TW201446428A - 研磨工具及其形成方法 - Google Patents
研磨工具及其形成方法 Download PDFInfo
- Publication number
- TW201446428A TW201446428A TW103120247A TW103120247A TW201446428A TW 201446428 A TW201446428 A TW 201446428A TW 103120247 A TW103120247 A TW 103120247A TW 103120247 A TW103120247 A TW 103120247A TW 201446428 A TW201446428 A TW 201446428A
- Authority
- TW
- Taiwan
- Prior art keywords
- abrasive tool
- bonding material
- ratio
- forming
- abrasive
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 106
- 239000000463 material Substances 0.000 claims abstract description 264
- 239000002245 particle Substances 0.000 claims abstract description 76
- 229910001018 Cast iron Inorganic materials 0.000 claims description 206
- 239000000203 mixture Substances 0.000 claims description 161
- 239000010949 copper Substances 0.000 claims description 115
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 109
- 229910052802 copper Inorganic materials 0.000 claims description 109
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 88
- 239000010936 titanium Substances 0.000 claims description 88
- 229910052719 titanium Inorganic materials 0.000 claims description 88
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 44
- 239000011651 chromium Substances 0.000 claims description 31
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 29
- 229910052721 tungsten Inorganic materials 0.000 claims description 29
- 239000010937 tungsten Substances 0.000 claims description 29
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 21
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 19
- 229910052804 chromium Inorganic materials 0.000 claims description 19
- 150000001875 compounds Chemical class 0.000 claims description 17
- 238000002679 ablation Methods 0.000 claims description 16
- 229910052759 nickel Inorganic materials 0.000 claims description 16
- 230000008439 repair process Effects 0.000 claims description 14
- 238000009418 renovation Methods 0.000 claims description 13
- 238000009419 refurbishment Methods 0.000 claims description 7
- 239000007767 bonding agent Substances 0.000 claims description 4
- 230000006978 adaptation Effects 0.000 claims description 3
- DMJXRYSGXCLCFP-LBPRGKRZSA-N (3s)-n-tert-butyl-1,2,3,4-tetrahydroisoquinoline-3-carboxamide Chemical compound C1=CC=C2CN[C@H](C(=O)NC(C)(C)C)CC2=C1 DMJXRYSGXCLCFP-LBPRGKRZSA-N 0.000 claims 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 20
- 239000003082 abrasive agent Substances 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 description 98
- 238000000227 grinding Methods 0.000 description 55
- 229910000906 Bronze Inorganic materials 0.000 description 37
- 239000010974 bronze Substances 0.000 description 37
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 37
- 239000011521 glass Substances 0.000 description 19
- 238000002844 melting Methods 0.000 description 18
- 230000008018 melting Effects 0.000 description 18
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 16
- 238000012360 testing method Methods 0.000 description 16
- 238000009826 distribution Methods 0.000 description 15
- 239000011230 binding agent Substances 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000010432 diamond Substances 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- 229910001092 metal group alloy Inorganic materials 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000011160 research Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 229910052582 BN Inorganic materials 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 230000002902 bimodal effect Effects 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- BLOIXGFLXPCOGW-UHFFFAOYSA-N [Ti].[Sn] Chemical compound [Ti].[Sn] BLOIXGFLXPCOGW-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- -1 titanium hydride Chemical compound 0.000 description 2
- 229910000048 titanium hydride Inorganic materials 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 235000004443 Ricinus communis Nutrition 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361835567P | 2013-06-15 | 2013-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201446428A true TW201446428A (zh) | 2014-12-16 |
Family
ID=52018013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103120247A TW201446428A (zh) | 2013-06-15 | 2014-06-11 | 研磨工具及其形成方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20140366458A1 (fr) |
| TW (1) | TW201446428A (fr) |
| WO (1) | WO2014201272A1 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005118773A2 (fr) | 2004-05-28 | 2005-12-15 | Wafergen, Inc. | Appareil et procedes pour effectuer des analyses multiplex |
| US9144883B2 (en) * | 2014-02-12 | 2015-09-29 | Taiwan Semiconductor Manufacturing Co., Ltd | Abrasive article, conditioning disk and method for forming abrasive article |
| US10641772B2 (en) | 2015-02-20 | 2020-05-05 | Takara Bio Usa, Inc. | Method for rapid accurate dispensing, visualization and analysis of single cells |
| JP7075394B2 (ja) | 2016-07-21 | 2022-05-25 | タカラ バイオ ユーエスエー, インコーポレイテッド | マルチウェルデバイスを用いたマルチz撮像及び分注 |
| WO2019136058A1 (fr) | 2018-01-02 | 2019-07-11 | The Regents Of The University Of Michigan | Capture de gouttelettes multiples |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655795A (en) * | 1983-02-28 | 1987-04-07 | Ex-Cell-O Corporation | Abrasive tool for honing |
| GB9022191D0 (en) * | 1990-10-12 | 1990-11-28 | Suisse Electronique Microtech | Cubic boron nitride(cbn)abrasive tool |
| US7883398B2 (en) * | 2005-08-11 | 2011-02-08 | Saint-Gobain Abrasives, Inc. | Abrasive tool |
| US8821606B2 (en) * | 2009-07-21 | 2014-09-02 | Honda Motor Co., Ltd. | Metal bonded grinding stone, and method of manufacturing the same |
| TW201223699A (en) * | 2010-09-03 | 2012-06-16 | Saint Gobain Abrasives Inc | Bonded abrasive articles, method of forming such articles, and grinding performance of such articles |
-
2014
- 2014-06-11 TW TW103120247A patent/TW201446428A/zh unknown
- 2014-06-12 WO PCT/US2014/042157 patent/WO2014201272A1/fr not_active Ceased
- 2014-06-12 US US14/303,353 patent/US20140366458A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014201272A1 (fr) | 2014-12-18 |
| US20140366458A1 (en) | 2014-12-18 |
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