TW201323154A - Product having abrasive particles and manufacturing method thereof - Google Patents

Abstract

Disclosed is a product having abrasive particles and manufacturing method thereof, in which a layer of nanometer metal oxide is bonded to a surface of the abrasive particles. Multiple abrasive particles that are bonded with the nanometer metal oxide layer are mixed with a high-molecule polymer to be coated on at least one side surface of a substrate, and the multiple abrasive particles that are bonded with the nanometer metal oxide layer have a portion projecting beyond the high-molecule polymer to form a grinding or cutting tool, or multiple abrasive particles that are bonded with the nanometer metal oxide layer are mixed with a high-molecule polymer to form a filling material as a thermal paste. Through the increasing bonding strength between the abrasive particles and the high-molecule polymer by the nanometer metal oxide layer, the performance of the product is improved.

Description

Abrasive product and preparation method thereof

The invention relates to a product with abrasive grains and a preparation method thereof, in particular to a processing operation on a wafer thin substrate, a TFT-LCD glass, a ceramic, a mold or a metal, or a ceramic wafer, a germanium wafer or a glass wafer. A material for polishing a quartz wafer or a metal wafer, or a material for filling a gap between the surface of the electronic component and the heat sink, and a method of manufacturing the same.

The abrasive particles (abrasive grains) can be fixed to the core wire to form a wire saw for precise cutting or cutting operations. Wire saws have been widely used in wafer thin substrates, TFT-LCD glass, ceramics, molds or metals.

Taiwan Patent No. M412050 discloses a fixed abrasive wire saw structure in which superabrasive particles are fixed on the surface of a core wire composed of a high-strength metal wire or a resin wire excellent in heat resistance and tensile strength, and are electrically adhered or adhered. The electroplating layer is used to fill the superabrasive grains, and the covered superabrasive grains are exposed from the partial electroplating and subsequent layers, so that the superabrasive grains are fixedly dispersed on the surface of the core wire.

Taiwan Patent Publication No. 201119772 discloses a saw wire having abrasive grains partially embedded in a metal core and partially in an organic binder layer.

Taiwan Publication No. 455521 discloses a polishing line for a wire saw and a method of manufacturing the same, wherein the abrasive particles are adhered to the core wire by using a photocurable resin or an electron beam curing resin which is cured in a few seconds.

Chemical mechanical polishing polishing pads are used to polish ceramic wafers, tantalum wafers, glass wafers, quartz wafers, and metal wafers. The abrasive particles can also be fixed to a metal disk to form a dresser for dressing or conditioning the chemical mechanical polishing pad to restore the polishing performance of the polishing pad.

Taiwan Patent I264345 discloses a CMP conditioner and a method of manufacturing the same. The CMP polishing pad includes a resin layer, superabrasive grains fixed in the resin layer so that an exposed portion of each superabrasive grain protrudes from the resin layer, and a superabrasive grain and the resin layer are disposed An intermetallic coating wherein the exposed portion is substantially outside the metal coating.

Taiwan Patent No. I314497 discloses an electroformed thin grinding wheel piece which is provided with a thin grinding wheel abrasive layer formed by dispersing abrasive grains in a metal plating phase, and the thin grinding wheel abrasive layer has a layer of abrasive grains sequentially laminated on the thin grinding wheel. The first to fifth abrasive layer in the layer thickness direction of the layer, wherein the content of the abrasive grains in the first, third, and fifth abrasive layer is set to be larger than that of the second and fourth abrasive layers More content.

The abrasive particles (abrasive grains) may be doped into the polymer carrier to form a filling material for the heat dissipation paste, so as to fill the gap between the surface of the electronic component and the heat sink, so as to prevent the heat sink from being completely close to the electronic component. To improve the heat dissipation effect.

Taiwan Patent Publication No. 201102420 discloses a heat-dissipating paste having modified diamond particles, comprising a plurality of diamond particles doped in the polymer carrier, the surface of the diamond particles having an oxygen-containing group; and an additive doped In the polymer carrier, each of the diamond particles is further uniformly distributed in the polymer carrier.

Generally, the grinding or cutting tool or the abrasive particles in the filling material are not easily and directly bonded to the bonding agent or the polymer carrier, so it is often necessary to modify the surface of the abrasive grain. A method for modifying the surface of the abrasive grain, comprising coating a metal layer on the surface of the abrasive grain, for example, plating a metal such as copper, nickel, titanium, silver, chromium, or the like; or ceramizing the abrasive grain, such as grinding the diamond The surface is coated with titanium (Ti), bismuth (Si), chromium (Cr), tungsten (W) and other metals, and then forms a carbide form such as TiC, SiC, CrC, WC in a high temperature environment to increase the hydrophilicity of the abrasive particles. And the binding property with the binder; but the bonding strength of the metal and the polymer binder is still not good, for example, when sawing, the diamond abrasive grains fixed on the core are easy to fall off, and the life of the product is reduced.

The present invention has been proposed in order to improve a conventional abrasive product and a process for producing the same, to increase the bonding strength between the abrasive particles and the high molecular polymer, and to improve the efficiency of the product.

The main object of the present invention is to provide a product having abrasive grains and a method for preparing the same, wherein a surface of the abrasive particles is bonded to a layer of a nano metal oxide layer; and a plurality of abrasive particles bonded to the nano metal oxide layer are mixed with the high molecular polymer. a portion of the abrasive particles coated on at least one side of the substrate and the plurality of bonded nano-metal oxide layers protrudes from the polymer to form a grinding or cutting tool, or a plurality of abrasives bonded to the nano-metal oxide layer The granular mixed polymer forms a filling material for the thermal grease; the nano metal oxide layer increases the bonding strength between the abrasive particles and the high molecular polymer to improve the efficiency of the product.

For other purposes and functions of the present invention, please refer to the drawings and the embodiments, which are described in detail below.

As shown in Fig. 1, a first embodiment of the present invention has an abrasive grain product 1 comprising a plurality of abrasive grains 10, a substrate 20 and a high molecular polymer 30; the surface of the abrasive particles 10 is bonded to a layer of nano metal oxide. The layer 101; the plurality of abrasive particles 10 bonded to the nano metal oxide layer 101 are mixed with the high molecular polymer 30 on at least one side surface 201 of the substrate 20; and a part of the plurality of abrasive grains 10 protrudes from the polymer 30. The product 1 having abrasive grains in this embodiment is a sandpaper or a dresser, and the base 20 is a base of a sandpaper or a dresser.

The polymer 30 can be a thermoplastic polymer material, a thermosetting polymer material or an elastic polymer material. Thermoplastic polymer materials such as acrylic resins can be molded by ultraviolet curing. The thermosetting polymer material includes an epoxy resin, a phenol resin, a phenol (Phenolic), a polyimide (Polyimide) acrylic acid, or the like, or a mixture thereof, which is dried and heated to form a matured reaction. The elastic polymer material such as silicone rubber can be cooked by heating. The substrate 20 may be a metal material, a polymer material or a ceramic material or a composite material thereof.

As shown in Fig. 2, a second embodiment of the present invention has an abrasive grain product 2 comprising a plurality of abrasive grains 10, a substrate 21 and a high molecular polymer 30; the surface of the abrasive particles 10 is bonded to a layer of nano metal oxide. The layer 101; the plurality of abrasive particles 10 bonded to the nano metal oxide layer 101 are mixed with the high molecular polymer 30 on the entire surface 211 of the substrate 21; and a part of the plurality of abrasive grains 10 protrudes from the polymer 30. The product 2 having abrasive grains in this embodiment is a wire saw, and the base 21 is a base of a wire saw. The wire saw can be a wire saw for cutting single crystal germanium wafers or solar polysilicon or sapphire. The wire saw can be made by using thermosetting or thermoplastic polymer materials, metal powders (such as copper) or ceramic powders, diamond abrasive grains, additives (such as dispersants) and plasticizers. Uniform, adhered to the wire, dried and heated (or UV cured) to form.

As shown in FIG. 3, a third embodiment of the present invention has an abrasive grain product 3 comprising a plurality of abrasive grains 10, a substrate 22 and a high molecular polymer 30; the surface of the abrasive grain 10 is bonded to a layer of nano metal oxide. The layer 101; the plurality of abrasive particles 10 bonded to the nano metal oxide layer 101 are mixed with the high molecular polymer 30 on the surface 221 of the substrate 22; and a part of the plurality of abrasive grains 10 protrudes from the polymer 30. The product 3 having abrasive grains in this embodiment is a grinding wheel, and the base 22 is a base of the grinding wheel.

As shown in Fig. 4, a fourth embodiment of the present invention has an abrasive grain product 4 comprising a plurality of abrasive particles 10 and a high molecular polymer 30; the surface of the abrasive grain 10 is bonded to a layer of nano metal oxide layer 101; The abrasive particles 10 are mixed with the high molecular polymer 30 to form a thermal grease, which serves as a filling material for filling the gap between the surface of the electronic component and the heat dissipating device, so as to prevent the heat dissipating device from completely fitting the electronic component to improve the heat dissipating effect.

As shown in FIG. 5, the entire surface of the abrasive grains 10 of the above embodiments is bonded to a layer of the nano metal oxide layer 101, and the bonding strength of the abrasive grains 10 to the high molecular polymer is increased by the nano metal oxide layer 101. Improve product efficiency.

The abrasive particles 10 may be superabrasive grains such as natural diamonds, synthetic diamonds, cubic boron nitride, tantalum carbide, aluminum oxide or cerium oxide or a mixture of such superabrasive grains. The nano metal oxide layer 101 may be a nanometer oxide metal such as nano titanium oxide (TiO ₂ ), nano alumina (Al ₂ O ₃ ), nano cerium oxide (SiO ₂ ) or nano zinc oxide (ZnO). Or a nano metal oxide layer 11 composed of a mixture thereof. The thickness of the nano metal oxide layer 101 is from 30 nm (nanometer) to 500 nm, with 50 nm to 200 nm being optimal.

The nano metal oxide layer 101 is coated on the entire surface of the abrasive grain 10. The nano metal oxide 101 may be attached to the surface of the abrasive grain 10 by chemical vapor deposition (CVD); the above chemical vapor deposition (CVD) method is performed by an ALD (Atomic Layer Deposition) method. The above nano oxidized metal or a mixture thereof is attached to the surface of the abrasive grain 10.

The nano metal oxide 101 may also be attached to the surface of the abrasive grain 10 by a sol-gel method (Sol-Gel); the sol-gel method may be selected by a immersion drawing method, a sedimentation method, a spin coating method, and Spray method and brushing method and wet method.

The sol-gel method is selected from the group consisting of nanometer oxidized metal particles such as nano titanium oxide, nano alumina, nano cerium oxide or nano zinc oxide, and the solution is combined with any of the foregoing material particles. The mixture is uniformly mixed and dispersed in a tank, and then a plurality of abrasive grains are immersed in the Sol-Gel solution, and then the plurality of abrasive grains are taken out from the Sol-Gel solution or the Sol-Gel solution is completely removed from the tank. The foregoing nano metal oxide particles are attached to the surface of the plurality of abrasive grains; then the plurality of abrasive grains are placed in an oven for drying, and the temperature of the oven is set to 50 to 200 degrees, and the drying time is 10 to 60. In minutes, the higher the drying temperature, the shorter the drying time. In order to make the nano metal oxide layer on the surface of the abrasive grain uniformly uniform and adhere to the surface of the abrasive grain, the sintering operation can be performed, the abrasive grains are placed in the sintering furnace, and the sintering temperature is set at 200 to 800 degrees. The sintering time is 5 to 60 minutes, and finally the abrasive grains are taken out from the sintering furnace.

As shown in Fig. 6, the entire surface of the abrasive grain 10 and the nano metal oxide layer 101 may have an intermediate layer 102 comprising, for example, titanium (Ti), tungsten (W), chromium (Cr), molybdenum (for example). An intermediate layer 102 composed of a metal layer such as Mo), vanadium (V) or bismuth (Si), wherein a titanium or tantalum material is preferred. The intermediate layer 102 is applied to the surface of the abrasive grain 10 by thermal evaporation, and then the nano metal oxide layer 101 is coated on the entire surface of the intermediate layer 102.

When the abrasive grain 10 is a natural diamond or an artificial diamond and the temperature of the thermal evaporation is increased, the intermediate layer 102 composed of a metal layer such as titanium, tungsten, chromium, vanadium or niobium may be reacted with the contact surface of the diamond to form titanium carbide (TiC). a metal carbide layer such as tungsten carbide (WC), chromium carbide (CrC), vanadium carbide (VC) or tantalum carbide (SiC), such that the intermediate layer 102 further has a metal carbide layer in addition to the metal layer; A metal carbide layer such as titanium carbide or tantalum carbide is preferred. The metal carbide layer is interposed between the natural diamond or the synthetic diamond and the metal layer.

The nano metal oxide layer 101 can be combined with a diamond, but if there is a metal layer such as titanium, tungsten, chromium, molybdenum, vanadium or niobium and an intermediate layer 102 composed of a metal carbide layer, the abrasive grains 10 and the nano metal are oxidized. The combination of the layer 101 is stronger. The thickness of the titanium (Ti) layer on the surface of the diamond abrasive grains is from 0.1 μm (micrometers) to 2 μm; the thickness of the titanium carbide layer is from 0.01 μm (micrometers) to 0.5 μm.

As shown in Fig. 7, the method for producing a product having abrasive grains of the present invention comprises the following steps:

(1) coating a surface of the abrasive grain with a layer of nano metal oxide;

(2) mixing a plurality of abrasive grains coated with a metal oxide layer with a high molecular polymer;

(3) affixing the abrasive polymer after mixing the plurality of coated nano metal oxide layers to at least one side surface of the substrate; the plurality of abrasive particles of the bonded nano metal oxide layer The polymer is highlighted.

The above steps (1) may further include the following steps:

The metal is applied to the surface of the abrasive particles by thermal evaporation to form an intermediate layer.

The above step (3) can be omitted, and in the step (2), a plurality of coated nano metal oxide layer abrasive particles are mixed with the high molecular polymer to form a thermal grease.

The method for producing a product having abrasive grains according to the present invention includes the technical contents described in the above-mentioned product having abrasive grains of the present invention, and will not be repeatedly described.

The invention can improve the conventional abrasive grain product and the preparation method thereof, so that the whole surface of the abrasive grain is covered with a layer of nano metal oxide to increase the bonding strength between the abrasive grain and the polymer binder, and improve the efficiency of the product.

The above description is only for the embodiments of the present invention, and any modifications and variations made by those skilled in the art using the present invention are the scope of the invention claimed, and are not limited to the embodiments disclosed.

1, 2, 3, 4. . . Products with abrasive particles

10. . . Abrasive grain

101. . . Nano metal oxide layer

102. . . middle layer

20, 21, 22. . . Matrix

201, 211, 221. . . surface

30. . . High molecular polymer

(1), (2), (3). . . Step number

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view of a product having abrasive grains according to a first embodiment of the present invention.

Figure 2 is a schematic illustration of a product having abrasive particles in accordance with a second embodiment of the present invention.

Figure 3 is a schematic illustration of a product having abrasive particles in accordance with a third embodiment of the present invention.

Figure 4 is a schematic illustration of a product having abrasive particles in accordance with a fourth embodiment of the present invention.

Figure 5 is a schematic illustration of the coating of a layer of nano metal oxide over the entire surface of the abrasive particles of the present invention.

Figure 6 is a schematic illustration of an intermediate layer between the surface of the abrasive particles of the present invention and the nanometal oxide layer.

Figure 7 is a flow chart showing the process for producing a product having abrasive grains according to the present invention.

(1), (2), (3). . . Step number

Claims (16)

A product with abrasive particles, including:
a plurality of abrasive grains, the surface of the abrasive particles is combined with a layer of nano metal oxide;
a high molecular polymer;
The plurality of abrasive particles combined with the nano metal oxide layer are mixed with the high molecular polymer to form a thermal grease, or the plurality of abrasive nanoparticles combined with the nano metal oxide layer are mixed and the polymer is attached to a substrate. At least one side surface and a portion of the plurality of abrasive particles bonded to the nano metal oxide layer protrudes from one of the high molecular polymers, and the abrasive particles are polymerized with the polymer by the nano metal oxide layer The strength of the bond to enhance the efficiency of the product. The abrasive grain-containing product according to claim 1, wherein the nano metal oxide layer is composed of at least one of nano titanium oxide, nano alumina, nano cerium oxide or nano zinc oxide. Constituted. The abrasive grained product of claim 2, wherein the nano metal oxide layer has a thickness of from 30 nm to 500 nm. A product having abrasive grains according to claim 3, wherein a surface of the abrasive grain and the nano metal oxide layer have an intermediate layer comprising a metal layer. The abrasive-containing product according to claim 4, wherein the plurality of abrasive grains comprise super-hard abrasive particles composed of natural diamond, synthetic diamond, cubic boron nitride, tantalum carbide, aluminum oxide or cerium oxide. At least one of the metals forming the metal layer is one of titanium, tungsten, chromium, molybdenum, vanadium or niobium; the polymer is composed of a thermoplastic polymer material, a thermosetting polymer material or an elastic polymer material. One of the base bodies; the base body is one of a sandpaper, a dresser, a wire saw or a grinding wheel. The abrasive-containing product according to any one of claims 1 to 5, wherein the abrasive grain is one of a natural diamond or an artificial diamond; the intermediate layer further has a metal carbide layer; the metal The carbide layer is interposed between one of the natural diamond or the synthetic diamond and the metal layer; the metal carbide of the metal carbide layer is one of titanium carbide, tungsten carbide, chromium carbide, vanadium carbide or tantalum carbide. The product having abrasive grains according to claim 6, wherein the nano metal oxide layer has a thickness of 50 nm to 200 nm; and the metal layer has a thickness of 0.1 μm to 2 μm; the metal layer The metal is titanium; the metal carbide layer has a thickness of 0.01 μm to 0.5 μm; and the metal carbide of the metal carbide layer is titanium carbide. A method for producing a product having abrasive grains, comprising the steps of:
(1) coating a surface of the abrasive grain with a layer of nano metal oxide;
(2) A plurality of abrasive grains coated with a nano-metal oxide layer are mixed with a high-molecular polymer. The method for producing a product having abrasive grains according to claim 8, wherein the step (1) is performed by using one of a chemical vapor deposition method or a sol-gel method to coat the nano metal oxide layer. Attached to the entire surface of the abrasive grain; the nano metal oxide layer is composed of at least one of nano titanium oxide, nano alumina, nano cerium oxide or nano zinc oxide. The method for producing a product having abrasive grains according to claim 9, wherein the chemical vapor deposition method is to adhere the nano metal oxide layer to the entire surface of the abrasive grain by atomic layer deposition; The sol-gel method is to coat the nano metal oxide layer on the entire surface of the abrasive grain by one of a immersion drawing method, a sedimentation method, a spin coating method, a spray method, a painting method or a wet method. The nano metal oxide layer has a thickness of from 30 nm to 500 nm. The method for producing a product having abrasive grains according to claim 10, wherein the step (1) further comprises the following steps:
The metal is applied to the surface of the abrasive particles by thermal evaporation to form an intermediate layer comprising a metal layer. The method for producing a product having abrasive grains according to claim 11, wherein the metal constituting the metal layer is one of titanium, tungsten, chromium, molybdenum, vanadium or niobium; and the nano metal oxide layer The thickness is from 50 nanometers to 200 nanometers. The method for producing a product having abrasive grains according to any one of claims 8 to 12, wherein the step (2) comprises the following steps:
(3) affixing the abrasive polymer after mixing the plurality of coated nano metal oxide layers to at least one side surface of the substrate; the plurality of abrasive particles of the bonded nano metal oxide layer Highlighting the high molecular polymer;
Wherein the substrate is a substrate of one of a sandpaper, a trimmer, a wire saw or a grinding wheel; the plurality of abrasive grains comprise a superhard composed of natural diamond, synthetic diamond, cubic boron nitride, tantalum carbide, aluminum oxide or cerium oxide. At least one of the abrasive particles; the polymer is composed of one of a thermoplastic polymer material, a thermosetting polymer material, or an elastic polymer material. The method for producing a product having abrasive grains according to claim 13, wherein the abrasive grain is one of a natural diamond or an artificial diamond; the intermediate layer further has a metal carbide layer; the metal carbide layer is Between one of the natural diamonds or synthetic diamonds and the metal layer. The method for producing a product having abrasive grains according to any one of claims 8 to 12, wherein in the step (2), the abrasive particles and the polymer of the plurality of coated nano metal oxide layers are polymerized. The materials are mixed to form a thermal grease; the plurality of abrasive particles comprise at least one of natural high-gloss abrasive particles composed of natural diamond, synthetic diamond, cubic boron nitride, tantalum carbide or aluminum oxide. The method for producing a product having abrasive grains according to claim 15, wherein the abrasive grain is one of a natural diamond or an artificial diamond; the intermediate layer further has a metal carbide layer; the metal carbide layer is Between one of the natural diamonds or synthetic diamonds and the metal layer.