201220347 六、發明說明： 【發明所屬之技術領域】 此發明係尤其關於作爲用以製造半導體元件、液晶顯 示元件、印刷配線基板等的曝光用光源所使用之附套管的 放電燈及具備該放電燈的光源裝置者，又尤其關於從套管 導出供電線，其供電側前端部連接於供電裝置之附套管的 放電燈及光源裝置者。 【先前技術】 先前，封入水銀之短弧型的放電燈，係根據對向配置 於發光管內之一對的電極之前端距離較短且接近點光源， 藉由與光學系組合，利用作爲集光效率較高之曝光裝置的 光源。 在此種領域被使用之光源裝置，係具備光源之短弧型 放電燈，與包圍該放電燈之凹面反射鏡所成，將從放電燈 放射之光線，藉由前述凹面反射鏡朝向所定光學系加以聚 光並反射。 日本特開2008- 1 3041 8號公報（專利文獻1)揭示有具 有先前之短弧型放電燈的光源裝置。 於圖10揭示其構造，光源裝置1係由短弧型放電燈2, 與包圍其之凹面反射鏡3所成，該凹面反射鏡3係以其光放 射開口 3a朝向上方之方式裝設，並於其基端側端部3b安裝 前述放電燈2，藉此，該放電燈2被垂直配置，來自該放電 燈2的放射光係藉由凹面反射鏡3朝向上方反射》 201220347 於前述放電燈2之上方側端部的封止部2a，安裝套管4 ，從該套管4導出供電線5。於此供電線5的供電側前端部 ，設置有供電端子6，可自由裝卸地連接於電力供給用端 子台7的供電部8。 然而，近來，根據曝光處理之曝光面積的增加及處理 量的增加之要求，於前述光源裝置，更被要求紫外線量的 增加，爲此，身爲光源的短弧型放電燈需謀求高輸出化， 額定消費電力會增加，而電流流量也會變大。 如此，於燈流通大電流的話，電極的耗損會更明顯， 爲此補救此狀況，需要使電極本體部分大型化。 然後，支撐較大之電極的軸部分、封止部部分的構造 也需要大型化，結果，燈整體變大變重，例如逐漸變成使 用1個重量超過2kg的燈。 另一方面，如上述般，燈的高輸出化進展的話，於包 圍燈的反射鏡中，熱的影響會變成明顯，例如，構成反射 鏡之反射面的介電質膜等的塗層膜會剝離，而產生破損的 事態。對於爲了抑制此種反射膜的熱所致之影響來說，需 要增大反射鏡的開口徑。 然後，如此伴隨反射鏡的光放射開口被擴大構成之狀 況，從反射鏡的中心到電力供給用的端子台爲止之距離變 長，用以對放電燈供給電力的供電線也會變長。 因爲如此情況，於光源裝置中，燈的交換作業變得更 困難。 具體來說，在燈的交換作業時，燈較大的話，其重量 -6 · ⑧ 201220347 也會較重，故作業者必須雙手持燈的兩端部來進行作業， 但是，因爲供電線較長，從供電端子台的供電部卸下之供 電線在作業中晃動，會與反射鏡接觸而磨擦，所以會使該 反射鏡的反射面損傷，尤其，有其前端部的供電端子接觸 反射鏡及燈的發光管所致之影響較大，使該等產生刮傷而 招致性能劣化，進而因爲其狀況而導致破損之問題。 然後，就算有鑑於此狀況，欲以一方的手保持供電線 的端部，另一方的手保持燈，也會有無法支撐大型化之燈 的重量，因爲掉落而使燈及反射鏡破損之,問題。 起因於此種狀況，對於爲了防止上述之事故來說，也 導致必須以兩位作業者來進行燈的交換之作業效率的惡化 〔先前技術文獻〕 〔專利文獻〕 〔專利文獻1〕日本特開2008 - 1 3 04 1 8號公報 【發明內容】 〔發明所欲解決之課題〕 此發明係有鑒於前述先前技術的問題點，於具備有於 兩端形成封止部之發光管，並於該發光管的內部對向配置 陽極與陰極所成之放電燈，與安裝於該發光管的至少一方 之封止部之套管的附套管的放電燈，及具備該放電燈的光 源裝置中，提供防止在放電燈的交換時供電線胡亂晃動， 201220347 迴避燈及反射鏡的破損事故，可易於進行其交換作 求作業之效率化的構造者。 〔用以解決課題之手段〕 爲了解決前述課題，在此發明中，特徵爲從放 封止部的套管導出供電線，並且於該套管，設置有 供電線之供電側前端部的供電端子，可自由裝卸地 固接機構。 又，特徵爲包圍該放電燈，於上方具有光放射 的凹面反射鏡，與於該凹面反射鏡垂直配置前述附 放電燈，具有該放電燈之供電線的固接機構的套管 前述凹面反射鏡的光放射開口側。 〔發明的效果〕 依據本發明，因爲於附套管的放電燈之套管， 將供電線的供電側前端部，可自由裝卸地固定的固 ，故在燈的交換作業時，可將從供電端子台卸下之 的前端部，固定於套管，所以，不會有在交換作業 線胡亂晃動而接觸反射鏡及燈，尤其可防止其前端 端子抵接於反射鏡及燈而使其破損之狀況。 又，因爲作業者不會被供電線纏住，針對燈本 用雙手進行作業，可安全且有效率地作業》 尤其，於垂直配置放電燈的光源裝置中，因爲 部的套管，固定供電線的前端部來進行燈的交換作 業，謀 電燈之 將前述 固定的 用開口 套管的 ，位於 設置有 接機構 供電線 時供電 的供電 身可利 可於上 業，故 -8- ⑧ 201220347 供電線的自由前端部不會因爲重力而落下，也不會因爲落 下所致之反射鏡及燈的破損事故。 藉此，易於進行交換作業，作業效率也會大幅改善。 【實施方式】 於圖1揭示此發明之附套管的放電燈與使用其之光源 裝置。 附套管的放電燈2，係以垂直配置於開口於上方之凹 面反射鏡3之方式安裝。於其上方側的封止部2a，安裝套 管4，從該套管4導出供電線5。 然後，於套管4設置有用以將前述供電線5之供電側前 端部可自由裝卸地固定的固接機構10，在燈的交換作業時 ，如圖示般，將從供電端子台（未圖示）卸下之供電線5 的供電前端部，暫時固定於該固接機構10者。 再者，其他構造與圖10相同。 於圖2揭示固接機構1〇之一例，於供電線5的供電側前 端，安裝有壓著端子11，將該壓著端子11，藉由螺絲12, 與螺設於套管4之螺孔13，固定於套管4者。 於圖3、圖4揭示其他實施例，供電線4前端部的壓著 端子11係如圖4所示，被嵌合於埋植在套管4的銷14，從其 上使押片15旋動而加以固定者。 在該等實施例中壓著端子11揭示圓型者，但是，如圖 5所示，作爲Y型的壓著端子16亦可。 於圖6揭示固接機構10之其他實施例，C字狀的固定 201220347 片17設置於套管4，於其內部配置有彈簧構件18’壓著端 子11係從橫方向插入固定片N中，藉由彈簧構件18固定。 於圖7揭示固接機構10之另其他實施例’固接機構1〇 係使桿19旋動的話’旋轉軸20會旋轉’藉此’下方的柱塞 21突出於下方者，所謂公知的分度銷。在此固接機構〗〇’ 更具有形成於套管4之側部的開口 22’壓著端子11係被插 入此開口 22內。 然後，藉由桿19的旋動而下降之柱塞21 ’卡合於此壓 著端子1 1並固定者。 於圖8揭示固接機構10之另其他實施例。此固接機構 10係由埋植於套管4之銷23’與於其上端，經由鉸鏈（未 圖示）而可自由旋動地設置的桿24所構成。藉此，該桿24 係旋動於垂直方向與水平方向者，在壓著端子Η的固接時 ，於使桿24垂直而與銷23爲同軸之狀態（在同圖中虛線圖 示）下設置於0型壓著端子11之孔，插入銷23，將桿24倒 向水平方向（在同圖中實線圖示），藉此，卡合於壓著端 子1 1並固定者β 再者，將壓著端子11暫時固定於套管4的保持具，除 前述之外也可進行各種變形，例如，在利用圖2所示之螺 絲機構時，將螺絲埋植於套管4 ’並使壓著端子1 1嵌合於 其，從上方鎖緊螺帽加以固接亦可。 又，在圖6所示之利用彈簧構件時，同圖之C字狀的 固定片1 7本身作爲具有彈性者亦可。 進而，於套管4安裝磁鐵來作爲保持具，使該磁鐵吸 ⑧ -10- 201220347 附壓著端子11亦可。 於圖9，揭示供電端子之其他實施例，在此實施例中 ，供電線4的供電端子以栓塞25構成。然後’於套管4’突 設有配合此供電栓塞25的口徑之固定銷26。 供電栓塞25係嵌合於供電端子台27的供電栓28 ’並電 性連接進行對燈的供電》在燈的交換時，該供電栓塞25從 供電栓28拆下，嵌合並固定於套管4的固定銷26。 如以上所述，依據本發明，於朝向上方開口的凹面反 射鏡，垂直配置放電燈的光源裝置中，因爲於設置於該放 電燈的上部封止部之套管，設置將從該套管導出之供電線 的供電側前端部，可裝卸地固定的固接機構，在燈的交換 作業時暫時固定從供電端子台卸下之供電線的供電前端部 ，藉此，可發揮在交換作業時供電線的前端部不會胡亂晃 動，防止其接觸反射鏡及燈而使該等損傷之事故的效果。 然後，因爲作業者不會被供電線纏住而可利用兩手進 行交換作業，可有效率且安全進行作業》 【圖式簡單說明】 〔圖1〕關於本發明之光源裝置的整體圖。 〔圖2〕本發明之附套管的放電燈的部分放大圖。 〔圖3〕固接機構之其他實施例的立體圖。 〔圖4〕圖3之要部的放大圖。 〔圖5〕圖3之供電端子的其他實施例。 〔圖6〕固接機構的其他實施例。 -11 - 201220347 〔圖7〕固接機構的另其他實施例。 〔圖8〕固接機構的另其他實施例。 〔圖9〕供電端子及固接機構的其他實施例。 〔圖10〕先前的光源裝置。 【主要元件符號說明】 1 :光源裝置 2 :短弧型放電燈 2 a ·封止部 3 :凹面反射鏡 4 :套管 5 :供電線 10 :固接機構 11 :壓著端子（圓型） 1 2 :螺絲 1 3 :螺孔 14 :銷 15 :押片 16 :壓著端子（Y型） 17 : C字狀固定片 1 8 :彈簧構件 19 :桿 20 :旋轉軸 2 1 :柱塞 -12- ⑧ 201220347 22 :開口 23 :銷 24 :桿 25 :供電栓塞 26 :固定銷 -13-201220347 6. EMBODIMENT OF THE INVENTION The present invention relates to a discharge lamp which is used as a casing for manufacturing an exposure light source for manufacturing a semiconductor element, a liquid crystal display element, a printed wiring board, etc., and the discharge lamp. The light source device of the lamp, in particular, is directed to the supply line from the bushing, the front end of which is connected to the discharge lamp and the light source device of the power supply device. [Prior Art] Previously, a short-arc type discharge lamp in which mercury was sealed was used as a set by combining with an optical system by a short distance from a front end of an electrode disposed in a pair in the arc tube and close to a point light source. A light source of an exposure device having a higher light efficiency. A light source device used in such a field is a short arc type discharge lamp having a light source and a concave mirror surrounding the discharge lamp, and the light radiated from the discharge lamp is directed toward the predetermined optical system by the concave mirror. Gather and reflect. Japanese Laid-Open Patent Publication No. 2008- 1 3041 (Patent Document 1) discloses a light source device having a conventional short arc type discharge lamp. The structure of the light source device 1 is formed by a short arc type discharge lamp 2 and a concave mirror 3 surrounding the same, and the concave mirror 3 is mounted with the light emitting opening 3a facing upward, and The discharge lamp 2 is attached to the proximal end portion 3b, whereby the discharge lamp 2 is vertically disposed, and the emitted light from the discharge lamp 2 is reflected upward by the concave mirror 3" 201220347 in the discharge lamp 2 The sleeve 4 is attached to the sealing portion 2a at the upper end portion, and the power supply line 5 is led out from the sleeve 4. The power supply side end portion of the power supply line 5 is provided with a power supply terminal 6, and is detachably connected to the power supply portion 8 of the power supply terminal block 7. However, recently, in accordance with the increase in the exposure area of the exposure process and the increase in the amount of processing, the amount of ultraviolet rays is required to be increased in the light source device. Therefore, the short arc type discharge lamp as a light source needs to be output high. The rated power consumption will increase and the current flow will also increase. In this way, when a large current flows through the lamp, the wear of the electrode is more conspicuous. To remedy this situation, it is necessary to enlarge the body portion of the electrode. Then, the structure of the shaft portion and the sealing portion that support the larger electrode also needs to be increased in size, and as a result, the lamp as a whole becomes large and heavy, for example, gradually becomes a lamp having a weight exceeding 2 kg. On the other hand, as described above, when the high output of the lamp progresses, the influence of heat in the mirror surrounding the lamp becomes remarkable. For example, the coating film of the dielectric film or the like constituting the reflecting surface of the mirror becomes Stripped, resulting in a broken state of affairs. In order to suppress the influence of the heat of such a reflective film, it is necessary to increase the opening diameter of the mirror. Then, as the light emission opening of the mirror is enlarged, the distance from the center of the mirror to the terminal for power supply is increased, and the power supply line for supplying electric power to the discharge lamp is also lengthened. Because of this, in the light source device, the exchange work of the lamps becomes more difficult. Specifically, when the lamp is exchanged, if the lamp is large, the weight -6 · 8 201220347 will be heavier, so the operator must hold the two ends of the lamp to work, but because the power supply line is long. The power supply line removed from the power supply unit of the power supply terminal block is shaken during the operation and rubs against the mirror, so that the reflection surface of the mirror is damaged. In particular, the power supply terminal of the front end portion contacts the mirror and The influence of the light-emitting tube of the lamp is large, causing such scratches to cause performance deterioration, and further damage due to the situation. Then, even if there is a situation in which the end of the power supply line is held by one hand and the other hand holds the light, there is a possibility that the weight of the large-sized lamp cannot be supported, and the lamp and the mirror are broken due to the drop. ,problem. In order to prevent the above-mentioned accidents, the work efficiency of the exchange of lamps by two operators is also deteriorated. [Prior Art Document] [Patent Document] [Patent Document 1] 2008 - 1 3 04 1 8 SUMMARY OF THE INVENTION [Problem to be Solved by the Invention] The present invention is directed to an arc tube having a sealing portion formed at both ends in view of the problems of the prior art described above. a discharge lamp formed by arranging an anode and a cathode opposite to the inside of the arc tube, and a discharge lamp attached to the sleeve of the sleeve of the sealing portion of at least one of the arc tube, and a light source device including the discharge lamp It provides a structure that prevents the power supply line from sloshing when the discharge lamp is exchanged, and the damage of the 201220347 avoidance lamp and the mirror, which makes it easy to exchange and work efficiently. [Means for Solving the Problems] In order to solve the above problems, in the invention, the power supply line is led out from the bushing of the discharge sealing portion, and the power supply terminal of the power supply side front end portion of the power supply line is provided in the bushing. , can be freely detachably fixed to the mechanism. Further, the present invention is characterized in that a concave mirror having light emission thereon is surrounded, and the discharge lamp is disposed perpendicular to the concave mirror, and the concave mirror is provided with a fixing mechanism of the power supply line of the discharge lamp. The light radiates to the open side. [Effects of the Invention] According to the present invention, since the front end portion of the power supply side of the power supply line is detachably fixed to the casing of the discharge lamp with the casing, the power supply can be supplied during the exchange operation of the lamp. Since the front end portion from which the terminal block is removed is fixed to the bushing, the mirror and the lamp are not touched by the switching work line, and the front end terminal is prevented from coming into contact with the mirror and the lamp to be damaged. situation. Moreover, since the operator is not entangled by the power supply line, it is safe and efficient to work with both hands for the lamp book. In particular, in the light source device in which the discharge lamp is vertically disposed, the sleeve is fixed for the lamp unit. The front end of the electric wire is used for the exchange of the lamp, and the electric power supply for the fixed open sleeve which is located at the power supply line of the connection mechanism can be used for the work, so -8-8 201220347 The free front end of the wire does not fall due to gravity, nor does it cause damage to the mirror and lamp caused by the fall. This makes it easy to perform exchange work and greatly improves work efficiency. [Embodiment] A discharge lamp with a casing of the present invention and a light source device using the same are disclosed in Fig. 1. The discharge lamp 2 with a sleeve is attached in such a manner as to be vertically disposed on the concave mirror 3 which is open above. The sleeve 4 is attached to the sealing portion 2a on the upper side thereof, and the power supply line 5 is led out from the sleeve 4. Then, the sleeve 4 is provided with a fastening mechanism 10 for detachably fixing the front end portion of the power supply line 5 to the power supply side. When the lamp is exchanged, as shown, the power supply terminal block (not shown) The power supply front end portion of the power supply line 5 that has been removed is temporarily fixed to the fastening mechanism 10. Furthermore, other configurations are the same as those of FIG. An example of the fastening mechanism 1 is shown in FIG. 2, and a crimping terminal 11 is attached to the front end of the power supply side of the power supply line 5, and the crimping terminal 11 is screwed to the screw hole of the sleeve 4 by the screw 12. 13, fixed to the casing 4. 3 and 4, the crimp terminal 11 at the front end portion of the power supply line 4 is fitted to the pin 14 embedded in the sleeve 4 as shown in Fig. 4, from which the tab 15 is rotated. Move and fix it. In these embodiments, the terminal 11 is crimped to reveal a round shape. However, as shown in Fig. 5, the Y-type crimp terminal 16 may be used. 6 shows a further embodiment of the fastening mechanism 10, in which a C-shaped fixing 201220347 piece 17 is disposed in the sleeve 4, and a spring member 18' is disposed inside the crimping terminal 11 to be inserted into the fixing piece N from the lateral direction. It is fixed by the spring member 18. FIG. 7 shows another embodiment of the fastening mechanism 10, in which the fixing mechanism 1 rotates the rod 19, and the rotating shaft 20 rotates, whereby the plunger 21 below protrudes below, so-called known points. Degree of sales. Here, the fastening mechanism 〇' has an opening 22' formed in the side of the sleeve 4, and the crimping terminal 11 is inserted into the opening 22. Then, the plunger 21' which is lowered by the rotation of the rod 19 is engaged with the crimping terminal 1 1 and fixed. Still other embodiments of the securing mechanism 10 are disclosed in FIG. The fixing mechanism 10 is composed of a rod 24 which is embedded in the sleeve 4 of the sleeve 4 and a rod 24 which is rotatably provided via a hinge (not shown) at its upper end. Thereby, the rod 24 is rotated in the vertical direction and the horizontal direction, and when the crimping terminal Η is fixed, the rod 24 is perpendicular to the pin 23 (in the same figure, the dotted line is shown) The hole is placed in the 0-type crimping terminal 11, and the pin 23 is inserted to reverse the rod 24 in the horizontal direction (shown by a solid line in the same figure), thereby being engaged with the crimping terminal 1 1 and being fixed by β. The holder for temporarily fixing the crimping terminal 11 to the sleeve 4 can be variously modified in addition to the above. For example, when the screw mechanism shown in Fig. 2 is used, the screw is embedded in the sleeve 4' The crimping terminal 1 1 is fitted thereto, and the nut may be locked from above to be fixed. Further, in the case of using the spring member shown in Fig. 6, the C-shaped fixing piece 17 of the same figure may be elastic as it is. Further, a magnet is attached to the sleeve 4 as a holder, and the magnet may be sucked 8-10-201220347. In Fig. 9, another embodiment of the power supply terminal is disclosed. In this embodiment, the power supply terminal of the power supply line 4 is constituted by a plug 25. Then, a fixing pin 26 that fits the diameter of the power supply plug 25 is protruded from the sleeve 4'. The power supply plug 25 is fitted to the power supply plug 28' of the power supply terminal block 27 and electrically connected to supply power to the lamp. When the lamp is exchanged, the power supply plug 25 is detached from the power supply plug 28, and is fitted and fixed to the sleeve 4. Fixed pin 26. As described above, according to the present invention, in the light source device in which the discharge mirror is vertically disposed in the upwardly facing concave mirror, since the sleeve is provided in the upper sealing portion of the discharge lamp, the arrangement is to be led out from the sleeve. The front end portion on the power supply side of the power supply line is detachably fixed to the power supply front end portion of the power supply line that is detached from the power supply terminal block during the exchange operation of the power supply line, thereby providing the power supply front end portion for the exchange operation The front end of the wire does not sway, preventing it from coming into contact with the mirror and the lamp to cause the effects of such damage. Then, since the operator can be entangled by the power supply line, the exchange operation can be performed by both hands, and the work can be performed efficiently and safely. [FIG. 1] An overall view of the light source device of the present invention. [Fig. 2] A partially enlarged view of a discharge lamp of the present invention. [Fig. 3] A perspective view of another embodiment of the fastening mechanism. [Fig. 4] An enlarged view of the main part of Fig. 3. [Fig. 5] Another embodiment of the power supply terminal of Fig. 3. [Fig. 6] Other embodiments of the fastening mechanism. -11 - 201220347 [Fig. 7] Still other embodiments of the fixing mechanism. [Fig. 8] Still another embodiment of the fixing mechanism. [Fig. 9] Other embodiments of the power supply terminal and the fixing mechanism. [Fig. 10] A prior light source device. [Description of main component symbols] 1 : Light source device 2 : Short arc type discharge lamp 2 a · Sealing part 3 : Concave mirror 4 : Sleeve 5 : Power supply line 10 : Retention mechanism 11 : Crimping terminal (round type) 1 2 : Screw 1 3 : Screw hole 14 : Pin 15 : Pinch 16 : Crimping terminal (Y type) 17 : C-shaped fixing piece 1 8 : Spring member 19 : Rod 20 : Rotary shaft 2 1 : Plunger - 12- 8 201220347 22 : Opening 23 : Pin 24 : Rod 25 : Power supply plug 26 : Fixed pin - 13 -