層542 ，㈣祖包括—第二阻水氧保護層5二= =聲器單體與第二阻水氧保護層552之 及= 念撐體554。所述第二絕緣支撐體554 氧保護層552與揚聲器單體。 乐一阻水 上述第一阻水氧保護層542乃筮_ ^ ,(J ,D；；；2 ^ 552 copoly.e.COC)^,；.!^ 平 及疋同刀子合成樹脂膜板，例如 ’ ΡΡ)、聚乙稀㈣y， f氣乙稀（P〇lyvinyl chl〇ride，pvQ和胺甲酸乙醋 thu-個實施例中’第一阻水氧保護層542及 氧^層ί52的材料可以採用金屬加塑膠、混煉 岭”：阻水乳包跡以作為具有防水功能的薄膜。 =照圖5B，此實施例與圖5A的結構類似，因此， 二同内容以相同的標號表示，不再冗述。此平面揚聲器單 =結構至少包括揚聲H單如及位於其 結構5備與第二阻水氣結構5漏。上述第—阻水氧、= 22 201215170 540B與第二阻水氧結構55GB則包括阻水氧保護材料，並 且分別直接配置於第-開孔電極51〇與第二開孔電極別 上方以及其開孔上。 而形成的方法包括直接將防水材料例如經由蒸铲 是旋轉塗佈的方式分別先形成第一阻水氧結構54〇B' ^第 一阻水氧結構550B，之後再黏合於開孔電極的外層，如此 開孔電極與開孔電極之間不會有阻水氧材料。另，由於第 一阻水氧結構540B與苐二阻水氧結構55〇b設於第—開孔 電極510與第二開孔電極530之外側表面上，使防水二料 不會進入開孔之孔洞内，而在開孔表面形成，如圖所 示0 請參照圖5C，此實施例與圖5A的結構類似，因此， 相同内容以相同的標號表示，不再冗述。此平面揚聲哭單 體結構至少包括揚聲器單體以及位於其兩側的第一阻水氧 結構540C與第二阻水氧結構550C。上述第一阻水氧结構 540C與第二阻水氧結構550C則包括阻水氧保護材料丁並 且分別直接配置於第一開孔電極510與第二開孔電極53〇 面對振膜520 —側的表面以及其開孔之間。 而形成的方法包括直接將防水材料經由蒸鍍或是旋 轉塗佈的方式’鍍於平面揚聲器單體結構的外侧開孔電極 面對振膜520 —側的表面上方以及其孔洞之間。也就是， 在一實施例中’可以在形成外側開孔電極時，例如直接利 用蒸鑛或是旋轉塗佈的方式分別先形成第一阻水氧結構 540C與第二阻水氧結構550C於開孔電極的—表面上，之 23 201215170 後利用例如貼合的方式錄水氧_與支撐體黏合Gan^ ^ - has a certain gap between them (Air and 介; -7-door H-structure 270 includes - second water-blocking oxygen protective layer 272, between the shirt "^ 2 pole 22G and the second water-blocking oxygen protective layer 272" The fourth (four)-insulating support 274. The second insulating support portion 16 201215170 the non-perforation region 228 of the aperture electrode 220, and is used to isolate the second oxygen barrier layer 272 from the speaker unit 2〇〇 There is a certain gap (Air Gap). In the above-mentioned plane and acoustic structure embodiment or other embodiments, the first and second building bodies located in the 2% acoustic monomer 2〇〇 25〇, or the first insulating support 264 of the first water-blocking oxygen structure 26〇, or the second insulating support 274 of the water-blocking oxygen structure 270, can be variously patterned according to the specification requirements or Design of height change, etc. The distribution of the above-mentioned support body can be designed in terms of configuration, height, etc. The structure design of the support body is designed according to the design of the audio, and the design of the support body can be optimally designed. And the support body configuration a can be a point, grid or cross Designed in any shape or different types of combinations, and the distance between the supports can be optimally configured according to the audio design. The above-mentioned support can be transferred or reposted. The method can be formed on the aperture electrode, or directly on the aperture electrode by a printing technique such as inkjet printing (Inkjet Printing) or direct printing method such as screen printing (9) printing. In another embodiment, the process of the support body can also be directly bonded, such as when the support body is prepared before being placed, and the support body can adopt an adhesive configuration (Adhesion or non-adhesive). . In other embodiments, the process of the support may also be formed by etching or by photo-resistance development, or by dot-taking. 2C is a cross-sectional view showing the structure of a speaker unit 17 201215170 according to another embodiment of the present disclosure. In this embodiment, the structure of the speaker unit is similar to that of Fig. 2A, except that the electrode layer 212 of the first aperture electrode 210 faces the diaphragm 230. The electrode layer 222 of the second aperture electrode 220 faces the diaphragm 230. Figure 2D includes a cross-sectional view of another planar speaker structure embodiment. In this embodiment, the planar acoustic structure comprises, in addition to the speaker unit structure of Fig. 2C, a first water blocking oxygen structure 260 and a second water blocking oxygen structure 270 located on either side of the % sounder unit structure. 3A to 3G are schematic cross-sectional views showing a process of a consistent embodiment of the water blocking oxygen structure proposed in the present disclosure. Referring to FIG. 3a, after cleaning the surface on a substrate (SubStrate) 310, as shown in FIG. 汨, a Sacriflcial layer M2 is formed on the surface after the blue washing, and the sound can be spin-coated (Spmnmg). The c〇atmg) process forms the sacrificial layer 312 on the substrate 31. The material of the sacrificial layer 312 can be a material that is not hard baked at a high temperature, such as a temperature not exceeding a degree, or even no more than 9 degrees Celsius. Referring to FIG. 3c, the protective layer 314 above the sacrificial layer 312 is a material having a barrier layer 314'm, such as a cycloolefin=diethyl: or a polymer synthetic wax film board, for example, Polypropylene (PP) ", pvc (urethane), etc., has a water-repellent material, such as a COC thinner. In this case, please refer to ® 3D in the protective layer. A Uyer 316 is formed above 314. The spacer layer 316 is called a layer (SP· size, so as to be in this boundary), and the area of the water-oxygen structure is in this & field, and the layout of the support can be formed. Please refer to 201215170 3E 'The protective layer 314 and the spacer layer 316 thereabove are stripped from above the sacrificial layer 312. And as shown in FIG. 3F, a plurality of support bodies 318 are disposed over the protective layer 314 in the region of the spacer layer 316. The above-described support body 318 The distribution may be designed with a certain pattern, height or different configuration. As shown in FIG. 3G, the protective layer 314 is cut by a cutting and cutting method, and the spacer layer 316 and a portion of the surrounding protective layer 314 are removed, leaving The required water-blocking oxygen structure 'includes protection Layer 314 and its surface support 318. The water-blocking oxygen structure proposed in the present disclosure, in addition to being combinable with the speaker unit of Figure 2a, may be in one of the various embodiments, as well as the raised state of Figure 4. The unit structure is combined to form a planar speaker structure. Referring to Figures 4A and 4B, there is shown a cross-sectional view of a speaker unit structure for explaining one of the embodiments of the present disclosure. As shown in Figure 4A, the speaker unit 4〇 In the crucible, the aperture electrode 41A and the diaphragm 420 are included. The aperture electrode 410 includes a plurality of sound holes 413. The aperture electrode 410 may be a single metal layer having a conductive effect or include an aperture layer and an electrode layer. In this embodiment, the aperture electrode 41 includes an electrode layer 412 and an aperture layer 414, and the aperture layer 414 faces the diaphragm 420. When the aperture electrode 410 includes a single layer of metal, the material includes Iron, copper, aluminum or alloy materials thereof. When the opening layer 414 of the opening electrode 41 is an insulating layer, the insulating layer material comprises plastic, rubber, paper, cotton fiber, polymer fiber material. When layer 414 is a conductive layer, The conductive layer comprises aluminum, gold, silver, copper or an alloy thereof, or a Ni/Au bimetal material, or an indium tin oxide (Indium Tin Oxide) or an indium zinc oxide (Indium Zinc Oxide, IZO). One or a combination thereof, or a high score 201215170 sub-conductive material PEDOT. Or when the open-cell layer 414 is a conductive layer, the conductive layer material comprises one or a combination of metal fibers, oxidized metal fibers, carbon fibers, graphite fibers. The aperture electrode 410 may, in one embodiment, comprise a material having a light transmitting property, such as selected from the group consisting of indium tin oxide (IT〇), indium zinc oxide (ιζο), or aluminum zinc oxide (ΑΖ〇). One of them or a combination thereof. The diaphragm 420 may include a metal layer or a layer of conductive material and an electret material. In this embodiment, the diaphragm 420 includes an electret material layer 422 and a metal layer 424 ′ and the metal layer 424 ′ may be sputtered or It is formed on the surface of the electret material layer 422 by electroplating or the like. Between the aperture electrode 41〇 and the diaphragm 42〇, a branch body 430 is disposed in the non-sound hole area of the aperture electrode 41〇, and the non-sound hole area mainly avoids the sound hole position on the aperture electrode 41〇. . One of these supports 430 can be designed according to the requirements of the formula _. The water-blocking oxygen structure 440 is designed on the outermost layer of the speaker unit structure, and its effect on the water and oxygen in the environment is to improve the speaker unit. In this embodiment, the <water blocking oxygen structure 44 〇 , pole 4U ) is opposite to the other side of the diaphragm 420 . The water-blocking oxygen structure, the f-layer 442, and the aperture electrode of the speaker unit are in the non-sound hole area of the aperture electrode 410, and are used to isolate the gap (Air (jap). 20 201215170 The structure of the 400-unit of the monolithic unit is shown in the same figure as that of Figure 4A. In Figure 4, the part of the door is located at the position of the arrangement, such as the hole layer, the electric 丄 'Editor's shirt The structure of the plurality of sound ☆ structure, at least including the water-blocking oxygen protective layer and the electrode and as the vibration application, including the opening: the design of the protective layer, in some embodiments, located in the side of the Pingyang Office Using its barrier effect on water and oxygen in the environment, the reliability of the operation of the outer 7th edition 2 is improved, as shown in Fig. 5Α and 5Β. In addition, the water-resistant oxygen protective layer is in the other case. It can also be arranged in the speaker to achieve the barrier of water and oxygen in the environment. For example, in Figure 5C, the water blocking side (4) is placed on the hole electrode, or in Figure 5D, * after the diaphragm is y and the water and oxygen protective layer is The opening electrode and the support body are arranged. The details are as shown below. The dip], the spoon % is referred to FIG. 5A, and is implemented here. In the example, the planar speaker unit structure comprises a speaker unit and a first water-blocking oxygen structure 540A on both sides thereof, and a second water-blocking oxygen structure 550A. Here, the speaker unit is The two-hole electrode and the twirling-to-roller are described as an embodiment, but f is not limited thereto. For example, the structure in which the speaker unit includes a multi-layer stack is also the standard life of the embodiment. The first-opening electrode 510, the second opening electrode 21 201215170 =0', and the diaphragm 52G located therebetween. The diaphragm 5: and the diaphragm 520 and the second opening electrode are disposed between the plurality of electrodes In the embodiment, the 'th-water-blocking oxygen structure 54GA includes a sonic body and a first oxygen-suppressing layer (10)=:Γ:=support 544. The first insulating layer 44 is used to isolate the first-water-blocking oxygen protective layer 542, (4) The ancestors include - the second water-blocking oxygen protective layer 5 = = = the sound unit and the second water-blocking oxygen protective layer 552 = the support 554. The second insulating support 554 the oxygen protective layer 552 and the speaker The first water-blocking oxygen protective layer 542 is 筮 _ ^ , (J , D;;; 2 ^ 552 copoly.e.COC)^,; Knife synthetic resin film, such as 'ΡΡ', polyethylene (four) y, f ethylene (P〇lyvinyl chl〇ride, pvQ and urethane thiocyanate - in the embodiment 'the first water blocking oxygen protective layer 542 and The material of the oxygen layer ί52 can be made of metal plus plastic or rubber ridge": water-blocking milk wrap is used as a film with waterproof function. = Figure 5B, this embodiment is similar to the structure of Figure 5A, therefore, the same content The same reference numerals are used for the same reference numerals and are not redundant. The planar speaker single = structure includes at least a speaker H and a leakage in the structure 5 and the second water blocking structure 5 . The above-mentioned first water-blocking oxygen, = 22 201215170 540B and the second water-blocking oxygen structure 55GB comprise a water-blocking oxygen protective material, and are respectively disposed directly above the first-opening electrode 51 and the second opening electrode and open On the hole. The method for forming includes directly forming the first water-blocking oxygen structure 54〇B′ ^ the first water-blocking oxygen structure 550B by directly coating the waterproof material, for example, by steaming the shovel, and then bonding the outer layer of the open-hole electrode. There is no water-blocking oxygen material between the apertured electrode and the apertured electrode. In addition, since the first water blocking oxygen structure 540B and the second water blocking oxygen structure 55〇b are disposed on the outer surface of the first opening electrode 510 and the second opening electrode 530, the waterproof material does not enter the opening. The hole is formed in the hole and formed on the surface of the opening. As shown in FIG. 5C, this embodiment is similar to the structure of FIG. 5A. Therefore, the same contents are denoted by the same reference numerals and will not be redundant. The planar speaker crying unitary structure includes at least a speaker unit and a first water blocking oxygen structure 540C and a second water blocking oxygen structure 550C on both sides thereof. The first water-blocking oxygen structure 540C and the second water-blocking oxygen structure 550C include a water-blocking oxygen protective material butyl and are disposed directly on the first opening electrode 510 and the second opening electrode 53 〇 facing the diaphragm 520, respectively. The surface and between its openings. The method of forming includes directly plating the water-repellent material on the side of the outer perforated electrode of the planar speaker unit structure on the side facing the diaphragm 520 and between the holes thereof by means of evaporation or spin coating. That is, in an embodiment, the first water blocking oxygen structure 540C and the second water blocking oxygen structure 550C may be formed separately when forming the outer opening electrode, for example, directly by steaming or spin coating. On the surface of the hole electrode, 23, after 201215170, the water oxygen is recorded by means of, for example, a bonding method.
不再冗述。此平面揚聲器單 及第一阻水氧結構540D與 體結構至少包括揚聲器單體以及第No longer redundant. The flat speaker unit and the first water blocking oxygen structure 540D and the body structure include at least a speaker unit and a
阻水氧結構55GD則包括阻水氧保護材料，並且分別直接 配置於振膜520的兩側。若揚聲器包括多個平面揚聲器單 體堆疊’則此第-阻水氧結構5鄉與第二阻水氧結構 550D則是分別位於外側平面揚聲器單體的振膜兩侧，如圖 5E所示，第一阻水氧結構54〇D與第二阻水氧結構55〇〇 位於外侧的平面揚聲器單體，而其内側至少包括另一個平 面揚聲器單體560。 而形成的方法包括直接將防水材料經由蒸鍍或是旋 轉塗佈的方式，鍍於振膜520兩側，再將外側開孔電極以 及多個支撐體利用例如貼合的方式完成此平面揚聲器單體 結構。上述圖5A〜5D所揭露的高可靠度的平面揚聲器結構 的多個實施例中，防水材料可以採用例如環烯共聚物 (cyclic olefin copolymer，COC)薄膜，或是高分子合成 樹脂膜板，例如聚丙稀(P〇lypr〇pyl ene > PP)、聚乙烯(p〇ly ethylene ’ PE)、聚氣乙稀(p〇lyVinyl chloride ’ PVC)、胺曱 酸乙酯(urethane)或聚亞醯胺（Polyimide )。在另一實施例 中’防水材料也可以是採用金屬材料所組成_可能需要金屬 24 201215170 加塑膠，混煉溶喷或混紡。 本發明各實施例所述之阻水氧結構如為開孔電極外 侧，可包括阻水氧結構在開孔電極最外側之意或阻水氧結 構在開孔電極外側之意。 雖然本發明已以實施例揭露如上，然其並非用以限定 本發明，任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍内，當可作些許之更動與潤飾，故本 發明之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1是說明本發明多個實施例其中之一的平面揚聲器 結構剖面示意圖。 圖2A是說明本發明多個實施例其中一的平面揚聲器 單體剖面示意圖。 圖2B是說明本發明多個實施例其中之一的平面揚聲 器結構剖面示意圖。 圖2C是說明本發明多個實施例其中一的平面揚聲器 單體剖面示意圖。 圖2D是說明本發明多個實施例其中之一的平面揚聲 器結構剖面示意圖。 圖3A〜3G是說明為說明本揭露内容所提出阻水氧結 構之一實施例的製程剖面示意圖。。 圖4A是說明本發明多個實施例其中之一的平面揚聲 器結構剖面示意圖。 25 201215170 圖4B是說明本發明多個實施例其中之又一平面揚聲 器結構剖面示意圖。 圖5A〜5E是說明本發明多個實施例其中之部分實施 例中，採用不同阻水氧結構的高可靠度的平面揚聲器結構 的多個實施例結構剖面示意圖。 【主要元件符號說明】 100 :平面揚聲器單體結構 110 :揚聲器單體 120 :第一阻水氧結構 122 :第一阻水氧保護層 124 :第一絕緣支撐體 130 :第二阻水氧結構 132 :第二阻水氧保護層 134:第二絕緣支撐體 210 :第一開孔電極 212 :電極層 214 :開孔層 216 :音孔 220 :第二開孔電極 222 :電極層 224 :開孔層 226 :音孔 230 :振膜 232 :駐極體材料層 26 201215170 234 :金屬層 240、250 :第一、第二支撐體 260 :第一阻水氧結構 270 :第二阻水氧結構 262 :第一阻水氧保護層 264 :第一絕緣支撐體 272 :第二阻水氧保護層 274 :第二絕緣支撐體 310 :基底（Substrate) 312 :犧牲層（Sacrificial layer) 314 :保護層 316 :間隔層（Spacer Layer) 318 :支撐體 400 :揚聲器單體 410 :開孔電極 412 :電極層 414 :開孔層 416 :音孔 420 :振膜 422 :駐極體材料層 424 :金屬層 430 :支撐體 440 :阻水氧結構 442 :阻水氧保護層 27 201215170 444 :絕緣支撐體 510 :第一開孔電極 520 :振膜 522 :駐極體材料層 524 :金屬層 530 :第二開孔電極 540A、540B、540C、540D :第一阻水氧結構 550A、550B、550C、550D :第二阻水氧結構 560 :平面揚聲器單體 28The water blocking oxygen structure 55GD includes a water blocking oxygen protective material and is disposed directly on both sides of the diaphragm 520, respectively. If the speaker comprises a plurality of planar speaker unit stacks, then the first water-blocking oxygen structure 5 and the second water-blocking oxygen structure 550D are respectively located on both sides of the diaphragm of the outer plane speaker unit, as shown in FIG. 5E. The first water blocking oxygen structure 54〇D and the second water blocking oxygen structure 55〇〇 are located on the outer side of the planar speaker unit, and the inner side thereof includes at least another planar speaker unit 560. The method for forming includes directly plating the waterproof material on both sides of the diaphragm 520 by means of evaporation or spin coating, and then completing the planar speaker sheet by, for example, fitting the outer aperture electrode and the plurality of support bodies. Body structure. In various embodiments of the high-reliability planar speaker structure disclosed in the above-mentioned FIGS. 5A to 5D, the waterproof material may be, for example, a cyclic olefin copolymer (COC) film or a polymer synthetic resin film plate, for example, Polypropylene (P〇lypr〇pyl ene > PP), polyethylene (p〇ly ethylene 'PE), p〇lyVinyl chloride 'PVC, urethane or polyarylene Amine (Polyimide). In another embodiment, the water repellent material may also be composed of a metal material. _ may require metal 24 201215170 plus plastic, mixed solution spray or blend. The water-blocking oxygen structure according to various embodiments of the present invention, such as the outer side of the aperture electrode, may include the meaning of the water-blocking oxygen structure at the outermost side of the aperture electrode or the water-blocking oxygen structure outside the aperture electrode. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the structure of a planar speaker in one of various embodiments of the present invention. Figure 2A is a schematic cross-sectional view of a planar speaker unit illustrating one of the various embodiments of the present invention. Figure 2B is a cross-sectional view showing the structure of a planar speaker of one of the various embodiments of the present invention. Figure 2C is a schematic cross-sectional view of a planar speaker unit illustrating one of the various embodiments of the present invention. Figure 2D is a cross-sectional view showing the structure of a planar speaker of one of various embodiments of the present invention. 3A to 3G are schematic cross-sectional views showing a process for explaining one embodiment of the water blocking oxygen structure proposed in the present disclosure. . Figure 4A is a cross-sectional view showing the structure of a planar speaker of one of various embodiments of the present invention. 25 201215170 Figure 4B is a cross-sectional view showing another planar speaker structure of various embodiments of the present invention. Figures 5A through 5E are cross-sectional views showing various embodiments of a high-reliability planar speaker structure employing different water-blocking oxygen structures in some of the embodiments of the present invention. [Main component symbol description] 100: planar speaker unit structure 110: speaker unit 120: first water blocking oxygen structure 122: first water blocking oxygen protective layer 124: first insulating support body 130: second water blocking oxygen structure 132: second water blocking oxygen protective layer 134: second insulating support 210: first opening electrode 212: electrode layer 214: opening layer 216: sound hole 220: second opening electrode 222: electrode layer 224: open Hole layer 226: sound hole 230: diaphragm 232: electret material layer 26 201215170 234: metal layer 240, 250: first and second support body 260: first water blocking oxygen structure 270: second water blocking oxygen structure 262: first water-blocking oxygen protective layer 264: first insulating support 272: second water-blocking oxygen protective layer 274: second insulating support 310: substrate (Substrate) 312: sacrificial layer 314: protective layer 316: Spacer Layer 318: Support 400: Speaker Unit 410: Opening Electrode 412: Electrode Layer 414: Opening Layer 416: Sound Hole 420: Diaphragm 422: Electret Material Layer 424: Metal Layer 430: support body 440: water blocking oxygen structure 442: water blocking oxygen protective layer 27 201215170 444: insulating support 510: first aperture electrode 520: diaphragm 522: electret material layer 524: metal layer 530: second aperture electrode 540A, 540B, 540C, 540D: first water blocking oxygen structure 550A, 550B, 550C, 550D : Second water-blocking oxygen structure 560: flat speaker unit 28