201250253^ 六、發明說明： 【發明所屬之技術領域】 本發明是有關於如下的技術，該技術使用壓電板例如 石英板’基於振盪頻率來對加速度進行檢測。 【先前技術】 為了對地震等進行測量’微弱且低頻的加速度的檢測 成為重要的課題’要求每當進行此種測定時，構造儘可能 簡單，且高精度地進行測定。作為對上述微弱且低頻的加 速度進行彳欢測的感測器（sensor )’伺服（servo )式的加速 度測量裝置經常被使用。 一般而言，伺服式加速度測量裝置包含：擺 (pendulum )、擺位置檢測器、使力作用於擺的致動器 (actuator)、以及調整部，該調整部基於擺位置檢測器的 檢測結果來對致動器進行控制。擺包含錘與彈簧，彈簧的 一端固定於加速度測量裝置的容器，若加速度施加至加速 ^測量裝置，則由於慣性力的作用，錘的位置會相對於容 器而發生移動。擺的共振頻率被設定得非常低，即便加速 度極小，擺亦會大幅度地移動。擺相對於容器的位移盘如 下的加速度成比例，該加速度是在比擺的共振頻率更_ 頻率範圍中所施加的加速度。擺位置檢測器是對擺相對於 容器的位移進行檢測的感測器。致動器包含設置於擺 圈與設置於容器的磁電路，且可藉由如下的b電磁 $來使擺生位移，上述電磁力是使電流流人至 產生的電磁力。調整部用以基於擺位置檢測器所獲 4 201250253 的位移資料（data)，使電流流入至致動器的線圈。 若外力所產生的加速度施加至上述加速度測量裝置， 則擺的位置會因慣性力而發生移動。此時，可使電流自調 整部ML入至致動益，使大小與慣性力相同且方向與慣性力 相反的電磁力作用於擺，藉此，將擺保持於靜止狀態。因 此，藉由擺位置檢測器來對擺的位移進行檢彳， 位移為零的方式來使致動器 擺的位移騎反饋（feedbaek) _，對此時的致動器的 輸出進行測量，例如對流入至線圈的電流值進行測量，萨 卜力的加速度進行測定。上述伺服式加速度測‘ 二k 下的特徵’ gp ’精度高，解析度高，且可測定 的頻率為0〜400 Hz左右。 加速麵量裝置關服機射的擺的位置 ΓΓ光^學额電抑—方式。 測器使用雷射二極體―de)、 兀刀割型光電二極體（photodiode)、以及透鏡 光學式擺位置檢測器的檢測方法是採用- ^構CL上述光學式擺位置檢測器存在如下的問題， 位置檢測器為如下的構：容器方式的擺 化的方式來形成靜電容量，令電^；:移而發生變 斟μ汁抵带6曰， °哀電谷益方式的擺位置檢測器 子上述靜電谷1的變化進行_ 測，但無法排除雜訊(n〇1Se)的影響。因此擺 地對加速度it行檢測。 ㈣4度 201250253 於專利文獻1中揭示有如下的加速度感測器，該加速 度感測器是將恆定電流通入至可動電極，對與該可動電極 相對向的固定電極中所產生的感應電流的脈衝數進行偵 測’從而對加速度進行檢測，但上述加速度感測器與本發 明不同。於專利文獻2中’揭示有靜電容量變化檢測型的 加速度感測器，於可動式的中心板（center plate)與設置 於該中心板兩側的固定板之間形成2個可變電容，將逆相 的脈衝的電壓分別施加至上述2個固定板。產生加速度， 中心板的位置發生移動，藉此，兩個可變電容發生變化， 對此時自兩個固定板施加至中心板的電壓的脈衝的相位偏 移進行檢測，從而對加速度進行檢測。然而，上述靜電容 量變化檢測型的加速度感測器與本發明不同。 [先前技術文獻] [專利文獻] [專利文獻1]曰本專利特開平7-167885號公報 [專利文獻2]日本專利特開2004-198310號公報 【發明内容】 本發明是於如上所述的背景下形成的發明，本發明的 目=在於提供如下的加速度測量裝置，該加速度測量裝置 可尚精度且容易地檢測出加速度。 本發明的加速度測量裝置對因慣性力而搖動的擺構件 的自基準位置算起的位移量進行檢測，基於該檢測結果， 以使上述擺構件靜止於基準位置的方式，藉由操作部來將 外力施加至上述擺構件，基於此時的上述外力的大小， 201250253 作用於上述擺構件的加速度進行評價，上述加速度測量 置的特徵在於包括： 、 壓電板； -激振電極及另-激振電極，為了使上述壓電板 而分別設置於上述壓電板的一面侧及另一面側； 振盪電路，電性連接於上述一激振電極； 可變電容形成用的可動電極，設置於上述擺 電性連接於上述另一激振電極； 且 固疋電極’與上述擺構件相隔，且設置為與 p相對向’並且連接於上述㈣電路 = ，搖動，與上述可動電極之間的電容發生變化， 成可變電容， ·以及 殘稭此來形 率纽檢測部，用崎與上賴盪電_振盪慨 相對應的頻率資訊即信號進行檢測，且 振麵率 紅由上激振電極、 ㈣虞電路 及上述固定雷“x 敫振電極、上述可動電極 Μ疋電極而返回至上述振|電路， 嫌 擺構件的位置驗移量it行評價。 ㈣對上迷 又，本發明的加速度測量裝置中： 二隔著上述擺構件而與上述慣性 =方式，設置有第i可動電極及第 =向相對向 動電極， 了動電極作為上述可 以分別與第1可動電極 弟2可動電極相對向的方 201250253 構件相隔地設置有第1固定電極及第2固定 電極作為上述固定電極， i 於上.1可動電極及第1敗電極之間的第 1可變電容、與上述第2可動雷炻芬筮0门—十k巧弟 第2可1 輯極及第2固定電極之間的 M d 間’對上述振㈣路的電性連接端進行切 換的方式，設置有切換部， 丁刀 ^上述鮮資崎測部肋求出與如下的差分相對應 二机，上述差分是彻上述切換部㈣分割而成的與上 1可隻電谷相對應的振盪頻率及與上述第2 對應的振盪頻率的差分。 4相 上述擺構件的一端侧亦可利用支持部而受到懸臂支 持。又，上述擺構件亦可為上述壓電板，或於一部= 上述壓電板。 [發明的效果] 本發明是當擺構件因加速度而搖動且自基準位置起移 動時，經由擺構件侧的可動電極及與該可動電極相對向的 固疋電極之間的電容變化，將上述擺構件的位移量作為壓 電板的振盪頻率的變化而予以捕獲。因此，可高精度且容 易地對加速度進行檢測。而且，將可變電容形成於擺的擺 動方向的兩側，藉此，當對振盪頻率的變化進行測量時， 可應用差動法，因此，可抑制雜訊或溫度特性的影響，從 而可更高精度地對加速度進行檢測。 【實施方式】 對本發明的實施形態的伺服式加速度測量裝置進行說 8 201250253 ^z^ozpif 明。本實施形態的伺服式加速度測量裝置主要包含. 位置控制的對象的擺構件、擺位置檢測部、調整部、= =於擺賴動H料處理料，上賴位置檢測 縣於振賴率的變化來對擺的位移進行檢測， 移資料的電氣㈣料輸出，上述難縣於自擺位置Z 測部接收的位移資料，以使擺保持靜止狀態的方式而對: 輸出進行控制’上述資料處理部例如根據致動器的 來對慣性力的加速度進行計算。圖1是表示本 貫&形悲的伺服式加速度測量裝置的圖，圖i中，i ^體，的密閉型的例如包含石英的容器，於該容器的内 ^入有惰性氣體例如氮氣。再者 密閉型=器。上述容器'1固定於絕緣基板13 二：：1内，板狀的擺構件2的一端側的一面側及另 導電性黏接劑^、。，固定於相當於支持 的内側壁的上方部位。亦即，擺構件2是以使 1肉二於上方且賢立於錯垂方向的狀態，懸臂支持於 部。擺構件2可沿著其長度方向（錯垂方向）， 23 H刀起劃分為被支持部21、撓曲部22、以及錘部 ~ Γο、’首先’上述被支持部21藉由導電性黏接 1得比上固定於容器卜上述撓曲部22的厚度形 #2a* 寺部21的厚度更薄，當慣性力作用於擺構 =曲曲部22會撓曲，而且，上述錘部”使厚 更大，m的^度更厚而確保質量’使起作用的慣性力 &以谷易地對擺構件2的位移進行檢測。擺構 201250253r 件2是以被支持部21為支點而 向）上擺動。對於錘部23 中的左右方向（χ方 33及第2可動電極35料声=使後述的第！可動電極 如圖2⑷所示，2 亦可兼作為錘。 的表面形成有引出電極31。該、面側的被支持部21 表面上所形成的導電路徑％ 了 電極31經由一面側的 接，該第1可動電極33 & 1可動電極33電性連 側的表面。而且的錘部23的-面 而與第2可動電極35電性連接，導電路徑Μ 錘㈣的-面側朝另一面側妾通徑34是以自 返的方式所形成，上述第2可動=件2的另-端而折 另一 αμλα * 彳勤電極35設置於錘部23的 另=侧的表面。本實施形態中的導電路徑及各種電極 如包含濺鍍形成的金屬薄臈。 =2 (b)所不’於擺構件2的另一面側的被支持部 夺厲“纟方向（γ方向）的兩端部分別形成有例如包含 j缚膜㈣出電極54、56。該引出電極54、56分別經 =電路經53、55，分別電性連接於擺構件2的另一面側 撓曲Ϊ„2„2的表面所設置的線圈部51内的線圈的兩端。 於谷器1的内壁’以與第i可動電極33及第2可動電 極=分_對向的方式，形成有第丨蚊電極36及第2 固定電極38。第η動電極33肖第i固定電極％之間的 =隙形成第！可變電容Cvl42可動電極35與第2固定 電極38之間的間隙形成第2可變電容Cv2。 於容器1的内壁，以與線圈部51才目對向的方式，設置 201250253 有例如包括水久磁鐵（permanent magnet)等的磁電路52。 以如下的方式來對線圈部51的線圈進行設定，即，使對線 圈通電時所產生的磁通量的方向朝向上述磁電路52，可藉 由，通電的電•的方向或大小進行調整來對擺構件2的位 置（擺動位置）進行調整。利用線圈部51與磁電路 構成致動器5。 等效電路:圖㈣，表示 、 疋Ά 夬振盪器（quartz crystal201250253^ VI. Description of the Invention: TECHNICAL FIELD The present invention relates to a technique for detecting acceleration based on an oscillation frequency using a piezoelectric plate such as a quartz plate. [Prior Art] In order to measure earthquakes and the like, the detection of weak and low-frequency acceleration is an important issue. It is required that the measurement be as simple as possible and accurately measured every time such measurement is performed. A sensor-servo-type acceleration measuring device that performs the above-mentioned weak and low-frequency acceleration is often used. In general, the servo-type acceleration measuring device includes: a pendulum, a pendulum position detector, an actuator that applies a force to the pendulum, and an adjustment unit that is based on the detection result of the pendulum position detector. Control the actuator. The pendulum includes a hammer and a spring, and one end of the spring is fixed to the container of the acceleration measuring device. If the acceleration is applied to the acceleration measuring device, the position of the hammer moves relative to the container due to the inertial force. The resonance frequency of the pendulum is set very low, and even if the acceleration is extremely small, the pendulum moves greatly. The pendulum is proportional to the acceleration of the displacement disk of the container, which is the acceleration applied in the frequency range of the resonance frequency of the pendulum. The pendulum position detector is a sensor that detects the displacement of the pendulum relative to the container. The actuator includes a magnetic circuit disposed on the swing ring and disposed in the container, and the displacement can be displaced by the electromagnetic force of the electromagnetic force generated by the current flowing to the human body. The adjustment unit is configured to cause current to flow into the coil of the actuator based on the displacement data (data) obtained by the pendulum position detector 4 201250253. If an acceleration generated by an external force is applied to the above-described acceleration measuring device, the position of the pendulum moves due to the inertial force. At this time, the current self-adjusting portion ML can be made to actuate, so that an electromagnetic force having the same magnitude and inertial force and opposite in direction and inertial force acts on the pendulum, thereby keeping the pendulum in a stationary state. Therefore, the pendulum position detector is used to check the displacement of the pendulum, and the displacement is zero to make the displacement of the actuator pendulum feedback (feedbaek)_, and the output of the actuator is measured, for example. The current value flowing into the coil is measured, and the acceleration of the Sabli force is measured. The servo acceleration measurement described above is characterized by high accuracy and high resolution, and the measurable frequency is about 0 to 400 Hz. The position of the pendulum that accelerates the face-lift device to take care of the machine. The detector uses a laser diode-de), a guillotine-type photodiode, and a lens optical pendulum position detector. The detection method of the optical pendulum position detector is as follows: The problem is that the position detector is constructed as follows: the container mode is formed by the pendulum method to form the electrostatic capacity, so that the electricity is changed and the 斟μ juice is brought to the belt 6 曰, ° The change of the electrostatic valley 1 described above is measured, but the influence of noise (n〇1Se) cannot be excluded. Therefore, the pendulum is detected on the acceleration it line. (4) 4 degrees 201250253 Patent Document 1 discloses an acceleration sensor that transmits a constant current to a movable electrode and pulses an induced current generated in a fixed electrode opposed to the movable electrode. The number is detected 'to detect the acceleration, but the above-described acceleration sensor is different from the present invention. In Patent Document 2, an acceleration sensor having an electrostatic capacitance change detecting type is disclosed, and two variable capacitors are formed between a movable center plate and a fixed plate provided on both sides of the center plate. The voltages of the reverse phase pulses are applied to the above two fixed plates, respectively. The acceleration is generated, and the position of the center plate is moved, whereby the two variable capacitances are changed, and the phase shift of the pulse of the voltage applied from the two fixed plates to the center plate is detected at this time, thereby detecting the acceleration. However, the above-described electrostatic capacitance change detecting type acceleration sensor is different from the present invention. [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. In the invention formed in the background, the object of the present invention is to provide an acceleration measuring device which can accurately and easily detect an acceleration. The acceleration measuring device according to the present invention detects the displacement amount from the reference position of the swinging member that is swung by the inertial force, and based on the detection result, the swinging member is stopped at the reference position, and the operating portion An external force is applied to the pendulum member, and based on the magnitude of the external force at this time, 201250253 is evaluated for the acceleration acting on the pendulum member, and the acceleration measuring device is characterized by: a piezoelectric plate; an excitation electrode and another excitation The electrode is provided on one surface side and the other surface side of the piezoelectric plate, and the oscillation circuit is electrically connected to the excitation electrode; the movable electrode for forming a variable capacitor is provided in the pendulum Electrically connected to the other excitation electrode; and the solid electrode 'is separated from the pendulum member and disposed opposite to p and connected to the (4) circuit =, shaking, and the capacitance between the movable electrode and the movable electrode is changed , into a variable capacitor, · and the residual straw, the shape rate of the New Zealand detection department, using the frequency information corresponding to the oscillating and oscillating The detection is performed, and the vibration plane rate red is returned to the above-mentioned vibration|circuit by the upper excitation electrode, the (four) 虞 circuit, and the above-mentioned fixed lightning "x 敫 电极 electrode, the above movable electrode Μ疋 electrode, and the position of the oscillating member is inspected. (4) In the acceleration measuring device according to the present invention, in the acceleration measuring device of the present invention, the i-th movable electrode and the second-direction opposite-direction moving electrode are provided in the inertia=mode, and the moving electrode is used as the above. The first fixed electrode and the second fixed electrode may be provided as the fixed electrode, and the first fixed electrode and the second fixed electrode may be disposed between the upper movable electrode and the first negative electrode, respectively, between the members of the first movable electrode 2 facing the movable electrode of the first movable electrode 2; The first variable capacitor and the second movable rake 筮 筮 0 gate - ten k Qiao brother, the second can be the first and the second fixed electrode between the M d 'the electrical connection of the vibrating (four) way In the method of switching, a switching unit is provided, and the ribs of the fresh slabs are determined to correspond to the difference between the two machines. The difference is the division of the switching unit (four) and the upper one. Corresponding oscillation frequency and The difference between the oscillation frequencies corresponding to the second phase is 4. The one end side of the four-phase pendulum member may be supported by the cantilever by the support portion. Further, the pendulum member may be the piezoelectric plate or a portion of the piezoelectric plate. [Effects of the Invention] The present invention is to change the capacitance between the movable electrode on the side of the pendulum member and the solid electrode facing the movable electrode when the pendulum member is shaken by the acceleration and moved from the reference position. The displacement amount of the pendulum member is captured as a change in the oscillation frequency of the piezoelectric plate. Therefore, the acceleration can be detected with high precision and easily. Further, the variable capacitance is formed on both sides of the swing direction of the pendulum, whereby When the change in the oscillation frequency is measured, the differential method can be applied, so that the influence of noise or temperature characteristics can be suppressed, and the acceleration can be detected with higher precision. [Embodiment] The servo-type acceleration measuring apparatus according to the embodiment of the present invention is described as 8 201250253 ^z^ozpif. The servo-type acceleration measuring apparatus according to the present embodiment mainly includes a pendulum member, a pendulum position detecting unit, and an adjusting unit for the position control, and a change in the rate of the vibration-receiving rate of the position detection county. To detect the displacement of the pendulum, shift the electrical (four) material output of the data, and the displacement data received by the above-mentioned Dian County in the Z position of the pendulum position to keep the pendulum in a static state: the output is controlled. The acceleration of the inertial force is calculated, for example, based on the actuator. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a conventional & sinusoidal servo type acceleration measuring apparatus. In Fig. i, a sealed type of container containing quartz, for example, contains an inert gas such as nitrogen gas. Furthermore, the closed type = device. The container '1 is fixed to the insulating substrate 13 2::1, one side of the one end side of the plate-like pendulum member 2, and another conductive adhesive. , fixed to the upper part of the inner side wall corresponding to the support. In other words, the pendulum member 2 is in a state in which the meat is placed on the upper side and is in the wrong direction, and the cantilever is supported by the portion. The pendulum member 2 can be divided into a supported portion 21, a flexure portion 22, and a hammer portion by a 23 H knife, and the first support portion 21 is electrically conductively adhered. 1 is thinner than the thickness of the temple portion 21 of the thickness portion #2a* fixed to the container 22, and the inertial force acts on the pendulum = the curved portion 22 is deflected, and the hammer portion is " The thickness is made larger, and the degree of m is thicker to ensure the quality 'actuating inertial force & the displacement of the pendulum member 2 is detected by the valley. The pendulum 201250253r 2 is supported by the supported portion 21 as a fulcrum. The upper and lower directions of the hammer portion 23 (the square 33 and the second movable electrode 35 are sounded = the second movable electrode to be described later is shown in Fig. 2 (4), and the surface can be formed as a hammer. The electrode 31 is drawn. The conductive path formed on the surface of the support portion 21 on the surface side is connected to the electrode 31 via the one surface side, and the first movable electrode 33 & 1 movable electrode 33 is electrically connected to the side surface. The surface of the hammer portion 23 is electrically connected to the second movable electrode 35, and the conductive path Μ hammer (4) faces the side The one side side diameter 34 is formed by self-return, and the other end of the second movable body 2 is folded by another αμλα * the work electrode 35 is provided on the other side of the weight portion 23. The conductive path in the form and the various electrodes such as the metal thin plate formed by sputtering. = 2 (b) The supported portion on the other side of the pendulum member 2 is not as strong as the "twist direction (γ direction) Each of the portions is formed with, for example, a j-bonded film (four) output electrodes 54, 56. The lead-out electrodes 54, 56 are respectively electrically connected to the other side of the pendulum member 2 by the circuit 53 and 55, respectively. Both ends of the coil in the coil portion 51 provided on the surface. The inner wall ' of the trough 1 is formed with the second mosquito electrode 36 and the second movable electrode 33 and the second movable electrode. The second fixed electrode 38. The n-th movable electrode 33 has a gap between the fixed electrode % and the second variable electrode Cv2. The gap between the movable electrode 35 and the second fixed electrode 38 forms a second variable capacitor Cv2. In the inner wall of the container 1, in a manner opposite to the coil portion 51, 201250253 is provided, for example, including a water-long magnet (per The magnetic circuit 52 of the manent magnet or the like. The coil of the coil portion 51 is set such that the direction of the magnetic flux generated when the coil is energized is directed toward the magnetic circuit 52, and the electric current can be supplied. The direction or size is adjusted to adjust the position (swing position) of the pendulum member 2. The coil portion 51 and the magnetic circuit constitute the actuator 5. Equivalent circuit: Fig. 4 shows, 疋Ά 夬 oscillator (quartz crystal
osc舰〇〇的質量相對應的串聯電感㈤邮載），C 串聯電容，R1是串聯電阻，c〇是包 聯電容，Cosc繼電路14的負載“ 示，與可動電極33、35連接的引出電㈣是瘦 由導電路徑30而電性連接於石英振里器4，上述 柄 30通過導電性黏接劑1G、容器1及絕緣基板13。而且 上述石英振盪H4電性連接於錄電路41的—端。=方 面，固疋電極36、38分別經由導電路徑37、 的:換接點側。該切換部42的固定= ίΪ於振錢路41的另—端，可於岐電極37、39 ^ 父#地切換連接振盪電路41。石英振盈器4、振 0， 及切換部42收納在固定於絕絲板13的容器電 以10Hz的週期（連接時間為⑽ :例如 ㈣的切換，藉此，經由第，可變電容動= 丁上述切 獲得的振盪頻率FLx〗與經由第2可變電容&屯路所 獲得的振蘆頻率FLX2，會時間分割地被擺位置檢、=所 201250253r 獲取。 此處，根據JISC 6701「石英振盪器通則」，以如下的 (1)式的方式來表示石英振盪電路的通式。 FL=Frx ( 1+x ) x= (Cl/2) xl/ (CO+CL) ...... ( 1) FL是負載施加至石英振盪器時的振盪頻率，Fr是石 英振盪器本身的共振頻率。 於本實施形態中，如圖3及圖4所示，負載電容CL 是將Cose與可變電容Cv予以串聯連接所得的合成電容。 因此，將（2)式所表示的y代入，以代替（1)式中的CL。 y=l/ ( l/Cv+1/Cosc) ...... (2) 因此，若可變電容Cv因擺構件2的位置發生變化而 自CvO變為Cvx，則頻率的變化dFL由（3)式來表示。 dFL=FL0-FLx=AxCosc2x (Cvx-CvO) / (Βχ〇 ... (3) 此處， A=ClxFr/2 12 201250253 HZOOZpif B=C〇xCosc+ (CO+Cosc) xCvO C=C〇xCosc+ (CO+Cosc) xCvx。 又’若將加速度未施加至擺構件2時的處於所謂的基 準狀態（靜止狀態）時的可動電極及固定電極之間的相隔 距離設為d0 ’將加速度施加至擺構件2時的上述相隔距離 設為dx，則（4)式成立。The mass of the osc ship corresponds to the series inductance (5) postal load), C series capacitor, R1 is the series resistor, c〇 is the package capacitor, and the load of the Cosc relay circuit 14 is shown, connected to the movable electrodes 33, 35. The lead (4) is electrically connected to the quartz vibrator 4 by the conductive path 30. The handle 30 passes through the conductive adhesive 1G, the container 1 and the insulating substrate 13. The quartz oscillation H4 is electrically connected to the recording circuit 41. In terms of the end, the solid electrodes 36, 38 are respectively connected via the conductive path 37: the switching point side. The fixing of the switching portion 42 is at the other end of the vibration money path 41, and the electrode 37 can be 39 ^ Father #地开关连接 oscillation circuit 41. The quartz vibrator 4, the oscillation 0, and the switching portion 42 are housed in a container fixed to the wire board 13 at a cycle of 10 Hz (connection time is (10): for example, (four) switching, Thereby, the oscillation frequency FLx obtained by the above-described variable capacitance switching = the above-described cutting and the vibrating frequency FLX2 obtained by the second variable capacitance & 201250253r Obtained. Here, according to JISC 6701 "Crystal Oscillator General Rules", The general formula of the crystal oscillation circuit is expressed by the following formula (1): FL = Frx ( 1 + x ) x = (Cl / 2) xl / (CO + CL) ( 1 ) FL is The oscillation frequency when the load is applied to the quartz oscillator, Fr is the resonance frequency of the crystal oscillator itself. In the present embodiment, as shown in FIGS. 3 and 4, the load capacitance CL is connected in series with the variable capacitance Cv. The resulting synthetic capacitance. Therefore, the y represented by the formula (2) is substituted instead of CL in the formula (1). y=l/ ( l/Cv+1/Cosc) (2) Therefore, if the variable capacitance Cv changes from CvO to Cvx due to the change in the position of the pendulum member 2, the frequency change dFL is expressed by the equation (3). dFL = FL0 - FLx = AxCosc2x (Cvx - CvO) / (Βχ 〇... (3) Here, A=ClxFr/2 12 201250253 HZOOZpif B=C〇xCosc+ (CO+Cosc) xCvO C=C〇xCosc+ (CO+Cosc) xCvx. Also, if the acceleration is not applied to the pendulum In the case of the member 2, the distance between the movable electrode and the fixed electrode in the so-called reference state (stationary state) is set to d0', and the above-described distance when the acceleration is applied to the pendulum member 2 is set to dx, then (4) Established.
Cv0=Sx8/d0Cv0=Sx8/d0
Cvx=S><8/dx...... (4) 其中，S是可動電極及固定電極的相對向的區域的面 積 ’ ε是相對電容率（relative permittivity )。 由於d0已知，因此，可知dFL與dx (亦即，擺構件 2的位移AdsdO-dx)為對應關係。 於擺位置檢測部6中，針對與第丨可變電容及第2可 變電谷夫分別對應的振盡頻率FLxl、FLx2，分別對與擺 構件2處於靜止位置時的振盪頻率（以下，稱為基準頻率） FL01、FL02 之間的差分剔（=FL〇1FLxl )、Δρ2 (=FL02-FLx2)進行計算，進而對頻率變化率卜 △F2/FL〇2進打計算，上述頻率變化率絕肌⑴、af2/fl〇2 13 201250253 _ Αν W V*» 卜矗 t 是分別將上述差分AF1、AF2除以與上述差分AF1、相 對應的基準頻率所得的值。接著，對上述頻率變化率 △F1/FL01、AFS/FLO2的差分AF進行計算。可根據上述變 化率差來&十鼻出擺構件2的位移Ad。此處所謂的位 移△(!’是指當將擺構件2處於靜止位置的第1可動電極與 第1固定電極的相隔間隔（第1相隔間隔dxl)設為d〇1， 且將第2可動電極與第2固定電極的相隔間隔（第2相隔 間隔 dx2)設為 d02 時的△(!=(!0l-dxl=dx2-d02。 圖5是表示擺構件2的位移與振盪頻率的差分AFl (△F2)的關係的貫驗資料。如此，由於位移m與振盪頻 率的差分剔UF2)為-對—的對應關係，因此，可藉由 對振錢率差分絕（奶）進行測絲計算出位移址又， 求出㈣頻率差分綱、奶的變化率差分Δρ，根據該變 來對位移Ad進行計算，藉此，可抑制由雜訊 性所產生的不良影響。如此，與擺位置檢測部6 所计异出的位移Ad相當的信號婦送至調整部61。 ^整”基於接收的位移Ad的大小例如藉由問流 體（thynstor)相位控制來對流入至致動器 ！ 的線圈的電流的大小與方向$ ° '、’ 為零的方式來使致動器5^^整=此’以使位移^ 的，進行控制=擺=二 將線圈部51 處理部62’例如 述電磁力是⑽_ 5㈣祕嶋62 ’上 201250253 上述資料處理部62例如包含個人電腦（pers〇nai comp咖），且具有如下的功能，即，基於與調整部&所 獲得的致動器5的電磁力的大小相關的資訊，例如基於流 入至線圈部51的線_電流值’歸照事先已記憶於記憶 體（men^y)的資料表（datatable)來求出慣性力的加速 度’上述㈣表是使線卿51的線圈的錢值與作用於擺 構件2的加速度相對應的資料表。只要可維持擺構件2的 靜止狀fe，則作為檢測對象的慣性力、與因致動器$而作 用於擺構件2的電磁力的大小保持平衡，因此，可根據線 圈部51的線圈的電流值來計算出慣性力的加速度。 接著，對本實施形態的作用進行說明。首先，以使容 器1達到預疋的姿勢的方式，將上述加速度測量裝置固定 於振動檢測縣物。若該振動檢騎㈣發生振動，且產 生上述加速度測量裝置的振細量方向的振動成分，則慣 性力會作用於擺構件2的錘部23。接著，根據該慣性力的 大丨、，擺構件2的撓曲部22撓曲，因此，一方的相隔間隔 例如第1相隔間隔會稍微變窄，相反地，另一方的相隔間 隔例，第2相隔間隔會稍微擴大。因此，第i可變電容變 =，第2可變電容變小。藉此，與第丨可變電容及第2可 變電容分別對應的振盪頻率發生變化。利用擺位置檢測部 6來對此時的振盪頻率與基準頻率的差分AF1、AF2進行檢 ^ ’根據上述差分ΔΡ卜ΔΡ>2來對擺構件2的位移進行計 f °该計算出的位移的資料隨時被發送至調整部61，調整 ^ 61基於上述位移資料，例如藉由閘流體相位控制來對流 15 201250253 • ^*··»» v知卜*丈 3致ΐ器5的線圈部51的線圈的電流的大小與方向進行 二二以使位移為零的方式來進行㈣。藉此，實 :擺構件2在基準位置維持靜止狀態，於該例子 如藉由以垂直姿勢維持靜止狀態。而且’例 曰山认、十線圈部51的線圈的電流值進行監視，而可測 【象的振動的加速度。準備3台上述加速度感測 ” ^使各個加速度感測器的擺的振動方向完全不同，且 ，3 σ加速度感·的擺的振動方向不在同—平面上的方 式’對3台上述加速度感㈣進行設置，藉此，可對三 振動進行測定。 根據上述實施形態，由於加速度測量裝置發生振動， “振動所產生的慣性力會作用於懸臂支持在上述容器！ =部的擺構件2，因此，擺構件2撓曲。結果，擺構件2 二準位置起移動，擺構件2的前端側所形成的可動電極 33 (35)及與該可動電極33 (35)相對向的固定電極％、 %的相隔距離改變，因此，可變電容㈤（㈤）的電容 ^生4化。因此，該電容變化作為振盈頻率的變化奶 (△F2)而表現出。目此，擺構件2的極小的位移^亦可 作為振盈頻率的變化綱UF2)而檢視出，故而可高精度 地對擺構件2的位移進行測定，而且裝置構成簡單。 又，相對於一個擺構件2而形成有2個可變電容cvl、 ，且配置於相同的溫度環境中，因此，即便與可變電 容fvl、Cv2相對應的各個頻率因溫度而發生變化，該變 化里亦會抵銷，結果，可僅檢測出基於擺構件2的位移^ 16 201250253 HZJUZpif 的頻2化率的變化量，因此，具有檢測精度高的效果。 著’使用圖6、圖7 (a)、及圖7(b)來對本發明 的?他貫;?^悲進行說日月。該實施形態與上述實施形態的 :同點在於：上述實施形態中的擺構件2的被支持部21 2為石英振❹4。首先，對本實施形態的加速度測量 f置的構造進行說明。當構造與上述實施形態相同時，附 述貫麵態相同的符號，且將說明予以省略。本實 施形態的擺構件2a包含石英。於上述被支持部21a的一面 側及另一面側分別形成有激振電極24a、25a。-面側的激 振電極24a經由導電路徑32而電性連接於可動電極％。 =-面側的激振電極25a經由導電路徑施、用以將擺 ^固定於容器1的導電性黏接劑及未圖示的導電路 徑，連接於振盪電路41的一端。 根據該實施形態，除了上述實施形態的效果之外，由 ^無需在與擺構件2不同的位置設置石英振i器4的設 二間，因此，有助於加速度測量裝置的小型化。 於本實施形態中，整個擺構件2包含石英， 部21a中的被激振電極24a、25a包夹的部分:寻 ^ 8中表讀其他實郷態相關的_件 ，態中’擺構件2的形狀並非如上述實施形態般= 狀，而是為棒狀的擺構件2,該棒狀的擺構件2 ^二扳 的剖面為正方形，撓曲部22能夠在水平方向的任何=平面 撓曲。而且，於錘部23的4個側面分別形成有^^上 33b、35b、70b、71b。隔著錘部23而相對向的2組動電極 J W} ^ 17 201250253, 極（33b與35b的組及70b與71b的組）分別是與未圖示 的固定電極相對向地形成於擺構件2b的錘部23b的表面。 亦即，第1可變電容Cvl及第2可變電容Cv2的組是與之 且水平方向正乂地設置。藉由設為此種構成，可對水平方 向上的所有方向的振動的加速度進行檢測。於圖8中，為 了使圖易於觀察，將導電路徑及端子予以省略。於該實施 形態中’帛1可變電容Cvl及第2可變電容Cv2的組是與 2組水平方向正交地設置，但即便不正交，2組只要不、 地設置即可。 τ 於上述實施形態中，藉由電磁力來維持擺構件2的靜 止狀態’但例如亦可使靜電力等其他力起作用，從而維^ 靜止狀態。又，於上述實施形態中’擺構件2為懸臂支持 的板狀構件或棒狀構件，但本發明不限於此，例如亦可利 用彈性構件，以能夠搖動的方式來對擺構件的兩側進行支 【圖式簡單說明】 圖1是模式性地表示本發明的實施形態的加速度測量 裝置的要部的縱斷側面圖。 圖2 (a)、圖2 (b)是表示上述加速度測量裝置中所 使用的擺構件的一面及另一面的平面圖。 圖3是表示上述加速度測量裝置的電路構成的區塊 圖。 圖4是表示上述加速度測量裝置中的擺位置檢測器的 等效電路的電路圖。 201250253 HZJO^pif 的二吏用上述加速度測量裝置而取得的擺構件 的位移與振盪頻率的差分的關係的特性圖。 圖6是表示本發明的其他實施形態的縱斷側面圖。 圖7 U)、圖7 (b)是表示圖6所示的加速声 置中所使用的擺構件的一面及另一面的平面圖。、里、 圖圖8是表示本發明的其他實施形態的擺構件的立體 【主要元件符號說明】 1、3 :容器 2、2b :擺構件 4 :石英振盪器 5 :致動器 6:擺位置檢測部 10、10a、11、12 :導電性黏接劑 13 :絕緣基板 21、21a :被支持部 22 :撓曲部 23、23b :鐘部 24a ' 25a :激振電極 26a、30、32、34、37、39、53 ' 55 :導電路押 31、54 ' 56 z引出電極 二 33、33b、35、35b、70b、71b :可動電極 36、38 :固定電極 41 :振盪電路 201250253t 42 :切換部 51 :線圈部 52 :磁電路 61 :調整部 62 :資料處理部 C0 :有效並聯電容 C1 :串聯電容 Cose :負載電容 Cvl :第1可變電容 Cv2 :第2可變電容 L1 :串聯電感 R1 :串聯電阻 X、Y:方向 △d :位移 AF1、AF2 :差分 20Cvx = S >< 8 / dx (4) where S is the area of the opposing region of the movable electrode and the fixed electrode ' ε is the relative permittivity. Since d0 is known, it can be seen that dFL and dx (i.e., the displacement AdsdO-dx of the pendulum member 2) correspond to each other. In the swing position detecting unit 6, the oscillation frequencies of the oscillation components FLx1 and FLx2 corresponding to the second variable capacitor and the second variable electric grid are respectively set to the oscillation frequency when the pendulum member 2 is at the rest position (hereinafter referred to as Calculate the difference between the reference frequency) FL01 and FL02 (=FL〇1FLxl) and Δρ2 (=FL02-FLx2), and then calculate the frequency change rate △F2/FL〇2. Muscle (1), af2/fl〇2 13 201250253 _ Αν WV*» The divination t is a value obtained by dividing the above-described differences AF1 and AF2 by the reference frequency corresponding to the difference AF1, respectively. Next, the differential AF of the above-described frequency change rates ΔF1/FL01 and AFS/FLO2 is calculated. The displacement Ad of the ten nose swinging member 2 can be made according to the above change rate variation. Here, the displacement Δ (!' means that the interval between the first movable electrode and the first fixed electrode (the first phase interval dxl) when the pendulum member 2 is at the rest position is d〇1, and the second movable Δ (!=(!0l-dxl=dx2-d02) when the distance between the electrode and the second fixed electrode (the second interval interval dx2) is d02. Fig. 5 is a difference AF1 between the displacement of the pendulum member 2 and the oscillation frequency. The statistical data of the relationship of (ΔF2). Thus, since the difference between the displacement m and the oscillation frequency is UF2), the correspondence relationship is -, and therefore, the measurement can be performed by measuring the difference between the vibration rate and the milk (milk). Further, the displacement address is obtained, and (4) the frequency difference scheme and the milk change rate difference Δρ are obtained, and the displacement Ad is calculated based on the change, thereby suppressing the adverse effect caused by the noise. Thus, the pendulum position detection is performed. The signal corresponding to the displacement Ad corresponding to the portion 6 is sent to the adjustment unit 61. The integral is based on the magnitude of the received displacement Ad, for example, by the phase control of the thynstor to the coil that flows into the actuator! The magnitude of the current and the direction of $ ° ', ' zero to make the actuator 5 ^ ^ = this 'To control the displacement ^, control = pendulum = two, the coil portion 51 processing portion 62', for example, the electromagnetic force is (10) _ 5 (four) secret 62 ' on 201250253 The above data processing unit 62 includes, for example, a personal computer (pers〇nai comp coffee) And having a function relating to the magnitude of the electromagnetic force of the actuator 5 obtained by the adjustment unit & for example, based on the line_current value' flowing into the coil portion 51, which has been previously memorized. The data table of the memory (men^y) is used to obtain the acceleration of the inertial force. The above (fourth) table is a data table that corresponds to the money value of the coil of the thread 51 and the acceleration acting on the pendulum member 2. By maintaining the stationary fe of the swinging member 2, the inertial force to be detected and the magnitude of the electromagnetic force acting on the swinging member 2 by the actuator $ are balanced, and therefore, the current value of the coil of the coil portion 51 can be used. The acceleration of the inertial force is calculated. Next, the operation of the present embodiment will be described. First, the acceleration measuring device is fixed to the vibration detecting county in such a manner that the container 1 is in the preliminarily posture. When the vibration is generated by the check (4) and the vibration component in the direction of the vibration amount of the acceleration measuring device is generated, the inertial force acts on the weight portion 23 of the swinging member 2. Then, according to the large force of the inertial force, the swing member 2 Since the flexure 22 is deflected, for example, the interval between the first intervals is slightly narrowed, for example, the interval between the other intervals is small, and the interval between the other intervals is slightly increased. Therefore, the i-th variable capacitance is changed. The second variable capacitance is reduced, whereby the oscillation frequency corresponding to each of the second variable capacitor and the second variable capacitor is changed. The difference between the oscillation frequency and the reference frequency at this time by the swing position detecting unit 6 The AF1 and the AF2 are inspected, and the displacement of the pendulum member 2 is calculated based on the difference ΔΡ ΔΡ Ρ Ρ 2, and the calculated displacement information is transmitted to the adjustment unit 61 at any time, and the adjustment is based on the displacement data, for example. The convection current is controlled by the thyristor phase control. The current and the direction of the current of the coil of the coil portion 51 of the squeezing device 5 are two or two in order to make the displacement zero. Carry out (4). Thereby, the pendulum member 2 maintains a stationary state at the reference position, for example, by maintaining the stationary state in a vertical posture. Further, the current value of the coil of the eleven coil portion 51 is monitored, and the acceleration of the vibration of the image can be measured. Prepare 3 sets of the above-mentioned acceleration sensing" ^The vibration directions of the pendulums of the respective acceleration sensors are completely different, and the vibration direction of the pendulum of the 3 σ acceleration sense is not in the same plane - the above-mentioned acceleration feelings (4) By setting, the three vibrations can be measured. According to the above embodiment, since the acceleration measuring device vibrates, "the inertial force generated by the vibration acts on the cantilever to support the container! The pendulum member 2 of the portion is, therefore, the pendulum member 2 is flexed. As a result, the pendulum member 2 moves in the second position, and the distance between the movable electrode 33 (35) formed on the front end side of the pendulum member 2 and the fixed electrode %, % opposed to the movable electrode 33 (35) changes. The capacitance of the variable capacitor (5) ((5)) is reduced. Therefore, this change in capacitance is expressed as a change in the vibration frequency (ΔF2). Therefore, the extremely small displacement ^ of the pendulum member 2 can also be examined as a variation of the oscillation frequency UF2), so that the displacement of the pendulum member 2 can be measured with high precision, and the device configuration is simple. Further, since the two variable capacitors cv1 are formed in the same temperature environment with respect to the one pendulum member 2, even if the respective frequencies corresponding to the variable capacitors fv1 and Cv2 change due to temperature, the frequency changes. As a result, the variation is also offset. As a result, only the amount of change in the frequency conversion rate of the displacement of the pendulum member 2, 201250253 HZJUZpif, can be detected, and therefore, the detection accuracy is high. The use of Fig. 6, Fig. 7(a), and Fig. 7(b) to describe the day and month of the present invention. This embodiment is the same as the above-described embodiment in that the supported portion 21 2 of the pendulum member 2 in the above embodiment is a quartz ring 4 . First, the structure of the acceleration measurement f of the present embodiment will be described. When the configuration is the same as that of the above embodiment, the same reference numerals will be given, and the description will be omitted. The pendulum member 2a of this embodiment contains quartz. Excitation electrodes 24a and 25a are formed on one surface side and the other surface side of the supported portion 21a, respectively. The excitation electrode 24a on the surface side is electrically connected to the movable electrode % via the conductive path 32. The excitation electrode 25a on the surface side is connected to one end of the oscillation circuit 41 via a conductive path, a conductive adhesive for fixing the pendulum to the container 1, and a conductive path (not shown). According to this embodiment, in addition to the effects of the above-described embodiment, it is not necessary to provide the arrangement of the quartz crystal resonators 4 at a position different from the pendulum member 2, which contributes to downsizing of the acceleration measuring device. In the present embodiment, the entire pendulum member 2 includes quartz, and the portion of the portion 21a that is sandwiched by the excitation electrodes 24a and 25a is: a device that reads other related states, and a state in which the pendulum member 2 The shape of the pendulum member 2 is not a shape as in the above embodiment, but is a rod-shaped pendulum member 2, the cross section of which is a square, and the flexure 22 can be deflected in any horizontal plane. . Further, on the four side faces of the weight portion 23, upper portions 33b, 35b, 70b, and 71b are formed. The two sets of movable electrodes JW} ^ 17 201250253 that face each other across the weight portion 23, the poles (groups of 33b and 35b and groups of 70b and 71b) are respectively formed on the swing member 2b so as to face the fixed electrode (not shown). The surface of the hammer portion 23b. In other words, the groups of the first variable capacitor Cv1 and the second variable capacitor Cv2 are disposed in the horizontal direction. With such a configuration, the acceleration of the vibration in all directions in the horizontal direction can be detected. In Fig. 8, in order to make the figure easy to observe, the conductive paths and terminals are omitted. In this embodiment, the group of the 帛1 variable capacitor Cv1 and the second variable capacitor Cv2 is provided orthogonally to the two sets of horizontal directions. However, the two groups may be provided without being orthogonal. In the above embodiment, the static state of the swinging member 2 is maintained by the electromagnetic force. However, for example, other forces such as electrostatic force may be acted upon to maintain the stationary state. Further, in the above embodiment, the 'swing member 2 is a plate-shaped member or a rod-shaped member that is supported by a cantilever. However, the present invention is not limited thereto. For example, the elastic member may be used to swing the both sides of the swing member. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal side view schematically showing a main part of an acceleration measuring apparatus according to an embodiment of the present invention. 2(a) and 2(b) are plan views showing one surface and the other surface of the pendulum member used in the acceleration measuring device. Fig. 3 is a block diagram showing a circuit configuration of the acceleration measuring device. Fig. 4 is a circuit diagram showing an equivalent circuit of a pendulum position detector in the above acceleration measuring device. 201250253 HZJO^pif A characteristic diagram showing the relationship between the displacement of the pendulum member and the oscillation frequency obtained by the above-described acceleration measuring device. Fig. 6 is a longitudinal sectional side view showing another embodiment of the present invention. Fig. 7 (U) and Fig. 7 (b) are plan views showing one surface and the other surface of the pendulum member used in the accelerating sound shown in Fig. 6. Fig. 8 is a perspective view of a pendulum member according to another embodiment of the present invention. [Main element symbol description] 1. 3: Container 2, 2b: pendulum member 4: quartz oscillator 5: actuator 6: pendulum position Detection portions 10, 10a, 11, and 12: conductive adhesive 13: insulating substrates 21, 21a: supported portion 22: flex portions 23, 23b: clock portions 24a' 25a: excitation electrodes 26a, 30, 32, 34, 37, 39, 53 ' 55 : Conductor circuit 31, 54 ' 56 z extraction electrode two 33, 33b, 35, 35b, 70b, 71b: movable electrode 36, 38: fixed electrode 41: oscillation circuit 201250253t 42: switching Portion 51: Coil portion 52: Magnetic circuit 61: Adjustment unit 62: Data processing unit C0: Effective shunt capacitor C1: Series capacitor Cose: Load capacitor Cvl: First variable capacitor Cv2: Second variable capacitor L1: Series inductor R1 : series resistance X, Y: direction Δd : displacement AF1, AF2 : differential 20