TW201250929A - Microelectrode array architecture - Google Patents

Abstract

Disclosed herein is a device A device of the microelectrode array architecture, comprising: (a) a bottom plate comprising an array of multiple microelectrodes disposed on a top surface of a substrate covered by a dielectric layer; wherein each of the microelectrode is coupled to at least one grounding elements of a grounding mechanism, wherein a hydrophobic layer is disposed on the top of the dielectric layer and the grounding elements to make hydrophobic surfaces with the droplets; (b) a field programmability mechanism for programming a group of configured-electrodes to generate microfluidic components and layouts with selected shapes and sizes; and, (c) a system management unit, comprising: (i) a droplet manipulation unit; and (ii) a system control unit.

Description

201250929 VI. OBJECTS OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to microelectrode array structures, and more particularly, to the operation of discrete droplets, including but not limited to, based on dielectric power. Wetting microfluidic systems and methods. The present invention provides an expandable system architecture based on an array of identical basic microfluidic cell structures (referred to as "microelectrodes"). RELATED APPLICATIONS [0002] This application is hereby incorporated by reference in its entirety by reference in its entirety in its entirety, the entire entire entire entire entire entire entire entire entire entire entire entire entire entire content 17th & parent's name is "Field-Programmable"

Joint pending US patent application for Lab-on-a-Chip and Droplet Manipulations Based on EWOD Micro-Electrode Array Architecture

No.~H〇29,138 — and the name submitted on the following day of February, 2011

The contents of the co-pending U.S. Patent Application Serial No. 13,029,140, the entire disclosure of which is incorporated herein by reference. A microelectrode is a standard component used to establish a development path for microfluidics (similar to a CM〇s transistor used to develop digital electronics) to assemble microfluidic components into a network. Application of Combined Fluid Operation - The present invention relates to a structure having field programmable capabilities for establishing a digital microfluidic system including at least a Field Programmable Wafer Lab (FPLGC), field programmable Permanent display of n and fluid micro-cranes (Micro-Crane) The first generation of microfluidic biochips contain permanent silver engraved micropumps, microvalves and microchannels, which are based on the principle of continuous fluid flow. Flow microfluid 201250929 biochip compared to digital microfluidic bioptery two-dimensional microfluidic array expandable Discrete droplets of the same basic unit structure. Discrete droplets can be divided into independent controllable powers by the liquid _ __ facet === in the thin layer with conductivity 2 == Add a job, the polarity ===== Capacitance between the poles. Contains the biochemical μ σ 赫 and control the electric H, move inside the filling medium. In order to move the droplets, to the adjacent liquid ΓΓ 2 = electricity! The electrode directly below the droplet is removed for excitation. ί past called the year 'based on the manipulation of droplets of each nanoliter size by direct electronically controlled lions, the hybrid fluid technology has been improved in different ways. This is found in: U.S. Patent No. 6,911,132 B2, entitled "Apparatus for Manipulating Droplets by ectrowetting-Based Techniques", on June 28's of the secret year; Pamula et al.'s announcement on August 4, 2009 is US Patent No. 7, 569, 129 B2 to "Methods' for manipulating droplets by electrowetting-based techniques"; US Patent Application N, entitled "Apparatuses and methods for manipulating droplets", filed on October 9, 2009 by Pamula et al. 12/576, 794; Pamula et al., US Patent No. 7, 815, 871 B2, entitled "Dr〇piet microactuat〇r system", published on October 19, 2001; Pamula et al. US Patent Application No. 11/343, 284, entitled "Apparatuses and Methods for Manipulating Droplets on a Printed Circuit Board", January 30, and the name 201250929, published on August 10, 2004 by Shenderov et al., is Electrostatic Actuators. U.S. Patent No. 6, 733, 566 to Microfluidics and Methods for Using the same, US Patent Ν ο. 6, entitled "Actuators for Microfluidics Without Moving Parts", published on May 20, 2003, by Shender et al. 565, 727; Adachi et al., U.S. Patent Application Serial No. 11/430,857, filed on May 10, 2006, the disclosure of which is incorporated by reference. Into this article. These techniques provide a number of advantages in the implementation of the digital microfluidic paradigm described above, &amp; the manufacturing techniques currently used to produce these microfluidic wafers still rely on very complex and expensive manufacturing techniques. Some of these microfluidic wafers are currently produced in microfabrication foundries using expensive processing steps based on semiconductor processing techniques typically used in the integrated circuit (1C) manufacturing industry. In addition to the higher cost of semiconductor manufacturing technology, semiconductor foundries are not easy to enter. Some utilize printed circuit board technology and typically require a finished product or prototype turnaround time as fast as 24 hours. Disadvantageously, the conventional microfluidic systems established to date using the EW0D technology still have a specificity of 4 degrees. Good current (9) laboratories (including continuous flow and digital microfluidic devices) are relatively inflexible and are designed to perform only a single assay or a very similar set of very small assays. Advances in microfluidic system development, including continuous flow and digital microfluidic devices, have been hampered by the lack of standard commercial components. In addition, due to the current fixed layout of microfluidic wafers, new wafer designs are required for each application, thereby making it very expensive to develop new applications. In addition, ^ ϊ ϊ ϊ 是 is the advantage of the (four) from the semiconductor integrated circuit manufacturing expensive micro-machining technology. As a result, the cost of developing a new device for each specialized help is slower. Although mass production and processing equipment is less costly in reducing mold scale, the development of new equipment is contrary to the plateau, the present and long turnaround time may be too large in order to broaden the scope of medical, drug discovery, environmental and food monitoring and its two The application and range of microfluidics for microelectronics, the microfluidic approach to reconfiguring, more flexible and integrated devices with lit, and the need for technology and manufacturing of these wafers at a lower cost. The two are in a bioassay and a resource operation that ranks the resource management into a digital combination of bit combinations. In fact, what is more important is the lion-made combination of S-certified microfluidic components; it is used for standard components that have been established to perfect the number = electronic circuit path (similar to the development of fluid operations) In the network of Λ. Λ crystal) 'to assemble the microfluidic components to perform micro-film transistor (10) manufacturing technology 丄 fine processing device in the big "production can make micro- ΐ ΐ The human level, in order to test the needs of the law. The field is expected to upgrade the design of the l〇c to the application of the 'master' in the manual optimization of biometrics, time-consuming hardware design, 3 ΐΐ ιισ maintenance of the financial burden. The field of the microelectrode array structure is set on the second floor, and the "skin" is based on the microarray structure to program "blank, wafer, and thus realize the development of new devices within a few hours. Therefore, the prototype is also easy and cheap. There is a need in the art for new structures that contribute to the generation of manipulating droplets and the new (4) scalable design. The field is able to complete the hierarchical microfluidic design approach, which provides a path to deliver the same-level computer-aided design UAD support to biochip designers, which is what the current semiconductor industry 201250929 deserves. There is also a need in the art to improve conventional digital microfluidic structures such that applications beyond the L0C design can be implemented, such as field programmable permanent displays and fluid micro-crane systems. / It is believed that the microelectrode array structure can provide a solution that meets the above needs with a number of advantages over conventional digital microfluidic systems. The microelectrode array structure can be used by different digital microfluidic techniques including, but not limited to, EW0D. If this structure is implemented based on the EW〇D technique, the EW0D microelectrode array structure. SUMMARY OF THE INVENTION The present invention discloses a microelectrode array structure device comprising: a • a bottom plate comprising a microelectrode disposed on a surface of the lining, wherein the microelectrode is covered by a dielectric layer, wherein the parent The microelectrode is connected to at least one grounding element in the grounding structure, and a hydrophobic layer is disposed on top of the dielectric layer and the grounding element to form a hydrophobic surface having droplets; b. Field programmable structure Used to program the configuration of the poles to read the selected shapes and sizes to create the micro-element and layout, and the c. 2 system management unit, including the droplet manipulation unit and the system control unit. In another embodiment, a microelectrode array f 采用 fabricated using CMOS technology includes a .a · cmos system control block 'including: a controller block for providing a = processor unit, a memory space, an interface circuit, and Software programming capability; wafer, office for storing configuration electrode configuration data and micro-electrode array structure layout; capital location | 'secret storage (four) actual location; and flow gymnastics, for the purpose The layout information, the drop location map, and the physical excitation of the microelectrode array structure from the controller block are translated into droplets; and • a plurality of fluid logic blocks including: a microelectrode 'located on top of the CMOS substrate Table-private-memory view data storage fresh element 'used to spread the incentives of the electrodes; and control circuit blocks for managing control logic. In one embodiment, a film made by thin film transistor TFT technology The microelectrode array structure device comprises: a · TFT system control block, comprising: a controller block, 201250929 for knowing: for the processor unit, the memory space, the eight force; Piece layout block for storage routing and software programming to configure layout information and data; droplet location map: ^ dip and microelectrode array junction and fluid operation management ϋ for the actual droplets from the reservoir Position and graph of the micro-array structure, the physical location of the droplets in the ground position J &amp; from the controller block, its set of electrodes, excitation and removal =贞.^发f is given to the f matrix block for separate "per recording" ^, moment _, including: pole bus, thin film transistor, storage power „ 匕 3 gate bus, source includes source driver And the gate drive ^ source matrix controller, the chip, using the TFT (4) to send the driving data to the driving column structure to install the correction method i: the function of the micro crane; b · according to the hardware description language to generate the ordering dry crying = more Descriptive language execution ship certificate; laboratory, permanent ί^^^^^^; d. according to the sorting graph model _ system level 仃 process; e • will come from the microfluidic module library and from the design rules to the synthesis process; f. Measurement of the resources on the wafer The timetable for the sowing operation and the built-in self-test building from the synthetic processing. The input specification of the profitable specification performs geometric synthesis to generate the rational design of the biochip, according to the biochip combined with the specific physical information. Utilities. 'Generate a two-dimensional geometric model from the microfluid Wu, and rhinoceros, 1. Perform physical level analogy and design verification by using three-dimensional geometric models; design of room, permanent display 11 or miniature crane Loading into the air, in yet another embodiment, a field programmable permanent system including a microelectrode array includes: a • a transparent top cover for protecting liquid; b. a display located below the top cover Including the microelectrode array; C·multiple color liquid, 201250929, d • ink configured from the microelectrode array of the display to store the recorded color test and e. display miscellaneous device, =ί? A plurality of configuration electrodes of the tamping microelectrode are energized and de-energized to deliver the liquid to a selected location of the display agency. Column structure - bottom-up programming and design of the microelectrode array b · ϋ right ., .a • erase the memory of the micro_array structure; a group of tearing, smashing and size Configuring a microfluidic element of the electrode, the multi-window body assembly arranged in a _ form in the micro-rod 5 field programmable structure, including a reservoir, an electrode, a mixing chamber, a detection body, a droplet path, and a designation a functional electrode; c. a physical distribution of the micro-claw 7L member; and a microfluidic operation for the sample. The on-wafer system device of the on-wafer system device for micro-electrode arrays, based on microelectrode arrays, including: microfluidics and microelectronics, includes: a • on the 曰θ slice a plurality of fluid logic blocks inside the device, comprising: a microelectrode, = the surface of the CMOS substrate; a memory storage unit for holding the micro-test; Controlling the peach block, using ride control logic, wherein the fluid logic block is for microfluidics and microelectronics. The plurality of microelectronic circuits 'including controllers, memory, and other logic gates' On-wafer system microelectronic fabrication techniques and design/analogs produce fluid logic and micro-f sub-circuits that are used as standard libraries for designing microelectronic circuits. VIII, and, in another embodiment, the microelectrode array structure can be used in other digital microfluidic technologies such as dielectric electrophoresis (DEP) based technology, but for the purposes of the following, EWOD technology will be used to illustrate Various embodiments of the present invention. Various embodiments of microelectrode array structures are disclosed. In one embodiment, the microelectrode is the basic component of the present invention. The microelectrode is similar to a 2 CMOS transistor in an ASIC design. The microelectrode is a standard for establishing a development path for digital microfluidics (similar to a CM〇s transistor for developing digital electronics), assembled into a network with =: components, and the network implementation supports multiple application combinations. The fluid is made. 201250929 A well-established manufacturing technique such as (10)s or thin-film electrical rafts can contribute to the digital microfluidic system. Li electric structure to complete the hierarchical integrated digital microfluid design. Another embodiment is a microelectrode array structure according to customer needs, a plurality of microelectrodes (for example, "" ψ electrodes of the same shape and size. Microfluidic system _ two === Months' All of the electrodes (each can be multi-blooded, squirting, squirting, and new configuration. After configuration or programming, through the electrodes, the fluid operation in the digital microfluidic system is achieved. Doing fine vertical matching (4) In the if implementation mode, the droplet manipulation of the microelectrode array structure can be based on the kneading surface 1 归 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The </ RTI> </ RTI> </ RTI> can also be passed through the present invention. In another embodiment, a single microelectrode logic and analog (high voltage shaft) circuit are designed to be hidden directly beneath the metal microelectrode in the following manner. In another embodiment, the 'microelectrode and the system' are electrically arranged to minimize the number of interconnects required. The amount of interconnected micro-micro-electrodes and the bottleneck of expanding the total number of micro-electrodes. ^ The two-electrode_junction can be a passive top cover, an active top cover used as a ground or another ugly micro-electrode array as a top cover. A passive cover means no circuit on the board. And it can be used as a transparent cover for the test surface. The use of bribes as a means of measuring the medium has a longer shelf life. Even the bi-planar structure consisting of two active plates (axis) Not very desirable) can still be employed in micro-scale structures. In this case the top plate is coated with continuous electrodes which have a combination of electrical conductivity and light transmission in the thin layer. A more advanced top cover 201250929 can be realized by another coplanar microelectrode array upside down. In all cases, when manipulating the droplets in a microelectrode array structure provided with a top cover, This ability to adjust the distance between the top plate and the bottom plate (referred to as "gap") is an especially useful feature for tunable microelectrode array structures, providing greater flexibility for liquid verticality under coplanar structures. Medium: Microelectrode _ structure will The conventional digital microfluidic, '°°, g is a two-dimensional structure. The two-dimensional structure is a combination of two face-to-face co-panel discs with flexible gap adjustment capability. This three-dimensional structure will be clear by the fluid micro-machine In one embodiment, the microelectrode array structure can be used to implement a field programmable f LOC (FPL0C). (3) Field programmable by mitigating LQC design ^ Manually optimizing bio-Zhe, time-consuming hardware design, expensive The burden of the job and maintenance process can significantly reduce the labor and cost associated with the generation of digital microfluidic money. FPL0C is similar to the FPGA in ASIC design. Custom hardwire L〇c (modified turnaround time of the class) It takes a few months, and it takes only a few minutes to a few hours to modify the turnaround time. ^Improve the towel's general service structure to realize the program design!!:··, the programmable permanent display is Such a display can be privately smeared, but after programming, the power t connected to the display will be permanently lining. The field-programmable design is permanently versatile with the invention of a field-programmable permanent display. It can be easily recorded by the display of the FPLGC using the column structure as a record. Obvious should wait. Private newspapers or books, or posters, kanbans, pictures, and symbols, use fluid cells based on the _microelectrode array structure. The director of the single-layer secret-side compound organizes the best plan for the finest and the second. New Zealand's fluid micro-crane system can finally be used for printing bio-tissue 12 201250929 [Embodiment] Micro-electrode array structure can be applied to such as dielectric-based ===== for the purpose of discussion, will use _ interface The desired hybrid, smear, and pole designs on the _ include the liquid droplets in the layout of each electrode design. It is composed of a plurality of electrodes based on L 〇 C. The drip position is traversed by mutually parallel glass plates 120 and 121 connecting different areas of the design. The bottom extension 19 = position f fluid device comprises two phased arrays, and the top plate (10) is coated with (10) of the indium germanium (10) containing the individually controllable electrodes 13A. It is preferably passed through a combination of features such as oxygen transmission. Will be coated with a dielectric insulator such as two, having a conductivity in the thin layer and 160 〇 (for example, the wettability of the surface of the hydrophobic film such as poly*fluoroethylene AF is increased and controlled in the droplets; ~^C) Add to the plate to reduce the learning sample's Lai 150 and such as the heart % _ capacitance. The filling medium containing the biochemical zone to help the droplets 15 夹 is sandwiched between the plates = the electrode 18 adjacent to the droplets is moved and the electrodes below the droplets are removed and excited. Control the voltage while the droplet 150 is in front of it. The top view of the droplet 150 from the top of the regular face on the electrode = 90 is black indicating the application of the control electrode 180. The electrode 18 〇, the force gradient, thereby achieving the gap of the droplet 1 to create the potential of the dielectric array, can be _ _ _ I = by changing the droplet along the linear electrode. Can pass. Range of , 201250929 2 droplets can move at speeds up to 2〇cm/s. The pattern of droplets 151 and 152 is also delivered under the control of the clock voltage. Drying is limited to the user. The apparatus for manipulating dielectric droplets can be patterned as shown in FIG. 2 to pattern a plurality of microelectrodes 261 on the bottom substrate 245. Each of the i ΐ ^ 260-Pack ί τ microelectrode 261. The top plate contains the interfacial force between the surface of the contact surface of the unpatterned droplets 250, which aids in the thickness of the liquid liquid residue 1 and the thickness of the dielectric liquid residue 1 270 __. The dielectric droplets are pumped to the front of the micro-power ϋϊί2 in the energized state by reference to _j Ξΐ micro. In the case of a parallel plate device with a gap height of 150 faces (drilling dielectric droplets Ο5,), sixteen burning dielectric droplets (tear DC) two in the Shixi L&quot; ί droplets (250V〇C) . The polarity of the applied DC voltage is opposite, and at the same time, the test reaches the heart of the heart. LDEP #口 The difference between the EW0D excitation mechanisms is that the physical double-plane electrode is shared between *DEPs.

ί is usually applied less than the enthalpy (four) or low-frequency AC voltage, and the bismuth is in the range of 1' and less than 150V; and LDEP

Lojfi II ^ ^ excitation (2 〇〇 _3 〇〇 VrmS ) and higher frequency i-day, the range of AC driving voltage from 5 kHz to 200 kHz = ii: _i00Vrms. In the following description of the invention, the invention will be utilized, but in most cases the voltage and frequency are only excited by appropriate modifications, and the invention also covers DEP excitation. The concept of a dot matrix printer is adopted on the following month. That is, the mother electrode in the microelectrode array structure is a "point" that can be secretly shaped with a micro-element. In other words, each microelectrode in the electrode array can be configured as Microfluidic components are available in different shapes and sizes. According to customer needs, multi-tilt electrodes can be considered as being "graiped" and can be simultaneously energized to form different configuration electrodes and perform micro201250929 fluid operation '' , „ _ 作用 曰 曰 曰 曰 激励 激励 ” 指 指 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 向 施加 施加 施加 施加 施加 施加 施加 施加 施加 施加 施加 施加 施加 施加: The continuous transfer of droplets; or "removal of excitation" Μ can be polarized and flow toward a stronger electric field strength. En = 日 疋 removes the voltage applied to the electrode. The present invention 8 (4) forms a microelectrode array with different configurations of one pole by micro-hybrid. In the present embodiment, the microelectrode array 1 is a standard microelectrode ^ electrode 310. The microelectrode array 3 〇 0 is fabricated based on the application and the I body micro method two Hi as the microelectrode 31 〇) and independently from the final L0C array 3, 0 ΐ ί, as a specification manufacturing technique. In other words, this micro-electricity is slightly or “pre-configured” L〇C. Then, based on the application requirements, t 320 includes _ microelectrodes 310 (ie, 10 x 10 micro-electrodes into thunder electrodes refers to 10 x 10 micro-electrodes 310 combined for use as i-slope; z·'!^ and Simultaneously motivating or removing incentives at the same time. Generally speaking, it is provided in 2 non-volatile memory (such as ROM), and can be "in the field" with t and =3 set: return the device to its manufacturer. Figure 3 illustrates the droplets and the size and shape of the electrode of the present invention can be configured based on the application. The example of the configuration electrode is configured to be electrodes 320 and 340. The butterfly has 0 microelectrodes of the wrist. Dimensions, while the configuration electrode 340 has a lightning size. In addition to the configuration of the electrode size, the different shapes of the configuration electrodes can be configured by using micro = columns. The arrangement of the tube electrodes 32 is the I-electrode 33G is 2x4 micro The rectangular shape of the electrode, the electrode 360 is arranged on the left side of the toothed square, and the arrangement electrode 37 is circular. The size of the droplet 350 and the size of the arrangement electrode 320 are also shown in Fig. 3: Controlling the size of the electrode 32G, and setting the body electrode 32 of the droplet 350 Dimensional fit, due to &amp; "configure electrical system. The field programmable design of the $2 means that the droplet volume control 5, μ and microfluidic operation will require different droplet volumes, and 15 201250929 For the L0C designer, the function of the hope. The dynamic programmable control of the droplet volume is the height period as shown in Fig. 3A. 'The shape of the electrode of the present invention can be based on the application. The configuration electrode _ shape can be multiple micro The electrodes are to be implanted, and the groups are configured and energized to form a configuration of the desired shape 2. In: t Ming I, the shape of the dipole can be square, square with dentate edges, six f, and /, Referring to Fig. 3A, the shape of the arrangement electrode of the transport path 340, the detection window 350, and the mixing chamber 360 is square. The reservoir 33 is a large-sized electrode of a determined shape. The waste reservoir 32 is a quadrangle. Figure 3B illustrates an enlarged portion of the reservoir 330 and the configuration electrode 37. It also illustrates the comparison of the structure of the substrate side with the field programming structure. The permanent side reservoir 331 and the four permanently etched electrodes. 371 in Figure 3B At the same time, as a comparison, a similar shape reservoir 330 obtained by combining the microelectrodes 31 〇 with four identical shapes and sizes (4 x 4 microelectrodes) is illustrated in Fig. 3B. Fig. 4B And 4C illustrate an enlarged version of the reservoir 430 of Figure 4A. Figure 4B illustrates a physically etched reservoir structure 431 fabricated by a conventional LOC system. The elements are shown as permanently etched reservoir 431 and four permanent The electrode 34 of the sexual surname is compared to FIG. 4B (conventional design). FIG. 4C illustrates a field programming design, which has a similarly sized configuration I, a liquid 432, and a set of electrodes 472. The configuration reservoir 43 can be manufactured by combining a plurality of microelectrodes 411 into a desired size and shape to fabricate such a reservoir element. The set of electrodes 472 comprises 4 x 4 microelectrodes 411. After setting the shape and size of the desired microfluidic assembly, it is also important to set the position of the microfluidic components and how to connect the microfluidic components together as a line or network. Figure 4A illustrates the physical location of these microfluidic components and how these microfluidic components are coupled together for use as a function LOC. These microfluidic components are: a configuration electrode 470, a reservoir 430, a waste reservoir 420, a mixing chamber 460, a detection window 450, and a transport path 440 that connects different regions of the LOC. If the current % can be set to L0C ', then after the layout design, there will be some unused micro-electrodes 410. After the FPL0C is fully qualified, the designer can try the hardwired version 201250929 for a reduced cost, and then the unused microelectrodes 41〇 can be removed. The shape of the microelectrodes in the microelectrode array can vary. In one embodiment of the invention, the column is shown, and one of the microelectrodes is highlighted as a 5 〇 configuration electrode. Figure 5A has a total of 3x2 configuration electrodes. In the other 6-to, 5B said _ of the hexagonal microelectrode, and = ^ is shown as 5G3. 6x6 micro-electric _ into the configuration electrode, the figure 5 ^ = large 2 ^ gap shifting material has an advantage. In the embodiment of the embodiment, a plurality of arrays of square microelectrodes in the layout of the wall tiles are shown as 505. 6x6 microelectrodes constitute the arrangement electrodes 5〇6, and the electrodes are arranged. The interdigitated edges of the hexagonal electrodes have an advantage in moving droplets along the matching gap, but this only occurs in X^: many other shapes of microelectrodes, and is not limited to the three open = discussed here. It is very costly to use EVW〇D technology as a _microelectrode array structure, microelectrode is mandatory. However, the maximum uncertainty of the precise i-module of the droplet motion in EW0". When the droplet is in contact with the solid surface, the interaction between the body and the solid molecule can produce an attraction (turbidity iiii). The capillary force is only the size of the effective long electrode of the contact line and is not a configuration electrode composed of micro_. Thus two differently shaped droplets 510 and 520 in contact with phase 540 have 5, an effective length 530 and have the same on the droplet The capillary force between the Chen and Yu Qiao, the shape of the contact line is indeed on the microelectrode ~, a. 〃, dust, when the aspect ratio is reduced, the shape of the droplet becomes more directional and stimulated The hexagonal microelectrode arrangement electrode 555 contacts the square: the size of the capillary force is only determined by the effective length 552 of the contact line 553', and the gap between the edge microelectrodes is generated at the effective length 552. The gap in the mid-2012. The gap in the effective length 552 means a shorter effective length and also means a smaller capillary force on the droplet. Figure 5F illustrates contact with the excited square microelectrode configuration electrode 565 Same liquid 550. The gap within the effective length 562 of the contact line 563 is greater because the front tribe of the contact line 563 is within the gap of the microelectrode. The effective length 562 in Figure 5F is compared to the effective length 552 of Figure 5E: Much shorter, the driving ability of the configuration electrode 565 in FIG. 5F is smaller than that of the configuration electrode in the figure. FIG. 5G illustrates the same droplet 550 that is in contact with the excited square microelectrode arrangement electrode 5, but In the wall tile layout, the effective length 572 of the contact line 573 is shorter than the effective length 552 in Figure 5E, but longer than the effective length of the effective length contact line in the figure 对于 for moving the droplet from its starting electrode to expire ^ Electrode = important. Other methods can be implemented (such as making the interdigitated side of the electrode small = width) to compensate for the capillary caused by the gap between the micro- and so on. If the driving ability of the electrode is the most concerned, The field uses a hexagonal microelectrode array as shown in Fig. 5B. The microelectrode structure of the Jin array structure can be designed based on the current common _ wafer structure. Based on the double flat * EW 〇 D "pole knot ίί ^ 3 pattern Chemical The top plate 12G is coated with a continuous ground electrode. The dielectric insulator 17G provided with the water film (10) is added to the wetness of the plate and added to the control (10) and the like. Filling the medium; == facilitating the transport of the droplets 150 inside the filling medium. The embodiment t' of the present invention uses a microelectrode ^. The coplanar Z-based microelectrode array structure technology based on the coplanar structure In the mode of operation, 'sealing test (4) coffee, "noisy ^== 201250929 has the purpose of longer shelf storage life. In the present invention, the 'microelectrode plate structure can be in many ways, especially in coplanar The knot is physically implemented. Figure 6A illustrates a "grounding grid" coplanar microelectrode structure including a drive microelectrode 610, a ground line 611, and a gap 615 between the drive microelectrode 61A and the ground line 611. When the electrode is energized, the driving microelectrode is "charged by a square wave or a driving voltage. The ground line 611 is on the same plate as the driving microelectrode 610 to achieve a coplanar structure. The gap 615 is used to ensure no between 610 and 611. Vertical overlap Figure 6B illustrates a conventional drop operation unit that includes a permanent side of the electric 62 and 62 ground (in the vertical and horizontal directions). The two electrodes and the 621 are respectively level and The ground line 631 in the vertical direction is separated. The droplet _ is located at =: pound: the droplet 640 is too small to contact the surrounding line 631 'and does not perform the excitation of the droplet 64 。. This may be when Potential problems in the handling of droplets. The usual remedy is the mounted droplets 650, but it is often difficult to manually control the desired droplet size. H 'Limited by the ground wire 631 in the sling system, the electrode 620 And 621 cannot have an interdigitated perimeter for improved droplet manipulation. /, Improved droplet operation unit of the present invention in a sag structure. Α 20 芭 现场 现场 现场 现场 现场 现场 现场. The electrode can be designed in the form of a ft. In the example, 'configure electrode 620' is packaged as Jr's purpose 'droplet 641 is similar to liquid _, (Fig. $ ΐ 641 641 and configuration electrode (10), * multiple ground lines 611 physical weight should therefore achieve effective droplets Another embodiment of the electrode ground pad coplanar microelectrode. The drive micro is located at 710 sentences 11 = the ground pad 711 is located at the four corners, and the gap 715 is implemented by L/1 instead of the one shown in Figure 5A. In the embodiment of the grounding line, the present ratio, from the ^ ^ ^ cover \ pad to achieve a coplanar structure. Compared with the conventional embodiment, Figure 7 Αίί provides group grounding (groupgr_di啲 (in 21 The grounding rod disk 711 overlaps with the droplets (5), which is more than the conventional implementation 19 201250929

The basic one-to-one relationship is more A pad, then the size of the droplet is only dependent on the droplet. The overlap between the droplet and the ground pad is: the key is needed, because this Limitation; no matter the size of the droplets, such as the absence of a stack of turntables, as shown in Figure 7B. For the droplets, the droplets are heavily grounded on the Tan plate. The electrode is proportional to the surface area of the pad. Small-scale grounding also with electrodes and grounding will make the manufacturing process a blessing. Luxe nnshan /, 匕 physical ’ 'This is optimized to connect ‘: Table tt this ^ ground pad, will be attached to the midpoint of the pad and drive electrode; up to 2: liquid = drive. The uniform overlap of the microelectrodes and the droplets ensures that the reliable droplets are manipulated by the PCB. The microelectrodes (usually less than 1〇〇χ100_2) are ultrafine, so they need to be derived from the manufacturing of the converter. Another implementation of the micro-patterned grounding plate ''coplanar microelectrode structure' does not have a ground wire or a turntable on the same plate as the microelectrode. Instead, one serves as a ground pad to achieve a coplanar electrode structure. As indicated by the 4x4 side, the squared anode 810' has a gap 815 between the microelectrodes. In the present embodiment, the iir microelectrodes 81G can be configured to be electrically grounded by physical connection. In the present embodiment, the 'four (four) microelectrodes 810 are configured to be grounded. The present invention has the advantage of being grounded compared to the one-to-one electrode and ground structure in the conventional embodiment. In addition, the dynamic configuration of on-site programmable and micro-micro-electrode immersion, configuration electrodes, and configuration of ground pads provides higher flexibility and higher detail. As shown in Fig. 8A, the droplet 85〇 can only move in the y-axis direction due to the pair of electrodes and the ground structure in the prior art. In this configuration of the coplanar structure, due to the distribution of accumulated charge between the electrode 82A and the ground pad, the droplet 850 will be located between the excited electrode 820 and the ground 20 201250929 electrode marked black. center. The only way to move the drop 850 is to energize and energize the adjacent electrode 830; in this manner, the liquid 2 is in the direction of the line shown by arrow 840. In contrast, the surface of the co-planar surface of the pico-equivalent array structure can be used as shown in Fig. 8C. When "configure the electrode," is moved. Similarly, when the "configuration electrode" 861 is energized, when the temporary "configuration electrode," 862 is energized, the droplet 852, = 8| = hyperactivity. The excitation of the electrode ', _ (and the "configuration electrode" 862 is pulled onto the "configuration electrode" 863. For the purposes of illustration, 2 Ϊ = implementation includes the most (four) port manipulation of the ground electrode or the excitation electrode Good result. / Zheng to violate the drop

In the step-by-implementation mode, the LOC aspect of the microelectrode array structure technology is used; the G-plane tf ground network is disconnected from the ground. Another "grounding", ΐΐΐί 断开 is disconnected from the ground. In another embodiment, the "earth Tan disk" or "program is set to do not replace". In the embodiment, the co-planar joints can be slaughtered; ί=connected' #(四)物崎咐__带=H-circular and transparent top plate is adopted in a hybrid structure of the ί electrode array structure technology The gap distance for the top array structure shown in Fig. 10 is optimized. The electrode plate 1020 is placed in the field by the side electrode package of the micro electrode including the three micro-distribution electrodes. Miscellaneous includes the ten-health. This implementation is especially useful in applications such as the king a and the LOC. Although the micro 201250929 is designed to improve the shape and size of the electrode, it is still highly desirable to adapt. The widest range of size and volume of the droplet structure. This is because the field programmable LGC can be adapted to the wider the droplets, the more applications can be achieved. The optimized gap distance is the case, Yang Lai can It is reduced under the condition of not _1_. The supplementary method is usually applied. In the coplanar structure, in the second method, G is manipulated, in which the droplets are sandwiched between the top plates. The second method is usually applied in a biplanar structure, and the method of combining the modes merges the coplanar junctions. And the function of the adjustable gap between the top cover ship 1020. This kind of mixing ^". As shown in the figure Π) __ Droplet: Under the condition of the top is manipulated. The droplet _ is manipulated to be sandwiched between the immersion/electrode plate 1020. The present invention is not limited to the micro-electrode array structure technology, and the Hi-inch fine-grain can be closed while other embodiments of the present invention are based on a coplanar structure, and the bean can be added after the bean == to the L0C. Therefore, it is particularly important that the fixed electrode array structure is not required, because the shape, size and position of the liquid storage device are fixed, and the fixed C埠: ί 1160 1150 and the plate 1170 are loaded with tm. The load does not have to be very precise since the passive cover 118〇 is placed after loading the sample 1150. The vestibule—in the embodiment, all typical microfluidic operations can be performed by configuring and configuring the electrodes under the == column structure. The microfluid droplets micro-excited any view of the red droplets. For example, the eye-catching operation can be 2: loading the droplet into the droplet microactuator; assigning one or more '=, splitting, separating or splitting the droplet from the source droplet into two or more droplets Delivering any direction of I from one position to another; placing two or more droplets a 22 201250929 exciter in yet another embodiment,

In addition to the conventional control of the body operation, the advanced micro-slit operation of the typical micro-J can be carried out based on the micro-electrode array structure; the residual droplets are washed; the __ loses the 铋徉, the method cool, and the ad volume ); in the case of lower driving voltage; line cut *r low speed conveying droplets; performing precise cutting; performing crying two-person = sentence reciprocating mixer to improve mixing speed; improved by loop mixing over multi-layer mixer Mixing speed; the advanced grasped body operation described herein; and/or any combination of the above. One implementation of sample preparation under the microelectrode array structure EWOD ^ DEP; 22^ = electrode (·, 1221 1222, 1223, 1224, 122^122) 62 ii; = i(rnflgUred)" means Figure (10) and both cross-sectional views, producing (from 1220 to 1226) applying a high frequency signal (VHF) 1230 to the strip electrode, The non-uniform electric field inside the droplets uses the particles to drive the particles to the right. Two sub-droplets 1251 and =2 having different particle concentrations are obtained by applying a low frequency signal (VLF) 1235' on the square electrodes 122i and 1222. As an example, when 2 MHz and 6 〇 Vrms signal / 1230 are applied to one of the strip electrodes from left to right, the particles are attracted by positive DEp. After the cells were concentrated to the right side of the droplets, the droplets were split into two sub-droplets by EWOD by applying 8 〇 Vrms and 1 kHz on the two square-arranged electrodes. As a result, by exciting the strip electrodes from the left to the right loop, the cells are aggregated (right sub-droplet 1251) or diluted (left sub-droplet 1251) as shown in Fig. 12D. 23 201250929 FIG. 13 shows another embodiment of the sample σ potential under the microelectrode array structure using the droplet assignment technique. One of the common sample preparation steps is to de-stem cells from whole blood to obtain plasma for immunoassay. As shown in Figure 13, Jingchuan = using the droplet halving technique to produce smaller test drops (this axis is too small to form the desired (four) 1350. The droplet halving technique and the small gap L = have f Drop the small droplet 1345 from the reservoir/droplet: Smudge® to form a larger droplet 1350 while blocking the blood cells 138〇.

The resistance is mainly used to illustrate the droplet halving technique, and it is possible to use the same shape as I if 2 to generate smaller droplets by using the microelectrode. It does not use the main cause of blood cells. By using droplet aliquoting techniques, this is: removing particles from droplets' and can be prepared for diagnostic testing. In the second embodiment, the microelectrode array structure has a difficult operation from the loaded liquid trap. Figure 14A and other U-cars transfer the sample port and reactants to the reservoir, they are not fine ====open droplets_mouth droplets and the reservoir 1440 does not have any heavy tops. Droplet 1420 is even relocated into reservoir 1440. It is difficult for %?f L〇C' to make the droplet 142〇 reservoir 'over the position where the temporary arrangement electrode 1440 is overlapped, and the droplet 1420 can be pulled to the temporary configuration after the liquid storage. 14 self-positioning embodiments of the electrode i side. The sample is then accurately positioned to store ',' and the reservoir 1440 is energized, R 2 liquid meter, as shown in Figure 14B. formula. One embodiment of the droplet generation process is conventionally used to generate droplets. In the present H/middle door 1530 and the stacked electrode 1 coffee reservoir 1515), and the shape of the needless 1530 may be square (the shape of the square reservoir 1515 may pass through the pole 1535. In another embodiment, Other shapes. As shown in Fig. 15, the electrode array is in accordance with the design requirements, and the generation of droplets refers to the process of extruding the droplets 1550 from the square reservoir 1515 24 201250929. In order to initiate the droplet generation process, the first pole The leg acts as a pull back (pulb (4)) electrode, and then energizes another electric body to squeeze the body. Subsequently, the liquid finger is extruded by exciting the adjacent number of the device to finally produce a droplet; ^Liquid: One set of electrodes (4) includes 4配置4 microelectrodes arranged, and thus is square. The size of the electrode drain can be set in the range from pin micron to several millimeters. The shape may be square or other shape. In this volume, the reservoir may be square, circular or other specific shape. Implementing a specific droplet generation process called "liquid fraction" uses a micro-array structure first Via microelectrode or small reservoir 1 61G produces a smaller droplet 1615, which then passes through == 630. Conventionally, the 'droplet size approximates the size of the electrode, and does not ΪΪ 更 更 更. In the present invention, the droplet aliquot can be used to achieve More precise control. In addition, in the reverse way,

How many smaller droplets 1615 can be produced by Sttr^63G to measure the volume of L droplets 1630, as shown in FIG. Figure of a droplet delivery embodiment under the H electrode array structure. Such as

= microelectrode, thus square. Droplet 175G is located at the center of ΐ ^ , , .卩 (or above). In a conventional microfluidic transport operation, the droplet 175Q = shaped electrode can only be moved along the north-south and east-west from the configuration electrode 1735 to the configuration electric ==== species I f can not make the droplet 1735 from the configuration electrode Π 35 Diagonal shift: electrode and liquid ^ ▲ ▲ there are: 3] heavy drop generation - four = = pole 1760%, the defensive solid implementation is configured as a temporary step riding _ ' and then energize the desired configuration electrode 1733 and Temporary configuration electrode = 25 201250929 lit excitation 2 7 will drop the droplet 1750 along the diagonal __ configuration electrode, VL all ^ 古古户^不' Based on the invention, the droplet 1750 can be set at the square electrode . Further, the transport of the droplets is not limited to eight directions. The phase is configured to be outside the eight directions to deliver the droplets to the destination. Domain excitation Uf configuration

The path ^ has a portion M for connecting the different portions of L〇C to transport droplets. In the present invention, the "L0C under the structure of the microelectrode array", such as the ^1=f mode, does not require a fixed transport path for transporting droplets with the same child #丨a /TV, and the Xiaoxiang Lai route will be a good start. The position 廿曰~2 is obvious 'this routing processing will be very different from the conventional ϋ microfluidic design, because the excitation is not 185 (Μ85Η can be moved along in any direction including the ship in the _ droplet 1820 〇lilt Ι^ιΐΐη^ ”, this 旳 VLbl routing is different, except the routing path selection 丄ΐ 丄ΐ = 3 problem needs to be solved in the actual limit imposed by the fluid properties and = the timing of the Duguo off the drop schedule An _ Contamination can be moved by selecting the route so that the droplet (4) is first axis and ^ 1852. The consideration here is to arrange the delivery timing of the liquids $851 and 1852 so that they are not moving to their destination. If you think about pollution, you can choose any overlap of the route brain to avoid fluid transfer. For the purpose of configuring the electrode brain ^ = two Lai Guan and 1852, you may need to consider arranging droplet excitation Time ^ ancient = route 脳The difference in the length of the route foot can be turned into a tree, so the more complex it is, the more the top-down design will be required, with two drops of routing and timing. After defining the biomedical microfluidic function, use the system level (aixhitecturaHevel The wire provides a microfluidic function to the L〇c resource and maps the microfluid function to the time step of the excitation. The invention transports and moves the droplet under the microelectrode array structure called "temporary bridge 26 201250929 technology" Another embodiment is shown in Figures 19A-19C. Droplet cutting and evaporation sometimes cause the droplets to become too small and the droplets cannot be reliably excited by the electrodes. Figure 19A shows two configurations separated from each other by the gap 1960. Electrodes 193 and 194. The droplets are located on the left side of the configuration electrode 1930. The gap 1960 between the two arrangement electrodes 193 and ι 94 is sufficiently wide to be able to isolate the two configuration electrodes 193 and 194. The drop 1950 on 1930 does not contact the next adjacent iridium electrode 1940. Figure 19A illustrates the movement of the drop 195 〇 from the counter 1930 to the arranging electrode 1940 during conventional drop transport. Often it fails because the configuration electrode and droplet 1950 do not have a physical overlap to change its surface tension. _ 19 The droplet 1950 from Figure 19A is delivered to the desired configuration electrode 194. The 'n-like' area is covered during the process. The microelectrode is energized. The residual counter electrode 1970 partially covers the left side configuration electrode, the gap, and the entire next configuration electrode 1940. As shown in Fig. 19A, the "dental shape, the matching pin has a physical overlap, and as shown in Fig. 19A, The configuration electrode 1979〇7^= causes the droplet 1950 to move on top of the configuration electrode 197A. &amp; After the electrode 1970, the toothed arrangement electrode 197 is removed from the lit mo°, the 1950 microelectrode_structure is transported and the shaft droplet is again - the implementation mode = the ground droplet will become too small, j As shown in Fig. 20A, there is a dark 湳, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The way to not move is to use electrode column excitation. One of the residual droplets is excited, as shown in Figure 20B. The excitation electrodes are arranged in a plurality of columns to perform the electrode column excitation electrodes, and the three-column arrangement electrode electrode arrays 2020 include the pole column excitations indicated in the portion marked as black in the micro, as shown in FIG. 20, depending on the application: : The width of the column is 微 a microelectrode, but it takes eight turns. The most efficient electrode column excitation is to have a set of electricity 27 201250929 f f ' ΐ width 敎 to the radius of the droplet. This is why the three-column group is here. The length of the touch depends on the application, usually as long as possible. This three-column configuration of 9ni moving droplets 2050, in the first place of the configuration electrode column, with the f electrode column 2021 is excited, the trailing configuration electrode column 2022 by her: second, regardless of the size of the droplet, three column configuration The electrodes have a degree of contact line. As a result, the droplets can be effectively and smoothly fΪj such that the capillary forces on the droplets are consistent and maximized. Therefore, the droplet j is moved lower than the drive f which is lower than the reliance on the wiper. This motion 5 can be used to achieve a smoother movement at a much lower drive voltage due to the consistent capillary force of this technique, by achieving a low speed = ίίίϊ: effect on the droplet velocity (especially in low speed situations) Month. This smoothing of the 1-pole column excitation at the critical driving voltage has been observed: under the condition of a lower square wave, 塾 and _ 80/ΖΠ1 gap, at 1〇 cSt Shi Xi oil in the slow 忤 = f drops (1. - diameter). The length can be configured as a single 冲 Η Η Η Η Η Η 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 可以 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单 单. Used for ί ί ,, using three configuration electrodes to cut the droplets. One embodiment of a typical three electrode _ of the liquid (10) under the ruthenium structure of the present invention is as shown in Fig. 21A. Two configuration electrodes are used, and the droplets to be cut 9 9 t are at the top of the inner (four) pole 2U1 and partially overlap the outer configuration electrodes 2 and 2112. During the dicing, the outer two configurations ^^110 and 2112 are excited, and the internal miscellaneous 21 === wet external two electrodes. In general, the hydrophilic force of the two = liquid hair stretches the droplet, and the hydrophobic force of the towel core pinches the liquid into two sub-droplets 2151 and 2152' as shown in Fig. 21C. The present invention is used to achieve a precise start similar to the three-electrode cutting. The liquid droplets are cut by the two configuration electrodes 2210 and 2212. The droplet 2250 is slowly but firmly pulled toward the configuration electrode 22ι and now 28 201250929, as shown in Figure 22A. Here, two sets of five columns of configuration electrode columns 2215 and 2216 (marked black in Figure 22A) are used to pull the droplets apart. Fig. 22B illustrates that by moving one microelectrode column at a time, the two sets of electrode columns are kept moving in phase separation. Hydrophilic force-stretched droplets elicited by the two sets of electrode arrays 2215 and 2216. When the electrode arrays 2215 and 2216 reach the outer edges of the configuration electrodes 2210 and 2212, 'all of the configuration electrode columns are de-energized' and the configuration electrodes 221 and 2212 are energized to pinch the liquid into two sub-droplets 2251 and 2252. As shown in Figure 22C. 23A-23C illustrate an embodiment of the present invention for performing diagonal cuts. The diagonal cut starts by moving the droplet to be cut onto the temporary configuration electrode 2312, wherein the temporary placement electrode 2312 is located at the center of the joint corner of the four configuration electrodes 2310, 2311, 2313, and 2314. After the droplets are completely located at the center of the joint angle of the four configuration electrodes, the temporary arrangement electrode 2312 is de-energized, and the arrangement electrode 2310 and the arrangement electrode 2311 are energized, and the droplet 2350 is stretched into the liquid column, as shown in FIG. 23B. Show. In order to pinch the liquid into two sub-droplets, it is necessary to remove the inner corners of the configuration electrodes 2310 and 2311 to generate the necessary hydrophobic force in the middle of the droplets 235〇. Figure 23C illustrates that the L-shaped provisional placement electrodes 2315 and 2316 are energized to further stretch the droplets to have only a thin neck therebetween, the hydrophobic force in the middle then helping to pinch the droplet 2350 into two sub-droplets 2351 and 2352. Finally, the configuration electrodes 2310 and 2311 are again energized to center the droplets 2351 and 2352 into the configuration electrodes 2310 and 2311 as shown in Fig. 23D. 24A-24C illustrate the droplet cutting process on the open surface under the microelectrode array structure (Fig. 24A illustrates that the droplet 2450 is located on the left side configuration electrode 244A. Droplet 2450 will be cut into two sub-droplets 2470 as shown in Figure 24C. The droplet cutting process consists of the following two processes. First, the droplet 2450 to be cut is stretched into a thin liquid residue by energizing the configuration electrode 2430 at an appropriate voltage. This can be done from. Such "thin" night body columns generally refer to liquid columns having a width less than the initial droplet diameter. Next, the two preselected configuration electrodes and =_ are energized to cut the droplets and center them into the two configuration electrodes 2440^420, as shown in Figure 24C. The key to coplanar cutting is to have a foot-weight 4 between the droplet and the outer two configuration electrodes in order to have sufficient capillary force to perform the cutting. In one embodiment, when a plurality of droplets are cut into a plurality of droplets due to hydrodynamic instability, the thinner liquid column can be utilized to form two smaller droplets by the power or active U. When it is completely powered, disconnect. When using the main power, the optimized length is not heavy and the body is strongly positively energized to position the droplets in the desired configuration of the electrode in the way of 'miscellaneous or silky process in the micro-cell _ 2 ° ® 2450 a :i° The △ should be 卩, it is necessary to turn J Wen 浐 =. The solid implementation is based on micro-electricity; the size and quantity of the 歹 产 ί 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 定义 。 。 。 。 。 。 。 。 In order to form a continuous line or region = the configuration JLrt j80 疋: 连续 a continuous droplet, which is electrodeposited by including 2x4 microelectrodes = 酉1. Also, there are 8 Ϊ 9 formed by 2×4 individual microelectrodes to form a 2 9: band „50. In addition, 'continuous 'E' 2560 and ～2530 are illustrated. In another embodiment, in order to prevent liquid The column is split into a plurality of droplets due to water movement' regardless of the type of structure (double plane, a total of 2 plates is necessary for the display based on the microelectrode array structure to have a low-micro-electricity touch structure τ basic merge operation The &amp;&lt;RTIID=0.0&gt;&gt;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot;&quot; Used to indicate a combination of two or more droplets. This is because combining two droplets does not always result in complete mixing of the components of the initially separated droplets directly or immediately. In Figure 26A, two liquids The drops 2650 and 2651 are initially located on the configuration electrodes 2610 and 2612 and are separated by at least one of the configuration electrodes 2611 therebetween. The two droplets 2650 and 2651 have at least partial overlap with the configuration electrode 2611. As shown in Fig. 26B, 'external Two configuration electrodes 2610 and 261 2 is energized, the central configuration electrode is energized, whereby droplets 2650 and 2651 are pulled along each other along central configuration electrode 2611 to merge into a larger droplet 2653, as indicated by the arrows in Figure 26B. Figure 27A- 27C illustrates an efficient mixing process for droplet manipulation by non-uniform geometric motion to create eddy currents under the microelectrode array structure. The droplets 2750 and 2770 are deformed by energizing the configuration electrodes 2751 and 2771, as shown in Figure 27B; This causes the droplet 2750 to go high, causing the droplet 2770 to become fat. Then the 'central configuration electrode 276 is excited' to pull the droplets 2750 and 2770 into the hybrid configuration electrode 2760 (the zen is black), as shown in Figure 27C. In Fig. 27B, the black areas indicate two; the configuration electrodes 2751 and 2771 of the magnetic excitation not only deform the two droplets 275 〇 and 277 ,, but also locally pull them into the center configuration electrode 276 〇 This temporary energizing step shown in Fig. 27β also contributes to the smooth mixing movement of the two droplets. The shape of the black areas and the deformed droplets in Figs. 27B-27C are merely illustrative purposes. In the present invention, these shapes are as needed. can Any type. x Figures 28A and 28B illustrate microelectrode array hybrid crying for improved mixing speed. In one embodiment, a non-uniform reciprocating mixer can be used to add to the drip blend which can be shouted by the excitation-group microelectrode The irreversible pattern is achieved, wherein the irreversible pattern destroys the symmetry of the two loops to improve the mixing speed. Figure 28A illustrates that the droplet 2850 contains the sample and reactants, and the top of the pole 2840. The first pole drain is uniformly reciprocally mixed so that the droplet 2850 is removed from the direction of the arrow shown in FIG. 2, and the electrode 2860 is removed and energized, and the electric (4) 4 (M skin excitation is applied to pull the droplet back) Go to the initial position shown in Fig. 28A. Reciprocating mixing can perform multiple mixing effects. Further, the shapes of the arrangement electrode 2_ and the deformation liquid 31 201250929 in Figs. 28A and 28B are for illustrative purposes only. In the present invention, these shapes may be of any type as long as they have the ability to generate eddy currents or, alternatively, have the ability to produce multiple layers. In still another embodiment of the PFLOC droplet based mixing process, Figure 29 illustrates a loop mixing for improved mixing speed. This can be accomplished by generating a non-reversible level loop by the f-column of the smaller micro-electrode set, where the irreversible level loop destroys the symmetry of the I vertical layer loop to accelerate mixing. As shown in Fig. 29, eight configuration electrodes (291〇, 2920, 2叩0, 2940^2950^2960^297〇 2980) surrounding the droplet 2990 are formed to excite the arrangement electrode. For example, as a first step, the period in which the electrodes are energized is configured to cause the surface tension to change and a loop is generated inside the liquid 2990 toward the configuration electrode 291. Next, the configuration electrode 291 is removed from the excitation, and then the next adjacent configuration electrode 292 is excited. The loop excitation process is repeated through all eight configuration electrodes (291〇 to 2980) to create a level loop inside the droplet 299〇. This loop flow stimulus can be performed as many times as needed. In addition, the loop flow can be performed in a clockwise, counterclockwise, or alternating mixture of the two to achieve an optimal mixing effect. Further, the shapes of the electrodes 2910 to 2980 and the loops are merely exemplified. In the present invention, such loop mixing may be of any type as long as they have the ability to generate eddy currents or, alternatively, have the ability to create multiple layers. . Multilayer Mixer: One embodiment of the present invention that produces multiple layers in a small size (2X2 configuration electrodes) but an effective mixer to accelerate mixing can be as shown in the figure! Multi-layer hybrids are especially useful in low aspect ratios (&lt;1). it works. Aspect ratio = ratio of the gap between the electrode plate and the ground plate to the electrode size. Low aspect ratio sounds are more difficult to create eddy currents inside the droplets, thus the ability to create multiple layers becomes more important. Diagonal blending and diagonal cutting are utilized in this particular mixer. In the figure, the black liquid droplet 3051 at the arrangement electrode 3014 is mixed with the white liquid droplet 3050 at the arrangement electrode 3〇11. The provisional electrode 3010 will be a mixing chamber and energized to pull in droplets 3051 and 3〇5〇. To initiate multi-layer mixing, the first step merges the two droplets diagonally. The diagonal direction of the droplet combination can be 135 degrees of milk, but then the direction of the diagonal cut needs to be perpendicular to the merge operation. Figure 3 service 32 201250929 3〇5q first-time merge into black and white droplets. By i, the time is chosen, so the droplets are displayed as - semi-white, - half ί 3G52 is mixed with the squama scales and 9 〇. ‘As the coffee is not. In the temporary configuration electrode 3_ is removed + Ϊ set f and 3Q13 and other temporary configuration electrodes are energized, ^^〇52 / mouth diagonally cut into two sub-droplets 3053 and 3054, as shown in Fig. 30C:. The details of the corner cut have been discussed in the previous paragraph. Due to the low mixing rate, 3054 :: Yi Yi. The third step of /, ,;, and then layer mixing is to move the two droplets back to the 'electrode' alpha repeating diagonal blending and cutting. In the shank, the droplet 3054 is moved from the arranging electrode 3012 to the arranging electrode 3〇11, and the droplet 3 〇 = the gloid 3013 is moved to the arranging electrode. It is desirable to avoid the merging of droplets 3053 and 3054 while they are moving. Simple droplet movement manipulation of the configuration electrodes 3〇12 and 3〇13 and excitation of the configuration electrodes 3()11 and 3〇14 may result in physical fineness of the two cranes at the same time, then two ^ The drops may merge together. Therefore, the provisional electrodes 3〇15 and 3〇16 need to be energized to create a protective zone between the two droplets to prevent any accidental merging while the two droplets are moving towards their destination. . After the droplets 3053 and 3054 are moved into the configuration electrodes 3016 and 3015, the two droplets are moved straight forward into the configuration electrodes 3011 and 3014. The first to third steps can be repeated to produce the necessary number of layers to accelerate mixing. As a result of repeating the steps from the first step to the merging of the droplets 3053 and 3054 in Fig. 30D along the diagonal into droplets 3055, Fig. 30E illustrates a four layer droplet 3055. Figure 30F illustrates an eight layer drop 3056 obtained after undergoing a second pass from the first step of the multilayer mixing to another cycle of the third step. In addition, other embodiments of the present invention can broaden microfluidic operations beyond the scope of medical, drug discovery, environmental, and food monitoring applications. For example, droplets formed by electrodes can be used as a virtual chamber for chemical mixing and reaction, and as a nutrient medium container for displaying primitives or tissue cells. 33 201250929 Depending on the application, the underlying fabrication techniques for microelectrodes can be based on semiconducting, thin film transistor (TFT) arrays, ρβ, plastic or paper. The final product can be as small as the nail-sized FPL0C, can be a paper-sized fluid micro-lift, system, or a field-programmable kanban that can be as large as a building. The material can be rigid or flexible and bendable. One embodiment of manufacturing a LOC based on a microelectrode array structure by using a standard CMOS fabrication process is shown in the block diagram of FIG. The two main blocks of the microelectrode array structure are system control block 3150 and fluid logic block (ρ^β) 3110. Under normal circumstances, according to the limitations of application and manufacturing technology, the secret only needs to - (4) control block 3150, but requires multiple FLB3110. The electrode array is realized by FLBs daisy-chained together. The FLB is determined by the application and mainly by the limitations of the manufacturing technology. One FLB includes a back pressure driven microelectrode 3130, a one bit memory map data 3120 = and a control circuit 3140. The high voltage drive microelectrode 313Q is a physical microelectrode that can be energized to generate an EW〇D action to move the droplet by applying the necessary electricity. A meta-hidden map data 3120 maintains the logical value of the excitation of the microelectrode, blood type ground, "1, the electrode is excited to represent the excitation of the microelectrode. The control circuit 3140 controls the logic and forms the daisy chain structure of the FLB. The system control 3150 includes four main blocks: controller 316, wafer layout 317, = position paste 318G, and fluid operation manager. Control _ is necessary for space, interface, and software. The technology 'controller _ can be integrated as part of the finished product, or 詈: 4 2: 1 inch f external set. Wafer layout block 3170 * Storage poles with 咏2〇c layout information and data memory The actual position of the droplets on the droplet position map 3180. The layout information, the droplet position map, and the 0C application from the controller are translated into droplets by exciting the "configure electrode, sequence, stream 3 319 °" Physical incentives. And the menu structure provides on-site programmability, allowing the lgc electrode 1 to be programmed via software. If the firmware (stored in non-volatile memory such as ROM) can be modified "on the 34 201250929, without disassembling the device or returning the device to its manufacturer, It can be programmed in the field or in the field. The field programmability or software configuration of L〇c can be realized by system control 315〇 and FLB311〇. Electrode shape and size design and L0C layout information And the data is stored in the non-volatile memory inside the wafer layout block 3170, as shown in Fig. 31. The information of the excited electrode including the temporary electrode is stored in the non-volatile memory in the droplet position map 318A Then, the software configuration data is transmitted to the parent secret electrode 3130 through a meta memory map data 312. A group of microelectrodes are grouped (gr〇Uping), excited, and removed by the FLB3110 configuration. In addition, all FLB3n® are software-connectable and physically available in a monolithic integrated form that can be fabricated using standard manufacturing techniques. ",, microelectrodes on different structures can be implemented. In one embodiment, the hybrid structure shown by the microelectrode switch 32 is driven at a high voltage. The hybrid structure includes the same plate, the pole 3230 and the grounding grid 3280' as shown in FIG. A ground grid 3280 having a continuous electrode 3240 and on the electrode plate 3221 is connected to a switch 3210 for selecting a structural mode. (4) An embodiment of the electrical design of the FLB array, wherein (iv) il33QG includes the _chain configuration of the report multi-flb332q. The daisy chain is in the electrician 2 mode. The connecting lines are serial and do not form a net or a loop. As the size continues to shrink and the number of microelectrodes continues to grow, the inevitable challenge for the use of the secret train structure is the interconnection problem. Do not manage the system i: will become too complicated to be squandered, through the chain of operations, simplifying each FLB332, and the FLB interconnection will not increase with the number of FLB The increase, the exhibition and the more concise layout design. Each FLB 332° includes an r memory device (such as D flip-flop 331 〇) that excites the microelectrode 33, and an output value for the excitation signal #. When the signal is applied, it is not repaired according to the trigger _. Face 35 201250929 The clock in 唬ED loads the value of flip-flop 332〇. A one-bit memory device such as a D flip-flop "ίο can also be other flip-flop designs or other data storage applications. Figure 34 illustrates a cross-section of an FLB array article. In one embodiment, a three-layer metal layer and A layer of P〇ly layer. The bottom layer is the substrate, and the layer above the layer is the control circuit layer 3450. The control circuit, the flip-flop and the high voltage driver are all included in the 3451 located directly below the microelectrodes 344〇 and 347〇. A layer of metal in the region is used to fabricate microelectrodes 3440, 3470 and ground line 3430. A top view of this electrical, and ground structure is shown in Figure 5A. The applied microelectrode 3440 and microelectrode 347 are applied using voltage. The top of the microelectrode is the dielectric layer 3410. In the present embodiment, the ground line 343 is not covered by the dielectric layer 341, to reduce the required excitation. The hydrophobic membrane is low-surface, wet, and if viewed from the top, only the microelectrode array can be seen without seeing the circuitry hidden under the micro and pole. This self-contained microelectrode structure is used in the manufacture of FLB. Extremely high expandable The key to the expansibility. Another embodiment of fabricating a LOC based on a microelectrode array structure using a thin film transistor (TFT) array fabrication process is shown in the block diagram of Figure 35A. Two main blocks of a microelectrode array junction. The secret control block lion and active matrix block (recommended) 3500 system control block 355〇 includes four main blocks: controller 356〇, wafer layout 3^70, droplet position map 3580, and fluid operation manager 359〇. The device 356 is CPU, and has the necessary memory space, interface circuit and software programming capability. The wafer layout block 3570 is a memory for storing configuration data of the configuration electrodes and L〇c layout information and data. 〇 reflects the actual placement of the droplets on L 〇 c. By energizing the "configure electrode" sequence, the fluid handling manager 359 布局 lays down the layout information, the drop location map, and the L〇c drop from the controller 356〇 The physical excitation of the implementation. In the implementation of the lamp, in one embodiment, the LOC's field programmable or software configuration is implemented by the system, which controls the 3550. The shape and size of the electrode and the L〇c cloth. Information and data are stored in non-volatile memory A inside the wafer layout block 3570, as shown in Figure 35A. Information on the excited electrodes including the temporary electrodes is stored at the drop location 36 201250929 Material 3520 will be soft ϊ ί :: Ray passes through the -bit memory map to group, motivate and de-microelectrode 3530. Then, configure the electrical block UMB) 3500. ', the beibei is sent to the active matrix in a silent manner. In the detail, the five main blocks are included in the active matrix panel and ======Γ.

CTFT) 3511 &gt;TFT; storage capacitor 3513, microelectrode 3512, and interconnect wiring 3514, and each end of the material signal bus 3514 5 | 35: using C inch, source driver IC 3520 and gate Drive iC. Single ΐ ί ί tft /ifi f 3550 (4) ^ DC / Dr secret B / m, Λ ^ power 3541 is added to the DC / DC converter 3540, rain ίτ flow line 3515 applies a positive pulse to the gate to reach The voltage applied to the source bus 3514 is mainly until the next power is applied:

ί Γ^ίΓ1 3512 ' Description of TFT35H's TFT LCD layout. In another embodiment, the tantalum array layout is&apos; to reduce collisions with adjacent == gaps 3516. In the other embodiment, the microelectrode array based on TFT technology is in the biplanar structure of =. The TFT drain is made of a dielectric insulator (10)-coated with a microelectrode 35==glass=3501 and coated with a hydrophobic film 35〇5 to reduce the wettability of the surface and increase the droplets and micro The capacitance between the electrodes. On top 37 201250929, the 'continuous electrode coffee coated with hydrophobic film 35G5' array is constructed in a hierarchical manner to establish a multiplex analysis such as the entire L〇Γ. L〇cf detection. Microhertz operation layer _ 疋y The layer level (〇ne level down) is used to control and manage the Ϊ ==== side of the biomedical microfluidics, the biomedical microfluidic functional layer and the microfluidic eleven abstract methodology This will be a low-level micro_configuration and layout, such as the microfluidic presentation (such as "diagonal _," or "precision = 3 two: the advancement of microfluidic technology" The micro-body system extends from a relatively simple single-function LGC to a complex physical presentation. The final handle surface has a lining component: the ten problems in the geometric synthesis of the I and the same type can be utilized. Effective design compensation (4) will be more manageable LO^T's ~ ~ ^ 片 片 。 。 。 。 。 。 。 。 。 。 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = , Γ has at least the following three main types of application, the way. (1) Field Programmable Wafer Lab (10)); (2) now 38 201250929 程式 程式 永久 ; ; ; ; ; ; ; ; ; ; ; ; 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体 流体One embodiment of the application is designed according to FPL0C. Prior to any programming or configuration, the blank FFLOC3701 can be as shown in Figure 37A. This blank FPL^7〇1 includes multiple arrays of FLB3710, FPL0C system control 3720, and I/O. Interface 耵 30. In one embodiment of the invention, the number of 1/〇 interfaces 373 可 may be single or multiple depending on the need for setting the juice. In another embodiment, the placement of the I/O interface and FPLOC system control 3720 The location may be under the array of apertures 71 或者 or an array of FLB 3710 on the same wafer (as shown in Figure 37A). The FPL0C system control 3720 provides system separation, configuration, control, management, and other system related functions: The /O interface 3730 provides a function of connecting between the FPL0C and an external device to program the wafer, display test results, calibration, and data management. In another embodiment The I/O interface 3730 can also provide a connection to a printer, USB logger or network interface. The I/O interface 3730 also provides access to the power supply required for the FpL 〇c ^ 。. ...the first design step (or lowest level of work) for designing FFLOC is the physical location, size and shape of all microfluidic components (such as reservoirs, mixing zones, detection zones, and transport paths) and the overall FPL〇c Layout is used for field programming. Figure 37B illustrates one embodiment of programming a blank FPLOC 3701 to implement a configuration 3702. This configuration L〇C37〇2 has a microfluidic element comprising an electrode 374〇 and a reservoir f 377G, a waste reservoir 3790, a mixing chamber_, a detection window 375〇, and a transport path 378G, wherein the transport path is different from the FPLOC The electrode composition of the area. After the layout design of FpL〇c, there are also some unused microelectrodes 371〇 in Fig. 37B. The second step in the design of FpL〇c is to define the microfluidic operation of the crystal. Basic fluid operations include: creating droplets, transporting, cutting #j, and mixing. As discussed in the previous paragraph, a more sophisticated advanced fluid operation can be achieved based on the microelectrode array structure. The designer of FPLgg can choose the basics to build the whole to include her mulberry. However, the design of the user and the design of the FpLQG, the application level of the micro-fluid operation. , 39 201250929 Field programmable permanent display implementation. The brain is flattened as an embodiment of the present invention, wherein the ί di (died dr〇plet) frame 3810 is stored at ^, and the inner electrode (10) plus the electrode 3811 indicates no text or graphics. The droplets produced in Fig. 38β4 Wangmu are transported to a plurality of positions to show that the ring blank microelectrode 3815 becomes the background, and the ink 3814: η; ^810 ° in order to turn off the display 'all droplets are shifted Back to ° m 3sc^^^mum 〇71^ 3821 Ming turn. Microelectrode array 3830 is fabricated on electrode plate 3820. =4. A set of droplets 3840 form a dotted line with discrete points. Line. The formation of a continuous line or area has a point-by-point form that has a double-sounding squeak and a long time of the sinus, and the page will be bendable. In the present equation, 'figure _ denotes a bendable display. The droplets / 疋 line or region 'drop 3880 is the point. In the monthly embodiment, 'no power is needed to keep the microelectrode array 3 ί or graphics. # Drops are moved to the appropriate Ϊ for text or graphics. The moving power of the drops, the droplets will be clamped on the top plate and the droplets are small enough 'and the gap between the top plate and the bottom plate is very, about 7 〇Μ or less), if the system is sealed and used, such as Shi Xi Prevent, Η these droplets will be permanently restricted. It will be difficult for external forces such as gravity or normal 3 to move these restricted droplets. The biggest advantage of the field programmable permanent display is that It does not require power to maintain the display. The processable towel's droplet-based micro-excitation uses the field technology to display the test results shown in Figure 38 and Figure 38b, when the system passes through the microelectrode 3811. Excited or encouraged to perform When it is operated in microfluidics, after the display ink is not connected to the test or the target microfluidic operation, the droplets generated from the (or eight listening and liquid) frame 3814 in the figure move to the right position, with two of the formulas 201250929. The advantages are: (1) almost no use of flow _; extremely ambiguous; diagram: extra cost, because it is used for test transmission, stem 4 «, A μ /, ..., map and (2) even power micro-excitation The device is broken, and the SSS^=face displays the crying color or color so that the permanent color can be programmed in the field. In one embodiment of the present invention, the three primary colors are used; To display different colors. Figure 39Α Red beads, 3913^ in: a different frame position: 3910 for (red beads • green ^ 3957 ^: bright magnetic force does not leave the beads, Na ° 3960 ίίϋη moving, larger red The separation of the different colors and the beads allows the field programming permanent display technology to be used in another way to enable the field to display the permanent display color. Another layer of _ electrode bar, Jane Overlay 3 = droplets of the same color. As long as the micro-electric The board is made of transparent film and the top of the money foot clearly sees the color. According to the display requirements, liquid ί 1 ; , !: f0 4031 ^ 4041 and 4051 can be seen as open. The droplet 4 〇 32 is continuous color to the present An example of a -dimensional t: a 'microelectrode array structure' expands a two-dimensional conventional structure into a Γ·隹: ί 22 diagram! The 'pure microelectrode array 2220 is designed as a bottom plate' and another coplanar microelectrode array 2210 Designed as a top plate. The coplanar structure of the microelectrode array and the flexible gap adjustment 2270 constitute a three-dimensional microfluidic transfer system. When leading to a 41 201250929 ==== track = live, use only one plate to deliver liquid Drop time = another - the advantage is that the layer-by-layer construction of the three-fold type or organization will be possible. Y ayeu Figure 22 illustrates that one embodiment of the fluid micro-crane system 22 微 microliters to microliters | &amp; the surface tension of the droplets is very significant, and, small, so the fluid micro-crane system transfer plate can It is at j (upward 2220, down 2210 or laterally at any angle). Typically, transfer plates 2210 and 2220 are used to form a fluid micro-crane system. Droplet ^ chemical reaction of the virtual chamber, or tissue nutrient medium container. Droplets of a different size and shape are illustrated in FIG. The droplet 224G on the bottom transfer plate is the smallest droplet from a single longitudinal. The single electrode in this case may be a set of electrodes or a microelectrode. The dimensions of the electrodes should be configured accordingly, depending on the application. A drop of 2260 indicates that the phase _ minimum droplet hangs on the top transfer plate. The droplets can be combined by exciting the corresponding electrodes to move the droplets together. Droplets 223 and 2250 indicate that larger droplets manipulated by the fluid micro-crane system are located on transfer plates 2220 and /2210. The adjustable gap 2270 between the top transfer plate and the bottom transfer plate plays a key role in the system, as will be explained in the following paragraphs. Figure 42 illustrates the basic operation of the fluid micro-crane system. The first step of the transfer, as shown in Figure 42A, is to move a droplet 4230 on the top plate to the position of the electrode 421, and another liquid on the bottom plate. The drop 4240 moves to the position of the electrode 4220. The gap 4207 between the top plate and the bottom plate is adjusted such that there is a small gap 4204 between the drops 423 and 424. Increasing the size of one drop will change the radius of the drop. Due to the strong surface tension of the smaller droplets, the surface curvature of the droplets can be approximated by a circle on the open end. The radius of the droplet 4260 shown in Figure 42B is increased such that the two droplets are in contact with each other. In this case If the electrodes 4220 and 4290 are energized and the electrode 4210 is de-energized' then the combined droplet 4270 will be pulled downward from the top plate to the bottom plate, as shown in Figure 42C. ^ When the droplets on the two plates are not in size This technique can be applied repeatedly when there is a significant difference. Once a droplet is much larger than the other, the gap 4207 can be

42 201250929 In order to make the moved-in-droplet 4280 contact the target droplet 4?7n as shown in Fig. 42D. The star right door between the droplet 4230 and the droplet 4240 in Fig. 42A is intended to prevent: when the droplet is small so that the surface tension of the liquid becomes February ^ the combined droplet may be pulled to the wrong end plate, preventing An embodiment of a fluid micro-crane system in accordance with the present invention 'a biological system comprising a first and a second microarray structure comprises: a plurality of droplet carrying devices for transporting biochemicals ^ Transferring the initial biochemical element to the first-microelectrode array, the doping chamber containing a plurality of droplets, and the two-gap and valley structures in the first and second microelectrode arrays Used to adapt to biochemical characters _ °

43A, fine tongue and white table _ compound or tissue. When it is added to the position, the droplets grow like 4 and 43^0. In addition, when the tissue or compound is droplet 4310, it forms a continuation that increases and eventually contacts and tears the other droplets. The young gamma 2 is raised = large gaps 43 ^ t 4 ^ ί ΐ 的 的 。 。 。 。 留 留 留 留 留If the wall 4308 is organized or compounded and the droplets are capable of being effectively accommodated, a liquid such as a side of the medium is added to the liquid iitii droplets. This process can be Zhao, Zhiqing into a thief's organization or show. The framework of the top-down design method is shown in Figure 10 and is based on the "々,, this measurement protocol" provided by the biochip user. The domain model can be used to perform a “behavior level simulation” 4413 43 201250929 to verify advanced measurement capabilities. Next, using "system level synthesis, 4420 to generate a specific execution process based on the ordered graph model. "Microfluidic Module Library" 4421 and "Design Specification" 4422 are also provided as inputs to the synthesis process. This library of modules is similar to the standard cell library used in cell-based VLSI designs, including different microfluidic functional modules such as mixers and memory cells. The compact model is used for different microfluidic functional modules and parameters such as width, length and device analog or operational duration of laboratory experiments. In addition, some design specifications have been given a priori 'for example, the upper limit of the completion time, the upper limit of the wafer area size, and the = reconfigurable resources (such as on-wafer reservoirs/distribution ports and integrated optical detectors) The combination. The output of the synthesis process 4420 includes a schedule (or schedule) for determining the operation (to map) of the on-wafer resource 4442, and a built-in self test (BIST) (or built-in self test file) 4425. Then, at geometry, 4432, through the design specification input, a geometric level synthesis 443〇 occurs. Synthetic Processing Attempts to find the expectations of both the input specification and the optimization of some quality factors (such as performance and surface). After synthesis, the two-dimensional physical design of the biochip 4433 module placement and routing can be combined with the specific physical information from the molds and libraries that are combined with the manufacturing techniques to convert the three-dimensional geometry to the lion. This modulo 1 can be used to perform physical level analog 4445 and low level design verification 4450. After physical verification, the biochip can be sent for fabrication. In the mode of implementation, the micro-fluid and micro-electron on the lower-generation wafer are realized by the combination of the micro-electrode 11 train structure and the use of the computer-aided design (10) that the current semiconductor industry deserves. Preferably: According to the present invention, a system on a wafer is mounted on a microelectrode array based on microelectrodes and microelectronics, and the device includes: a plurality of fluid logic blocks on the wafer, including the lining The top table of the bottom = the information of the memory map logic gate, which can be used to generate the integration of the fluid block and the microelectronics 201250929 by using the on-wafer system and the tool. The MLA 10/simulation tool is used to make multiple fluid logic blocks a standard library for designing microelectronic circuits. In one embodiment, in order to integrate the next generation s〇c, microfluidic design, a microfluidic application level functional description is added as a library. Each of the FLBs 3320 shown can be easily described by VHDL (representing the VHSIC hardware description language, correspondingly VHSIC representing the polar-speed integrated circuit) or yerii〇g. Vhdl and Veri log疋 are used to describe the hardware from the abstract to the detailed level. The ugly EM is used in his tools (simulation tools, synthetic tools, and outside) using VHDL. Initially, by creating The test bench of the analogy and observations is used to simulate the RTL description in VHDL or Verilog. Then, after the mapping is mapped to the connection table, the connection table is translated into gate level &amp; The complex mode is synthesized without errors. Finally, the design is laid out (as shown in Fig. Γ = (4) circuit 345, microelectrode 3470 and ground line 3430). When S0 = 'a, it can be added without delay, and by recording this back (back-annotated) to the connection table, the simulation is run again. Except = power, mechanics or static) The group-partial differential equation describing the physics of the corresponding domain (eg water structure interaction) will be provided by the device under the operating conditions The behavior of the high-strength m-core column structure can be implemented as 'micro-electricity' simple 'but can provide a very effective control statement for the implementation of micro-fluidic operation, storage, 4 (10) produces the liquid side of the exact product.! -45= microelectrode Line formed in the target configuration electrode 456G and the reservoir _, ^, ,, Tian 4515. When the bridge 4515 and the target configuration electrode side are urged ^ = bridge between the flow to the target configuration electrode · t. 45 from the body from the reservoir "". Here the bridge is a strip of microelectrode lines. This is difficult 45 201250929 The characteristics of the droplet system. It has all the advantages of a channel, ie, _ = stimulating liquid (4) flows through it without the need to extrapolate Uj. At the same time, it also has all liquids based on the liquid paper Wei will be pulled back to the reservoir or the centroid configuration electrode 4560, ii and there are no residual droplets in the channel. Once the electrode 4560 is filled, then the bridge 4515 is de-energized to fill all the microelectrodes from the reservoir &quot;it :530r 45B ^ ° 4560 r~卩卩 bridge and configuration miscellaneous (4), then the device side flows out The liquid 'so the timing control of this process is not the heavy liquid microelectrode 4560 and the breakpoint of the bridge to precisely control the production of the liquid 4530. As shown in Fig. 45B, the liquid side is disconnected from the reservoir side by first energizing the microelectrode 451 and then removing the excitation from the bridge. This process will ensure that most of the liquid forming the bridge will be pulled to the reservoir side, and 4530 will be precisely controlled by the number of microelectrodes that configure electrode 4560. In 45B, the configuration electrode 4560 includes 10 microelectrodes. Other sizes and shapes of the configuration electrodes can be defined to produce different liquid sizes and shapes. Fig. 45C illustrates the disappearance of the liquid bridge, and the liquid 4530 is produced by exciting the reservoir 451 and disposing the electrode 456. In one embodiment, the same production process of the liquid can be utilized to cut the liquid into two sub-liquids, as shown in Figure 45D. After the excitation of the disposition electrode 4560 is removed, the bridge configuration electrode 4517 and the target configuration electrode 4571 are energized, and the liquid flows from the bridge to the region of 4570. Excitation is removed from the bridge configuration electrode 4517, and then the configuration electrodes 4561 and 4571 are energized to cause the liquid to break and form two sub-liquids 457 and 45f, as shown in Fig. 45E. This cutting process produces two sub-liquids of different sizes as long as the dimensions of the configuration electrodes 4561 and 4571 are pre-scaled to a desired size. In another embodiment, Figures 46A-C illustrate a mixing process performed by continuous flow microfluidic operation. Figure 46A illustrates the flow of liquid from reservoirs 4610 and 4620 into mixing chamber 4630 through excitation bridges 4615 and 4625 and excitation configuration electrodes 4616 and 4626. Here, the liquid associated with the configuration electrodes 4616 and 4626 is changed in shape 201250929 for better mixing, ratio mixing. The size of the probe is also different for gaps to prevent premature mixing. - The liquid H is electrically connected between ^16 and 4626 with an interposed electrode 4630 (10 x 10 microelectrodes, = electrodes 4616 and 4626' as shown in the figure. Then, the two bridges are mixed, here A simple hybrid microfluidic operation is interpreted as: (1) production: liquid-based microfluidizers 4610 and 4620 are produced; (2) cut to ., ^!/626 in a precise manner from storage, liquid and liquid _ The cut m616 f body 4610 is cut very clearly 'this continuous flow of personnel to describe the invention, the technology of the slanting and the ί: out of each IS county [simple description of the schema] ^ Description of the conventional sandwiched brain D A cross-sectional view of the system. Figure 1B is a top view of a conventional Ε-two-dimensional electrode array. Figure 2 is a diagram of a dual-plane DEp device for manipulating dielectric droplets. A configuration electrode (c〇nfigured_electr〇de) configured in each shape and size. Fig. 4A is a diagram of an L〇c layout using a microelectrode array structure. Fig. 4B is a diagram of a conventional physical etching structure. Explain that the reservoir (-) and Figure 5A illustrate an array of multiple square microelectrodes, one of which is micro Figure 5B illustrates an array of a plurality of hexagonal microelectrodes, one of which is shown by a projection 47 201250929. A plurality of square micros in a layout of a pole cloth (waii-brick) The electric car train, 曰 among them, the micro-electrode is highlighted 5D is the figure of the same effective length from the shape of two different droplets. Electrode ^ financial effect money ί 财 杂 miscellaneous, domain hybrid electrode and wall brick micro two / The redundancy is a diagram of the 'grounding grid—(four) 耵(4)” coplanar structure. Figures 7Α and 7Β are “grounding pads, a diagram of the coplanar structure. 8Α_, 8Β, and 8C are “programmed ground pads” coplanar A diagram of a structure in which a hybrid plate structure can be controlled to switch a microelectrode structure between a coplanar mode and a biplanar mode. 10 is a Wei-he structure with a detachable, adjustable W structure. A transparent top plate to accommodate the widest range of droplet sizes and volumes. Figures 11A and 11B illustrate the loading of samples. Figure 12A illustrates droplets and suspended particles excited by square configuration electrodes and strip configuration electrodes via EW0D and DEP, respectively Top view of Figures 12B and 12C are illustrative from The high-frequency transmission J applied to the right of the strip-shaped arrangement electrode, the non-uniform electric field inside the droplet is driven by DEp to the right-hand side of the t-picture. Fig. 12D illustrates the application to the square configuration electrode. To generate low frequency signals of two sub-droplets with different particle concentrations by EW〇D. Figure 13 illustrates another embodiment of FPLOC sample preparation using droplet aliquoting techniques. Figures 14A and 14B illustrate self-adjusting loaded samples. Or the ability of the reactants relative to the location of the storage and storage. Figure 15 illustrates one embodiment of the FPLOC droplet generation process. Figure 16 illustrates a specific droplet generation process referred to as "droplet aliquots. Figure 17 is a diagram illustrating the transport of droplets of FPLOC. Figure 18 is a diagram illustrating droplet routing of FPLOC. Figures 19A, 19B and 19C Is to explain the use of FPL0C temporary bridging treatment

48 201250929 Drop chart. 20A, 20B and 20C are diagrams illustrating electrode column excitation. 21A, 21B and 21C are diagrams illustrating droplet cutting of FPLOC. Figures 22A, 22B and 22C are diagrams illustrating the droplets of FPLOC: Figures 23A, 23B and 23C are diagonal lines illustrating the droplets of FPLOC; Fig. 24A shows the droplet cutting process on the open surface of FPL0C. 〇 Figure 25 illustrates the presence and continuity of the liquid axis under the microelectrode structure. 26A and 26B are diagrams illustrating basic merging/mixing of FPL0C. 27A, 27B and 27C are diagrams illustrating an effective mixing process of droplet manipulation performed by immobilization to accelerate mixing. 28A and 28B illustrate uneven reciprocating mixing for accelerating droplet mixing. Figure 29 is a diagram illustrating a fluid cycle based on an EW0D microelectrode array structure. Figures 30A-30F are diagrams illustrating a multilayer mixer in which a multilayer mixer is particularly effective and useful for low aspect ratios (&lt;1). Figure 31 is a block diagram showing the fabrication of a microelectrode array device using a standard CMOS fabrication process. Figure 32 illustrates a microelectrode junction of a finished product based on standard CMOS fabrication techniques. Figure 33 illustrates the electrical design of an FLB array based on standard CMOS fabrication techniques. Figure 34 illustrates a cross-sectional view of an RB array article based on standard CMOS fabrication techniques. Fig. 35A is an illustration of an array structure device using a thin film transistor (TFT) array fabrication process. Sanding Figure 35B illustrates a block diagram of an active matrix block (amb). Figure 35C is a top view of a microelectrode array based on a TFT array. Figure 35D is a cross-sectional view showing the fabrication of a microelectrode device based on TFT technology in a biplanar structure. Fu Figure 36 is a block diagram of the hierarchical system structure of the microelectrode array structure. 49 201250929 Figure 37A illustrates a blank microelectrode array structure device prior to any programming or configuration. Figure 37B illustrates an example of a design based on a microelectrode array structure configuration. Figures 38A and 38B illustrate a field programmable permanent display based on a microelectrode array structure. Figures 38C and 38D are cross-sectional views of a rigid and bendable field programmable permanent display. 39A and 39B illustrate a field-programmable permanent display of a mixing-cutter-bead based on a microelectrode array structure. Figure 39C illustrates the classification of colored beads by magnetic force and the different sizes of colored beads. Figure 40 illustrates a stacked multi-layer of a monochrome field programmable permanent display for use in forming a color display. Figure 41 illustrates a three-dimensional fluid micro-crane system. Figures 42A, 42B, 42C and 42D illustrate the basic operation of a fluid micro-crane system. Figures 43A, 43B, 43C, and 43D illustrate a 3D biochemical building system based on a fluid micro-crane system. Figure 44 illustrates a flow chart of a top down design approach for FPLOC design and programming. Figures 45A, 45B and 45C illustrate the production of a liquid by continuous flow excitation. Figures 45D and 45E illustrate the cutting of liquid by continuous flow excitation. Figures 46A, 46B and 46C illustrate the incorporation/mixing of liquids by continuous flow excitation.

[Main component symbol description] 120 Top plate 121 Base plate 130 Electrode 140 Electrode 150, 15 Bu 152 Droplet 50 201250929 160 Hydrophobic film 170 Dielectric insulator 180 Electrode 190 Two-dimensional electrode array 210 Low surface energy material 220 Reference electrode 240 Top plate 245 Bottom lining Bottom 250 Droplet 260 Electrode 261 Microelectrode 270 Thickness 300 Microelectrode array 310 Microelectrode 320 Electrode 320 Waste reservoir 330 Reservoir 340, 440 Transport path 350, 450 Detection window 360, 460 Mixing chamber 370, 371 Electrode 410 micro Electrode 420, 430, 431 &gt; 432 reservoir 470 '471 &gt; 472 electrode 501 &gt; 502 &gt; 503, 504, 505 electrode 506 electrode 510, 520, 530, 550 droplet 552, 562 effective length 553, 573 Contact lines 540, 555, 562 electrodes 51 121 1212, 1213 122 1222, 1223 1225, 1226 201250929 563 565, 575 610 611 '631 620, 621 640 &gt; 641 &gt; 650 620, 710 711 715 810 811 815 820 , 830 850, 852 860, 861, 862, 9 10 920 921 940 980 1010 1020 1150 1160 1170 1180 1210, 1220, 1224, contact line electrode microelectrode ground wire electrode droplet electrode microelectrode ground pad gap microelectrode ground electrode gap electrode droplet 863, 890 configuration electrode switch cover Electrode plate electrode grounding grid top plate electrode plate sample needle coplanar electrode plate passive cover electrode electrode electrode 52 201250929 1230 high frequency signal 1250 droplet 1251 ' 1252 subdrop 1256 electric field 1340 micro electrode 1345 small droplet 1350 desired droplet 1360 storage Liquid 1370 Clearance 1380 Blood cells 1420, 1430 Drops 1440, 1514, 1515, 1530 Reservoir 1530, 1535, 1540 Electrode 1550 Drop 1610 Reservoir 1615, 1630 Drop 1620 Electrode 1731 - 1739 Electrode 1750 Drop 1760 Electrode 1810, 1820 electrode 1850, 1851 ' 1852 droplet 1930, 1940, 1970 electrode 1950 droplet 1960 gap 2010, 2011 '2012 electrode 2020, 2021, 2022 electrode column 2050 droplet 2110, 2111 &gt; 2112 electrode 2150 droplet 53 201250929 2151, 2152 sub-droplets 2210, 2212 electrode 2215 &gt; 2216 electrode column 2250 droplet 2251 ' 2252 sub-droplet 2310, 2311 ' 2312 electrode 2313, 2314 electrode 2350 droplet 2420, 2430, 2440 electrode 2450 droplet 2470 sub-droplet 2540 continuous loop 2570, 2580 liquid Drop 2610, 2611 ' 2612 electrode 2650, 2651 ' 2653 droplet 2751 &gt; 2760, 2751 ' 2771 electrode 2760 electrode 2750, 2770 droplet 2840, 2860 electrode 2850 droplet 2910, 2920, 2930, 2940 2950, 2960, 2970, 2980 Electrode 3010, 3011 ' 3014 Electrode 3012, 3013 Electrode 3015, 3016 Electrode 3050, 3051 ' 3052 Droplet 3053, 3054 Subdroplet 3055, 3056 Droplet 3110 Fluid Logic Block 3120 Memory Map Data 54 201250929 Microelectrode Control Circuit System Control block controller wafer layout block drop position map fluid operation manager switch same plate microelectrode grounding grid trigger array dielectric layer hydrophobic film ground line microelectrode circuit layer substrate 3130 3140 3150 3160 3170 3180 3190 3210 3221 3230 3280 3310 3320 3330 3410 3420 3430 3440 3450 3460 3470 Microelectrode 3500 Active matrix block 3501 Glass substrate 3502 Top plate 3503 Thin film transistor 3504 Microelectrode 3505 Hydrophobic film 3506 Dielectric insulator 3507 Black matrix 3508 Electrode 3510 Active matrix panel 55 201250929 3511 Film Transistor 3512 · Microelectrode 3513 Storage Capacitor 3514, 3515 Line 3516 Clearance 3520 Source Driver 3525 Thumb Driver 3540 DC/DC Converter 3530 AM Controller 3550 System Control Block 3560 Controller 3570 Wafer Layout Block 3580 Droplet Location Map 3590 Fluid Management Manager 3610 Microfluidic Functional Layer 3630 Microfluidic Element Layer 3701 Field Programmable Wafer Lab 3710 Array 3720 FPLOC System Control 3730 I/O Interface 3740 Electrode 3750 Detection Window 3760 Mixing Chamber 3770 Reservoir 3780 Transport Path 3790 Disposal Material reservoir 3810 visible stamper droplet frame 3811 microelectrode 3812 ring 3813 text character 56 201250929 3814 ink 3815 microelectrode 3820 electrode plate 3821 top cover 3830 microelectrode array 3840, 3841 ' 3842 liquid 3870, 3880 droplets 3910, 3930, 3980 red beads 3912, 3940 blue beads 3913, 3920, 3970 green beads 3956, 3957 droplets 3960 magnets 4020, 4021 ' 4022 microelectrodes 4030, 4040, 4050 droplets 4031, 4041, 4051 Droplet 4032 Droplet 4204, 4207 Gap 4210, 4220 Electrode 4230, 4240, 4260 Drop 4270, 4280 Drop 4290 Electrode 4302 Top plate 4307 Gap 4308 Side wall 4310, 4320 Drop 4330, 4340 Drop 4350 Liquid surface 4360 Medium 4410 Bio Measurement Protocol 4412 High-Level Language Description 57 201250929 4413 Behavioral Level Simulation 4415 Sorting Chart Model 4420 System Level Synthesis 4421 Microfluidic Module Library 4422 Design Specification 4425 Built-In Self Test 4430 Geometry Synthesis 4440 3D Geometric Model 4442 Mapping 4445 Physical Level Analog 4450 Low Level Design Verify 4510 Reservoir 4515 Bridge 4516 Micro Electrode 4517 Electrode 4560 Electrode 4530, 4570 Sub-liquid 4561 ' 4571 Electrode 4615, 4625 Bridge 4616, 4626 Electrode 4610, 4620 Reservoir 4630 Mixing chamber

58

Claims (1)

201250929 VII. Patent application scope: 1. A microelectrode array structure device, comprising: a substrate, comprising an array of a plurality of microelectrodes disposed on a top surface of a substrate, the plurality of microelectrodes being composed of a dielectric layer Covering, wherein each of the microelectrodes is connected to at least one grounding member in the grounding structure, and a hydrophobic layer is disposed on the top of the dielectric layer and the grounding member to generate a hydrophobic surface having droplets; b. Field programmable structure for programming a set of configuration electrodes to create microfluidic components and layouts of selected shapes and sizes; and c. system management unit 'including droplet manipulation unit and system control unit. 2. The device of claim 1, wherein the configuring the electrode in the field programmable structure comprises: the first-configurable electrode comprising a plurality of micro-electrodes arranged in a matrix; and the first-configuration At least one second adjacent arrangement electrode adjacent to the electrode is liquid on the first formulation and overlaps a portion of the second adjacent electrode. 3. The apparatus according to claim 1, wherein the system management unit performs the step of sequentially applying a driving voltage for exciting and removing the excitation to the one or more selected configuration electrodes sequentially. Excitation of the selected configuration electrode Excitation excitation moves from the sulfur excitation along a selected path to touch one or more droplets between the electrodes. The apparatus of claim 3, wherein the system management unit performs the step of: arranging the number of microelectrodes that configure the electrodes to substantially control the size and shape. 5. The device of claim 2, wherein the configuration electrode comprises at least one microelectrode. 6. The device of claim 5, wherein the set of microfluidic elements configuring the electrodes in the field programmable structure comprises: a reservoir, an electrode, a mixing chamber, a detection window, a waste reservoir, a liquid The secret path and the designated function electrode. 7. The device of claim 6, wherein the layout of the microfluidic component comprises: an input/output port, a reservoir, an electrode, a mixing chamber, a detection window, a waste reservoir, a droplet path, a designated ship electrode And the physical distribution of the electrode network. 8. The device of claim 1, wherein the system management unit performs the steps of: removing excitation from the first-configuration electrode and exciting the second adjacent configuration electrode to configure the droplet from the first configuration The electrode is pulled onto the second phase #configuration electrode. 9. The apparatus of claim 8, wherein the system management unit performs the step of splitting the droplet by using three configuration electrodes, the droplet of which is loaded on the first configuration electrode of the core of the towel substantially The two second phase_electrodes overlap, and the step of splitting the droplets by using the two configuration electrodes comprises: a) arranging two scale-arranged electrodes including neodymium electrode lines, the plurality of micro-electrode lines covering a droplet that is placed on the electrode; b. energizes the two temporary configuration electrodes; c. is excited row by row to move toward the two second adjacent configuration electrodes, and to the line closest to the center Removing the excitation to pull the droplet toward the two second adjacent configuration electrodes; and - and removing the excitation from the two second configuration electrodes to the two temporary configuration electrodes, 201250929 adjacent configuration electrodes excitation. 10. The device of claim 8, wherein the system management unit performs the step of splitting the droplets by using three configuration electrodes, wherein the droplets are loaded on the first configuration electrode at the center, and two adjacent The configuration electrode does not overlap with the droplets, and the step of splitting the droplets by using the three configuration electrodes includes: a· arranging two temporary arrangement electrodes including a plurality of microelectrode lines covering the plurality of microelectrode lines Determining the droplets loaded on the first configuration electrode; b. exciting the two temporary configuration electrodes; c· exciting row by row to move toward the two of the second adjacent configuration electrodes, and closest to the center The line removes the excitation to pull the droplet substantially toward the two of the second adjacent configuration electrodes; and d· removes excitation from the two temporary configuration electrodes and energizes the two second adjacent configuration electrodes . 11. The apparatus of claim 8, wherein the system management unit performs a step of splitting droplets by using three configuration electrodes, wherein droplets and two seconds are disposed on the first configuration electrode at the center The adjacent configuration electrodes partially overlap, and the step of splitting the droplets by using the three configuration electrodes includes: a removing excitation from the first configuration electrode; and b. exciting two second adjacent configuration electrodes 'To pull the droplets roughly with the knife. 12. The apparatus of claim 11, wherein the system management unit performs the step of splitting the droplets diagonally, comprising: ~ a. placing a droplet on the first configuration electrode; 61 201250929 b· Excitation is removed from the first configuration electrode, and two second adjacent configuration electrodes disposed opposite the first configuration electrode are excited to be oriented toward the two diagonally arranged a second adjacent configuration electrode is drawn from the droplet; and c. an excitation region is removed from the overlap region between the first configuration electrode and the two second adjacent configuration electrodes arranged diagonally to the droplet The inflammation is broken into two sub-droplets. 13. The apparatus of claim 8, wherein the system management unit performs the step of relocating the droplets back into the reservoir, comprising: a: generating a temporary configuration electrode 'where the temporary configuration electrode and A portion of the reservoir overlaps and a portion of the droplet does not overlap the reservoir; b. energizing the temporary configuration electrode to drag the droplet to cause the droplet to at least partially with the reservoir Overlap; and c. removing excitation from the temporary configuration electrode and energizing the reservoir to draw the droplet substantially into the reservoir. 14. The apparatus of claim 1, wherein the system management unit performs the step of configuring a third adjacent configuration electrode such that the third adjacent configuration electrode does not overlap with a droplet on the first configuration electrode. 15. The device of claim 14, wherein the third adjacent configuration electrode comprises a plurality of microelectrodes arranged in an array. 16. The apparatus of claim 15, wherein the system management unit performs the step of diagonally moving the droplets, comprising: a. generating a temporary configuration electrode 'overlying a portion of the droplets' and generating a third adjacent configuration electrode ; 62 201250929 b. by removing the excitation of the first configuration electrode and exciting the temporary configuration electrode, the droplets are transported diagonally from the first configuration electrode to the third adjacent configuration electrode; And c. removing the excitation from the temporary arrangement electrode and exciting the third adjacent configuration electrode. 17. The device of claim 12, wherein the system management unit performs the step of moving the droplets in all directions, comprising: a. generating a temporary configuration electrode that overlaps a portion of the droplets, and generating a second adjacent configuration electrode b) transporting droplets from the first configuration electrode to the third adjacent configuration electrode by removing excitation from the first configuration electrode and exciting the temporary configuration electrode; and c· The temporary configuration electrode removes the excitation and excites the third adjacent configuration electrode. 18. The apparatus of claim 8, wherein the system management unit performs the step of coplanar splitting, comprising: a) configuring a thin strip temporary configuration electrode overlapping the drop; b. Removing the excitation and exciting the strip-type temporary configuration electrode; c. removing the excitation from the temporary configuration electrode; and d. exciting the first configuration electrode and the second adjacent configuration electrode . 19. The apparatus of claim 8, wherein the system management unit performs the step of using the two configuration electrodes to merge the two droplets into one step, wherein the two first configuration electrodes are The two adjacent configuration electrodes are separated, and the steps of combining the two droplets together by using three configuration electrodes include: a· removing excitation for two of the first configuration electrodes; and b· pairing the second in the middle The adjacent configuration electrodes are energized. 20. The apparatus of claim 19, wherein the system management unit performs the step of morphing mixing, comprising: a generating two temporary configuration electrodes to change the shape of the two droplets; b pairing the two firsts Configuring the electrode to remove the excitation and exciting the two of the temporary configuration electrodes; and c. removing the excitation from the two temporary configuration electrodes and exciting the second adjacent configuration electrode in the middle. 21. The method of claim 11, wherein the step of performing the mixing of the liquid droplets by changing the liquid fine filaments comprises: changing the shape of the droplets; a. generating a temporary configuration electrode And b. removing the excitation row excitation from the first-configuration electrode; and applying the excitation to the temporary configuration electrode, exciting; and repeating the first configuration electrode Temporarily configuring the electrodes and the first sum excitation. The removal excitation of the configuration electrode is as set forth in claim 8, wherein the system management unit performs the step of accumulating the inner loop of the droplet to accelerate the mixing in the liquid axis portion, including: a generating the surrounding liquid a plurality of temporarily disposed electrodes of the drops; and b. energizing and removing the excitation of each of the temporarily disposed electrodes in a clockwise direction - a plurality of times. 23. The step of performing the excitation and the wire excitation of each of the _configuration electrodes one by one in the counterclockwise direction as described in the item 22 of May. 24. The device of claim 8, wherein the secret management unit performs the step of generating a multi-layer mixture of droplets, comprising: ★ a. Configuring a 2x2 array of configuration electrodes 'includes two at a first diagonal position a first configuration electrode; b. generating a temporary configuration electrode located at a center of the configuration electrode of the 2x2 array; c. exciting the temporary configuration f electrode to combine two numbers from the two first configuration electrodes a droplet; d is configured to remove the excitation of the electrode and to energize the two configuration electrodes at the second position; ^ e · remove the excitation from the scale electrode, and smash into two second liquids Dropping; f. transmitting the two second droplets back to the first-arranged electrode at the first-diagonal position by energizing the temporarily disposed electrodes outside the two sides, pairing the two additional scales Configuring the electrode to remove the enchantment to the face--exciting the two first configuration electrodes at the shaw position to complete the delivery; g. stimulating the temporary configuration electrodes to merge the configurations from the two said first 65 201250929 Electricity Two second droplets of the pole; and h. repeating the splitting of the secret, transport and feed line. 25. The apparatus of claim 8, the step of generating a liquid droplet, comprising: wherein the system management unit performs production a. in the liquid storage configuration - the first (four) b. a configuration electrode line; a second temporary configuration electrode that overlaps with the liquid of the liquid storage and is vertically erected with the nearest adjacent configuration electrode; d excites the first temporary configuration electrode; Exciting the second _configuration electrode and exciting the nearest adjacent configuration electrode; ί· removing the excitation from the second temporary configuration electrode; and g· aligning the next adjacent configuration electrode in the line sequence Excitation, and removing the fiber from the previously excited adjacent configuration electrode. 26. The apparatus of claim 8, wherein the system management unit performs the step of generating a droplet by utilizing a droplet halving technique, comprising: a) generating a target configuration electrode for a desired droplet size; b· The liquid-loaded reservoir is configured with small-sized adjacently disposed electrode wires, the liquid being connected to the target-disposed electrode, wherein both ends of the small-sized adjacently-arranged electrode wires are connected to the reservoir and the reservoir The target configuration electrode overlaps; c. the target configuration electrode is excited; d. along the path from the reservoir side to the target configuration electrode, one at a time 66 201250929 to the order of the I round micro-equal (four) Each of the small-sized adjacent configuration electrodes is energized and removed for excitation; and e• repeats the excitation of the small-sized adjacent configuration electrodes and removes the excitation sequence to produce the desired droplets at the target configuration electrode pads. 27. The device of claim 26, wherein the step of pre-calculating the number of micro-aliquots of droplets is performed. 28. The apparatus of claim 8, wherein the system management unit performs the step of calculating the volume of the droplet on the crucible-self 13 electrode by using a liquid scoring technique, comprising: a. generating a storage Configuring an electrode; b· arranging a temporary arrangement electrode inside the first arrangement electrode; c· arranging a small-sized adjacent arrangement electrode line from a first arrangement electrode on which a droplet connected to the storage arrangement electrode is mounted, Both ends of the cap-sized small-sized adjacent arrangement electrode line overlap with the first configuration electrode and the storage configuration electrode; d· exciting the temporary arrangement electrode; e· exciting the storage arrangement electrode; • energizing and removing excitation for each of the small-sized adjacent configuration electrodes sequentially loaded with micro-aliquoted droplets, along the path from the first configuration electrode side to the storage configuration electrode; and g • Repeat the excitation and removal excitation sequences of the small-sized adjacent configuration electrodes to calculate the total number of micro-aliquoted droplets. #29. The device of claim 8, wherein the system management unit performs a _ bridge with the aztec electrode and the third (four) three adjacent configuration electrodes to perform the test. a step of dropping, comprising: co-configuring an electrode, the bridge configuration electrode comprising the third adjacent configuration electrode and an extended bridging region with a droplet weight 4; b removing excitation from the first-configuration electrode, and The bridge configures the electrodes to excite; and c. disposes the excitation of the electrodes in the bridge configuration and excites the third sense electrodes. The apparatus of claim 8, wherein the secret management unit performs the step of moving the liquid droplet by using column excitation, comprising: a configuring a column arrangement electrode including a plurality of columns of microelectrodes; and b In the target direction, the sub-column of the column of the column electrode is excited and the excitation is removed. 31. The device of claim 8, wherein the system management unit performs a rotation of a smear droplet on a surface of the scouring electrode, comprising: a. arranging a column arranging electrode, wherein the column arranging electrode comprises a multi-parallel electrode and has an overlay The length of all of the residual droplets; and b. by stimulating the sub-column of the column-arranged electrodes along the target direction to flush the spent electrode on the spent electrode. 32. The device of claim 8, wherein the reservoir is loaded with a liquid. The apparatus of claim 8, wherein the system management unit performs the steps of generating a different shape and size of the body by utilizing the continuous flow, comprising: 68 201250929 a·configure a target configuration electrode for a desired liquid size and shape; b. configure a bridge configuration electrode, the bridge configuration electrode including a microelectrode wire and connected to the reservoir and the target configuration electrode; c. Exciting the bridge configuration electrode and the target configuration electrode; and d removing the bridge configuration electrode by first removing excitation from the group microelectrode closest to the target configuration electrode of the bridge configuration electrode excitation. The apparatus of claim 8, wherein the system management unit performs the step of splitting the lag into two sub-liquids by using a continuous flow at a controlled size and split ratio, including: * a configuration overlapping with the liquid, having a predefined first sub-liquid size and a miscellaneous first target configuration electrode; a second target configuration electrode having a predefined second sub-liquid size and shape; c. a bridge configuration electrode, the bridge Configuring an electrode including a microelectrode wire and connecting, a target configuration electrode and the second target configuration electrode; d. exciting the bridge configuration electrode and the second target 酉 battle pole; e. arranging an electrode for the bridge Removing the excitation; and exciting the first target alignment electrode. Excessively = far = the touch of the item 8 is described in the system management unit, including (10) a 3-configuration hybrid configuration electrode that combines two liquids in a controlled size, shape, and combination ratio; 69 201250929 b·Configuration a first target configuration electrode and a second target configuration electrode overlapping the hybrid configuration electrode; c· configuring a first bridge configuration electrode, the first bridge configuration electrode including a microelectrode line and connected to the first target configuration electrode And a first liquid source; d. configuring a second bridge configuration electrode 'the second bridge configuration electrode comprising a microelectrode line and connected to the second target configuration electrode and a second liquid source; e. to the first bridge Configuring the electrode and the second bridge configuration electrode and the first target configuration electrode and the second target configuration electrode to perform excitation; f· removing excitation from the first bridge configuration electrode and the second bridge configuration electrode; And *g· exciting the mixed configuration electrode. 36. The apparatus of claim i, wherein the system management unit performs the step of: displaying a text or a graphic by using a configuration electrode to form a point, line, or region that is continuous with money, 37. The device, wherein the ground structure is fabricated on a top plate of a bi-planar structure, the top plate being above the bottom plate and having a gap between the top plate and the bottom plate. 38. The device of claim 1 , wherein the grounding structure is a coplanar structure having a passive top or no top cover. 39. The skirt of claim 1, wherein the ground structure is a coplanar structure having a ground grid. The device of claim 1, wherein the ground structure is a coplanar structure having a ground 70 201250929 pad. 41. The device of claim 1 wherein the ground structure is a coplanar structure having a programmed ground pad. - A device as claimed in claim 1 wherein the grounding structure is a hybrid structure utilizing an optional slick combination. 43. The device of claim 7, wherein the liquid droplets of the system management unit perform the steps of loading the liquid with the liquid, comprising: a. loading the liquid on a coplanar structure; b. Place a passive cover on the liquid. The top plate is a device according to the above description, wherein the distance between the plate and the bottom plate is sandwiched between the plate and the bottom plate. The distance is used to accommodate a wide range of droplets having different sizes. The following steps are: a. configuring a high gap between the top plate and the bottom plate. b. Configuring the size of the configuration electrode to control the size of the droplet, recording the top plate and the bottom plate; And/or c. configuring the size of the configuration electrode to control the contact of the liquid droplets with the bottom plate. The droplets are only 45. The device as claimed in claim i is arranged in a substantially _, square, hexagonal honeycomb or stacked brick shape. Called array shape 46. If requested! The device, which enables the manipulation unit to perform sample lending, comprising the following steps: ...a simple droplet a. The configuration includes a __fine warfare _ configuration electrode; 71 201250929 b in a left-to-right direction Applying a DEP driving voltage to the strip configuration electrode; and c) applying an EW0D driving voltage on the square configuration electrode to cut the droplet into two sub-droplets having different particle concentrations. 47. The device of claim 1, wherein the droplet manipulation sheet S of the system management unit can perform sample preparation 'including a narrow channel for preparing a sample and having a resist material attached to a top plate' The preparation comprises the steps of: a. exciting the microelectrode to produce micro-sized droplets that are too small to carry the particles; b丄 the helium channel moves the micro-sized droplets to a desired location While leaving the particles behind; and c. repeating the movement of the micro-sized droplets until a $-size droplet is produced. The device of claim i, wherein the droplet manipulation unit of the system management unit comprises implementing a droplet routing structure by energizing the configuration electrode, the droplet routing structure performing the following steps: a. At least one routing path for transporting the droplets and comprising a plurality of configuration electrodes; b. exciting and removing the excitation sequence by the path (4) in order of sequential phase sugars; and c. exciting the electrode of the routing path Removal of excitation 49. A microelectrode array structure device made of CMOS technology, including: 72 201250929 a · CMOS system control block, including: controller block 'used to provide processor unit, memory space, interface circuit and Soft residual error meter capability; ^ layout block for storing configuration electrode configuration data and microelectrode array structure layout information and data; droplet position map for storing the actual position of the droplet; and fluid operation manager for The layout Wei, the location map money from the Μ electrode array structure of the controller block applies a physical excitation translated into a droplet; and b The fluid logic block 'includes: a microelectrode on the top surface of the (10)s substrate; - a (4) map map, a fresh element for simplifying the excitation information of the microelectrode, and a control circuit block for management control 50. The skirt of claim 49, wherein the plurality of control blocks of the plurality of fluid logic blocks are connected together in a daisy chain configuration. 51. As set forth in claim 49, wherein the stream The microelectrodes of the block can be energized by applying a drive voltage. 5 4 » The skirt described in Moon Bundle Item 49, wherein the memory map data storage unit of the fluid logic block can be loaded with data prior to excitation. The device of claim 49, wherein the finished article of the fluid logic block of the microarray structure comprises: a. a top metal layer 'for an axial micro- and ground structure; b. a lower portion of the top metal layer The second layer includes the control circuit block, the memory of the memory, and the high voltage driver of the electrode of the recording body; and the bottom of the c. 73 201250929 54. The device of claim 53 Where the control The circuit block, the memory map data storage unit and the high voltage driver are all included in a region directly under the corresponding microelectrode. 55. A microelectrode array structure device manufactured by a thin film transistor TFT technology, comprising: a The TFT system control block includes: a controller block for providing a processor unit, a memory space, an interface circuit, and a soft-age design capability; a crystal &gt; 1 layout block for storing configuration electrode configuration data and a microelectrode array structure Layout information and data; the actual location of the drop location® 'secret storage (4); and the more operational manager for transferring the information from the layout information, the drop location map, and the microelectrode array structure Forming a physical droplet excitation material for exciting the microelectrode, the microelectrode array structure application from the controller block, wherein the physical droplet excitation data comprises a pair of configurations sent to the active matrix block in a progressive manner Pole grouping, excitation and removal excitation; and b active matrix block 'includes. There is a inspection panel' secretly excited each electrode Including the gate bus, the source bus, the thin film transistor, the storage capacitor! and the microelectrode, there is; the array control (4), including the source driver (four) and the gate-external actuator, and the driver data is sent to the driver chip And from the m system control data to drive the TFT array; and a DC/DC converter for applying the driving electric house to the source _ and the thumb pin driver. The device of claim 55, wherein the micro-column structure of the TFT technology comprises a hexagonal TFT array layout. The apparatus of claim 55, wherein the microelectrode array structure of the TFT technology comprises a biplanar structure comprising: a. a glass substrate having a microelectrode; b. a dielectric insulator of a hydrophobic film; c. a continuous electrode coated with a hydrophobic film; and d. a black matrix made of an opaque metal. 58. The apparatus of claim 1, wherein the system control unit in the form of a functional block comprises: a. a hierarchical microelectrode array structure wafer level software structure, comprising: a field programming management software 'for Electrodes are disposed into the microfluidic element and in the layout/network of the microfluidic element; and microfluidic programming management software for controlling and managing microfluidic operations; and b. application system management unit, including: system Separation and integration blocks for separating the devices; detecting and displaying blocks for acquiring, displaying, reporting and storing measurement results; data management and transfer blocks for connecting the devices to an external information system; Connect to the perimeter management block of the external system. 59. The device of claim 1, wherein the system control unit in the form of a functional block comprises a hierarchical system structure, the hierarchical system structure comprising: a biomedical microfluidic functional layer 'for defining application level functions and micro Use of an electrode array device; b. a microfluidic operating layer located below the biomedical microfluidic functional layer for controlling and managing microfluidic operations; 75 201250929 C. Microfluidic component layer located below the microfluidic operating layer a physical configuration and layout for creating the microfluidic element; and d. a microelectrode array layer located below the microfluidic component layer for managing geometric parameters of the microelectrode. 60. A method for designing and designing a microelectrode array structure device from top to bottom' includes: a. designing a crystal laboratory, permanent display ^ or micro crane function by hardware description language; b. The language generates a sort graph model; c. performs an analogy by a hardware description language to verify the functions of a wafer lab, a permanent display, or a micro crane; d. uses system level synthesis to generate a specific execution spear according to the sort graph model, e Logging the design data from the microfluidic module library and from the design specification into the synthesis process; f generating a mapping slot for the aa on-chip resource measurement operation, a schedule file for the measurement operation, and a built-in self-test file from the synthesis process; Perform geometrical synthesis using the input of the design specification to produce a two-dimensional physical design of the biochip; h. Generate a two-dimensional geometric model based on the two-dimensional physical design of the biochip combined with specific physical information. Information from the microfluidic module library; i performs physical level analogy and design verification by using a two-dimensional geometric model ; And &amp; 76 201250929 J The lab-on-a-chip, or micro-permanent display design loading crane to blank microelectrode array device. 61. The device of claim 3, wherein the device is an EW〇D device, wherein the driving voltage is in the range of DC to DC of 10 kHz and less than (d). 62. The device of claim 3, wherein the device is a DEp device, wherein the driving voltage is in the range of 50 kHz to 200 kHz AC and has 1 () 〇 - 3 〇〇 Vrms. 6 3. A field programmable permanent display system comprising a microelectrode array comprising: a. a transparent top cover for protecting a liquid; b member state, located below the top cover, comprising the microelectrode array; c. a plurality of colored liquids for forming text and graphics; d • an ink frame reservoir configured from the microarray of the display for retaining the selected locations of the multi-color test bodies; e, a display controller for dimming a plurality of configuration electrodes including a plurality of microelectrodes, and 1 for removing the excitation '(4) the color of the recording, the description of the domain on the display (four) unified 'Wei Chun pure domain, The plurality of microelectrodes retained for lab operation in the tablet are reserved. The system described in the following is the system described in claim 63, wherein the on-site programmable yong 77 201250929 ''' page system can be implemented as follows: Text or graphics are displayed by forming discrete or continuous points, lines or regions using the configuration electrodes. 67. A system as described in δ-monthly item 63, wherein the display is rigid or bendable. The system of claim 64, wherein the display is rigid or bendable. The system of claim 63, wherein the field programmable permanent display system is a color display produced by the following steps: a. Add colored beads to the squirting droplets to create three primary color droplets; b. Configuring the liquid of the desired color by mixing the three primary color droplets at a pre-calculated ratio and expecting the desired color The liquid is placed in a desired position; and c _ regenerates three primary color droplets by manipulating the force of the magnetic force and the size of the colored beads of the overage color. The system of claim 64, wherein Scene The programming permanent display system is a color display produced by the following steps: a adding colored beads to the transparent droplets to produce three primary color droplets; b. mixing the three primary colors by a pre-calculated ratio Droplets to configure the liquid of the desired color and place the liquid of the desired color to the desired location; and c. Filter the colored droplets by manipulating the magnetic force and the size of the colored beads to regenerate the three primary color droplets. 71. The system of claim 63, wherein the field programmable permanent display system is a color produced by a plurality of single primary color coplanar microelectrode arrays. 78 2〇125〇929 Display. The system of claim 64, wherein the field programmable permanent display system is a color display produced by stacking a plurality of single primary color coplanar microelectrode arrays. 73. A three-dimensional microfluidic delivery system&apos; includes two coplanar microelectrode arrays having open surfaces facing each other with an adjustable gap between the two coplanar microelectrode arrays. 74. The system of claim 73, wherein the system is a fluid micro-crane system comprising a first and a second microelectrode array. The fluid micro-crane system comprises: a. a coplanar delivery system for controlling Droplet transport on the first and second microelectrode arrays; and b. a crane management unit for adjusting the gap distance between the first and second microelectrode arrays and by merging, splitting, and transporting Droplets on the first and second microelectrode arrays are used to transport droplets between the first and second microelectrode arrays. 75. The system of claim 74, wherein the system comprises first and second microelectrode arrays_biochemical building systems, the biochemical construction money comprising: a. a plurality of droplet carrying devices 'for Transporting a biochemical compound; b delivery system for delivering the initial biochemical element to a starting position on the first-microelectrode array; c. multiple virtual chambers containing multiple droplets, biochemical reaction and tissue culture 79 201250929 d. Adjustable gaps and container structures between the first and second simplifications for accommodating the growth or reaction of biochemical compounds. 76. A method for designing and designing a microelectrode array structure device from bottom to top, comprising: a) erasing a memory of the microelectrode array structure; b) configuring a __ group of configured electrodes having a selected shape and size a microfluidic element, the set of configuration electrodes comprising a plurality of microelectrodes arranged in the form of a field programmable tissue (4) column, the microfluidic component comprising a reservoir, an electrode, a mixing chamber, a detection window, a waste reservoir a droplet path and a designated functional electrode; c. configuring the physical distribution of the microfluidic element; and d. designing a microfluidic operation for sample preparation, droplet manipulation, and detection. 77. An on-wafer system apparatus for integrating microfluidics and microelectronics based on a microelectrode array structure, the on-wafer system apparatus comprising: a. a plurality of fluid logic blocks internal to the system device on the wafer, including : a microelectrode on a top surface of the CMOS substrate; a memory map data storage unit 'for holding excitation information of the microelectrode; and a control circuit block for managing control logic, wherein the fluid logic Blocks are integrated units for microfluidics and microelectronics; and b. multiple microelectronic circuits 'including controllers, memory mines, and other logic gates, by utilizing on-wafer system microelectronic fabrication techniques and design/analog tools The integration of fluid logic blocks and microelectronic circuits is created that are used to make multiple fluid logic blocks a standard library for designing microelectronic circuits.