TW201224282A - Turbo molecular pump with improved blade structures - Google Patents
Turbo molecular pump with improved blade structures Download PDFInfo
- Publication number
- TW201224282A TW201224282A TW099143187A TW99143187A TW201224282A TW 201224282 A TW201224282 A TW 201224282A TW 099143187 A TW099143187 A TW 099143187A TW 99143187 A TW99143187 A TW 99143187A TW 201224282 A TW201224282 A TW 201224282A
- Authority
- TW
- Taiwan
- Prior art keywords
- stage
- blade group
- degrees
- rotor
- stator
- Prior art date
Links
- 230000006872 improvement Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 229910001018 Cast iron Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 238000005086 pumping Methods 0.000 abstract description 21
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000000712 assembly Effects 0.000 abstract 2
- 238000000429 assembly Methods 0.000 abstract 2
- 238000005457 optimization Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/38—Blades
- F04D29/384—Blades characterised by form
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
201224282 六、發明說明：201224282 VI. Description of invention:
V 【發明所屬之技術領域】 本發明係關於一種渦輪分子泵浦之葉片結構改良，尤 指一種將轉子葉片及靜子葉片之各項參數做最佳化調整之 渦輪分子泵浦之葉片結構改良。 【先前技術】 近年來由於半導體產業蓬勃發展，因而造成半導體前 Φ 段製程之相關設備需求量大增，其中高真空系統中的心臟 元件一渦輪分子泵浦更成為需求量極大之高真空系統元 件。 渴輪分子泵浦（Turbo Molecular Pump )源於1912年， 由德國人Gaede所發明的分子拖曳泵浦（M〇iecuiar Drag Pump )改良而來。首先請參照如第一圖所示，係一習知之 渦輪分子泵浦A之刮面圖示，該渦輪分子泵浦a係包含一 籲轉子A1及一靜子A2,該轉子A1由一轉子軸A10及複數 個轉子葉片All所組成，而該靜子A2由複數個靜子葉片 A21所組成’並且轉子葉片A11及靜子葉片A21係—層層 的交錯設置。 接著請參閱如第二圖所示，係一渦輪分子泵浦之作用 原理示意圖，氣體進入渦輪分子泵浦B1後，如虛線之路押 所示，氣體分子B5經由轉子葉片B2之帶動而進入 Γ 一屢 之靜子葉片B3,而氣體分子B5經由撞擊靜子葉片B3而轉 201224282 向之後，便可進入下一層之轉子葉片B4。因此，渦輪分子 果浦B1之作用原理係利用高速旋轉之傾斜葉片使系統中 原本混亂運動之氣體分子朝出口運動，並利用多級轉子葉 片與靜子葉片之交錯排列來提高其壓縮比。由於渦輪分子 泵浦具有高真空度、高排氣效率以及無油氣污染等特性， 因此得以被廣泛使用於各種研究及應用上。 由於渦輪分子泵浦大量被應用於高精密度之研究或產 業中因此其抽氣效能是非常被重視的。然而，雖然不斷 的有研究者對於渦輪分子泵浦進行改良，但是仍然無法達 到非常優良的抽氣速度及穩定度。 有鑑於此’必須提供一種改良之渦輪分子泵浦，藉由 其結構上之優化設計，以增加其抽氣速度及穩定度。 【發明内容】BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a blade structure improvement of a turbo molecular pump, and more particularly to a blade structure improvement of a turbo molecular pump that optimizes parameters of a rotor blade and a stator blade. [Prior Art] In recent years, due to the booming development of the semiconductor industry, the demand for related equipment in the pre-semiconductor process of semiconductors has increased greatly. Among them, the core component-turbomolecular pumping in the high vacuum system has become a highly demanding high vacuum system component. . The Turbo Molecular Pump was developed in 1912 by the M〇iecuiar Drag Pump invented by the German Gaede. First, please refer to the schematic diagram of a conventional turbomolecular pumping pump A, which includes a rotor A1 and a stator A2, which is composed of a rotor shaft A10, as shown in the first figure. And a plurality of rotor blades A1, and the stator A2 is composed of a plurality of stator blades A21 and the rotor blades A11 and the stator blades A21 are layered. Next, please refer to the schematic diagram of the principle of turbomolecular pumping as shown in the second figure. After the gas enters the turbomolecular pump B1, as shown by the dotted line, the gas molecule B5 enters via the rotor blade B2. A plurality of stator blades B3 are repeatedly passed, and the gas molecules B5 are turned to 201224282 by impacting the stator blades B3, and then the rotor blades B4 of the next layer are entered. Therefore, the principle of the action of the turbo-molecules P1 is to use the inclined blades of high-speed rotation to move the gas molecules of the originally chaotic motion in the system toward the exit, and to increase the compression ratio by using the staggered arrangement of the multi-stage rotor blades and the stator blades. Due to its high vacuum, high exhaust efficiency, and no oil and gas pollution, turbomolecular pumping is widely used in various research and applications. Since turbomolecular pumping is widely used in high-precision research or industry, its pumping efficiency is highly valued. However, although researchers continue to improve turbomolecular pumping, they still cannot achieve very good pumping speeds and stability. In view of this, an improved turbomolecular pumping must be provided, with its structurally optimized design to increase its pumping speed and stability. [Summary of the Invention]
故，有鑑於前述之問㈣缺失，I明人以多年之經驗 、並發揮μ像力與創造力，在不斷試作與修改之後， 始有本發明之-種渦輪分子泵浦之葉片結構改良。 本發明之主要目的係提供一種渦輪分子泵浦之葉片結 構改良’#由將其轉子葉片及靜子葉片之各項參數進行最 ，化之調整，使渦輪分子泵浦之抽氣速度及穩定度皆有顯 著之提升。 為達上述目的，本發明係揭露一種渴輪分子泵浦之 片結構改良，其至φ &人. 八至^包含：一轉子，其包含：一轉子中 201224282 軸；一第一級轉子葉片組，係設置於該轉子中心軸上，該 第-級轉子葉片組之葉片數量為16〜17 [設置角度為 37度〜45度；一第二級轉子葉月組，係設置於轉子中心軸 亡，並鄰接於第-級轉子葉片組，該第二級轉子葉片組之 葉片數量為32〜33片，設置角度為45度〜5〇度；—第三 級轉子葉片組，係設置於轉子中心軸上，並與第一級轉子 葉片組分別位於第二級轉子葉片組之不_，該第三級轉 子葉片組之葉片數量為3〇〜31片，設置角度為3〇度〜 度·，一第四級轉子葉片組，係設置於轉子中心轴上，並與 第二級轉子葉片組分別位於第三級轉子葉片組之不同側， 該第四級轉子葉片組之葉片數量為28〜29片，設置角度為 25度〜30度；及一第五級轉子葉片組，係設置於轉子中心 軸 並與第二級轉子葉片組分別位於第四級轉子葉片組 之不同側，該第五級轉子葉片組之葉片數量為26〜27片， 設置角度為15度〜22度；及一靜子，其包含：一第一級 靜子葉片組，係設置於第一級轉子葉片組與第二級轉子葉 片組之間’該第一級靜子葉片組之葉片數量為5〇〜52片， 又置角度為45度〜70度；一第二級靜子葉片組，係設置 於第二級轉子葉片組與第三級轉子葉片組之間，該第二級 靜子葉片組之葉片數量為50〜52片，設置角度為48度〜 70度；—第三級靜子葉片組，係設置於第三級轉子葉片組 與第四級轉子葉片組之間，該第三級靜子葉片組之葉片數 201224282 量為50〜52片’設置角度為4G度〜7Q度；—第四級靜子 葉片組，係設置於第四級轉子葉片組與第五級轉子葉片組 之間，該第四級靜子葉片組之葉片數量為34〜36片，設置 角度為28度〜4G度；及-第五級靜子葉片組，係與該第 四級靜子葉片組分別設置於第五級轉子葉片組之不同側， 該第五級靜子葉片組之葉片數量為34〜36片，設置角度為 22度〜40度。 【實施方式】 為達前述之目的與功效，發明人將渦輪分子㈣之轉 子葉片及靜子葉片之各項參數進行最佳化設計，在不斷的 C正與調整之下’始得到本發明之一種渦輪分子泵浦之葉 片結構改良。 本發明之一渦輪分子粟浦係包含-轉子及-靜子，該 轉子及該靜子之材質主要為純铭材或Μ合金㈣，這些 材質具有材質輕、防腐飯、易加工、易組裝以及強勃性適 中等優點。轉子及靜子雖可使用銅或金等材質，但其價格 比結昂責，且材質較軟、重量較重以及強㈣較低。鋼、 鐵、鑄鐵金屬以及不鐘铜好路 不賴材雖然亦可使用，但是其材質脆 硬、重量太重、容易受腐钱、不易加工以及不易組裝。 轉子中心軸101、一第一級轉 首先請參照如第三圖所示，係本發明之該滿輪分子果 浦之該轉子之立體外觀示意圓，本發明之轉子1〇〇係包含 110、一 第二級 | 201224282 子葉片組12η , 川、一第三級轉子葉片組130、—第四級轉子葉 片組14〇及—钕 久 第五級轉子葉片組150。 級轉子葉片組110係設置於該轉子中心軸1 〇 1 上，第_ ^ 、轉子葉片組110之葉片數量為16〜17片，設置 角度為37度〜45度。 該第-纽Therefore, in view of the above-mentioned question (4), I Ming people have years of experience, and exerted i-image and creativity. After continuous trial and modification, the blade structure of the turbo-molecular pump of the present invention has been improved. The main object of the present invention is to provide a turbine molecular pumping blade structure improvement '# by maximizing the parameters of the rotor blade and the stator blade, so that the pumping speed and stability of the turbo molecular pumping are both There is a significant improvement. In order to achieve the above object, the present invention discloses a structural improvement of a thirsty wheel molecular pump, which is to φ & human. Eight to include: a rotor comprising: a rotor of 201224282 shaft; a first stage rotor blade The set is set on the central axis of the rotor, and the number of blades of the first-stage rotor blade group is 16 to 17 [the set angle is 37 degrees to 45 degrees; a second-stage rotor blade group is set in the rotor center axis. And adjacent to the first-stage rotor blade group, the number of blades of the second-stage rotor blade group is 32 to 33 pieces, and the installation angle is 45 degrees to 5 degrees; the third-stage rotor blade group is disposed at the center of the rotor On the shaft, and the first-stage rotor blade group is respectively located in the second-stage rotor blade group, the number of blades of the third-stage rotor blade group is 3〇~31 pieces, and the setting angle is 3〇 degrees~degree·, A fourth-stage rotor blade group is disposed on the central axis of the rotor, and is located on a different side of the third-stage rotor blade group from the second-stage rotor blade group, and the number of blades of the fourth-stage rotor blade group is 28-29 Slice, set the angle from 25 degrees to 30 degrees; and one The rotor blade group is disposed on the rotor central axis and is located on a different side of the fourth-stage rotor blade group from the second-stage rotor blade group. The number of blades of the fifth-stage rotor blade group is 26 to 27 pieces, and the setting angle is 15 degrees to 22 degrees; and a stator comprising: a first stage stator blade set, disposed between the first stage rotor blade set and the second stage rotor blade set 'the number of blades of the first stage stator blade set 5〇~52 pieces, and an angle of 45 degrees to 70 degrees; a second stage stator blade set is disposed between the second stage rotor blade group and the third stage rotor blade group, the second stage stator blade The number of blades of the group is 50 to 52 pieces, and the setting angle is 48 degrees to 70 degrees; the third stage stator blade group is disposed between the third stage rotor blade group and the fourth stage rotor blade group, the third stage The number of blades of the stator blade group is 201224282. The quantity is 50~52 pieces' setting angle is 4G degree~7Q degree; the fourth stage stator blade group is set between the fourth stage rotor blade group and the fifth stage rotor blade group. The number of blades of the fourth stage stator blade group is 34~36 , the set angle is 28 degrees ~ 4G degrees; and - the fifth stage stator blade set, and the fourth stage stator blade set are respectively disposed on different sides of the fifth stage rotor blade set, the blade of the fifth stage stator blade set The number is 34~36 pieces, and the setting angle is 22 degrees~40 degrees. [Embodiment] In order to achieve the above-mentioned purpose and effect, the inventors have optimized the parameters of the rotor blade and the stator blade of the turbo molecule (4), and under the constant C and adjustment, one of the inventions is obtained. The blade structure of the turbomolecular pump is improved. One of the turbo molecules of the present invention comprises a rotor and a stator. The rotor and the stator are mainly made of pure materials or tantalum alloys. The materials are light, anti-corrosive, easy to process, easy to assemble and strong. Moderate sex. Although the rotor and the stator can be made of copper or gold, the price is higher than that of the rotor, and the material is soft, heavy, and strong (four). Steel, iron, cast iron metal and good copper can not be used. However, the material is brittle, hard, heavy, easy to be corrupted, difficult to process and difficult to assemble. The rotor central axis 101 and a first-stage rotation are first referred to as shown in FIG. 3, which is a three-dimensional appearance of the rotor of the full-wheel molecular fruit of the present invention. The rotor 1 of the present invention comprises 110. A second stage | 201224282 sub-blade group 12n, Chuan, a third-stage rotor blade group 130, a fourth-stage rotor blade group 14〇, and a fifth-stage fifth-stage rotor blade group 150. The stage rotor blade group 110 is disposed on the rotor central axis 1 〇 1 , and the number of blades of the rotor blade group 110 is 16 to 17 pieces, and the installation angle is 37 degrees to 45 degrees. The first-new
一級轉子葉片組120係設置於轉子中心軸ι〇1 上並鄰接於第_級轉子葉片組11〇，第二級轉子葉片組 120之葉j；；缸1 、片數里為32〜33片，設置角度為45度〜5〇度。 二級轉子葉片組13〇係設置於轉子 上，並斑笙 y 、級轉子葉片矣且m分別位於第二級轉子葉片The first stage rotor blade group 120 is disposed on the rotor center axis ι〇1 and adjacent to the first stage rotor blade group 11〇, the second stage rotor blade group 120 leaves j; the cylinder 1 and the number of sheets are 32 to 33 pieces Set the angle to 45 degrees to 5 degrees. The secondary rotor blade set 13 is disposed on the rotor, and the spot y y , the stage rotor blade 矣 and m are respectively located in the second stage rotor blade
不同側’第三級轉子葉片組130之葉片數量為3C 〜31片，設置角度為30度〜4〇度。 該第四級轉早整μ Λ 上，並與第广 140係設置於轉子中心軸ιοί 组130之尤 ？葉片組⑶分別位於第三級轉子葉片 、’且之不同彻丨，楚m , 〜29片_ 轉子葉片組140之葉片數量為28 29片，设置角度為25度〜3〇度。 該第五級轉子葉只“ 、片組1 5〇係設置於The number of blades of the different side 'third-stage rotor blade group 130 is 3C to 31 pieces, and the setting angle is 30 degrees to 4 degrees. The fourth stage is turned on the early μ Λ, and the 140th line is placed on the rotor center axis ιοί group 130. The blade sets (3) are respectively located in the third-stage rotor blades, and are different from each other, and the number of blades of the rotor blade group 140 is 28 29 pieces, and the setting angle is 25 degrees to 3 degrees. The fifth-stage rotor blade is only ", the film group is set to
上，並與苐三級轉子葉^ 於轉子中心軸HM ^ 140 ^ 、、，且130分別位於第四級轉子葦w 組之不同側，第五 得于葉片 〜27片 級轉子葉片組15〇之葉片數量 27片，設置角度為重為26 度〜22度。 接著請參照如第四圖& _ 之該靜子之立體外· ’係本發明之渦輪分子栗浦 意圖，本發明之靜子2〇〇係包含_ 201224282 第一級靜子葉片組210、一第二級靜子The upper and the third-stage rotor blades are located on the different sides of the fourth-stage rotor 苇w group, and the fifth is obtained from the blade-27-stage rotor blade group 15〇. The number of blades is 27, and the angle is set at 26 degrees to 22 degrees. Next, please refer to the stereoscopic outer view of the stator as shown in the fourth figure & _, 'the turbol molecule of the present invention, the stator 2 of the present invention contains _ 201224282 first stage stator blade set 210, a second Level static
靜子葉片組250。 該第一級靜子葉片組210係設置於第一 110與第二級轉子葉片組12〇之間，第一級 於第一級轉子葉片組 一級靜子葉片組21 〇 之葉片數量為50〜52片，設置角度為45度〜7〇度。 該第二級靜子葉片組220係設置於第二級轉子葉片組 12〇與第三級轉子葉片組130之間，第二級靜子葉片組22〇 之葉片數量為50〜52片，設置角度為48度〜70度。 該第三級靜子葉片組230係設置於第三級轉子葉片組 130與第四級轉子葉片組14〇之間，第三級靜子葉片組 之葉片數量為50〜52片，設置角度為40度〜70度。 該第四級靜子葉片組240係設置於第四級轉子葉片組 140與第五級轉子葉片組150之間，第四級靜子葉片組240 之葉片數量為34〜36片，設置角度為28度〜4〇度。 該第五級靜子葉片組250係與該第四級靜子葉片組 240分別設置於第五級轉子葉片組15〇之不同側，第五級 靜子葉片組250之葉片數量為34〜36片’設置角度為22 度〜40度。 另外第一級靜子葉片組21 〇、第二級靜子葉片組 第一級靜子葉片組230、第四級靜子葉片組240以及 第五級靜子葉片紕 25〇更分別含有一靜子覆環211、221、 201224282 23卜24卜25 1，以分別將每一級靜子葉片組之葉片固定住， 並可用於將每一級靜子葉片組互相組裝。 在本發明之渦輪分子泵浦中，轉子葉片及靜子葉片皆 分成第一級到第五級，其功能主要是提高壓縮比之壓縮性 能’以達到超高真空的抽氣率之真空度效果，以增加半導 體製程真空鍍膜設備之精確度及潔淨度。 經由上述内谷對於本發明進行詳細說明後，可得知本 發明具有以下之優點： (1) 本發明藉由將其轉子葉片及靜子葉片之各.項參數進行 最佳化之調整’使渦輪分子泵浦之抽氣速度及穩定度 皆有顯著之提升。 (2) 本發明所設計之每一級轉子葉片組之葉片數量皆少於 習知之渦輪分子泵浦之葉片數量，因此使得渦輪分子 泵浦之加工及製造上更加容易，可減少製造成本。 以上所述之實施例僅係說明本發明之技術思想與特 點其目的在使熟習此項技藝之人士能夠瞭解本發明之内 谷並據以實施，當不能以之限定本發明之專利範圍若依 本發明所揭露之精神作均等變化或修飾，仍應涵蓋在本發 明之專利範圍内。 發明人經過不斷的構想與修改，最終得到本發明之設 什，並且擁有上述之諸多優點，冑為優良之發明，應符合 申叫發明專利之要件，特提出申請，盼貴審查委員能早 201224282 日賜與發明專利，以保障發明人之權益。 【圖式簡單說明】 第一圖 係一習知之渦輪分子泵浦之剖面圖示； 第二圖 係一渴輪分子泵浦之作用原理示意圖； 第三圖 係本發明之一渦輪分子泵浦之一轉子之立體外 觀示意圖；及 第四圖 係本發明之該渦輪分子泵浦之一靜子之立體外Static blade set 250. The first stage stator blade group 210 is disposed between the first stage 110 and the second stage rotor blade group 12A. The first stage is in the first stage rotor blade group. The first stage rotor blade group 21 has a number of blades of 50 to 52 pieces. Set the angle to 45 degrees to 7 degrees. The second stage stator blade group 220 is disposed between the second stage rotor blade group 12〇 and the third stage rotor blade group 130. The second stage stator blade group 22 has a number of blades of 50 to 52 pieces, and the setting angle is 48 degrees to 70 degrees. The third stage stator blade group 230 is disposed between the third stage rotor blade group 130 and the fourth stage rotor blade group 14〇. The third stage stator blade group has 50 to 52 blades and the angle is 40 degrees. ~70 degrees. The fourth stage stator blade group 240 is disposed between the fourth stage rotor blade group 140 and the fifth stage rotor blade group 150. The fourth stage stator blade group 240 has 34 to 36 blades and the angle is 28 degrees. ~4 degrees. The fifth-stage stator blade group 250 and the fourth-stage stator blade group 240 are respectively disposed on different sides of the fifth-stage rotor blade group 15〇, and the number of blades of the fifth-stage stator blade group 250 is 34 to 36 pieces. The angle is 22 degrees to 40 degrees. In addition, the first stage stator blade group 21 〇, the second stage stator blade group first stage stator blade group 230, the fourth stage stator blade group 240 and the fifth stage stator blade 纰25 〇 further comprise a stator cover ring 211, 221 201224282 23 卜24 卜 25 1 to respectively fix the blades of each stage of the stator blade group, and can be used to assemble each stage of the stator blade group with each other. In the turbomolecular pumping of the present invention, the rotor blade and the stator blade are divided into the first stage to the fifth stage, and the function thereof is mainly to improve the compression performance of the compression ratio to achieve the vacuum degree effect of the ultra-high vacuum pumping rate. To increase the accuracy and cleanliness of semiconductor process vacuum coating equipment. After the present invention has been described in detail through the above-described inner valley, it can be seen that the present invention has the following advantages: (1) The present invention optimizes the parameters of each of its rotor blades and stator blades to make the turbine Molecular pumping has a significant increase in pumping speed and stability. (2) The number of blades of each stage of the rotor blade group designed by the present invention is smaller than that of the conventional turbo molecular pumping, thereby making it easier to process and manufacture the turbo molecular pump, thereby reducing the manufacturing cost. The embodiments described above are merely illustrative of the technical spirit and characteristics of the present invention. The purpose of the present invention is to enable those skilled in the art to understand the invention and to implement the invention. Equivalent variations or modifications of the spirit of the invention are intended to be included within the scope of the invention. After inventor's constant envisioning and modification, the inventor finally got the advantages of the present invention, and possessed many of the above advantages. As an excellent invention, it should conform to the requirements of the invention patent, and apply for it, and hope that the review committee can be early 201224282 Giving and inventing patents to protect the rights of inventors. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic diagram of a conventional turbomolecular pumping; the second figure is a schematic diagram of the action principle of a thirsty wheel molecular pump; the third figure is a turbomolecular pumping of the present invention. A schematic view of a three-dimensional appearance of a rotor; and a fourth figure is a three-dimensional external view of the turbomolecular pump of the present invention
觀示意圖。 【主要元件符號說明】 A、B1 A1、1〇〇 A10Schematic diagram. [Main component symbol description] A, B1 A1, 1〇〇 A10
All、B2、B4 A2、200All, B2, B4 A2, 200
A21、B3 B5 101 110 120 130 140 渦輪分子泵浦 轉子 轉子軸 轉子葉片 靜子 靜子葉片 氣體分子 轉子中心轴 第一級轉子葉片組 第二級轉子葉片組 第三級轉子葉片組 第四級轉子葉片組 第五級轉子葉片組 150 201224282 210 211 、 221 、 231 、 241 、 251 220 230 240 250 第一級靜子葉片組 靜子覆環 第二級靜子葉片組 第三級靜子葉片組 第四級靜子葉片組 第五級靜子葉片組A21, B3 B5 101 110 120 130 140 turbomolecular pumped rotor rotor shaft rotor blade stator rotor vane gas molecule rotor central axis first stage rotor blade group second stage rotor blade group third stage rotor blade group fourth stage rotor blade group The fifth stage rotor blade group 150 201224282 210 211 , 221 , 231 , 241 , 251 220 230 240 250 the first stage stator blade group stator ring second stage stator blade group third stage stator blade group fourth stage stator blade group Five-stage stator blade group
1111
Claims (1)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099143187A TWI424121B (en) | 2010-12-10 | 2010-12-10 | Turbo molecular pump with improved blade structures |
| US13/073,008 US20120148390A1 (en) | 2010-12-10 | 2011-03-28 | Turbo Molecular Pump with Improved Blade Structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099143187A TWI424121B (en) | 2010-12-10 | 2010-12-10 | Turbo molecular pump with improved blade structures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201224282A true TW201224282A (en) | 2012-06-16 |
| TWI424121B TWI424121B (en) | 2014-01-21 |
Family
ID=46199567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099143187A TWI424121B (en) | 2010-12-10 | 2010-12-10 | Turbo molecular pump with improved blade structures |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20120148390A1 (en) |
| TW (1) | TWI424121B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114973902A (en) * | 2022-04-14 | 2022-08-30 | 西北工业大学 | Aeroengine low-pressure turbine model for teaching and assembling method |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11566082B2 (en) | 2014-11-17 | 2023-01-31 | Cytiva Bioprocess R&D Ab | Mutated immunoglobulin-binding polypeptides |
| EP3093496B1 (en) * | 2015-05-15 | 2019-03-06 | Pfeiffer Vacuum Gmbh | Rotor of a vacuum pump |
| ES2874974T3 (en) | 2016-05-11 | 2021-11-05 | Cytiva Bioprocess R & D Ab | Separation matrix |
| JP7106187B2 (en) | 2016-05-11 | 2022-07-26 | サイティバ・バイオプロセス・アールアンドディ・アクチボラグ | How to save the separation matrix |
| US10889615B2 (en) | 2016-05-11 | 2021-01-12 | Cytiva Bioprocess R&D Ab | Mutated immunoglobulin-binding polypeptides |
| ES2909833T3 (en) | 2016-05-11 | 2022-05-10 | Cytiva Bioprocess R & D Ab | Cleaning and/or disinfection method of a separation matrix |
| JP7031934B2 (en) | 2016-05-11 | 2022-03-08 | サイティバ・バイオプロセス・アールアンドディ・アクチボラグ | Separation matrix |
| US10703774B2 (en) | 2016-09-30 | 2020-07-07 | Ge Healthcare Bioprocess R&D Ab | Separation method |
| US12448411B2 (en) | 2016-09-30 | 2025-10-21 | Cytiva Bioprocess R&D Ab | Separation method |
| GB2557679A (en) * | 2016-12-15 | 2018-06-27 | Edwards Ltd | Stator blade unit for a turbomolecular pump |
| JP2021173257A (en) * | 2020-04-28 | 2021-11-01 | 株式会社島津製作所 | Turbomolecular pump and stator of turbomolecular pump |
| JP7396209B2 (en) * | 2020-06-03 | 2023-12-12 | 株式会社島津製作所 | Turbomolecular pumps, rotors and stators of turbomolecular pumps |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE757354A (en) * | 1969-10-27 | 1971-03-16 | Sargent Welch Scientific Co | TURBOMOLECULAR PUMP WITH ADVANCED STATORS AND ROTORS |
| DE2654055B2 (en) * | 1976-11-29 | 1979-11-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Rotor and stator disks for turbo molecular pumps |
| JPH0261387A (en) * | 1988-08-24 | 1990-03-01 | Seiko Seiki Co Ltd | Turbomolecular pump |
| US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
| JP3079367B2 (en) * | 1997-10-03 | 2000-08-21 | セイコー精機株式会社 | Turbo molecular pump |
| DE19951954A1 (en) * | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolecular pump |
| DE10046506A1 (en) * | 2000-09-20 | 2002-03-28 | Leybold Vakuum Gmbh | Turbo-molecular vacuum pump has part of blades thickened in region of pressure side edge |
| DE10052637B4 (en) * | 2000-10-24 | 2021-03-11 | Pfeiffer Vacuum Gmbh | 02/16/2001 Discs for a turbo molecular pump |
| DE10111603A1 (en) * | 2001-03-10 | 2002-09-12 | Pfeiffer Vacuum Gmbh | Gas friction pump with additional gas inlet |
| EP1249613B1 (en) * | 2001-03-15 | 2004-01-28 | VARIAN S.p.A. | Turbine pump with a stator stage integrated with a spacer ring |
| JP3961273B2 (en) * | 2001-12-04 | 2007-08-22 | Ｂｏｃエドワーズ株式会社 | Vacuum pump |
| JP2003172291A (en) * | 2001-12-04 | 2003-06-20 | Boc Edwards Technologies Ltd | Vacuum pump |
| US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
| US7445422B2 (en) * | 2005-05-12 | 2008-11-04 | Varian, Inc. | Hybrid turbomolecular vacuum pumps |
-
2010
- 2010-12-10 TW TW099143187A patent/TWI424121B/en active
-
2011
- 2011-03-28 US US13/073,008 patent/US20120148390A1/en not_active Abandoned
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114973902A (en) * | 2022-04-14 | 2022-08-30 | 西北工业大学 | Aeroengine low-pressure turbine model for teaching and assembling method |
Also Published As
| Publication number | Publication date |
|---|---|
| US20120148390A1 (en) | 2012-06-14 |
| TWI424121B (en) | 2014-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI424121B (en) | Turbo molecular pump with improved blade structures | |
| CA2837476A1 (en) | Gas turbine engine comprising three rotary bodies | |
| KR102123137B1 (en) | Clamped circular plate and vacuum pump | |
| JP2013519033A (en) | High vacuum pump | |
| KR20160102160A (en) | Vacuum exhaust mechanism, compound vacuum pump, and rotating body component | |
| CN104895839A (en) | Axial-flow compressor stator blade system with adjustable first and second half of segments and working method thereof | |
| CN103573469B (en) | A kind of fan aerodynamic arrangement structures and methods of fanjet | |
| US20140205432A1 (en) | Rotary vacuum pump | |
| WO2009028099A1 (en) | Turbo molecular drag pump | |
| JPWO2009101699A1 (en) | Turbo molecular pump | |
| CN114321013A (en) | Guide vane-free counter-rotating air compressor based on multi-pair cross section and application | |
| WO2010074967A3 (en) | Centripetal pumping stage and vacuum pump incorporating such pumping stage | |
| CN102889219B (en) | Disk type molecular pump | |
| CN102536902A (en) | Improved blade structure of turbo molecular pump | |
| CN216477913U (en) | A kind of turbomolecular pump blade, turbine rotor and turbomolecular pump | |
| US10161403B2 (en) | Vacuum pump | |
| TW201215772A (en) | Improved stator structure of turbomolecular pump and method for manufacturing the same | |
| TW202106979A (en) | Molecular drag stage | |
| JP2012520961A (en) | Multiple inlet vacuum pump | |
| JP3978001B2 (en) | Turbo molecular pump | |
| CN215256873U (en) | A turbo molecular pump | |
| JP2865888B2 (en) | Multi-turbo type vacuum pump | |
| CN1032574A (en) | Radial Molecular Pump | |
| JP2020122429A (en) | Turbo molecular pump | |
| JP2006291794A (en) | Vacuum pump rotor |